公开(公告)号：US07145132B2

公开(公告)日：2006-12-05

申请号：US11020674

申请日：2004-12-27

申请人： Levinus Pieter Bakker ,  Derk Jan Wilfred Klunder ,  Maarten Marinus Johannes Wilhelmus Van Herpen

发明人： Levinus Pieter Bakker ,  Derk Jan Wilfred Klunder ,  Maarten Marinus Johannes Wilhelmus Van Herpen

IPC分类号： H01S1/00 ,  G03B27/52

CPC分类号： G03F7/70058 ,  G03F7/70916 ,  G03F7/70933

摘要： A debris trapping system for trapping debris particles released with the generation of radiation by a radiation source in a lithographic apparatus includes first and second sets of channels. Each channel of the first set enables radiation from a radiating source to propagate therethrough and has an inner wall for catching debris particles. The second set of channels is situated downstream of the first set with respect to a propagation direction of the radiation. Each channel of the second set enables radiation from the radiating source to also propagate therethrough and has an inner wall for catching debris particles. A gas supply and a gas exhaust are configured to provide between the first set and the second set of channels a gas flow having a net flow direction substantially across the propagation direction of the radiation from a radiating source.

摘要翻译： 用于捕获由光刻设备中的辐射源产生辐射而释放的碎屑颗粒的碎片捕集系统包括第一和第二组通道。 第一组的每个通道使来自辐射源的辐射能够通过其传播并具有用于捕获碎屑颗粒的内壁。 相对于辐射的传播方向，第二组通道位于第一组的下游。 第二组的每个通道使得来自辐射源的辐射也能够通过其传播，并且具有用于捕获碎屑颗粒的内壁。 气体供应和排气被配置为在第一组和第二组通道之间提供气流，其具有基本上横跨辐射源的辐射的传播方向的净流动方向。

公开(公告)号：US06947118B2

公开(公告)日：2005-09-20

申请号：US10740828

申请日：2003-12-22

申请人： Levinus Pieter Bakker

发明人： Levinus Pieter Bakker

IPC分类号： G03B27/42 ,  G03B27/52 ,  G03F7/20 ,  H01L21/027

CPC分类号： G03F7/70991 ,  G03F7/70841

摘要： A lithographic apparatus includes a vacuum chamber provided with a first gas evacuator, a conduit in communication with a component inside the vacuum chamber. The apparatus also includes a conduit shield inside the vacuum chamber. The conduit shield provides a conduit path for at least a part of the conduit, and shields the vacuum chamber from the conduit path. The apparatus further includes a gas evacuation shield, extending at least between a gas passage through the conduit shield and a separate gas evacuation feedthrough through a wall of the vacuum chamber. The gas evacuation shield provides a gas evacuation path from the conduit path into an area outside the vacuum chamber, and shields the vacuum chamber from the gas evacuation path.

公开(公告)号：US06678037B2

公开(公告)日：2004-01-13

申请号：US09971769

申请日：2001-10-09

申请人： Jan Van Elp ,  Martinus Hendrikus Antonius Leenders ,  Vadim Yevgenyevich Banine ,  Hugo Matthieu Visser ,  Levinus Pieter Bakker

发明人： Jan Van Elp ,  Martinus Hendrikus Antonius Leenders ,  Vadim Yevgenyevich Banine ,  Hugo Matthieu Visser ,  Levinus Pieter Bakker

IPC分类号： G03B2754

CPC分类号： G03F7/70575 ,  G03F7/70191 ,  G03F7/702

摘要： In a lithographic projection apparatus, a grating spectral filter is used to filter an EUV projection beam. The grating spectral filter is preferably a blazed, grazing incidence, reflective grating. Cooling channels may be provided in or on the rear of the grating spectral filter. The grating spectral filter may be formed of a material effectively invisible to the desired radiation.

摘要翻译： 在光刻投影设备中，使用光栅光谱滤波器来过滤EUV投影光束。 光栅光谱滤波器优选地是闪耀的，掠入射的反射光栅。 冷却通道可以设置在光栅光谱滤波器的背面中或后面。 光栅光谱滤波器可以由对期望的辐射有效地不可见的材料形成。

公开(公告)号：US09488574B2

公开(公告)日：2016-11-08

申请号：US12682939

申请日：2008-10-13

申请人： Thomas Koehler ,  Tim Nielsen ,  Bernhard Brendel ,  Andy Ziegler ,  Ronny Ziegler ,  Levinus Pieter Bakker ,  Martinus Bernardus Van Der Mark

发明人： Thomas Koehler ,  Tim Nielsen ,  Bernhard Brendel ,  Andy Ziegler ,  Ronny Ziegler ,  Levinus Pieter Bakker ,  Martinus Bernardus Van Der Mark

IPC分类号： G01N21/47 ,  A61B5/00 ,  G01N21/17

CPC分类号： G01N21/4795 ,  A61B5/0073 ,  A61B5/0091 ,  A61B5/4312 ,  A61B2562/146 ,  G01N2021/1787 ,  G01N2201/0826 ,  G01N2201/0833

