公开(公告)号：US07887677B2

公开(公告)日：2011-02-15

申请号：US11524207

申请日：2006-09-21

申请人： Takashi Mikami ,  Atsushi Tomyo ,  Kenji Kato ,  Eiji Takahashi ,  Tsukasa Hayashi

发明人： Takashi Mikami ,  Atsushi Tomyo ,  Kenji Kato ,  Eiji Takahashi ,  Tsukasa Hayashi

IPC分类号： C23C14/34

CPC分类号： C23C14/3457 ,  C23C14/228 ,  C23C14/3464 ,  H01J37/32357 ,  H01J37/32972 ,  H01J37/34

摘要： A silicon object formation target substrate is arranged in a first chamber, a silicon sputter target is arranged in a second chamber communicated with the first chamber, plasma for chemical sputtering is formed from a hydrogen gas in the second chamber, chemical sputtering is effected on the silicon sputter target with the plasma thus formed, producing particles contributing to formation of silicon object, whereby a silicon object is formed, on the substrate, from the particles moved from the second chamber to the first chamber.

摘要翻译： 硅物体形成目标衬底被布置在第一腔室中，硅溅射靶设置在与第一腔室连通的第二室中，用于化学溅射的等离子体由第二腔室中的氢气形成，化学溅射 由此形成等离子体的硅溅射靶，产生有助于硅物体形成的颗粒，由此在从第二室移动到第一室的颗粒的基底上形成硅物体。

公开(公告)号：US07872480B2

公开(公告)日：2011-01-18

申请号：US12197495

申请日：2008-08-25

申请人： Kenji Kato ,  Hisashi Sasaki ,  Koji Shiotani

发明人： Kenji Kato ,  Hisashi Sasaki ,  Koji Shiotani

IPC分类号： G01N27/04

CPC分类号： G01N27/4067 ,  F02D41/1494 ,  G01N27/4065

摘要： A gas sensor control apparatus for controlling a gas sensor includes a resistance detection unit and a heater control unit. The resistance detection unit detects a resistance of an object cell of the gas sensor. When the resistance of the object cell is lower than a predetermined threshold, the heater control unit controls energization of a heater such that the resistance detected by the resistance detection unit is a first predetermined resistance. Subsequently, after elapse of a predetermined time, the heater control unit further controls energization of the heater in such a manner that the resistance detected by the resistance detection unit is a second predetermined resistance of a resistance value that is higher than that of the first predetermined resistance.

摘要翻译： 用于控制气体传感器的气体传感器控制装置包括电阻检测单元和加热器控制单元。 电阻检测单元检测气体传感器的对象单元的电阻。 当对象单元的电阻低于预定阈值时，加热器控制单元控制加热器的通电，使得由电阻检测单元检测的电阻为第一预定电阻。 随后，在经过预定时间之后，加热器控制单元进一步控制加热器的通电，使得由电阻检测单元检测到的电阻是比第一预定值高的电阻值的第二预定电阻 抵抗性。

公开(公告)号：US07838197B2

公开(公告)日：2010-11-23

申请号：US11939933

申请日：2007-11-14

申请人： Yoko Shibasaki ,  Kenji Kato ,  Masao Arima

发明人： Yoko Shibasaki ,  Kenji Kato ,  Masao Arima

IPC分类号： G03F7/26

CPC分类号： G03F7/0388 ,  G03F7/029 ,  G03F7/031

摘要： There are provided a photosensitive composition used in one-shot exposure of exposing it via a photomask to light from a UV lamp or in direct writing with light from a UV lamp or laser light to form a patterned latent image to be developed with an alkaline aqueous solution, wherein a difference between maximum absorbance and minimum absorbance, in a wavelength range of 355 to 405 nm, of a dry coating thereof before light exposure is within 0.3 per 25 μm film thickness of the dry coating, and a dry film obtained by applying the photosensitive composition onto a carrier film and then drying it.

