公开(公告)号：US20080298945A1

公开(公告)日：2008-12-04

申请号：US12129346

申请日：2008-05-29

申请人： Damon Keith Cox ,  Marvin L. Freeman ,  Jason M. Schaller ,  Jeffrey C. Hudgens ,  Jeffrey A. Brodine

发明人： Damon Keith Cox ,  Marvin L. Freeman ,  Jason M. Schaller ,  Jeffrey C. Hudgens ,  Jeffrey A. Brodine

IPC分类号： B66C23/18

CPC分类号： H01L21/68707 ,  H01L21/67742 ,  Y10T74/20305

摘要： Methods and apparatus are provided for the use of a dual Selective Compliant Assembly Robot Arm (SCARA) robot. In some embodiments two SCARAs are provided, each including an elbow joint, wherein the two SCARAs are vertically stacked such that one SCARA is a first arm and the other SCARA is a second arm, and wherein the second arm is adapted to support a first substrate, and the first arm is adapted to extend to a full length when the second arm supports the first substrate, and wherein the first substrate supported by the second arm is coplanar with the elbow joint of the first arm, and the second arm is further adapted to move concurrently in parallel (and/or in a coordinated fashion) with the first arm a sufficient amount to avoid interference between the first substrate and the elbow joint of the first arm. Numerous other embodiments are provided.

摘要翻译： 提供了使用双选择性装配机器人手臂（SCARA）机器人的方法和装置。 在一些实施例中，提供了两个SCARA，每个SCARA包括肘关节，其中两个SCARA被垂直堆叠，使得一个SCARA是第一臂，而另一个SCARA是第二臂，并且其中第二臂适于支撑第一基底 ，并且当第二臂支撑第一基板时，第一臂适于延伸到全长，并且其中由第二臂支撑的第一基板与第一臂的肘关节共面，并且第二臂进一步适配 与第一臂并行（和/或以协调的方式）同时移动足够的量以避免第一基板和第一臂的肘关节之间的干涉。 提供了许多其他实施例。

公开(公告)号：US07359767B2

公开(公告)日：2008-04-15

申请号：US11488873

申请日：2006-07-18

申请人： Michael Robert Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt

发明人： Michael Robert Rice ,  Martin R. Elliott ,  Robert B. Lowrance ,  Jeffrey C. Hudgens ,  Eric Andrew Englhardt

IPC分类号： G06F19/00

CPC分类号： B65G37/02 ,  B65G47/61 ,  B65G2201/0297 ,  H01L21/67769 ,  H01L21/67775 ,  H01L21/67778

摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.

摘要翻译： 在第一方面中，基板装载站由连续输送基板载体的输送机供给。 作为基板装载站的一部分的基板载体处理器在输送机运动的同时与输送机交换基板载体。 载体交换过程可以包括以基本匹配输送机速度的速度移动基底载体处理器的端部执行器。 提供了许多其他方面。

公开(公告)号：US07274971B2

公开(公告)日：2007-09-25

申请号：US11067303

申请日：2005-02-25

申请人： Todd J. Brill ,  Michael Teferra ,  Jeffrey C. Hudgens ,  Amitabh Puri

发明人： Todd J. Brill ,  Michael Teferra ,  Jeffrey C. Hudgens ,  Amitabh Puri

IPC分类号： G06F7/00

CPC分类号： G05B19/4189 ,  G05B2219/31274 ,  Y02P90/28 ,  Y10S414/135

摘要： In a first aspect, a computer program product is provided. The computer program product includes a medium readable by a computer. The computer readable medium has computer program code adapted to (1) create a band map that indicates an expected status of one or more positions along a band of a continuously moving conveyor system, each position adapted to receive a carrier support adapted to transport at least one substrate carrier around an electronic device manufacturing facility; (2) monitor status of the one or more positions included in the continuously moving conveyor system; and (3) control operation of the continuously moving conveyor system based on the status of the one or more positions. Numerous other aspects are provided.