摘要： A device (1) for imaging the interior of an optically turbid medium is provided. The device comprises a receptacle (3; 103) structured to accommodate an optically turbid medium for examination and an optically matching medium filling a space between an inner surface (6; 106) of the receptacle (3; 103) and the optically turbid medium. The device comprises at least one light source generating light to be coupled into the receptacle (3; 103) and at least one detector for detecting light emanating from the receptacle (3; 103). A coupling surface (10; 110) optically coupled to the inner surface (6; 106) of the receptacle and a coupling member (11; 111) optically coupled to the light source and the detector are provided. The coupling surface (10; 110) and the coupling member (11; 111) are movable to a plurality of different positions relative to each other and structured to establish an optical connection from the light source to the inner surface (6; 106) of the receptacle and from the inner surface (6; 106) of the receptacle to the at least one detector in the plurality of different positions.

摘要翻译： 提供了用于对光学混浊介质的内部成像的装置（1）。 该装置包括构造成容纳用于检查的光学混浊介质的容器（3; 103）和填充容器（3; 103）的内表面（6; 106）与光学混浊介质之间的空间的光学匹配介质。 所述装置包括至少一个光源，其产生要耦合到所述插座（3; 103）中的光和至少一个用于检测从所述插座（3; 103）发出的光的检测器。 光耦合到容器的内表面（6; 106）的耦合表面（10; 110）和光学耦合到光源和检测器的耦合构件（11; 111）。 联接表面（10; 110）和联接构件（11; 111）可以相对于彼此移动到多个不同的位置，并被构造成建立从光源到内表面（6; 106）的光学连接 所述容器和所述容器的内表面（6; 106）到所述多个不同位置中的所述至少一个检测器。

公开(公告)号：US08318288B2

公开(公告)日：2012-11-27

申请号：US10981736

申请日：2004-11-05

申请人： Levinus Pieter Bakker

发明人： Levinus Pieter Bakker

IPC分类号： G02B17/00

CPC分类号： G03F7/70191 ,  G02B1/11 ,  G02B5/00 ,  Y10T428/24355

摘要： An optical element includes a top layer which is transmissive for EUV radiation with wavelength λ in the range of 5-20 nm, and a structure of the top layer is a structure having an rms roughness value equal to or larger than λ/10 for spatial periods equal to or smaller than λ/2. The structure promotes transmission through the top layer to the optical element.

摘要翻译： 光学元件包括对波长λ在5-20nm范围内的EUV辐射透射的顶层，并且顶层的结构是具有等于或大于λ/ 10的rms粗糙度的结构用于空间 周期等于或小于λ/ 2。 该结构促进通过顶层的传输到光学元件。

公开(公告)号：US20120163022A1

公开(公告)日：2012-06-28

申请号：US13376387

申请日：2010-06-07

申请人： Levinus Pieter Bakker ,  Jun She ,  Hugo Johan Cornelissen ,  Gongming Wei

发明人： Levinus Pieter Bakker ,  Jun She ,  Hugo Johan Cornelissen ,  Gongming Wei

IPC分类号： F21V7/00 ,  F21V7/07 ,  F21V7/04 ,  F21V7/08 ,  F21V8/00 ,  F21V7/06

CPC分类号： G02B6/0016 ,  G02B6/0021

摘要： This invention relates to an illumination apparatus. The illumination apparatus comprises a light guide plate and a light source configured to emit light into the light guide plate through a first surface, and the light guide plate comprises a concentrator configured to direct incident light in the light guide plate so as to radiate in a direction substantially parallel to a preset plane. The preset plane is perpendicular to any one of the top surface and bottom surface of the light guide plate, and intersects the first surface and a second surface of the light guide plate or intersects the first surface and one of the side surfaces at an angle that is substantially larger than the critical angle of a total reflection. In this way, unwanted light loss in the light guide plate is reduced, and the distribution of the light intensity or luminance along the light guide plate is improved, i.e., a substantially uniform distribution of the light intensity can be achieved.

摘要翻译： 本发明涉及一种照明装置。 照明装置包括导光板和被配置为通过第一表面将光发射到导光板中的光源，并且导光板包括集中器，其被配置为将入射光引导到导光板中以便辐射到 方向基本上平行于预设平面。 预设平面垂直于导光板的顶表面和底表面中的任何一个，并且与导光板的第一表面和第二表面相交，或者与第一表面和侧表面之一相交，角度与 远大于全反射的临界角。 以这种方式，导光板中的不需要的光损失减小，并且沿导光板的光强度或亮度分布得到改善，即可以实现大致均匀的光强分布。

公开(公告)号：US20100272331A1

公开(公告)日：2010-10-28

申请号：US12747177

申请日：2008-12-10

申请人： Bernhard Johannes Brendel ,  Tim Nielsen ,  Levinus Pieter Bakker ,  Henricus Wilhelm Peter Van Der Heijden

发明人： Bernhard Johannes Brendel ,  Tim Nielsen ,  Levinus Pieter Bakker ,  Henricus Wilhelm Peter Van Der Heijden

IPC分类号： G06T7/00

CPC分类号： A61B5/4312 ,  A61B5/0091

摘要： A method for assessing measurement quality in acquisition of an image of the interior of a medium (1) is provided. The method comprises the steps: subsequently irradiating the medium (1) with light from a plurality of different source positions (s) and, for each source position, detecting light emanating from the medium in a plurality of different detection positions (d) for acquisition of an image of the interior of the medium (1). The method further comprises the step: providing information about whether the measurement quality is deteriorated by exploiting signal symmetry under reversal of the light path.

