公开(公告)号：US20120048349A1

公开(公告)日：2012-03-01

申请号：US13219484

申请日：2011-08-26

申请人： Burak Metin ,  Eric Lee ,  Mustafa Pinarbasi ,  Deepak Nayak

发明人： Burak Metin ,  Eric Lee ,  Mustafa Pinarbasi ,  Deepak Nayak

IPC分类号： H01L31/048

CPC分类号： H02S40/34 ,  H01L31/02013 ,  H01L31/048 ,  Y02E10/50

摘要： A flexible solar cell assembly having solar cells that are positioned within a sealed module chamber. A sealed wiring chamber is positioned on an end of the sealed module chamber and is interposed between the sealed module chamber and a junction box. Wiring interconnecting the junction box to the solar cells in the sealed module chamber is routed through the sealed wiring chamber to inhibit water entry into the sealed module chamber via the wiring.

摘要翻译： 一种具有位于密封模块室内的太阳能电池的柔性太阳能电池组件。 密封接线室位于密封模块室的一端并插入在密封模块室和接线盒之间。 将接线盒与密封模块室中的太阳能电池互连的布线通过密封布线室布线，以阻止水通过布线进入密封模块室。

公开(公告)号：US20100226629A1

公开(公告)日：2010-09-09

申请号：US12721446

申请日：2010-03-10

申请人： Bulent M. Basol ,  Howard Zolla ,  Mustafa Pinarbasi ,  Gregory Norsworthy

发明人： Bulent M. Basol ,  Howard Zolla ,  Mustafa Pinarbasi ,  Gregory Norsworthy

IPC分类号： F26B3/28 ,  F24F7/00 ,  F26B3/34

CPC分类号： F27B9/045 ,  C23C14/5866 ,  F27B9/063 ,  F27B9/20 ,  F27B9/28 ,  F27B9/36 ,  H01L21/67109 ,  H01L21/67126 ,  H01L21/6776 ,  H01L31/0322 ,  Y02E10/541

摘要： Described are roll-to-roll or reel-to-reel thermal or rapid thermal processing tools (reactors) are used to react a precursor layer on a continuous flexible workpiece. Variants of the reactors are described, including a reactor having multiple exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; and a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap. Also described is an exhaust system that separates the Group VIA material vapors from other gaseous species for re-cycling or easy disposal and techniques and apparatus for efficient removal of moisture from the workpiece before processing precursor layer in the RTP tool.

摘要翻译： 描述了卷对卷或卷对卷热或快速热处理工具（反应器）用于使连续柔性工件上的前体层反应。 描述了反应器的变型，包括具有多个排气出口的反应器，该排气出口连接到处理间隙的入口和出口之间的反应器的工艺间隙; 包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到所述反应器的过程间隙，位于所述工艺间隙的入口和出口之间; 包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到所述反应器的过程间隙，位于所述工艺间隙的入口和出口之间; 以及包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到处理间隙的入口和出口之间的反应器的工艺间隙。 还描述了一种排气系统，其将VIA族VIA气体物质与其他气态物质分离以进行重新循环或易于处置，以及在RTP工具中处理前体层之前有效去除工件的水分的技术和设备。

公开(公告)号：US20090183675A1

公开(公告)日：2009-07-23

申请号：US12334420

申请日：2008-12-12

申请人： Mustafa Pinarbasi ,  Howard G. Zolla ,  Ying Yu ,  Gregory Norsworthy ,  Jalal Ashjaee ,  Bulent M. Basol

发明人： Mustafa Pinarbasi ,  Howard G. Zolla ,  Ying Yu ,  Gregory Norsworthy ,  Jalal Ashjaee ,  Bulent M. Basol

IPC分类号： B05C13/00

CPC分类号： F27B9/045 ,  F27B9/063 ,  F27B9/20 ,  F27B9/28 ,  F27B9/36 ,  H01L21/67109 ,  H01L21/67126 ,  H01L21/67706 ,  H01L21/67721 ,  H01L21/6776 ,  H01L31/0322 ,  Y02E10/541 ,  Y02P70/521

摘要： A roll-to-roll or reel-to-reel RTP tool including a reactor having a continuous insert placed in a primary gap of the reactor is provided. The primary gap of the reactor is defined by peripheral reactor walls including a top reactor wall, a bottom reactor wall and side reactor walls. The continuous insert includes a continuous process gap through which a continuous workpiece travels between an entry opening and an exit opening of the insert. An inner space exists between at least one of the insert walls and at least a portion of the peripheral reactor walls that make up the primary gap. At least one gas inlet is connected to the inner space, and at least one exhaust opening connects the process gap as well as the inner space to outside the reactor and carries any gaseous products to outside the process gap and the primary gap of the reactor. Sealable doors or web valves seal the entrance and the exit of the process gap when needed before or after the process, especially when the continuous workpiece stops moving.

