公开(公告)号：US07767006B2

公开(公告)日：2010-08-03

申请号：US10581729

申请日：2004-12-16

申请人： Yoshichika Tokuno ,  Norihiro Ito ,  Takehiko Orii ,  Mitsunori Nakamori ,  Tadashi Iino ,  Hiroki Ohno ,  Yusuke Saito

发明人： Yoshichika Tokuno ,  Norihiro Ito ,  Takehiko Orii ,  Mitsunori Nakamori ,  Tadashi Iino ,  Hiroki Ohno ,  Yusuke Saito

IPC分类号： B01D59/26

CPC分类号： H01L21/68721 ,  B01D53/002 ,  B01D2257/106 ,  C01B13/10 ,  H01L21/6715 ,  H01L21/68742 ,  H01L21/68785

摘要： Water vapor is mixed to O3 gas generated by an ozone generator of discharge type. The mixed fluid is cooled by a cooler, thereby impurities such as metals and nitrogen oxides contained in the O3 gas dissolve into condensed water. Subsequently, a gas-liquid separator separates the O3 gas from the condensed water. Water vapor is mixed with the O3 gas again. The mixed fluid passes through a metal trap composed of a container containing plural silicon chips as a metal adsorbent, thereby to remove the remaining metals therefrom.

摘要翻译： 将水蒸气与由排放型臭氧发生器产生的O 3气体混合。 混合流体被冷却器冷却，从而O 3气体中所含的金属和氮氧化物等杂质溶解在冷凝水中。 随后，气液分离器将O 3气体与冷凝水分离。 水蒸汽再次与O3气体混合。 混合流体通过金属捕集器，该金属捕集器由含有多个硅芯片的容器组成，作为金属吸附剂，从而从其中除去剩余的金属。

公开(公告)号：US07731799B2

公开(公告)日：2010-06-08

申请号：US10579423

申请日：2004-12-07

申请人： Takayuki Toshima ,  Tadashi Iino ,  Yusuke Saito ,  Mitsunori Nakamori ,  Noritaka Uchida ,  Takehiko Orii

发明人： Takayuki Toshima ,  Tadashi Iino ,  Yusuke Saito ,  Mitsunori Nakamori ,  Noritaka Uchida ,  Takehiko Orii

IPC分类号： B08B3/08

CPC分类号： G03F7/427 ,  H01L21/31138

摘要： A substrate processing method which removes an ArF resist film from a wafer having the ArF resist film. As an ultraviolet irradiation process is performed on the ArF resist film, and then an ozone gas and water vapor are fed to the ArF resist film, the ArF resist film is altered in a water-soluble state. Thereafter, the ArF resist film is removed from the substrate by feeding pure water to the ArF resist film altered into the water-soluble state.

摘要翻译： 从具有ArF抗蚀剂膜的晶片去除ArF抗蚀剂膜的基板处理方法。 由于在ArF抗蚀剂膜上进行紫外线照射处理，然后向ArF抗蚀剂膜供给臭氧气体和水蒸汽，所以ArF抗蚀剂膜变为水溶性状态。 此后，通过将纯水供给到改变成水溶性状态的ArF抗蚀剂膜，从基板除去ArF抗蚀剂膜。

公开(公告)号：US07693597B2

公开(公告)日：2010-04-06

申请号：US11244684

申请日：2005-10-05

申请人： Mitsunori Nakamori ,  Tadashi Iino ,  Noritaka Uchida ,  Takehiko Orii

发明人： Mitsunori Nakamori ,  Tadashi Iino ,  Noritaka Uchida ,  Takehiko Orii

IPC分类号： G06F19/00 ,  C25F1/00 ,  C25F3/30 ,  C25F5/00 ,  C23F1/00 ,  H01L21/306 ,  H01L21/44

CPC分类号： G03F7/423 ,  G03F7/42 ,  H01L21/31133 ,  H01L21/67051 ,  H01L21/67178

摘要： A substrate processing method for removing a resist film from a substrate having the resist film formed thereon comprises maintaining the inner region of the chamber at a prescribed temperature by putting a substrate in a chamber, denaturing the resist film by supplying ozone and a water vapor in such a manner that ozone is supplied into the chamber while a water vapor is supplied into the chamber at a prescribed flow rate, the amount of ozone relative to the amount of the water vapor being adjusted such that the dew formation within the chamber is prevented, and processing the substrate with a prescribed liquid material so as to remove the denatured resist film from the substrate.

