公开(公告)号：US20240012028A1

公开(公告)日：2024-01-11

申请号：US18253444

申请日：2021-11-26

Applicant: TECHNOPROBE S.P.A.

Inventor： Flavio MAGGIONI

IPC: G01R1/073 ,  G01R3/00

CPC classification number: G01R1/07314 ,  G01R3/00 ,  G01R1/07357

Abstract: A method of manufacturing a probe card for functionality testing of devices under test (DUT) is disclosed having the steps of providing an interface board configured for interfacing the probe card to a testing apparatus, providing a stiffener, connecting an interposer in the shape of a monobloc of material to the stiffener, cutting the monobloc according to a predetermined pattern after connecting it to the stiffener, thereby defining a plurality of modules which are independent and separated from each other, associating the interface board with the stiffener, and associating a probe head with the interposer. The probe head includes a plurality of contact elements adapted to electrically connect the interposer to contact pads of the devices under test. A probe card obtained by the method is also disclosed.

公开(公告)号：US11828774B2

公开(公告)日：2023-11-28

申请号：US16550071

申请日：2019-08-23

Applicant: TECHNOPROBE S.p.A.

Inventor： Roberto Crippa ,  Flavio Maggioni

IPC: G01R1/073 ,  G01R1/067

CPC classification number: G01R1/07371 ,  G01R1/06761

Abstract: A testing head comprises a plurality of contact probes, and a guide having a plurality of guide holes for housing the contact probes and including a conductive portion. Each contact probe includes a first end region and a second end region, and a body which extends between the first and second end regions. Suitably, the conductive portion includes a group of the guide holes and electrically connects contact probes of a first group of the contact probes. The contact probes of the first group slide in the guide holes in the conductive portion and are adapted to carry a same signal, and each contact probe of a second group of the plurality of contact probes is surrounded by an insulating coating layer that extends along the body of each contact probe of the second group, thereby insulating the contact probes of the second group from the conductive portion.

公开(公告)号：US11782075B2

公开(公告)日：2023-10-10

申请号：US17545851

申请日：2021-12-08

Applicant: Technoprobe S.p.A.

Inventor： Riccardo Liberini

IPC: G01R1/073

CPC classification number: G01R1/07378 ,  G01R1/07342

Abstract: A probe card for a testing apparatus of electronic devices comprises a probe head housing a plurality of contact probes, each contact probe having at least one contact tip adapted to abut onto contact pads of a device under test, as well as a main support and an intermediate support connected to the main support and adapted to realize a spatial transformation of distances between contact pads on its opposite faces as a space transformer, the probe card suitably also comprising at least one connecting element adapted to link the space transformer and the main support, this connecting element having a substantially rod-like body and being equipped with a first end portion comprising at least one terminal section adapted to be engaged in a corresponding housing realized in the space transformer and with a second terminal portion adapted to abut onto an abutment element linked to the main support.

公开(公告)号：US20230021227A1

公开(公告)日：2023-01-19

申请号：US17783440

申请日：2020-12-17

Applicant: TECHNOPROBE S.P.A.

Inventor： Roberto CRIPPA ,  Stefano FELICI

IPC: G01R1/073 ,  G01R1/067 ,  G01R31/28

Abstract: A probe head for a testing apparatus integrated on a semiconductor wafer is disclosed having a first plurality of contact probes having a first transversal diameter, a second plurality of micro contact probes having a second transversal diameter, smaller than the first transversal diameter, and a flexible membrane having conductive tracks for connecting a first plurality contact probe with a corresponding second plurality micro contact probe. The second plurality contact probes are arranged between the testing apparatus and the flexible membrane, and the second plurality micro contact probes are arranged between the flexible membrane and a semiconductor wafer. The second plurality micro contact probes are configured to abut onto contact pads of a device under test integrated in the semiconductor wafer, with each first plurality contact probe being in contact with a corresponding second plurality micro contact probe through a conductive track of the flexible membrane to connect the device under test with the testing apparatus.

公开(公告)号：US11549965B2

公开(公告)日：2023-01-10

申请号：US16324686

申请日：2017-08-07

Applicant: TECHNOPROBE S.P.A.

