公开(公告)号：US07616472B2

公开(公告)日：2009-11-10

申请号：US11552032

申请日：2006-10-23

申请人： Erh-Kun Lai ,  ChiaHua Ho ,  Kuang Yeu Hsieh

发明人： Erh-Kun Lai ,  ChiaHua Ho ,  Kuang Yeu Hsieh

IPC分类号： G11C11/00

CPC分类号： G11C13/0007 ,  B82Y10/00 ,  G11C11/5664 ,  G11C11/5678 ,  G11C11/5685 ,  G11C13/0004 ,  G11C13/0014 ,  G11C13/0016 ,  G11C2213/31 ,  G11C2213/32 ,  G11C2213/34 ,  G11C2213/79 ,  H01L27/2463 ,  H01L45/04 ,  H01L45/06 ,  H01L45/122 ,  H01L45/144 ,  H01L45/146 ,  H01L45/1633

摘要： A memory device that selectably exhibits first and second logic levels. A first conductive material has a first surface with a first memory layer formed thereon, and a second conductive material has a second surface with a second memory layer formed thereon. A connective conductive layer joins the first and second memory layers and places the same in electrical contact. The structure is designed so that the first memory layer has a cross-sectional area less than that of the second memory layer.

摘要翻译： 可选择地显示第一和第二逻辑电平的存储器件。 第一导电材料具有形成在其上的第一存储层的第一表面，并且第二导电材料具有形成在其上的第二存储层的第二表面。 连接导电层连接第一和第二存储层并将其放置在电接触中。 该结构被设计成使得第一存储层的横截面积小于第二存储层的横截面面积。

公开(公告)号：US07595218B2

公开(公告)日：2009-09-29

申请号：US11461103

申请日：2006-07-31

申请人： ChiaHua Ho ,  Erh Kun Lai ,  Kuang Yeu Hsieh

发明人： ChiaHua Ho ,  Erh Kun Lai ,  Kuang Yeu Hsieh

IPC分类号： H01L21/00

CPC分类号： H01L27/101 ,  H01L27/24

摘要： Programmable resistive RAM cells have a resistance that depends on the size of the programmable resistive elements. Manufacturing methods and integrated circuits for programmable resistive elements with uniform resistance are disclosed that have a cross-section of reduced size compared to the cross-section of the interlayer contacts.

摘要翻译： 可编程电阻RAM单元具有取决于可编程电阻元件的尺寸的电阻。 公开了具有均匀电阻的可编程电阻元件的制造方法和集成电路，其具有与层间触点的横截面相比尺寸减小的横截面。

公开(公告)号：US07586778B2

公开(公告)日：2009-09-08

申请号：US12134117

申请日：2008-06-05

申请人： ChiaHua Ho ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

发明人： ChiaHua Ho ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

IPC分类号： G11C11/00

CPC分类号： G11C17/165 ,  B82Y10/00 ,  G11C11/5664 ,  G11C11/5678 ,  G11C11/5685 ,  G11C13/0004 ,  G11C13/0007 ,  G11C13/0014 ,  G11C13/0016 ,  G11C13/0069 ,  G11C17/16 ,  G11C2213/31 ,  G11C2213/32 ,  G11C2213/77

摘要： A method is described for operating a bistable resistance random access memory having two memory layer stacks that are aligned in series is disclosed. The bistable resistance random access memory comprises two memory layer stacks per memory cell, the bistable resistance random access memory operates in four logic states, a logic “00” state, a logic “01” state, a logic “10” state and a logic “11” state. The relationship between the four different logic states can be represented mathematically by the two variables n and f and a resistance R. The logic “0” state is represented by a mathematical expression (1+f) R. The logic “1” state is represented by a mathematical expression (n+f) R. The logic “2” state is represented by a mathematical expression (1+nf) R. The logic “3” state is represented by a mathematical expression n(1+f) R.

摘要翻译： 描述了一种用于操作具有串联排列的两个存储层堆叠的双稳态电阻随机存取存储器的方法。 双稳态电阻随机存取存储器包括每个存储单元的两个存储层堆栈，双稳态电阻随机存取存储器以四个逻辑状态，逻辑“00”状态，逻辑“01”状态，逻辑“10”状态和逻辑 “11”状态。 四个不同逻辑状态之间的关系可以用两个变量n和f以及电阻R在数学上表示。逻辑“0”状态由数学表达式（1 + f）R 逻辑“1”状态由数学表达式（n + f）R表示。逻辑“2”状态由数学表达式（1 + nf）R表示。逻辑“3”状态由数学 表达式n（1 + f）R

