Objective lens and method for manufacture thereof
    71.
    发明申请
    Objective lens and method for manufacture thereof 有权
    物镜及其制造方法

    公开(公告)号:US20050053788A1

    公开(公告)日:2005-03-10

    申请号:US10823000

    申请日:2004-04-13

    摘要: Theme To inhibit the lens aberration in an objective lens for recording and reproducing optical information, which is composed of a molded aspherical single lens, while attaining at the same time good lens productivity, and also to ensure excellent optical properties and to obtain a high production efficiency in a mold processing step and a press molding step conducted to manufacture the lens. Means for Solving the Problems An objective lens 1 is a lens wherein a convex aspherical surface is formed at the first surface and a numerical aperture NA satisfies the condition, NA≧0.8. It is preferable to have an aspherical surface also at the second surface. A molding material that was premolded to a prescribed shape and is in a heated and softened state is press molded by using a pair of upper and lower molds having opposing molding surfaces, a molding surface shape is transferred by using a spherical molding material with a radius r and pressing the molding material between a pair of upper and lower molds, and the paraxial curvature radius R of the convex aspherical surface satisfies the following relation r/R≦1.35. The objective lens optical system comprises an objective lens 1 and a cover glass (CG) 2.

    摘要翻译: 主题为了抑制用于记录和再现光学信息的物镜中的透镜像差,其由模制的非球面单透镜组成,同时同时获得良好的透镜生产率,并且还确保优异的光学性能并获得高生产率 进行模具加工工序的效率和进行制造透镜的压制成型步骤。 解决问题的方案物镜1是在第一表面形成凸非球面并且数值孔径NA满足条件NA = 0.8的透镜。 优选在第二表面也具有非球面。 将预成型为规定形状并处于加热软化状态的成型材料通过使用具有相对成型面的一对上下模具进行加压成型,通过使用具有半径的球形成型材料转印成型面形状 并且在一对上模和下模之间挤压成型材料,并且凸非球面的近轴曲率半径R满足以下关系r / R <= 1.35。 物镜光学系统包括物镜1和盖玻璃(CG)2。

    Photosensitive polyimide resin composition
    73.
    发明授权
    Photosensitive polyimide resin composition 有权
    感光聚酰亚胺树脂组合物

    公开(公告)号:US6160081A

    公开(公告)日:2000-12-12

    申请号:US183124

    申请日:1998-10-30

    摘要: The invention relates to a photosensitive polyimide resin composition comprising (A) a polyamic acid having, in its main chain, repeating units formed from a polycondensation product of at least one tetracarboxylic acid or tetracarboxylic anhydride thereof with at least one diamine compound, and having actinic ray-sensitive functional groups at both terminals thereof; (B) a photosensitive auxiliary having a photopolymerizable functional group; (C) a photopolymerization initiator; and (D) a solvent, wherein 1 the polyamic acid is such that when the repeating unit represented by the formula (1) is defined as a unit molecular weight, a unit molecular weight per carboxyl group (unit molecular weight/COOH) falls within a range of from 200 to 300, and 2 the photosensitive resin composition permits the formation of a polyimide film having a residual stress of 40 MPa or lower and a coefficient of thermal expansion of 30 ppm/.degree. C. or lower on a substrate, and to said polyamic acid, a polyimide film having excellent film properties, and a pattern forming process using the photosensitive polyimide resin composition.

    摘要翻译: 本发明涉及一种感光性聚酰亚胺树脂组合物,其包含(A)在其主链中具有由至少一种四羧酸或其四羧酸酐与至少一种二胺化合物的缩聚产物形成的并具有光化性的重复单元的聚酰胺酸 两端的光敏功能基团; (B)具有可光聚合官能团的光敏助剂; (C)光聚合引发剂; 和(D)溶剂,其中+ E,crc 1 + EE聚酰胺酸使得当由式(1)表示的重复单元定义为单位分子量时,每个羧基的单位分子量(单位分子量 重量/ COOH)在200〜300的范围内,并且+ E,crc 2 + EE,感光性树脂组合物能够形成残留应力为40MPa以下,聚酰亚胺膜的热膨胀系数为30 ppm /℃以下,以及所述聚酰胺酸,具有优异膜特性的聚酰亚胺膜和使用感光性聚酰亚胺树脂组合物的图案形成方法。