摘要翻译： 提供一种用于单次曝光的光敏组合物，其通过光掩模曝光到来自UV灯的光或者用来自UV灯或激光的光直接写入以形成图案化潜像以用碱性水溶液 溶液，其中在曝光前的干涂层在355nm至405nm的波长范围内的最大吸光度和最小吸光度之间的差异在干涂层的每25μm膜厚度的0.3内，以及通过施加 将感光性组合物涂布在载体膜上，然后干燥。

公开(公告)号：US20100210093A1

公开(公告)日：2010-08-19

申请号：US12513362

申请日：2007-10-29

申请人： Kenji Kato ,  Eiji Takahashi

发明人： Kenji Kato ,  Eiji Takahashi

IPC分类号： H01L21/205

CPC分类号： C23C16/505 ,  C23C16/24 ,  H01L21/02532 ,  H01L21/0262 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

摘要： In the method for forming a silicon-based thin film by the plasma CVD method using high-frequency excitation, a polycrystalline silicon-based thin film having high degree of crystallization is formed relatively at a low temperature, economically, and productively.The polycrystalline silicon-based thin film is formed in such a state that the pressure of gas during formation of the film is selected and determined from the range of 0.0095 Pa to 64 Pa; the ratio (Md/Ms) of a supply flow rate Md of a diluting gas to a supply flow rate Ms of a film-forming material gas introduced into a deposition chamber is selected and determined from the range of 0 to 1200; the high-frequency power density is selected and determined from the range of 0.0024 W/cm3 to 11 W/cm3; the plasma potentials during formation of the film is maintained to 25 V or lower, and the electron density in the plasma is maintained to 1×1010 electrons/cm3 or higher; and the combination of those pressures and the like is such a combination that attains the ratio (Ic/Ia=degree of crystallization) of Ic derived from the crystallized silicon component to Ia derived from the amorphous silicon component in the evaluation of the crystallizability of silicon in the film by the laser Raman scattering spectroscopy is 8 or higher.

摘要翻译： 在通过使用高频激发的等离子体CVD法形成硅基薄膜的方法中，经济地且高效地相对地在低温下形成具有高结晶度的多晶硅基薄膜。 形成多晶硅系薄膜的状态是，从0.0095Pa〜64Pa的范围选择并确定膜形成时的气体压力; 稀释气体的供给流量Md与导入淀积室的成膜材料气体的供给流量Ms的比（Md / Ms）从0〜1200的范围选择并确定; 从0.0024W / cm 3至11W / cm 3的范围选择和确定高频功率密度; 膜形成期间的等离子体电位维持在25V以下，等离子体中的电子密度维持在1×10 10电子/ cm 3以上。 并且这些压力等的组合是这样的组合，其在评估硅的结晶性中达到了从结晶硅组分衍生的Ia与来自非晶硅组分的Ia的比（Ic / Ia =结晶度） 在电影中由激光拉曼散射光谱法测定8或更高。

公开(公告)号：US20090218978A1

公开(公告)日：2009-09-03

申请号：US12089669

申请日：2006-10-11

申请人： Masayuki Kato ,  Kazushi Hirose ,  Yoshihiro Fujimura ,  Minoru Tanaka ,  Takao Koba ,  Hiroki Nishida ,  Naoki Sumiya ,  Kenji Kato

发明人： Masayuki Kato ,  Kazushi Hirose ,  Yoshihiro Fujimura ,  Minoru Tanaka ,  Takao Koba ,  Hiroki Nishida ,  Naoki Sumiya ,  Kenji Kato

IPC分类号： H02P3/08 ,  G01B7/00

CPC分类号： B60J1/17 ,  B60J10/74 ,  E05F15/46 ,  E05Y2900/538 ,  E05Y2900/55 ,  H01H3/142

摘要： A contact detection apparatus that allows faster detection and a pinch prevention apparatus equipped with such a detection apparatus are provided.The contact detection apparatus includes a first electrode (430) made of a flexible conductive material and extending throughout a contact detection range, a second electrode (440) apart from the first electrode and extending on the back side of the first electrode, and detection means for detecting contact of an object with the first electrode based on the capacitance of the first electrode. The first electrode is made of a conductive resin containing an embedded conductor.

摘要翻译： 提供一种允许更快检测的接触检测装置和配备有这种检测装置的防夹装置。 接触检测装置包括由柔性导电材料制成并且在整个接触检测范围内延伸的第一电极（430），与第一电极分开并在第一电极的背面延伸的第二电极（440）和检测装置 用于基于第一电极的电容来检测物体与第一电极的接触。 第一电极由包含嵌入导体的导电树脂制成。