摘要翻译： 一种用于从其上形成有抗蚀剂膜的基板去除抗蚀剂膜的基板处理方法包括通过将基板放置在室中来将室的内部区域保持在规定温度，通过将臭氧和水蒸气供给而使抗蚀剂膜变性 这样一种方式是将臭氧以规定的流量供给到室中，同时将臭氧量相对于水蒸气量调节到室内的露点形成， 并用规定的液体材料处理基板，以从基板上除去变性的抗蚀剂膜。

公开(公告)号：US07674402B2

公开(公告)日：2010-03-09

申请号：US10581675

申请日：2004-12-03

申请人： Tadashi Iino ,  Zenichiro Izumi

发明人： Tadashi Iino ,  Zenichiro Izumi

IPC分类号： H01B1/00

CPC分类号： C08K3/38 ,  B82Y30/00 ,  C08K7/06 ,  H01B1/122 ,  H01B1/24 ,  H01M8/0204 ,  H01M8/0206 ,  H01M8/0213 ,  H01M8/0221 ,  H01M8/0226 ,  C08L23/10

摘要： An electroconductive resin composition, comprising at least: a multi-component polymer-type resin binder (A) comprising a dispersed phase and a continuous phase, and having a number-average particle size of dispersed phase of 0.001-2 μm, and an electroconductive material (B) in the form of powder and/or fiber. The electroconductive resin composition may preferably be used for a fuel cell separator.

摘要翻译： 一种导电树脂组合物，其至少包括：包含分散相和连续相的多组分聚合物型树脂粘合剂（A），并且具有0.001-2μm的分散相的数均粒径和导电性 材料（B）以粉末和/或纤维的形式。 导电树脂组合物可优选用于燃料电池隔板。

公开(公告)号：US07410543B2

公开(公告)日：2008-08-12

申请号：US10957003

申请日：2004-10-01

申请人： Takayuki Toshima ,  Naoki Shindo ,  Tadashi Iino

发明人： Takayuki Toshima ,  Naoki Shindo ,  Tadashi Iino

IPC分类号： B08B3/00 ,  B08B5/00

CPC分类号： H01L21/6708 ,  H01L21/31138 ,  Y10S134/902

摘要： Resists can be removed while metal contamination of wafers, etc. and generation of particles, and growth of oxide films are suppressed. A substrate processing method comprises feeding a processing gas, such as ozone gas, into a processing vessel to pressurize an atmosphere surrounding a substrate. A solvent gas, such as steam, is fed into the processing vessel while the processing gas is fed into the processing vessel, whereby a resist of the substrate can be removed with the solvent gas and the processing gas while metal corrosion, etc. can be prevented.

摘要翻译： 可以去除抗蚀剂，同时抑制晶片等的金属污染和颗粒的产生以及氧化膜的生长被抑制。 基板处理方法包括将诸如臭氧气体的处理气体进料到处理容器中以对基板周围的气氛加压。 将诸如蒸汽的溶剂气体加入处理容器中，同时将处理气体进料到处理容器中，由此可以用溶剂气体和处理气体除去基板的抗蚀剂，同时金属腐蚀等可以 防止了