    Rubber photoresist composite and a method for producing a circuit board
using thereof
    75.
    发明授权
    Rubber photoresist composite and a method for producing a circuit board using thereof 失效
    橡胶光致抗蚀剂复合体及其制造方法

    公开(公告)号:US5783359A

    公开(公告)日:1998-07-21

    申请号:US848521

    申请日:1997-04-28

    CPC分类号: G03F7/0048 G03F7/012

    摘要: This invention relates to a rubber photoresist composite which can be applied evenly on a large-sized or square-shaped baseboard and a method for producing a circuit board using thereof. A rubber photoresist composite of this invention comprises a photosensitive agent, a cyclized rubber and a solvent, said solvent including a solvent component having a boiling point ranging from 150.degree. C. to 220.degree. C. The rubber photoresist composite can be applied evenly on the baseboard rotated at a high speed by a spinner.

    摘要翻译: 本发明涉及可以均匀地涂敷在大型或正方形基板上的橡胶光致抗蚀剂复合体及其制造方法。 本发明的橡胶光致抗蚀剂复合材料包括感光剂,环化橡胶和溶剂,所述溶剂包括沸点范围为150-220℃的溶剂组分。橡胶光致抗蚀剂复合材料可以均匀地涂在 底座用旋转器高速旋转。

    Positive resist polymer composition and method of forming resist pattern
    78.
    发明授权
    Positive resist polymer composition and method of forming resist pattern 失效
    正型抗蚀剂聚合物组合物和形成抗蚀剂图案的方法

    公开(公告)号:US4345020A

    公开(公告)日:1982-08-17

    申请号:US212609

    申请日:1980-12-03

    CPC分类号: G03F7/039 Y10S430/143

    摘要: A cross-linkable positive-working ionizing radiation-resist or ultraviolet ray-resist polymer composition including: in polymerized form,(a) units derived from a methacrylic acid ester of the formula:CH.sub.2 .dbd.C(CH.sub.3).COOR where R is an alkyl or haloalkyl group having from 1 to 6 carbon atoms, benzyl or cyclohexyl,(b) units derived from a monoolefinically unsaturated carboxylic acid having from 3 to 12 carbon atoms and from 1 to 3 carboxyl groups, and(c) units derived from methacrylic acid chloride.The amount of the units (c) in the polymer composition is such that the number of moles of the units (b), multiplied by the number of the carboxyl group or groups in each of the units (b), ranges from about 1 to about 20% based on the total number of moles of the units (a), (b) and (c); the amount of the units (c) ranges from about 0.05 to about 3.0% by mole based on the total number of moles of the units (a), (b) and (c); and the molar ratio of the units (b), multiplied by the number of the carboxyl groups in each of the units (b), to the units (c) is greater than 2/1 but less than 250/1. The polymer composition is preferably in the form of either a copolymer having the units (a), (b) and (c), or a polymer blend of a copolymer comprised of the units (b) and a portion of the units (a) and a copolymer comprised of the units (c) and the remainder of the units (a). The resist polymer composition exhibits enhanced sensitivity as well as good thermal resistance, contrast and resolution.

    摘要翻译: 一种可交联正性电离辐射抗蚀剂或紫外线抗蚀剂聚合物组合物,包括:聚合形式,(a)衍生自下式的甲基丙烯酸酯的单元:CH 2 = C(CH 3).COOR,其中R是 具有1至6个碳原子的烷基或卤代烷基,苄基或环己基,(b)衍生自具有3至12个碳原子和1至3个羧基的单烯属不饱和羧酸的单元,和(c)衍生自甲基丙烯酸 酰氯。

    Positive resist terpolymer composition and method of forming resist
pattern
    79.
    发明授权
    Positive resist terpolymer composition and method of forming resist pattern 失效
    正抗蚀剂三聚物组合物和形成抗蚀剂图案的方法

