High-pressure drying apparatus, high-pressure drying method and substrate processing apparatus
    72.
    发明授权
    High-pressure drying apparatus, high-pressure drying method and substrate processing apparatus 失效
    高压干燥装置,高压干燥方法和基板处理装置

    公开(公告)号:US06691430B2

    公开(公告)日:2004-02-17

    申请号:US10382616

    申请日:2003-03-04

    IPC分类号: F26B700

    CPC分类号: H01L21/67034 Y10S134/902

    摘要: Liquid for prevention of substrate drying is supplied into a processing chamber so that a pool of the liquid is created as an anti-drying atmosphere in advance inside a processing chamber, and substrates, as they are dipped in the pool, are kept on stand-by in a substrate board. In this manner, air drying of the substrates which are kept on stand-by is prevented. When the number of the substrates in the substrate board reaches a certain number, the anti-drying atmosphere is removed from the processing chamber, which is followed by introduction of an SCF into the processing chamber and supercritical drying (high pressure drying) of all of the plurality of substrates inside the processing chamber, namely, batch supercritical drying.

    摘要翻译: 将用于防止基材干燥的液体供应到处理室中,使得在处理室内预先产生作为防干燥气氛的液体池,并且当浸入池中时,将基板保持在待机状态, 通过在衬底板中。 以这种方式,防止了保持待机的基板的空气干燥。 当基板中的基板数量达到一定数量时,从处理室中除去防干燥气氛,然后将SCF引入处理室,并将超临界干燥(高压干燥)全部 处理室内的多个基板,即分批超临界干燥。

    Switching type liquid-in vibration isolating device

    公开(公告)号:US06585242B2

    公开(公告)日:2003-07-01

    申请号:US10077347

    申请日:2002-02-15

    IPC分类号: F16F500

    CPC分类号: F16F13/26

    摘要: This invention provides a switching type liquid-in vibration isolating device capable of opening/closing an orifice by changing over between the atmospheric and negative pressure in a switching chamber corresponding to shake and idle vibration, respectively. In order to prevent a pipe, for introducing the atmospheric and negative pressure in the switching chamber, from disconnecting, a first and a second fitting 1, 2 are connected by a vibration isolating substrate 3, a partition member 4, a first and a second diaphragm 5, 6 are disposed within a hollow space thereof, a main liquid chamber 7 and a sub-liquid chamber 8 are interconnected by two inside and outside orifices 12, 13, a equilibrium chamber 9 is formed between the first and second diaphragm 5, 6, a switching chamber 10 is formed between the second diaphragm 6 and the second fitting 2, the center portion of the bottom wall 22 of the second fitting 2 is depressed toward the switching chamber 10, a pipe 11 is pierced into the top 25a of the depressed portion 25 and received in the depressed portion 25, and a plurality of convex portions 29 for interference prevention are outwardly projectively provided on the bottom wall 22 around the depressed portion 25.

    Internal clock generating circuitry having testing function
    74.
    发明授权
    Internal clock generating circuitry having testing function 失效
    具有测试功能的内部时钟发生电路

    公开(公告)号:US06532560B1

    公开(公告)日:2003-03-11

    申请号:US09553382

    申请日:2000-04-20

    申请人: Takashi Miyake

    发明人: Takashi Miyake

    IPC分类号: G01R3128

    摘要: Internal clock generating circuitry comprises a phase comparator (1) for comparing the phase of a clock signal applied thereto from outside the circuitry with that of a feedback signal fed back thereto, and for generating a voltage corresponding to the difference between the phases of those clock signals, a voltage-controlled oscillator or VCO (2) for generating a clock signal having a frequency corresponding to the voltage from the phase comparator (1), a normal clock signal generating circuit (3) for generating at least one normal clock signal used for making an internal circuit operate under normal conditions from the clock signal from the VCO (2), and for generating and feeding the feedback signal back to the phase comparator (1), a test VCO (5) for generating a clock signal having a frequency corresponding to the voltage from the phase comparator (1), a test clock signal generating circuit (6) for generating at least one test clock signal used for testing the internal circuit from the clock signal from the test VCO (5), a selector (4) for selecting either the normal clock signal or the test clock signal generated, and for furnishing the selected clock signal to the internal circuit, and a control signal generating circuit (7) for generating a control signal to stop the test VCO (5) according to an input signal applied thereto from outside the circuitry.

    摘要翻译: 内部时钟发生电路包括相位比较器(1),用于比较从电路外部施加到其上的时钟信号的相位与反馈给反馈信号的时钟信号的相位,并产生与这些时钟的相位之间的差相对应的电压 信号,压控振荡器或VCO(2),用于产生具有对应于来自相位比较器(1)的电压的频率的时钟信号;正常时钟信号产生电路(3),用于产生使用的至少一个正常时钟信号 用于使内部电路在来自VCO(2)的时钟信号的正常条件下工作,并且用于产生并将反馈信号馈送到相位比较器(1),用于产生时钟信号的测试VCO(5)具有 频率对应于来自相位比较器(1)的电压,测试时钟信号发生电路(6),用于产生用于测试内部电路的至少一个测试时钟信号 来自测试VCO(5)的时钟信号,用于选择正常时钟信号或所生成的测试时钟信号的选择器(4),以及用于将选择的时钟信号提供给内部电路,以及控制信号发生电路 ),用于根据从电路外部施加到其上的输入信号产生控制信号以停止测试VCO(5)。

    Timer control circuit
    75.
    发明授权
    Timer control circuit 失效
    定时器控制电路

    公开(公告)号:US06483887B2

    公开(公告)日:2002-11-19

    申请号:US09992428

    申请日:2001-11-26

    IPC分类号: H01H4300

    CPC分类号: H03K3/64 G06F1/025 H03K5/156

    摘要: A timer control circuit includes timers that perform count operations. A signal selection circuit selectively passes underflow signals supplied from the timers, based on control signals. A flip-flop is supplied with an output of the signal selection circuit section as a toggle signal.