摘要翻译： 在第一方面，提供一种计算机程序产品。 计算机程序产品包括可由计算机读取的介质。 计算机可读介质具有计算机程序代码，其适于（1）创建指示沿着连续移动的输送机系统的波段的一个或多个位置的预期状态的波段图，每个位置适于接收适于至少运输的载波支持 电子设备制造设备周围的一个基板载体; （2）监视连续移动的输送机系统中包括的一个或多个位置的状态; 和（3）基于一个或多个位置的状态来控制连续移动的输送机系统的操作。 提供了许多其他方面。

公开(公告)号：US06582175B2

公开(公告)日：2003-06-24

申请号：US10135261

申请日：2002-04-29

申请人： Damon Cox ,  Martin R. Elliott ,  Chris Pencis ,  Jeffrey C. Hudgens ,  Michael Robert Rice

发明人： Damon Cox ,  Martin R. Elliott ,  Chris Pencis ,  Jeffrey C. Hudgens ,  Michael Robert Rice

IPC分类号： B65G100

CPC分类号： H01L21/68707 ,  H01L21/67742

摘要： A multi-set robot is provided that includes a first robot set having a first motor coupled to a first rotatable member that is rotatable about an axis; a second motor coupled to a second rotatable member that is rotatable about the axis; a first plurality of blades vertically spaced from one another; and a first linkage adapted to enable coordinated movement of the blades on rotation of the first and second rotatable members. The robot also includes a second robot set positioned above the first robot set having a third motor coupled to a third rotatable member that is rotatable about the axis; a fourth motor coupled to a fourth rotatable member that is rotatable about the axis; a second plurality of blades vertically spaced from one another; and a second linkage adapted to enable coordinated movement of the blades on rotation of the third and fourth rotatable members. Other aspects are provided.

摘要翻译： 提供了一种多组机器人，其包括第一机器人组，其具有联接到可围绕轴线旋转的第一可旋转构件的第一电动机; 耦合到可围绕所述轴线旋转的第二可旋转构件的第二马达; 彼此垂直间隔开的第一组多个叶片; 以及第一连杆，其适于使所述叶片在所述第一和第二可旋转构件的旋转时能够协调地运动。 所述机器人还包括位于所述第一机器人组件上方的第二机器人组件，所述第二机器人组具有联接到可围绕所述轴线旋转的第三可旋转构件的第三 耦合到可围绕所述轴线旋转的第四可旋转构件的第四电动机; 第二多个叶片，彼此垂直间隔开; 以及第二联动装置，其适于在第三和第四可旋转构件旋转时实现叶片的协调运动。 提供其他方面。

公开(公告)号：US6056504A

公开(公告)日：2000-05-02

申请号：US92626

申请日：1998-06-05

申请人： Jeffrey C. Hudgens ,  Tony R. Kroeker

发明人： Jeffrey C. Hudgens ,  Tony R. Kroeker

IPC分类号： B25J9/10 ,  H01L21/687 ,  B25J18/04

CPC分类号： H01L21/68707 ,  B25J9/107

摘要： An adjustable length frog-leg type wafer handler is provided. The wafer handler has two arms each having an upper portion and a lower portion. The lower portion may extend between a normal position and an extended position, and/or the upper portion may extend between an normal position and a compressed position. The adjusted positions (i.e., extended or compressed) are assumed as the wafer handler moves through a center position. Thus, the inventive wafer handler has a normally smaller arm length (as compared to conventional frog leg configurations) which in turn allows a smaller core axis of rotation (i.e., a smaller bladeless arm length). Therefore the blade used with the adjustable wafer handler may be longer by an amount equal to the difference between the normal and the adjusted arm lengths, without increasing the overall (i.e., the length of the arm and blade) retracted axis of rotation. The longer blade allows wafer placement within a processing chamber without requiring the wafer handler itself to enter the processing chamber.