公开(公告)号：US07329698B2

公开(公告)日：2008-02-12

申请号：US10363922

申请日：2002-08-06

申请人： Masayuki Noguchi ,  Tomoaki Kobayashi ,  Tadashi Iino

发明人： Masayuki Noguchi ,  Tomoaki Kobayashi ,  Tadashi Iino

IPC分类号： C08K5/15 ,  B60C1/00

CPC分类号： H01M8/0221 ,  B82Y30/00 ,  H01M8/0213 ,  H01M8/0226 ,  Y02P70/56

摘要： There is provided a conductive curable resin composition comprising (A) a curable resin composition comprising an elastomer with a Mooney viscosity (ML1+4 (100° C.)) of 25 or greater at 2-80 wt % and (B) a carbon material, with a weight ratio of component (A) to component (B) of 70-5:30-95. The curable resin composition of component (A) preferably comprises (A1) an elastomer at 80-2 wt %, (A2) a radical reactive resin at 20-98 wt % and (A3) an organic peroxide at 0.2-10 parts by weight to 100 parts by weight of (A1+A2). Also provided are a process for production of a conductive cured resin by shaping and curing of the conductive curable resin composition, and a fuel cell separator, an assembly for a cell, an electrode or a heat releasing plate, obtained thereby.

摘要翻译： 提供一种导电性固化性树脂组合物，其包含（A）包含门尼粘度（ML 1 + 4（100℃））的弹性体的固化性树脂组合物的摩尔比为25以上，2-80 （B）的重量比为70-5:30-95的（B）碳材料。 组分（A）的可固化树脂组合物优选包含（A1）80-2重量％的弹性体，（A2）20-98重量％的自由基反应性树脂和（A3）0.2-10重量份的有机过氧化物 至（A1 + A2）100重量份。 还提供了通过导电性固化性树脂组合物的成形和固化以及由此获得的燃料电池隔板，电池组，电极或散热板来制造导电性固化树脂的方法。

公开(公告)号：US06729041B2

公开(公告)日：2004-05-04

申请号：US10034520

申请日：2001-12-28

申请人： Naoki Shindo ,  Tadashi Iino

发明人： Naoki Shindo ,  Tadashi Iino

IPC分类号： F26B300

CPC分类号： H01L21/6708 ,  Y10S134/902

摘要： This substrate processing apparatus supplies wafers W accommodated in a closed processing container 10 with ozone gas and steam for processing the wafers W. The apparatus includes an ozone-gas generator 40 for supplying the ozone gas into the processing container 10, a steam generator 30 for supplying the steam into the processing container 10 and a steam nozzle 35 arranged in the processing container 10 and connected to the steam generator 30. The steam nozzle 35 is equipped with a nozzle body 35a having a plurality of steam ejecting orifices 35f formed at appropriate intervals and a heater 35h for preventing dewdrops of the steam from being produced in the nozzle body 35a. Consequently, it is possible to prevent the formation of dewdrops of solvent steam, which may produce origins of particles in the closed processing container, unevenness in cleaning (etching), etc., and also possible to improve the processing efficiency.

摘要翻译： 该基板处理装置将容纳在封闭处理容器10内的晶片W供给臭氧气体和蒸汽用于处理晶片W.该装置包括用于向处理容器10供给臭氧气体的臭氧气体发生器40，用于 将蒸汽供给到处理容器10和设置在处理容器10中并连接到蒸汽发生器30的蒸汽喷嘴35.蒸汽喷嘴35配备有喷嘴体35a，喷嘴体35a具有以适当间隔形成的多个蒸汽喷射孔35f 以及用于防止在喷嘴体35a中产生蒸汽的露珠的加热器35h。 因此，可以防止在封闭的加工容器中产生颗粒的起因，清洗（蚀刻）等不均匀的溶剂蒸汽的露珠的形成，也可以提高加工效率。

公开(公告)号：US5296868A

公开(公告)日：1994-03-22

申请号：US74565

申请日：1993-06-10

申请人： Kazuhiro Itami ,  Tadashi Iino

发明人： Kazuhiro Itami ,  Tadashi Iino

IPC分类号： G02B27/00 ,  G02B27/01

CPC分类号： G02B27/0101 ,  G02B27/0149 ,  B60K2350/2052 ,  G02B2027/0118 ,  G02B2027/0154 ,  G02B2027/0187

摘要： A display apparatus for a vehicle by which the brightness of a display image can be varied readily without using a dimming circuit and a display image of a high contrast can be assured. The display apparatus comprises a light emitting displaying element for emitting visible light therefrom, and a reflecting member for reflecting visible light from the light emitting displaying element toward a driver of the vehicle directly or indirectly by way of a component of the vehilce such as a windshield. The reflecting member is selectively moved between a first position at which the reflecting member totally reflects visible light from the light emitting displaying means and a second position at which the reflecting member reflects visible light from the light emitting displaying element but at a comparatively low reflecting rate.