Inventor： Daniele Perego

IPC: G01R1/067 ,  G01R1/073 ,  G01R31/28

Abstract: It is herein described a contact probe of a testing head of an apparatus for testing electronic devices comprising a probe body being essentially extended in a longitudinal direction between respective end portions adapted to realize a contact with respective contact pads, at least one end portion having transverse dimensions greater than the probe body and comprising an enlarged portion, projecting only in correspondence of a first side wall of the contact probe. Suitably, the at least one end portion further comprises at least one protrusion projecting from a second side wall, opposite to the first side wall and substantially extending toward the second and opposite wall along a longitudinal axis of the contact probe starting from the enlarged portion.

公开(公告)号：US11340262B2

公开(公告)日：2022-05-24

申请号：US16870794

申请日：2020-05-08

Applicant: Technoprobe S.p.A.

Inventor： Roberto Crippa ,  Flavio Maggioni ,  Andrea Calaon

IPC: G01R1/073

Abstract: A contact probe for a testing head of an apparatus for testing electronic devices comprises a body extending along a longitudinal axis between a first end portion and a second end portion, the second end portion being adapted to contact pads of a device under test. Suitably, the contact probe comprises a first section, which extends along the longitudinal axis from the first end portion and is made of an electrically non-conductive material, and a second section, which extends along the longitudinal axis from the second end portion up to the first section, the second section being electrically conductive and extending over a distance less than 1000 μm.

公开(公告)号：US11163004B2

公开(公告)日：2021-11-02

申请号：US16442394

申请日：2019-06-14

Applicant: TECHNOPROBE S.P.A.

Inventor： Flavio Maggioni

IPC: G01R31/319 ,  G01R3/00 ,  G01R1/18 ,  G01R1/073 ,  G01R1/067

Abstract: A probe head comprises a plate-shaped support including respective pluralities of guide holes, a plurality of contact probes being slidingly housed in the respective pluralities of guide holes and including at least a first group of contact probes being apt to carry only one type of signal chosen between ground and power supply signals, a conductive portion realized on the support and including a plurality of the guide holes housing the contact probes of the first group, and at least one filtering capacitor having at least one capacitor plate being electrically connected to the conductive portion, the conductive portion electrically connecting the contact probes of the first group.

公开(公告)号：US11131690B2

公开(公告)日：2021-09-28

申请号：US15640097

申请日：2017-06-30

Applicant: Technoprobe S.p.A.

Inventor： Giuseppe Crippa

IPC: G01R1/067 ,  G01R3/00 ,  H01R13/03 ,  H01R13/24

Abstract: It is described a contact probe for a testing head of an apparatus for testing electronic devices including a body essentially extended along a longitudinal direction between a contact tip and a contact head, that contact probe comprising at least one multilayer structure, in turn including a superposition of at least one inner layer or core and a first inner coating layer, and an outer coating layer that completely covers the multilayer structure and made of a material having a higher hardness than a material realizing the core.

公开(公告)号：US20210255218A1

公开(公告)日：2021-08-19

申请号：US17308636

申请日：2021-05-05

Applicant: Technoprobe S.p.A.

Inventor： Stefano FELICI

IPC: G01R1/073

Abstract: A probe head for testing a device under test includes an upper guide and a lower guide parallel to each other and spaced apart. Each of the guides is provided with a respective plurality of guide holes, a plurality of contact probes housed in the guide holes and provided each with a first end and with a second end, the first end being adapted to contact pads of a device under test. At least one additional guide is associated with one of the guides. The additional guide includes first guide holes, housing a first group of the contact probes, and second guide holes, housing a second group of the contact probes. The first and second guide holes are shifted with respect to the guide holes of the guide which said additional guide is associated with, and the shift of the first guide holes is in a direction opposite the shift of the second guide holes.

公开(公告)号：US11016122B2

公开(公告)日：2021-05-25

申请号：US16439527

申请日：2019-06-12

Applicant: TECHNOPROBE S.P.A.

Inventor： Roberto Crippa ,  Raffaele Vallauri

IPC: G01R3/00 ,  G01R1/073 ,  G01R1/067 ,  G01R31/28

Abstract: A contact probe comprises a probe body being extended in a longitudinal direction between respective end portions adapted to realize a contact with respective contact pads, at least one end portion having transverse dimensions greater than the probe body. Suitably, the end portion comprises at least one indentation adapted to house a material scrap being on the contact probe after a separation from a substrate wherein the contact probe has been realized.