    公开(公告)号:US4276365A

    公开(公告)日:1981-06-30

    申请号:US061291

    申请日:1979-07-02

    IPC分类号: G03F7/039 G03C1/68

    CPC分类号: G03F7/039 Y10S430/143

    摘要: PCT No. PCT/JP78/00022 Sec. 371 Date July 7, 1979 Sec. 102(e) Date July 2, 1979 PCT Filed Nov. 6, 1978 PCT Pub. No. WO79/00284 PCT Pub. Date May 31, 1979A cross-linkable positive-working ionizing radiation-resist or ultraviolet ray- resist polymer composition including: in polymerized form,(a) units derived from a methacrylic acid ester of the formula:CH.sub.2 .dbd.C(CH.sub.3).COOR where R is an alkyl or haloalkyl group having from 1 to 6 carbon atoms, benzyl or cyclohexyl,(b) units derived from a monoolefinically unsaturated carboxylic acid from 3 to 12 carbon atoms and having from 1 to 3 carboxyl groups, and(c) units derived from methacrylic acid chloride.The amount of the units (c) in the polymer composition is such that the number of moles of the units (b), multiplied by the number of the carboxyl group or groups in each of the units (b) ranges from about 1 to about 20% based on the total number of moles of the units (a), (b) and (c); the amount of the units (c) ranges from about 0.05 to about 3.0% by mole based on the total number of moles of the units (a), (b) and (c); and the molar ratio of the units (b), multiplied by the number of the carboxyl groups in each of the units (b), to the units (c) is greater than 2/1 but less than 250/1.

    摘要翻译: PCT No.PCT / JP78 / 00022 Sec。 371日期1979年7月7日 102(e)日期1979年7月2日PCT申请日1978年11月6日PCT公布。 出版物WO79 / 00284 日期:1979年5月31日一种可交联正电离辐射抗蚀剂或紫外线抗蚀剂聚合物组合物,其包含:聚合形式,(a)衍生自下式的甲基丙烯酸酯的单元:CH 2 = C(CH 3)。 COOR,其中R是具有1至6个碳原子的烷基或卤代烷基,苄基或环己基,(b)衍生自3至12个碳原子并具有1至3个羧基的单烯属不饱和羧酸的单元和(c )单元衍生自甲基丙烯酰氯。

    Positive resist terpolymer composition and method of forming resist
pattern
    80.
    发明授权
    Positive resist terpolymer composition and method of forming resist pattern 失效
    正抗蚀剂三聚物组合物和形成抗蚀剂图案的方法

    公开(公告)号:US4273856A

    公开(公告)日:1981-06-16

    申请号:US112309

    申请日:1979-07-02

    CPC分类号: G03F7/039 Y10S430/143

    摘要: PCT No. PCT/JP78/00021 Sec. 371 Date July 2, 1979 Sec. 102(e) Date July 7, 1979 PCT Filed Nov. 6, 1978 PCT Pub. No. WO79/00283 PCT Pub. Date May 31, 1979A cross-linkable positive-working ionizing radiation-resist or ultraviolet ray-resist polymer composition comprising, in polymerized form,(a) from about 70 to about 99% by mole of units derived from a methacrylic acid ester of the formula:CH.sub.2 .dbd.C(CH.sub.3). COORwhere R is an alkyl or haloalkyl group having from 1 to 6 carbon atoms, a benzyl group or a cyclohexyl group,(b) from about 1 to about 20% by mole of units derived from methacrylamide, and(c) from about 0.05 to about 20% by mole of units derived from methacrylic acid chloride;each amount of the units (a), (b) and (c) being based on the total moles of the units (a), (b) and (c). The polymer composition is preferably in the form of either a copolymer comprised of the units (a), (b) and (c), or a blend of a copolymer comprised of the units (b) and a portion of the units (a) and a copolymer comprised of the units (c) and the remainder of the units (a). The resist polymer composition exhibits enhanced sensitivity as well as good thermal resistance, contrast and resolution.

    摘要翻译: PCT No.PCT / JP78 / 00021 Sec。 371日期1979年7月2日 102(e)日期1979年7月7日PCT提交1978年11月6日PCT公布。 出版物WO79 / 00283 日期:1979年5月31日一种可交联的正电离辐射抗蚀剂或紫外线抗蚀剂聚合物组合物,其包含聚合形式的(a)约70-约99摩尔%的衍生自 式:CH 2 = C(CH 3)。 COOR,其中R是具有1至6个碳原子的烷基或卤代烷基,苄基或环己基,(b)约1至约20摩尔%来自甲基丙烯酰胺的单元,和(c)约0.05 至约20摩尔%的衍生自甲基丙烯酰氯的单元; 单位(a),(b)和(c)的单位为单位(a),(b)和(c)的总摩尔数。 聚合物组合物优选为由单元(a),(b)和(c)组成的共聚物的形式,或由单元(b)和单元(a)的一部分组成的共聚物的共混物, 和由单元(c)和单元(a)的其余部分组成的共聚物。 抗蚀剂聚合物组合物具有增强的灵敏度以及良好的耐热性,对比度和分辨率。