摘要翻译： 提供了一种可调长度的蛙腿型晶片处理器。 晶片处理器具有两个臂，每个臂具有上部和下部。 下部可以在正常位置和延伸位置之间延伸，和/或上部可以在正常位置和压缩位置之间延伸。 当晶片处理器移动通过中心位置时，假设调整位置（即扩展或压缩）。 因此，本发明的晶片处理器具有通常较小的臂长度（与传统的青蛙腿构型相比），这又允许较小的芯轴旋转轴（即，较小的无臂臂长度）。 因此，与可调节的晶片处理器一起使用的刀片可以比通常和调节的臂长度之间的差值更长，而不增加总体（即臂和刀片的长度）缩回的旋转轴线。 更长的刀片允许晶片放置在处理室内，而不需要晶片处理器本身进入处理室。

公开(公告)号：US08870512B2

公开(公告)日：2014-10-28

申请号：US12257376

申请日：2008-10-23

申请人： Michael Robert Rice ,  Jeffrey C. Hudgens

发明人： Michael Robert Rice ,  Jeffrey C. Hudgens

IPC分类号： H01L21/677 ,  H01L21/673

CPC分类号： H01L21/67763 ,  B65D85/70 ,  H01L21/67386 ,  H01L21/67393 ,  H01L21/67775 ,  Y10S414/137

摘要： An electronic device manufacturing system is disclosed. The system includes a processing tool having one or more processing chambers each adapted to perform an electronic device manufacturing process on one or more substrates; a substrate carrier adapted to couple to the system and carry one or more substrates; and a component adapted to create a sealed environment relative to at least a portion of the substrate carrier and to substantially equalize the sealed environment with an environment within the substrate carrier. Methods of the invention are described as are numerous other aspects.

摘要翻译： 公开了一种电子设备制造系统。 该系统包括具有一个或多个处理室的处理工具，每个处理室适于在一个或多个基板上执行电子设备制造过程; 衬底载体，其适于耦合到所述系统并携带一个或多个衬底; 以及适于相对于所述衬底载体的至少一部分产生密封环境并且基本上使所述密封环境与所述衬底载体内的环境相等的部件。 本发明的方法被描述为许多其它方面。

公开(公告)号：US08599531B2

公开(公告)日：2013-12-03

申请号：US12684733

申请日：2010-01-08

申请人： Satish Sundar ,  Jeffrey C. Hudgens ,  Prudhvi R. Chintalapati ,  William Nixon Taylor, Jr. ,  William P. Laceky ,  Jeffrey A. Brodine ,  Dean C. Hruzek ,  Mario Dave Silvetti

发明人： Satish Sundar ,  Jeffrey C. Hudgens ,  Prudhvi R. Chintalapati ,  William Nixon Taylor, Jr. ,  William P. Laceky ,  Jeffrey A. Brodine ,  Dean C. Hruzek ,  Mario Dave Silvetti

IPC分类号： H01L21/683 ,  H01L21/67 ,  H01L21/673 ,  H01L21/677

CPC分类号： H01L21/6833 ,  H01L21/67 ,  H01L21/673 ,  H01L21/677 ,  H01L21/683 ,  H01L21/6831 ,  H01L21/68707 ,  Y10S414/141 ,  Y10S901/30 ,  Y10S901/40

摘要： Systems, apparatus and methods for transporting substrates between system components of an electronic device manufacturing system are provided. The systems and apparatus include an electrostatic end effector having a base, an electrode pair on the base, and spacer members for spacing the substrate from the electrode pairs to provide a gap between the electrode pair and the substrate. Methods of the invention as well as numerous other aspects are provided.

摘要翻译： 提供了用于在电子设备制造系统的系统部件之间传送基板的系统，设备和方法。 该系统和装置包括具有基座的静电末端执行器，基座上的电极对和用于将基板与电极对间隔开的隔离构件，以在电极对和基板之间提供间隙。 提供了本发明的方法以及许多其它方面。

公开(公告)号：US20130039726A1

公开(公告)日：2013-02-14

申请号：US13205116

申请日：2011-08-08

申请人： Jeffrey A. Brodine ,  Jeffrey C. Hudgens ,  Izya Kremerman

发明人： Jeffrey A. Brodine ,  Jeffrey C. Hudgens ,  Izya Kremerman

IPC分类号： B25J9/04 ,  B25J9/00 ,  B25J18/00

CPC分类号： H01L21/67742 ,  B25J9/04 ,  B25J9/041 ,  B25J9/042 ,  H01L21/67766

摘要： Substrate transport systems, apparatus, and methods are described. The systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent to the destination and then independently actuating an upper arm link housing and one or more wrist members to put or pick one or more substrates at the destination wherein the wrist member is independently actuated relative to the forearm link housing and the motion of the forearm link member is kinematically linked to the motion of the upper arm link housing. Numerous other aspects are provided.