摘要翻译： 提供了一种评估介质内部图像的测量质量的方法（1）。 该方法包括以下步骤：随后对来自多个不同源位置的光照射介质（1），并且对于每个源位置，在多个不同检测位置（d）中检测从介质发出的光以进行采集 介质（1）的内部的图像。 该方法还包括以下步骤：通过在光路反转下利用信号对称来提供关于测量质量是否劣化的信息。

公开(公告)号：US07701554B2

公开(公告)日：2010-04-20

申请号：US11024013

申请日：2004-12-29

申请人： Levinus Pieter Bakker

发明人： Levinus Pieter Bakker

IPC分类号： G03B27/34 ,  G03B27/42

CPC分类号： G03F7/70958 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F7/70983 ,  G21K5/10 ,  G21K2201/067

摘要： An optical component for use in a lithographic apparatus. The optical component includes an optical element having an optical surface for reflecting electromagnetic radiation, and a protective zone covering the optical surface. The protective zone is provided with a material that substantially protects the optical surface against sputtering when the optical component is in use. The material has a refractive index that approximately equals unity for at least a predetermined wavelength of electromagnetic radiation to which the optical surface is exposed.

摘要翻译： 用于光刻设备的光学部件。 光学部件包括具有用于反射电磁辐射的光学表面的光学元件和覆盖光学表面的保护区域。 保护区设置有当光学部件在使用时基本上保护光学表面免受溅射的材料。 该材料具有对于光学表面暴露于的至少一个预定波长的电磁辐射近似等于1的折射率。

公开(公告)号：US07639422B2

公开(公告)日：2009-12-29

申请号：US11576706

申请日：2005-09-28

申请人： Levinus Pieter Bakker

发明人： Levinus Pieter Bakker

IPC分类号： G02B5/18 ,  G02B27/44

CPC分类号： G02B27/0087 ,  G02B5/1866

摘要： The invention relates to a device for generating a periodical array of light spots from an input light beam, said device comprising—a periodical array of apertures (202) forming a plurality of interlaced sub-arrays of apertures,—phase shifter elements (PS;) placed in front of said apertures for imposing a phase shift to said input light beam so that each light spot is constructed as the superposition of a plurality of light spots generated by said plurality of interlaced sub-arrays of apertures. Use: Light spot generation.

摘要翻译： 本发明涉及一种用于从输入光束产生周期性阵列的光点的装置，所述装置包括 - 形成孔的多个隔行子阵列的孔（202）的周期阵列，相移元件（PS; ）放置在所述孔的前面，用于对所述输入光束施加相移，使得每个光斑被构造为由所述多个交织的子阵列孔产生的多个光斑的叠加。 用途：光斑生成。

公开(公告)号：US20090306519A1

公开(公告)日：2009-12-10

申请号：US12375047

申请日：2007-07-16

申请人： Levinus Pieter Bakker

发明人： Levinus Pieter Bakker

IPC分类号： A61B6/00

CPC分类号： A61B5/4312 ,  A61B5/0073 ,  A61B5/0091

摘要： The invention relates to a device (1) for imaging an interior of a turbid medium (45) comprising: a) a measurement volume (15) for receiving the turbid medium (45); b) a light source (5) for irradiating the turbid medium (45); c) a photodetector unit (10) for detecting light emanating from exit positions (60) located on a boundary of the measurement volume (15) as a result of >irradiating the turbid medium (45). The device (1) is adapted to collect light from spatially distinct beams of light emanating from a single exit position (60). The single exit position (60) may, for instance, come in the form of an optical channel (25b) or it may simply be an area of skin tissue from which light emanates. In one embodiment of the device (1) according to the invention multiple optical light guides (55) are optically coupled to the single exit position (60).

摘要翻译： 本发明涉及一种用于对浑浊介质（45）内部进行成像的装置（1），包括：a）用于接收混浊介质的测量体积（15）; b）用于照射混浊介质（45）的光源（5）; c）用于检测从位于测量体积（15）的边界上的出口位置（60）发出的光的光电检测器单元（10），作为>照射混浊介质（45）的结果。 装置（1）适于收集从单个出口位置（60）发出的空间上不同的光束的光。 单个出口位置（60）可以例如以光学通道（25b）的形式，或者它可以简单地是光发出的皮肤组织的区域。 在根据本发明的装置（1）的一个实施例中，多个光学光导（55）光耦合到单个出口位置（60）。