MOLYBDENUM IMIDE COMPOUND
    76.
    发明申请

    公开(公告)号:US20170253625A1

    公开(公告)日:2017-09-07

    申请号:US15598450

    申请日:2017-05-18

    申请人: ADEKA CORPORATION

    摘要: In the method of the present invention for producing a thin film, including introducing, onto a substrate, a vapor that has been obtained by vaporizing a thin-film-forming material including a molybdenum imide compound represented by the following formula (I) and that includes the molybdenum imide compound; and then forming a thin film including molybdenum on the substrate by decomposing and/or chemically reacting the molybdenum imide compound. (In the formula, R1 though R10 each represent a hydrogen atom or a linear or branched alkyl group having 1 to 5 carbon atoms, and R11 represents a linear or branched alkyl group having 1 to 8 carbon atoms.)