公开(公告)号：US07531825B2

公开(公告)日：2009-05-12

申请号：US11463824

申请日：2006-08-10

申请人： Erh-Kun Lai ,  Chiahua Ho ,  Kuang Yeu Hsieh

发明人： Erh-Kun Lai ,  Chiahua Ho ,  Kuang Yeu Hsieh

IPC分类号： H01L47/00 ,  G11C11/56

CPC分类号： H01L45/06 ,  H01L45/1233 ,  H01L45/1293 ,  H01L45/144 ,  H01L45/1683

摘要： A non-volatile method with a self-aligned RRAM element. The method includes a lower electrode element, generally planar in form, having an inner contact surface. At the top of the device is a upper electrode element, spaced from the lower electrode element. A containment structure extends between the upper electrode element and the lower electrode element, and this element includes a sidewall spacer element having an inner surface defining a generally funnel-shaped central cavity, terminating at a terminal edge to define a central aperture; and a spandrel element positioned between the sidewall spacer element and the lower electrode, having an inner surface defining a thermal isolation cell, the spandrel inner walls being spaced radially outward from the sidewall spacer terminal edge, such that the sidewall spacer terminal edge projects radially inward from the spandrel element inner surface. ARRAM element extends between the lower electrode element and the upper electrode, occupying at least a portion of the sidewall spacer element central cavity and projecting from the sidewall spacer terminal edge toward and making contact with the lower electrode. In this manner, the spandrel element inner surface is spaced from the RRAM element to define a thermal isolation cell adjacent the RRAM element.

摘要翻译： 具有自对准RRAM元素的非易失性方法。 该方法包括具有内部接触表面的大体平面形状的下部电极元件。 在装置的顶部是与下部电极元件间隔开的上部电极元件。 容纳结构在上电极元件和下电极元件之间延伸，并且该元件包括侧壁间隔元件，其具有限定大致漏斗形中心腔的内表面，终止于端边缘以限定中心孔; 以及位于所述侧壁间隔元件和所述下电极之间的突出元件，具有限定了热隔离单元的内表面，所述凸起内壁与所述侧壁间隔件终端边缘径向向外间隔开，使得所述侧壁间隔件末端边缘径向向内突出 从弹簧元件内表面。 ARRAM元件在下电极元件和上电极之间延伸，占据侧壁间隔元件中心空腔的至少一部分并且从侧壁间隔件终端边缘朝向和与下电极接触。 以这种方式，伞形元件内表面与RRAM元件间隔开以限定与RRAM元件相邻的热隔离单元。

公开(公告)号：US20090020746A1

公开(公告)日：2009-01-22

申请号：US12235773

申请日：2008-09-23

申请人： Erh-Kun Lai ,  ChiaHua Ho ,  Kuang Yeu Hsieh ,  Shih-Hung Chen

发明人： Erh-Kun Lai ,  ChiaHua Ho ,  Kuang Yeu Hsieh ,  Shih-Hung Chen

IPC分类号： H01L45/00

CPC分类号： H01L45/06 ,  G11C11/5678 ,  G11C13/0004 ,  H01L27/2436 ,  H01L45/1233 ,  H01L45/1246 ,  H01L45/144 ,  H01L45/148 ,  H01L45/1666

摘要： A process in the manufacturing of a resistor random access memory with a confined melting area for switching a phase change in the programmable resistive memory. The process initially formed a pillar comprising a substrate body, a first conductive material overlying the substrate body, a programmable resistive memory material overlying the first conductive material, a high selective material overlying the programmable resistive memory material, and a silicon nitride material overlying the high selective material. The high selective material in the pillar is isotropically etched on both sides of the high selective material to create a void on each side of the high selective material with a reduced length. A programmable resistive memory material is deposited in a confined area previously occupied by the reduced length of the poly, and the programmable resistive memory material is deposited into an area previously occupied by the silicon nitride material.