    摘要翻译: 定时器控制电路包括执行计数操作的定时器。 信号选择电路基于控制信号选择性地通过从定时器提供的下溢信号。 触发器提供有信号选择电路部分的输出作为触发信号。

    Audio/video communication system and method
    76.
    发明授权
    Audio/video communication system and method 失效
    音视频通信系统及方法

    公开(公告)号:US5625350A

    公开(公告)日:1997-04-29

    申请号:US364861

    申请日:1994-12-27

    摘要: A communication system for e.g. an automobile including a system control unit for activating a selected audio/video device (such as an AM/FM tuner or a navigation system) in response to a request signal transmitted on a bus from a command input terminal. The system control unit generates command signals necessary to activate the selected audio/video device in response to the request signal, including command signals to de-activate any currently-operating devices. Conversely, adjustment commands (such as volume change or channel change commands) are transmitted directly (that is, unchanged by the system control unit) from the command input terminal to the selected audio/video device on the first bus line. In addition, the audio/video devices transmit reset signals whenever power is shut-off and then restored. Each reset signal includes a transmission source address corresponding to the audio/video device which transmitted the signal. The system control unit compares these transmission source addresses with a stored address corresponding to the selected audio/video device, and transmits a command signal to restart the selected audio/video device. Further, when the system control unit is turned off and then restored, the system control unit transmits a reset command to all of the audio/video devices connected to the bus.

    摘要翻译: 一种通信系统。 包括用于响应于在总线上从命令输入端子发送的请求信号来激活所选择的音频/视频设备(诸如AM / FM调谐器或导航系统)的系统控制单元的汽车。 系统控制单元响应于请求信号产生激活所选择的音频/视频设备所需的命令信号,包括命令信号以禁用任何当前操作的设备。 相反,调节命令(例如音量变化或频道改变命令)从命令输入终端直接发送到系统控制单元(即,系统控制单元未被更改)到第一总线上的所选音频/视频设备。 此外,每当关闭电源然后恢复时,音频/视频设备都会传输复位信号。 每个复位信号包括对应于发送信号的音频/视频设备的发送源地址。 系统控制单元将这些发送源地址与对应于所选择的音频/视频设备的存储地址进行比较,并发送命令信号以重新启动所选择的音频/视频设备。 此外,当系统控制单元关闭然后恢复时,系统控制单元向连接到总线的所有音频/视频设备发送复位命令。

    Tuner with selective equalization of different program sources
    77.
    发明授权
    Tuner with selective equalization of different program sources 失效
    调谐器具有不同程序源的选择性均衡

    公开(公告)号:US5241696A

    公开(公告)日:1993-08-31

    申请号:US852933

    申请日:1992-03-13

    摘要: Tuner for receiving a plurality of receiving frequencies and audio system having a plurality of audio components, characterized by the provision of a device for generating a designation command for selectively designating a program source such as a broadcast station at the receiving frequency of the tuner or an audio component, and an equalizer for adjusting the audio signal from the selected program source to have a frequency characteristic according to the program source designated by the designation command. By this provision, the need of operating tone controls at each time of the change of program source is obviated, so that the readiness of operation is improved.

    摘要翻译: 用于接收多个接收频率的调谐器和具有多个音频分量的音频系统,其特征在于提供一种用于产生指定命令的设备,用于以调谐器的接收频率选择性地指定诸如广播站的节目源,或者 音频分量和均衡器,用于调整来自所选节目源的音频信号,以具有根据由指定命令指定的节目源的频率特性。 通过这种规定,在程序源的每次更改时都需要操作音调控制,从而提高了操作的准备性。

    Frequency characteristic setting circuitry for an amplifier
    79.
    发明授权
    Frequency characteristic setting circuitry for an amplifier 失效
    放大器的频率特性设定电路

    公开(公告)号:US5045802A

    公开(公告)日:1991-09-03

    申请号:US504180

    申请日:1990-04-04

    IPC分类号: H03G5/16 H03G5/02

    CPC分类号: H03G5/025

    摘要: Frequency characteristic setting circuitry for an amplifier generates frequency band data groups using a plurality of characteristic pattern data groups stored in a memory. Each of the frequency band data groups is made by making each item of data of a characteristic pattern data group retrieved from among a plurality of characteristic pattern data groups stored in the memory correspond to each frequency in a designated frequency band. The data groups generated for a plurality of frequency bands are combined together and the equalizing characteristic of the amplifier is controlled according to a characteristic pattern data group obtained by the combination.

    摘要翻译: 用于放大器的频率特性设置电路使用存储在存储器中的多个特征模式数据组来产生频带数据组。 每个频带数据组是通过使存储在存储器中的多个特征模式数据组中检索的特征模式数据组的每个数据项与指定频带中的每个频率对应来进行的。 将针对多个频带生成的数据组合在一起,并根据通过组合获得的特征图案数据组来控制放大器的均衡特性。