公开(公告)号：US20090188813A1

公开(公告)日：2009-07-30

申请号：US12358678

申请日：2009-01-23

申请人： Kenji Kato ,  Hisashi Sasaki ,  Koji Shiotani

发明人： Kenji Kato ,  Hisashi Sasaki ,  Koji Shiotani

IPC分类号： G01N27/26

CPC分类号： G01N33/0037 ,  G01N27/4074 ,  G01N27/4075 ,  G01N27/417 ,  Y02A50/245

摘要： A NOx sensor includes a sensor element equipped with first and second pumping cells to define first and second measurement chambers. The first pumping cell exerts an oxygen pumping action against the first measurement chamber to adjust the oxygen concentration in the gas under measurement within the first measurement chamber to a given level. The second pumping cell exerts an oxygen pumping action against the second measurement chamber to produce a pumping cell current according to the NOx concentration in the gas under measurement. When the moisture content of the gas under measurement changes from 2 vol % to 8 vol %, the NOx sensor allows a variation of NOx concentration detection value based on the pumping cell current in such a manner that the NOx concentration detection value reaches a transient peak value of 20 ppm or smaller and converges to ±5 ppm of a reference value within 5 seconds.

摘要翻译： NOx传感器包括配备有第一和第二泵浦单元以限定第一和第二测量室的传感器元件。 第一泵送单元对第一测量室施加氧气抽吸作用，以将在第一测量室内测量的气体中的氧浓度调节到给定的水平。 第二泵送单元对第二测量室施加氧气抽吸作用，以根据测量气体中的NOx浓度产生泵浦电池电流。 当测量气体的水分含量从2vol％变化到8vol％时，NOx传感器允许基于泵浦单元电流的NOx浓度检测值的变化，使得NOx浓度检测值达到瞬时峰值 值在20ppm以下，并且在5秒内收敛到参考值的±5ppm。

公开(公告)号：US07517632B2

公开(公告)日：2009-04-14

申请号：US12013028

申请日：2008-01-11

申请人： Masaki Sasaki ,  Kenji Kato ,  Masao Arima

发明人： Masaki Sasaki ,  Kenji Kato ,  Masao Arima

IPC分类号： G03C11/00 ,  G03C1/492 ,  G03C1/494 ,  G03C1/76 ,  G03C5/00

CPC分类号： G03F7/029 ,  C08F2/50 ,  G03F7/0047 ,  G03F7/031 ,  H05K1/092 ,  H05K3/02 ,  H05K2203/0514

摘要： An object of the present invention is to provide a silver paste composition suitable for use in laser direct imaging devices employing a light source emitting a laser having a maximum wavelength of 350 to 420 nm, useful in forming a high-definition conductive pattern efficiently, and superior in storage stability, a conductive pattern formed by using the composition, a plasma display having the pattern, and a method of forming the conductive pattern by using the composition. An alkali development-type silver paste composition of the present invention comprises (A) a carboxyl group-containing resin, (B) a glass frit, (C) a silver powder, (D) a compound having at least one radically polymerizable unsaturated group in its molecule, and (E-1) an oxime-based photopolymerization initiator represented by the following general formula (I).

摘要翻译： 本发明的一个目的是提供一种适用于激光直接成像装置的银膏组合物，该装置采用发射具有350至420nm最大波长的激光的光源，用于有效地形成高分辨率导电图案，以及 存储稳定性优异，通过使用该组合物形成的导电图案，具有图案的等离子体显示器，以及通过使用该组合物形成导电图案的方法。 本发明的碱显影型银糊剂组合物包含（A）含羧基树脂，（B）玻璃料，（C）银粉，（D）具有至少一个自由基聚合性不饱和基团 和（E-1）由以下通式（I）表示的肟基光聚合引发剂。

公开(公告)号：US07513140B2

公开(公告)日：2009-04-07

申请号：US11249133

申请日：2005-10-13

申请人： Kenji Kato

发明人： Kenji Kato

IPC分类号： G01P21/00 ,  G01P3/44

CPC分类号： G01C19/56

摘要： A sensing circuit for a vibration type of angular rate sensor comprises a vibrator, driving unit, follow-up signal forming unit, normal voltage-range setting unit, and determining unit. The driving unit drives the vibrator to vibrate at a predetermined amplitude by using, as a feedback signal, an error voltage signal in which an amplitude of vibration of the vibrator is reflected. The follow-up signal forming unit forms, by using the error voltage signal, a follow-up signal following up the error voltage signal at changes which are gentler than changes in the error signal. The normal voltage-range setting unit sets a range of a normal voltage for the error voltage signal by using the follow-up signal. The determining unit determines whether or not the sensor circuit is in a malfunctioning condition, by using an estimation as to whether or not the error voltage signal is within the range of the normal voltage.