摘要翻译： 制造具有用于切换可编程电阻存储器中的相位变化的限定熔化区域的电阻器随机存取存储器的过程。 该工艺最初形成了一个支柱，该支柱包括衬底主体，覆盖衬底主体的第一导电材料，覆盖第一导电材料的可编程电阻性存储器材料，覆盖在可编程电阻性存储器材料上的高选择性材料， 选择性材料。 柱中的高选择性材料在高选择性材料的两侧进行各向同性蚀刻，以在长度较小的高选择性材料的每侧产生空隙。 可编程电阻式存储器材料沉积在先前由多晶硅长度减小的限制区域中，并且可编程电阻式存储器材料沉积到先前由氮化硅材料占据的区域中。

公开(公告)号：US20080121861A1

公开(公告)日：2008-05-29

申请号：US11465094

申请日：2006-08-16

申请人： Erh-Kun Lai ,  ChiaHua Ho ,  Kuang Yeu Hsieh ,  Shih-Hung Chen

发明人： Erh-Kun Lai ,  ChiaHua Ho ,  Kuang Yeu Hsieh ,  Shih-Hung Chen

IPC分类号： H01L45/00

CPC分类号： H01L45/06 ,  G11C11/5678 ,  G11C13/0004 ,  H01L27/2436 ,  H01L45/1233 ,  H01L45/1246 ,  H01L45/144 ,  H01L45/148 ,  H01L45/1666

摘要： A process in the manufacturing of a resistor random access memory with a confined melting area for switching a phase change in the programmable resistive memory. The process initially formed a pillar comprising a substrate body, a first conductive material overlying the substrate body, a programmable resistive memory material overlying the first conductive material, a high selective material overlying the programmable resistive memory material, and a silicon nitride material overlying the high selective material. The high selective material in the pillar is isotropically etched on both sides of the high selective material to create a void on each side of the high selective material with a reduced length. A programmable resistive memory material is deposited in a confined area previously occupied by the reduced length of the poly, and the programmable resistive memory material is deposited into an area previously occupied by the silicon nitride material.

摘要翻译： 制造具有用于切换可编程电阻存储器中的相位变化的限定熔化区域的电阻器随机存取存储器的过程。 该工艺最初形成了一个支柱，该支柱包括衬底主体，覆盖衬底主体的第一导电材料，覆盖第一导电材料的可编程电阻性存储器材料，覆盖在可编程电阻性存储器材料上的高选择性材料， 选择性材料。 柱中的高选择性材料在高选择性材料的两侧进行各向同性蚀刻，以在长度较小的高选择性材料的每侧产生空隙。 可编程电阻式存储器材料沉积在先前由多晶硅长度减小的限制区域中，并且可编程电阻式存储器材料沉积到先前由氮化硅材料占据的区域中。

公开(公告)号：US20070158690A1

公开(公告)日：2007-07-12

申请号：US11461103

申请日：2006-07-31

申请人： ChiaHua Ho ,  Erh Kun Lai ,  Kuang Yeu Hsieh

发明人： ChiaHua Ho ,  Erh Kun Lai ,  Kuang Yeu Hsieh

IPC分类号： H01L27/10 ,  H01L21/82

CPC分类号： H01L27/101 ,  H01L27/24

摘要： Programmable resistive RAM cells have a resistance that depends on the size of the programmable resistive elements. Manufacturing methods and integrated circuits for programmable resistive elements with uniform resistance are disclosed that have a cross-section of reduced size compared to the cross-section of the interlayer contacts.

摘要翻译： 可编程电阻RAM单元具有取决于可编程电阻元件的尺寸的电阻。 公开了具有均匀电阻的可编程电阻元件的制造方法和集成电路，其具有与层间触点的横截面相比尺寸减小的横截面。

公开(公告)号：US20070155172A1

公开(公告)日：2007-07-05

申请号：US11382799

申请日：2006-05-11

申请人： Erh Kun Lai ,  Chiahua Ho ,  Yi Chou Chen ,  Kuang Yeu Hsieh

发明人： Erh Kun Lai ,  Chiahua Ho ,  Yi Chou Chen ,  Kuang Yeu Hsieh

IPC分类号： H01L21/44

CPC分类号： H01L27/2436 ,  H01L45/04 ,  H01L45/06 ,  H01L45/1226 ,  H01L45/14 ,  H01L45/141 ,  H01L45/144 ,  H01L45/146 ,  H01L45/147 ,  H01L45/148 ,  H01L45/1625 ,  H01L45/1641 ,  H01L45/1675

摘要： A method for manufacturing a phase change memory device comprises forming an electrode layer. Electrodes are made in the electrode layer using conductor fill techniques that are also used inter-layer conductors for metallization layers, in order to improve process scaling with shrinking critical dimensions for metallization layers. The electrode layer is made by forming a multi-layer dielectric layer on a substrate, etching the multi-layer dielectric layer to form vias for electrode members contacting circuitry below, forming insulating spacers on the vias, etching through a top layer in the multi-layer dielectric layer to form trenches between the insulating spacers for electrode members contacting circuitry above, filling the vias and trenches with a conductive material using the metallization process. Thin film bridges of memory material are formed over the electrode layer.