摘要翻译： 可以确保用于车辆的显示装置，其中可以容易地改变显示图像的亮度而不使用调光电路和高对比度的显示图像。 显示装置包括用于从其发射可见光的发光显示元件和用于通过诸如挡风玻璃等车辆的部件直接或间接地将来自发光显示元件的可见光反射向车辆驾驶员的反射部件 。 反射构件选择性地在反射构件完全反射来自发光显示装置的可见光的第一位置与反射构件反射来自发光显示元件的可见光的第二位置之间选择性地移动，但是反射率较低 。

公开(公告)号：US5034732A

公开(公告)日：1991-07-23

申请号：US351548

申请日：1989-05-15

申请人： Tadashi Iino

发明人： Tadashi Iino

IPC分类号： G02B27/00 ,  G02B27/01

CPC分类号： G02B27/0101 ,  G02B27/01 ,  G02B27/0149 ,  B60K2350/2052 ,  G02B2027/0154 ,  G02B2027/0165 ,  G02B2027/0169 ,  G02B2027/0187

摘要： In a head up display apparatus for an automotive vehicle including a projector unit disposed at the ceiling of the automotive vehicle to project display images and a half-mirror reflector unit for reflecting the projected display images to the driver, the height of the half-mirror reflector unit and the angular position of the projector unit are automatically adjusted according to vehicle speed, so that virtual display images can be appropriately seen by the driver ahead of the half mirror reflector unit along the driver's eye direction variable according to vehicle speed, by use of a relatively small half-mirror reflector unit.

摘要翻译： 在一种用于机动车辆的抬头显示装置中，包括设置在机动车辆的天花板上的投影仪单元以投影显示图像，以及用于将投影的显示图像反映到驾驶员的半透明反射器单元，半透视镜的高度 反射器单元和投影仪单元的角度位置根据车辆速度自动调节，使得虚拟显示图像可以由半反射镜单元之前的驾驶员沿驾驶员眼睛方向可变地根据车辆速度适当地看到，通过使用 的相对较小的半透明反射器单元。

公开(公告)号：US4967191A

公开(公告)日：1990-10-30

申请号：US383041

申请日：1989-07-21

申请人： Tadashi Iino

发明人： Tadashi Iino

IPC分类号： G02B27/00 ,  G02B27/01

CPC分类号： G02B27/0101 ,  G02B2027/0154 ,  G02B2027/0165 ,  G02B2027/0187

摘要： A display apparatus for an automotive vehicle comprises a projector disposed at the ceiling of a vehicle passenger compartment to project display images and a reflecting member pivotally disposed in a dashboard of the vehicle to reflect the display images projected by the projector toward the driver. The reflecting member is a mirror or a hologram plate. The display images are stable without being subjected to the influence of external sunlight, while increasing the field of vision on the front windshield. Further, when the hologram plate is used, it is possible to obtain large display images in spite of a small-sized projector and to improve the visual recognizability of display images.

摘要翻译： 一种用于机动车辆的显示装置，包括：投影仪，设置在车辆乘客室的天花板处以投射显示图像;以及反射部件，其可枢转地设置在车辆的仪表板中，以将由投影仪投射的显示图像反射到驾驶员。 反射构件是反射镜或全息图板。 显示图像稳定，不受外界阳光的影响，同时增加前挡风玻璃上的视野。 此外，当使用全息图板时，尽管有小型投影仪可以获得大的显示图像，并且提高显示图像的视觉可识别性。