公开(公告)号：US20170341224A1

公开(公告)日：2017-11-30

申请号：US15539824

申请日：2014-12-26

申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA

发明人： Yasuhiko HASHIMOTO ,  Takahiro INADA ,  Kenji BANDO ,  Yoshiaki TANAKA ,  Junichi MURAKAMI ,  Satoru HIBINO ,  Yukio IWASAKI

IPC分类号： B25J9/06 ,  B25J18/00 ,  B25J17/02

CPC分类号： B25J9/06 ,  B25J9/043 ,  B25J17/0258 ,  B25J18/00

摘要： A dual-arm robot includes a first arm and a second arm, each having a first link rotatable about a first axis, and a second link rotatably coupled to the first link and defined with an end effector attaching portion. The first link of the first arm is disposed to be separated from the first link of the second arm in an extending direction of the first axis. Further, the second link of the first arm and the second link of the second arm are disposed so as to be located between the first link of the first arm and the first link of the second arm in the extending direction of the first axis and so that the end effector attaching portions are located at substantially the same position in the extending direction of the first axis.

公开(公告)号：US09623555B2

公开(公告)日：2017-04-18

申请号：US13293717

申请日：2011-11-10

申请人： Alexander G. Krupyshev ,  Robert T. Caveney ,  Martin R. Elliott ,  Christopher Hofmeister

发明人： Alexander G. Krupyshev ,  Robert T. Caveney ,  Martin R. Elliott ,  Christopher Hofmeister

IPC分类号： B25J9/04

CPC分类号： B25J9/043 ,  B25J9/042

摘要： A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.

公开(公告)号：US09508581B2

公开(公告)日：2016-11-29

申请号：US14365431

申请日：2011-12-15

申请人： Katsuhiro Yamazoe ,  Shinichi Imai ,  Kosuke Sakata ,  Yoshiki Nishijima ,  Hiroaki Tsukimoto ,  Kohsaku Saino

发明人： Katsuhiro Yamazoe ,  Shinichi Imai ,  Kosuke Sakata ,  Yoshiki Nishijima ,  Hiroaki Tsukimoto ,  Kohsaku Saino

IPC分类号： H01L21/687 ,  H01L21/677 ,  B25J9/04 ,  B25J9/10

CPC分类号： H01L21/67742 ,  B25J9/043 ,  B25J9/1065

摘要： An object is to transmit an operation of a first parallel link to a second parallel link through a plurality of rotatably supported arms, to prevent the second parallel link from meandering or rolling so that a wafer can be transported smoothly.Arms (61 to 63) of a transmission arm unit (6) are provided for transmitting an operation of a first parallel link (4) to a second parallel link (5). An operation of the first parallel link (4) is transmitted to the second parallel link (5) so that an angle between an arm (53) and an arm (52) in the second parallel link(5) always coincides with an angle between an arm (41) and an arm (42) in the first parallel arm unit (4).

摘要翻译： 传动臂单元（6）的臂（61至63）用于将第一并联连杆（4）的操作传送到第二平行连杆（5）。 第一平行连杆（4）的操作被传递到第二平行连杆（5），使得第二平行连杆（5）中的臂（53）和臂（52）之间的角度总是与 第一平行臂单元（4）中的臂（41）和臂（42）。

公开(公告)号：US09457464B2

公开(公告)日：2016-10-04

申请号：US14297675

申请日：2014-06-06

申请人： Applied Materials, Inc.

发明人： Izya Kremerman ,  Jeffrey C. Hudgens

IPC分类号： B25J9/06 ,  B25J9/04 ,  B25J9/10 ,  H01L21/677

CPC分类号： B25J9/043 ,  B25J9/042 ,  B25J9/107 ,  H01L21/67742 ,  Y10S414/139 ,  Y10S901/15 ,  Y10T74/20305

摘要： Robot apparatus, substrate transport systems, and methods are described. The robot apparatus and systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent to the destination and then actuating robot assemblies to put or pick the substrates at the destination. Numerous other aspects are provided.