摘要翻译： 一种相变存储器件的制造方法，包括形成电极层。 使用导体填充技术在电极层中制造电极，该技术也用于金属化层的层间导体，以便通过金属化层的缩小临界尺寸改善工艺规模。 电极层是通过在衬底上形成多层电介质层而形成的，蚀刻多层电介质层以形成接触下面电路的电极构件的通路，在通孔上形成绝缘隔离层， 以在用于接触上述电路的电极部件的绝缘间隔物之间​​形成沟槽，用导电材料使用金属化工艺填充过孔和沟槽。 存储材料的薄膜桥形成在电极层上。

公开(公告)号：US08067762B2

公开(公告)日：2011-11-29

申请号：US11560723

申请日：2006-11-16

申请人： ChiaHua Ho ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

发明人： ChiaHua Ho ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

IPC分类号： H01L29/02 ,  H01L47/00

CPC分类号： H01L45/1608 ,  H01L45/04 ,  H01L45/06 ,  H01L45/12 ,  H01L45/1233 ,  H01L45/144 ,  H01L45/146 ,  H01L45/1625

摘要： A bistable resistance random access memory is described for enhancing the data retention in a resistance random access memory member. A dielectric member, e.g. the bottom dielectric member, underlies the resistance random access memory member which improves the SET/RESET window in the retention of information. The deposition of the bottom dielectric member is carried out by a plasma-enhanced chemical vapor deposition or by high-density-plasma chemical vapor deposition. One suitable material for constructing the bottom dielectric member is a silicon oxide. The bistable resistance random access memory includes a bottom dielectric member disposed between a resistance random access member and a bottom electrode or bottom contact plug. Additional layers including a bit line, a top contact plug, and a top electrode disposed over the top surface of the resistance random access memory member. Sides of the top electrode and the resistance random access memory member are substantially aligned with each other.

摘要翻译： 描述了双稳态电阻随机存取存储器，用于增强电阻随机存取存储器件中的数据保持。 电介质构件，例如 底部电介质构件位于电阻随机存取存储器构件的下方，其改善了保留信息中的SET / RESET窗口。 底部电介质构件的沉积通过等离子体增强化学气相沉积或通过高密度 - 等离子体化学气相沉积来进行。 用于构造底部电介质构件的一种合适的材料是氧化硅。 双稳态随机存取存储器包括设置在电阻随机存取构件和底部电极或底部接触插塞之间的底部电介质构件。 附加层包括位线，顶部接触插塞和设置在电阻随机存取存储器构件顶表面上的顶部电极。 顶部电极和电阻随机存取存储器构件的侧面基本上彼此对准。

公开(公告)号：US20110189819A1

公开(公告)日：2011-08-04

申请号：US13083450

申请日：2011-04-08

申请人： Wei-Chih Chien ,  Kuo-Pin Chang ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

发明人： Wei-Chih Chien ,  Kuo-Pin Chang ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

IPC分类号： H01L21/8239

CPC分类号： H01L45/04 ,  H01L45/085 ,  H01L45/12 ,  H01L45/1233 ,  H01L45/144 ,  H01L45/146 ,  H01L45/147 ,  H01L45/148 ,  H01L45/1625 ,  H01L45/1633 ,  Y10S438/90

摘要： A memory device comprises first and second electrodes with a memory element and a buffer layer located between and electrically coupled to them. The memory element comprises one or more metal oxygen compounds. The buffer layer comprises at least one of an oxide and a nitride. Another memory device comprises first and second electrodes with a memory element and a buffer layer, having a thickness of less than 50 Å, located between and electrically coupled to them. The memory comprises one or more metal oxygen compounds. An example of a method of fabricating a memory device includes forming first and second electrodes. A memory, located between and electrically coupled to the first and the second electrodes, is formed; the memory comprises one or more metal oxygen compounds and the buffer layer comprises at least one of an oxide and a nitride.

摘要翻译： 存储器件包括具有存储元件的第一和第二电极以及位于它们之间并与之电耦合的缓冲层。 记忆元件包括一种或多种金属氧化合物。 缓冲层包括氧化物和氮化物中的至少一种。 另一个存储器件包括具有存储元件和缓冲层的第一和第二电极，其厚度小于50，位于它们之间并与之电耦合。 记忆体包括一种或多种金属氧化合物。 制造存储器件的方法的一个例子包括形成第一和第二电极。 形成位于第一和第二电极之间并电耦合到第一和第二电极的存储器; 存储器包括一种或多种金属氧化合物，并且缓冲层包括氧化物和氮化物中的至少一种。