摘要翻译： 提供卷对卷或卷到卷RTP工具，其包括具有放置在反应器的初级间隙中的连续插入物的反应器。 反应器的主要间隙由外围反应器壁限定，包括顶部反应器壁，底部反应器壁和侧壁反应器壁。 连续的插入件包括连续的工件间隙，连续的工件在插入件的进入开口和出口之间行进。 内部空间存在于至少一个插入壁和构成主间隙的外围反应器壁的至少一部分之间。 至少一个气体入口连接到内部空间，并且至少一个排气口将过程间隙以及内部空间连接到反应器外部，并将任何气体产物运送到过程间隙和反应器的初级间隙之外。 密封的门或腹板阀门在工艺之前或之后需要密封过程间隙的入口和出口，特别是当连续工件停止移动时。

公开(公告)号：US07362543B2

公开(公告)日：2008-04-22

申请号：US11108313

申请日：2005-04-18

申请人： Richard Hsiao ,  Quang Le ,  Paul P. Nguyen ,  Son Van Nguyen ,  Mustafa Pinarbasi ,  Patrick R. Webb ,  Howard G. Zolla

发明人： Richard Hsiao ,  Quang Le ,  Paul P. Nguyen ,  Son Van Nguyen ,  Mustafa Pinarbasi ,  Patrick R. Webb ,  Howard G. Zolla

IPC分类号： G11B5/17

CPC分类号： B82Y10/00 ,  G11B5/17 ,  G11B5/313 ,  G11B5/3163 ,  G11B5/3967 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49064 ,  Y10T29/49073

摘要： The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.

摘要翻译： 本发明提供一种用于制造用于磁写头的线圈元件的方法。 使用光刻技术在衬底上形成线圈图案。 使用反应离子蚀刻蚀刻衬底，在衬底中产生线圈状沟槽。 使用离子束沉积沉积薄膜种子层。 用金属电镀衬底，用金属填充沟槽。 基板进行化学机械抛光以去除多余的金属并平面化写入头的空气轴承表面。

公开(公告)号：US07327538B2

公开(公告)日：2008-02-05

申请号：US11479318

申请日：2006-06-29

申请人： Ashok Lahiri ,  Mustafa Pinarbasi

发明人： Ashok Lahiri ,  Mustafa Pinarbasi

IPC分类号： G11B5/39

CPC分类号： G11B5/3912

摘要： In a lead overlay (LOL) type of read head first and second insulation layers are employed with the first insulation layer being located between a top surface of a first hard bias layer and a first lead layer and the second insulation layer is located between the top surface of a second hard bias layer and a second lead layer for minimizing a shunting of a sense current through the hard bias layers into a read sensor.

摘要翻译： 在第一绝缘层位于第一硬偏置层的顶表面和第一引线层之间的第一和第二绝缘层的引线覆盖层（LOL）型读取头中，并且第二绝缘层位于顶部 第二硬偏置层和第二引线层的表面，用于最小化通过硬偏压层的读出电流的分流到读取传感器中。

公开(公告)号：US20070139828A1

公开(公告)日：2007-06-21

申请号：US11679753

申请日：2007-02-27

申请人： Mustafa Pinarbasi

发明人： Mustafa Pinarbasi

IPC分类号： G11B5/33

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G01R33/093 ,  G11B5/3906 ,  G11B5/3954 ,  G11B2005/3996

摘要： A magnetic head includes a seed layer structure comprising Ta and NiFeCr seed layers; an antiparallel (AP) pinned layer structure formed above the NiFeCr seed layer; a free layer positioned above the AP pinned layer structure; and a layer of metal oxide positioned between the free layer and the AP pinned layer structure. A magnetic head in another embodiment includes a seed layer structure comprising Al2O3, Ta, and NiFeCr seed layers, wherein a thickness of the NiFeCr seed layer is less than about a thickness of at least one of the Al2O3 and Ta seed layers; an antiparallel (AP) pinned layer structure formed above the NiFeCr seed layer; and a free layer positioned above the AP pinned layer structure. In another embodiment, a thickness of the NiFeCr seed layer is greater than about a thickness of at least one of the Al2O3 and Ta seed layers.

摘要翻译： 磁头包括包含Ta和NiFeCr种子层的种子层结构; 形成在NiFeCr种子层上方的反平行（AP）钉扎层结构; 位于AP钉扎层结构之上的自由层; 以及位于自由层和AP钉扎层结构之间的金属氧化物层。 在另一实施例中的磁头包括包含Al 2 O 3，Ta和NiFeCr种子层的种子层结构，其中NiFeCr晶种层的厚度小于约 至少一个Al 2 O 3 N 3和Ta种子层的厚度; 形成在NiFeCr种子层上方的反平行（AP）钉扎层结构; 以及位于AP钉扎层结构之上的自由层。 在另一个实施方案中，NiFeCr晶种层的厚度大于Al 2 N 3 O 3和Ta种子层中的至少一种的厚度。

公开(公告)号：US20070033799A1

公开(公告)日：2007-02-15

申请号：US11204876

申请日：2005-08-15

申请人： Mustafa Pinarbasi

发明人： Mustafa Pinarbasi

IPC分类号： G11B5/187

CPC分类号： G01R33/093 ,  B82Y25/00 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A magnetoresistive sensor having a pinned layer that extends beyond the stripe height defined by the free layer of the sensor. The extended pinned layer has a strong shape induced anisotropy that maintains pinning of the pinned layer moment. The extended portion of the pinned layer has sides beyond the stripe height that are perfectly aligned with the sides of the sensor within the stripe height. This perfect alignment is made possible by a manufacturing method that uses a mask structure for more than one manufacturing phase, eliminating the need for multiple mask alignments.