摘要翻译： 用于振动型角速率传感器的感测电路包括振动器，驱动单元，跟随信号形成单元，正常电压范围设定单元和确定单元。 驱动单元通过使用其中振动器的振动幅度被反射的误差电压信号作为反馈信号来驱动振动器以预定的振幅振动。 后续信号形成单元通过使用误差电压信号形成跟随误差电压信号的跟随信号，该变化比误差信号的变化更为温和。 正常电压范围设定单元通过使用跟随信号来设定误差电压信号的正常电压的范围。 通过使用关于误差电压信号是否在正常电压的范围内的估计来确定传感器电路是否处于故障状态。

公开(公告)号：US07496250B2

公开(公告)日：2009-02-24

申请号：US11799974

申请日：2007-05-03

申请人： Takashi Niwa ,  Kenji Kato ,  Susumu Ichihara ,  Norio Chiba ,  Yasuyuki Mitsuoka ,  Manabu Oumi ,  Nobuyuki Kasama

发明人： Takashi Niwa ,  Kenji Kato ,  Susumu Ichihara ,  Norio Chiba ,  Yasuyuki Mitsuoka ,  Manabu Oumi ,  Nobuyuki Kasama

IPC分类号： G02B6/12

CPC分类号： G01Q60/38 ,  G01Q60/06 ,  G01Q60/22

摘要： An optical microcantilever for a scanning near field microscope comprises a support section, a cantilever-shaped optical waveguide, and a light blocking wall. The optical waveguide has a free end, a fixed end fixed to the support section and terminating in a light input/output end, and a tip formed at a side of the free end of the cantilever and having a microscopic aperture at an end thereof. The light blocking wall blocks the transmission of light scattered from a region of the light input/output end in the direction of the tip of the optical waveguide.

摘要翻译： 用于扫描近场显微镜的光学微悬臂梁包括支撑部分，悬臂形光波导和遮光壁。 光波导具有自由端，固定到支撑部分并终止于光输入/输出端的固定端，以及形成在悬臂自由端一侧的尖端，并在其一端具有微小孔。 光阻挡壁阻挡从光输入/输出端的区域在光波导的尖端方向上散射的光的透射。

公开(公告)号：US20090044924A1

公开(公告)日：2009-02-19

申请号：US12097189

申请日：2006-10-10

申请人： Akihisa Inoue ,  Xin Min Wang ,  Naokuni Muramatsu ,  Yoshimasa Kondo ,  Kenji Kato

发明人： Akihisa Inoue ,  Xin Min Wang ,  Naokuni Muramatsu ,  Yoshimasa Kondo ,  Kenji Kato

IPC分类号： B22C9/00 ,  B22C7/00 ,  B22C9/12 ,  B23K26/38

CPC分类号： B22D23/00 ,  B23K26/355 ,  B23K26/40 ,  B23K2101/20 ,  B23K2103/02 ,  B23K2103/04 ,  B23K2103/08 ,  B23K2103/12 ,  B23K2103/14 ,  B23K2103/172 ,  B23K2103/26 ,  B44C1/228

摘要： A challenge of the present invention is to develop a method for repeatedly forming a reverse transferred pattern in a simple and efficient manner onto the surfaces of Zr based, Ti based, Cu based, Ni based and Fe based metallic glass that have supercooled liquid temperatures of not lower than 400° C. and are also required to be molded at not lower than 400° C. (a) An image pattern is converted into bitmap data being mirror reversed with respect to a real image, (b) high energy density light 15 is repeatedly flashed, and the surface of a mold 20 is scanned while one of dot holes 24 is formed by one-time irradiation, to form an image pattern as dots assembled pattern 21 onto the surface of the mold 20 in accordance with the bitmap data, and (c) the dots assembled pattern 21 is reverse-transfer molded onto a metallic glass 1 within a supercooled liquid temperature range Tg-Tx by means of the mold 20 which is for dots assembled pattern formation.

摘要翻译： 本发明的挑战是开发一种以简单有效的方式将反向转印图案重复形成在Zr基，Ti基，Cu基，Ni基和Fe基金属玻璃的表面上的方法，其具有过冷液体温度 不低于400℃，并且还要求在不低于400℃的条件下成型。（a）图像图案被转换为相对于真实图像被镜像反转的位图数据，（b）高能量密度光 15反复闪烁，并且通过一次照射形成点孔24之一来扫描模具20的表面，以根据位图形成作为点组装图案21的图案图案到模具20的表面上 数据，以及（c）点组装图案21通过用于点组装图案形成的模具20在过冷液体温度范围Tg-Tx内被反向传递模制到金属玻璃1上。