摘要翻译： 描述了机器人装置，基板输送系统和方法。 机器人装置和系统适于通过将动臂联动件旋转到与目的地相邻的位置，然后致动机器人组件来将目标物放置或拾取基板，从而有效地将目标物体放置或拾取目的地。 提供了许多其他方面。

公开(公告)号：US20160133493A1

公开(公告)日：2016-05-12

申请号：US14988256

申请日：2016-01-05

申请人： Brooks Automation, Inc.

发明人： Robert T. Caveney ,  Jayaraman Krishnasamy ,  Ulysses Gilchrist ,  Michell Drew ,  Jairo T. Moura

IPC分类号： H01L21/677

CPC分类号： H01L21/67706 ,  B25J9/042 ,  B25J9/043 ,  B25J11/0095 ,  B25J18/04 ,  H01L21/67742 ,  Y10S901/15 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20329

摘要： A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

公开(公告)号：US09252038B2

公开(公告)日：2016-02-02

申请号：US13519232

申请日：2010-12-22

申请人： Hirotoshi Nakao ,  Muneyoshi Nishitsuji ,  Takahiro Yoshino ,  Takuya Kuriyama ,  Taiji Chiba ,  Daisuke Kawakubo ,  Kiyotaka Yamada

发明人： Hirotoshi Nakao ,  Muneyoshi Nishitsuji ,  Takahiro Yoshino ,  Takuya Kuriyama ,  Taiji Chiba ,  Daisuke Kawakubo ,  Kiyotaka Yamada

IPC分类号： B25J9/04 ,  H01L21/677 ,  B25J9/10 ,  B25J9/00

CPC分类号： H01L21/67742 ,  B25J9/003 ,  B25J9/043 ,  B25J9/1065

摘要： To provide a drive device rigid enough to endure a stress due to a reaction during driving of an arm unit, and to provide a conveyance device including the same.A drive device includes a frame and an actuator installed in the frame. The frame is formed by integral molding by casting. The frame includes a connecting portion connectable to a division wall of a conveyance chamber, a bottom plate portion serving as an opposed portion provided to be opposed to the connecting portion, and a plurality of coupling portions that couple the connecting portion and the bottom plate portion to each other. The actuator includes three coaxial shafts (two rotating shafts and single turning shaft), three motors, and a transmission mechanism that transmits a rotational driving force by the three motors to the three shafts. The frame is formed by the integral molding, and hence it is possible to realize a drive device having a high rigidity.

摘要翻译： 为了提供刚性足以承受在臂单元的驱动期间由于反应而产生的应力的驱动装置，并且提供包括该驱动装置的输送装置。 驱动装置包括框架和安装在框架中的致动器。 框架通过铸造一体成型形成。 框架包括可连接到传送室的分隔壁的连接部分，用作与连接部分相对设置的相对部分的底板部分，以及将连接部分和底板部分联接的多个联接部分 对彼此。 致动器包括三个同轴轴（两个旋转轴和单个转动轴），三个电动机和将三个电动机的旋转驱动力传递到三个轴的传动机构。 框架通过一体成形而形成，因此可以实现高刚性的驱动装置。

公开(公告)号：US20160020126A1

公开(公告)日：2016-01-21

申请号：US14868689

申请日：2015-09-29

申请人： Brooks Automation, Inc.

发明人： Antonio F. Pietrantonio ,  Anthony Chesna ,  Hakan Elmali ,  Ulysses Gilchrist

IPC分类号： H01L21/677 ,  B25J18/00 ,  B25J9/04

CPC分类号： H01L21/67742 ,  B25J9/042 ,  B25J9/043 ,  B25J18/00 ,  H01L21/677 ,  H01L21/68707 ,  Y10S901/15 ,  Y10S901/27 ,  Y10T74/20305

摘要： A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.

摘要翻译： 一种基板输送装置，具有可操作地连接到驱动部分的驱动部分和sc ara臂，以移动sc臂。 镰刀臂有一个上臂和至少一个前臂。 前臂可移动地安装到上臂并且能够在其上保持基底。 上臂基本上是刚性的，并且可调节以改变上臂的预定尺寸。

公开(公告)号：US09230841B2

公开(公告)日：2016-01-05

申请号：US14579067

申请日：2014-12-22

申请人： Brooks Automation, Inc.

