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    Hybrid organometallic compounds, particularly for metal organic chemical vapor deposition
    5.
    发明授权
    Hybrid organometallic compounds, particularly for metal organic chemical vapor deposition 失效
    杂化有机金属化合物，特别是金属有机化学气相沉积

    公开(公告)号：US4720560A

    公开(公告)日：1988-01-19

    申请号：US664645

    申请日：1984-10-25

    申请人： Benjamin C. Hui ,  Jorg Lorberth ,  Andreas A. Melas

    发明人： Benjamin C. Hui ,  Jorg Lorberth ,  Andreas A. Melas

    IPC分类号： C23C16/48 ,  C07C391/00 ,  C07C395/00 ,  C07F3/00 ,  C07F3/02 ,  C07F3/06 ,  C07F3/08 ,  C07F3/10 ,  C07F3/12 ,  C07F5/00 ,  C07F5/02 ,  C07F5/06 ,  C07F9/50 ,  C07F9/72 ,  C07F9/90 ,  C07F9/94 ,  C23C16/18 ,  C23C16/30

    CPC分类号： C07F5/00 ,  C07C391/00 ,  C07C395/00 ,  C07F3/00 ,  C07F3/02 ,  C07F3/06 ,  C07F3/08 ,  C07F3/12 ,  C07F5/027 ,  C07F5/06 ,  C07F9/505 ,  C07F9/723 ,  C07F9/90 ,  C07F9/94 ,  C23C16/18 ,  C23C16/301 ,  C23C16/306

    摘要： Compounds having the molecular formula:MR.sub.xwherein x is an integer from 2 to 4 inclusive, each said R substituent is independently selected from hydride, lower alkyl, phenyl, alkyl-substituted phenyl, cyclopentadienyl, and alkyl substituted cyclopentadienyl, at least two of said R substituents are different, and M is an element selected from Groups 2B or 3A of the Periodic Table, Bismuth, Selenium, Tellurium, Beryllium, and Magnesium, but excluding Aluminum, Bismuth, Selenium, and Tellurium if any R is hydride. The hybrid compound is used for metal organic chemical vapor deposition. The invention also includes a metal organic chemical vapor deposition process employing a hybrid of first and second compounds having the above formula, but wherein the R substituents of each compound can be like or unlike and M is selected from Groups 2B, 2A, 3A, 5A, and 6A of the Periodic Table except for Carbon, Nitrogen, Oxygen, and Sulfur. The hybrid composite compound has different properties than the first and second compounds, and thus can be more suitable for a particular metal organic chemical vapor deposition process.

    摘要翻译： 具有分子式：MRx的化合物，其中x是从2到4的整数，其中每个所述R取代基独立地选自氢化物，低级烷基，苯基，烷基取代的苯基，环戊二烯基和烷基取代的环戊二烯基，所述 R取代基不同，M是选自元素周期表第2B或3A族的元素，铋，硒，碲，铍和镁，但如果任何R是氢化物，则不包括铝，铋，硒和碲。 杂化化合物用于金属有机化学气相沉积。 本发明还包括使用具有上式的第一和第二化合物的杂化物的金属有机化学气相沉积方法，但其中每种化合物的R取代基可以是或不同的，M选自2B，2A，3A，5A族 ，以及除碳，氮，氧和硫之外的元素周期表6A。 杂化复合化合物具有与第一和第二化合物不同的性质，因此可以更适合于特定的金属有机化学气相沉积工艺。

    Preparation of dihydrocarbyl aluminum halides and dihydrocarbyl aluminum alkoxides
    6.
    发明授权
    Preparation of dihydrocarbyl aluminum halides and dihydrocarbyl aluminum alkoxides 失效
    二氢铝酸铝和二氢铝酸铝的制备

    公开(公告)号：US3657300A

    公开(公告)日：1972-04-18

    申请号：US3657300D

    申请日：1970-02-02

    申请人： ETHYL CORP

    发明人： BEAVER PHILLIP R ,  GEDDES JAMES C JR

    IPC分类号： C07F5/06

    CPC分类号： C07F5/06

    摘要： IT IS DISCLOSED THAT HIGH PURITY DIHYDROCARBYL ALUMINUM HALIDES AND DILHYDROCARBYL ALUMINUM ALKOXIDES ARE PRODUCED BY A PLURAL STEP PROCESS WHICH INVOLVES A REACTION TO PRODUCE A HYDROCARBYL ALUMINUM DIHALIDE OR HYDROCARBYL ALUMINUM DIALKOXIDE WHICH IS PURIFIED BY DISTILLATION AND THEN REACTED WITH TRIHYDROCARBYL ALUMINUM IN ABOUT STOICHIOMETRIC PROPORTIONS TO PRODUCE THE DESIRED PRODUCT WITHOUT REQUIRING FURTHER PURIFICATION.