摘要翻译： 磁阻传感器具有延伸超过由传感器的自由层限定的条纹高度的钉扎层。 延伸的钉扎层具有强烈的形状诱导的各向异性，保持钉扎层力矩的钉扎。 被钉扎层的延伸部分具有超过条带高度的侧面，其在条纹高度内完全与传感器的侧面对准。 通过使用掩模结构用于多于一个制造阶段的制造方法，可以实现这种完美的对准，从而消除了对多个掩模对准的需要。

公开(公告)号：US07136264B2

公开(公告)日：2006-11-14

申请号：US10412357

申请日：2003-04-10

申请人： Mustafa Pinarbasi

发明人： Mustafa Pinarbasi

IPC分类号： G11B5/39

CPC分类号： G11B5/3906

摘要： A magnetic head including a lead overlaid read head component in which the electrical current passing through the overlaid passive regions of the sensor layers is reduced. The parts of the electrical leads that overlay the sensor layers are comprised of gold. The exceptional electrical conductivity of gold allows most sensor electrical current to flow through the overlaid leads and significantly reduces the amount of sensor electrical current that passes through the overlaid sensor layers. The operational characteristics of the read head are improved because the overlaid passive regions of the sensor layers do not contribute to the sensor signal. Noise and side reading effects are thereby reduced. In alternative embodiments of the present invention of gold is also used to overlay portions of the electrical leads that are away from the overlaid portions. This further reduces the sensor electrical current that passes through the overlaid sensor layers.

摘要翻译： 一种包括引线重叠读头部件的磁头，其中通过传感器层的重叠无源区的电流减小。 覆盖传感器层的电引线部分由金构成。 金的卓越的电导率允许大多数传感器电流流过覆盖的引线，并显着减少通过重叠传感器层的传感器电流量。 读取头的操作特性得到改善，因为传感器层的重叠无源区域不会对传感器信号有贡献。 从而降低噪音和侧读效果。 在本发明的替代实施例中，金也用于覆盖远离重叠部分的电引线的部分。 这进一步降低了通过覆盖的传感器层的传感器电流。

公开(公告)号：US20060114615A1

公开(公告)日：2006-06-01

申请号：US11320444

申请日：2005-12-27

申请人： Mustafa Pinarbasi

发明人： Mustafa Pinarbasi

IPC分类号： G11B5/33 ,  G11B5/127 ,  G11B5/39

CPC分类号： G11B5/127

摘要： A current perpendicular to plane (CPP) sensor having a sensor stack lead layer that is resistant to corrosion. The sensor includes a sensor stack having a capping layer at its top. A lead layer constructed of a non-corroding material such as Ru, Rh, Au or some similar material is formed over the capping layer. A magnetic shield material such a NiFe can then be deposited over the lead layer. The non-corroding lead material prevents the cap layer from corroding, preventing corrosion from causing parasitic resistance in the area in and around the lead and capping layers, thereby increasing sensor performance and reliability.

摘要翻译： 垂直于平面（CPP）传感器的电流具有耐腐蚀的传感器堆叠引线层。 传感器包括在其顶部具有覆盖层的传感器堆叠。 由覆盖层上形成由诸如Ru，Rh，Au或某些类似材料的非腐蚀性材料构成的引线层。 然后可以将诸如NiFe的磁屏蔽材料沉积在引线层上。 不腐蚀的铅材料防止盖层腐蚀，防止腐蚀在引线和封盖层内和周围的区域引起寄生电阻，从而提高传感器的性能和可靠性。

公开(公告)号：US06980404B2

公开(公告)日：2005-12-27

申请号：US10289105

申请日：2002-11-06

申请人： James Mac Freitag ,  Mustafa Pinarbasi

发明人： James Mac Freitag ,  Mustafa Pinarbasi

IPC分类号： G11B5/39 ,  H01F10/16 ,  H01F10/32 ,  H01L43/08 ,  H01L43/10

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/3903 ,  G11B2005/3996

摘要： A giant magnetoresistance (GMR) head for magnetic storage systems, the GMR head having a free layer with improved soft magnetic properties while retaining giant magnetoresistance (GMR) effects. The free layer comprises an alloy comprising Cox, Fey, and Cuz, wherein x, y, and z represent the atomic weight percentage of Co, Fe, and Cu, respectively.

摘要翻译： 用于磁存储系统的巨磁阻（GMR）磁头，GMR磁头具有改善的软磁特性的自由层，同时保持巨磁阻（GMR）效应。 自由层包含合金，其中x，y和z代表原子重量百分比 的Co，Fe和Cu。