发明人： Ulysses Gilchrist ,  Robert T. Caveney ,  Jayaraman Krishnasamy ,  Mitchell Drew ,  Jairo T. Moura

IPC分类号： G06F7/00 ,  H01L21/677 ,  B25J9/04 ,  B25J11/00 ,  B25J18/04

CPC分类号： H01L21/67706 ,  B25J9/042 ,  B25J9/043 ,  B25J11/0095 ,  B25J18/04 ,  H01L21/67742 ,  Y10S901/15 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20329

摘要： A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

摘要翻译： 一种基板处理装置，包括框架，连接到框架的第一SCARA臂，包括端部执行器，构造成沿着第一径向轴线延伸和缩回; 连接到框架的第二SCARA臂，包括端部执行器，构造成沿着第二径向轴线延伸和缩回，SCARA臂具有共同的肩部旋转轴线; 并且耦合到SCARA臂的驱动部分被配置为沿着相应的径向轴线独立地延伸每个SCARA臂并且绕着共同的肩部旋转轴线旋转每个SCARA臂，其中第一径向轴线相对于第二径向轴线成角度，并且端部 相应臂的效应器与相应的径向轴线对准，其中每个末端执行器构造成保持至少一个基板，并且末端执行器位于公共转移平面上。

公开(公告)号：US09064919B2

公开(公告)日：2015-06-23

申请号：US13392040

申请日：2010-08-25

申请人： Takayuki Yazawa ,  Hiroto Nakajima

发明人： Takayuki Yazawa ,  Hiroto Nakajima

IPC分类号： B25J9/06 ,  H01L21/677 ,  B25J9/04

CPC分类号： H01L21/67742 ,  B25J9/042 ,  B25J9/043 ,  H01L21/67766 ,  Y10S414/135 ,  Y10S901/46

摘要： An industrial robot including a first arm which has a first arm portion, and a second arm portion supported by the first arm portion. The industrial robot also includes a second arm which has a third arm portion and a fourth arm portion supported by the third arm portion. The first arm and the second arm can be expanded/retracted independently. A turning center of the first arm portion and a turning center of the third arm portion are placed coaxially. The first arm and the second arm are constructed so as to be almost line-symmetric with respect to an imaginary line under the condition that the first arm and the second arm are retracted. The first arm portion, the third arm portion, the second arm portion, and the fourth arm portion are placed in this order in a vertical direction.

摘要翻译： 一种工业机器人，包括具有第一臂部的第一臂和由第一臂部支撑的第二臂部。 工业机器人还包括第二臂，其具有由第三臂部支撑的第三臂部和第四臂部。 第一臂和第二臂可以独立地伸展/缩回。 第一臂部的转动中心和第三臂部的转动中心同轴配置。 在第一臂和第二臂缩回的条件下，第一臂和第二臂被构造成相对于假想线几乎线对称。 第一臂部，第三臂部，第二臂部和第四臂部以该垂直方向依次配置。

公开(公告)号：US20150110584A1

公开(公告)日：2015-04-23

申请号：US14579067

申请日：2014-12-22

申请人： Brooks Automation, Inc.

发明人： Ulysses Gilchrist ,  Robert T. Caveney ,  Jayaraman Krishnasamy ,  Mitchell Drew ,  Jairo T. Moura

IPC分类号： H01L21/677 ,  B25J9/04 ,  B25J18/04 ,  B25J11/00

CPC分类号： H01L21/67706 ,  B25J9/042 ,  B25J9/043 ,  B25J11/0095 ,  B25J18/04 ,  H01L21/67742 ,  Y10S901/15 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20329

摘要： A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

摘要翻译： 一种基板处理装置，包括框架，连接到框架的第一SCARA臂，包括端部执行器，构造成沿着第一径向轴线延伸和缩回; 连接到框架的第二SCARA臂，包括端部执行器，构造成沿着第二径向轴线延伸和缩回，SCARA臂具有共同的肩部旋转轴线; 并且耦合到SCARA臂的驱动部分被配置为沿着相应的径向轴线独立地延伸每个SCARA臂并且绕着共同的肩部旋转轴线旋转每个SCARA臂，其中第一径向轴线相对于第二径向轴线成角度，并且端部 相应臂的效应器与相应的径向轴线对准，其中每个末端执行器构造成保持至少一个基板，并且末端执行器位于公共转移平面上。