摘要翻译： 描述了基底输送系统，装置和方法。 这些系统适于通过将动臂连杆机构旋转到与目的地相邻的位置而有效地放置或拾取目的地的基板，然后独立地致动上臂连杆壳体和一个或多个腕部构件以将一个或多个基板放置在 目的地，其中手腕构件相对于前臂连杆壳体独立地致动，并且前臂连杆构件的运动与上臂连杆壳体的运动相关联。 提供了许多其他方面。

公开(公告)号：US20120325328A1

公开(公告)日：2012-12-27

申请号：US13605927

申请日：2012-09-06

申请人： Vinay K. Shah ,  Eric Englhardt ,  Jeffrey C. Hudgens ,  Martin Elliott

发明人： Vinay K. Shah ,  Eric Englhardt ,  Jeffrey C. Hudgens ,  Martin Elliott

IPC分类号： F17D3/00

CPC分类号： H01L21/67393 ,  H01L21/67017 ,  H01L21/67353 ,  Y10S414/135 ,  Y10S414/137 ,  Y10T137/0318 ,  Y10T137/0396

摘要： In a first aspect, a substrate carrier is provided that includes an enclosure adapted to be sealable and to house at least one substrate. The substrate carrier includes a first port leading into the enclosure and adapted to allow a flow of gas into the enclosure while the substrate carrier is closed. Numerous other aspects are provided.

摘要翻译： 在第一方面，提供了一种衬底载体，其包括适于可密封的壳体并容纳至少一个衬底。 衬底载体包括通向壳体的第一端口，并且适于在衬底载体关闭的同时允许气体流入外壳。 提供了许多其他方面。

公开(公告)号：US08016542B2

公开(公告)日：2011-09-13

申请号：US12129346

申请日：2008-05-29

申请人： Damon Keith Cox ,  Marvin L. Freeman ,  Jason M. Schaller ,  Jeffrey C. Hudgens ,  Jeffrey A. Brodine

发明人： Damon Keith Cox ,  Marvin L. Freeman ,  Jason M. Schaller ,  Jeffrey C. Hudgens ,  Jeffrey A. Brodine

IPC分类号： B25J18/00

CPC分类号： H01L21/68707 ,  H01L21/67742 ,  Y10T74/20305

摘要： Methods and apparatus are provided for the use of a dual Selective Compliant Assembly Robot Arm (SCARA) robot. In some embodiments two SCARAs are provided, each including an elbow joint, wherein the two SCARAs are vertically stacked such that one SCARA is a first arm and the other SCARA is a second arm, and wherein the second arm is adapted to support a first substrate, and the first arm is adapted to extend to a full length when the second arm supports the first substrate, and wherein the first substrate supported by the second arm is coplanar with the elbow joint of the first arm, and the second arm is further adapted to move concurrently in parallel (and/or in a coordinated fashion) with the first arm a sufficient amount to avoid interference between the first substrate and the elbow joint of the first arm. Numerous other embodiments are provided.

摘要翻译： 提供了使用双选择性装配机器人手臂（SCARA）机器人的方法和装置。 在一些实施例中，提供了两个SCARA，每个SCARA包括肘关节，其中两个SCARA被垂直堆叠，使得一个SCARA是第一臂，而另一个SCARA是第二臂，并且其中第二臂适于支撑第一基底 ，并且当第二臂支撑第一基板时，第一臂适于延伸到全长，并且其中由第二臂支撑的第一基板与第一臂的肘关节共面，并且第二臂进一步适配 与第一臂并行（和/或以协调的方式）同时移动足够的量以避免第一基板和第一臂的肘关节之间的干涉。 提供了许多其他实施例。