公开(公告)号：US20090212369A1

公开(公告)日：2009-08-27

申请号：US12037158

申请日：2008-02-26

申请人： Dae-Gyu Park ,  Michael P. Chudzik ,  Rashmi Jha ,  Siddarth A. Krishnan ,  Naim Moumen ,  Vijay Narayanan ,  Vamsi Paruchuri

发明人： Dae-Gyu Park ,  Michael P. Chudzik ,  Rashmi Jha ,  Siddarth A. Krishnan ,  Naim Moumen ,  Vijay Narayanan ,  Vamsi Paruchuri

IPC分类号： H01L21/8238

CPC分类号： H01L21/823857 ,  H01L21/823842 ,  H01L29/785

摘要： CMOS circuit structures are disclosed with the PFET and NFET devices having high-k dielectric layers consisting of the same gate insulator material, and metal gate layers consisting of the same gate metal material. The PFET device has a “p” interface control layer which is capable of shifting the effective-workfunction of the gate in the p-direction. In a representative embodiment of the invention the “p” interface control layer is aluminum oxide. The NFET device may have an “n” interface control layer. The materials of the “p” and “n” interface control layers are differing materials. The “p” and “n” interface control layers are positioned to the opposite sides of their corresponding high-k dielectric layers. Methods for fabricating the CMOS circuit structures with the oppositely positioned “p” and “n” interface control layers are also disclosed.

摘要翻译： 公开了CMOS电路结构，其中PFET和NFET器件具有由相同的栅极绝缘体材料构成的高k电介质层以及由相同栅极金属材料组成的金属栅极层。 PFET器件具有能够沿p方向移动栅极的有效功能的“p”接口控制层。 在本发明的代表性实施例中，“p”界面控制层是氧化铝。 NFET器件可以具有“n”个界面控制层。 “p”和“n”界面控制层的材料是不同的材料。 “p”和“n”界面控制层位于其相应的高k电介质层的相对侧。 还公开了制造具有相对定位的“p”和“n”界面控制层的CMOS电路结构的方法。

公开(公告)号：US20090181507A1

公开(公告)日：2009-07-16

申请号：US12014815

申请日：2008-01-16

申请人： Michael P. Chudzik ,  Dominic J. Schepis ,  Linda Black

发明人： Michael P. Chudzik ,  Dominic J. Schepis ,  Linda Black

IPC分类号： H01L21/8234

CPC分类号： H01L21/823807 ,  H01L21/76229 ,  H01L21/823842 ,  H01L21/823878

摘要： A method for growing an epitaxial layer patterns a mask over a substrate. The mask protects first areas (N-type areas) of the substrate where N-type field effect transistors (NFETs) are to be formed and exposes second areas (P-type areas) of the substrate where P-type field effect transistors (PFETs) are to be formed. Using the mask, the method can then epitaxially grow the Silicon Germanium layer only on the P-type areas. The mask is then removed and shallow trench isolation (STI) trenches are patterned (using a different mask) in the N-type areas and in the P-type areas. This STI patterning process positions the STI trenches so as to remove edges of the epitaxial layer. The trenches are then filled with an isolation material. Finally, the NFETs are formed to have first metal gates and the PFETs are formed to have second metal gates that are different than the first metal gates. The first metal gates have a different work function than the second metal gates.

摘要翻译： 用于生长外延层的方法在衬底上图案掩模。 掩模保护要形成N型场效应晶体管（NFET）的衬底的第一区域（N型区域），并露出衬底的第二区域（P型区域），其中P型场效应晶体管（PFET） ）将被形成。 使用掩模，该方法可以仅在P型区域上外延生长硅锗层。 然后去除掩模，并在N型区域和P型区域中对浅沟槽隔离（STI）沟槽进行图案化（使用不同的掩模）。 该STI图案化工艺定位STI沟槽以便去除外延层的边缘。 然后用隔离材料填充沟槽。 最后，NFET形成为具有第一金属栅极，并且PFET形成为具有与第一金属栅极不同的第二金属栅极。 第一金属门具有与第二金属栅极不同的功函数。

公开(公告)号：US20090152637A1

公开(公告)日：2009-06-18

申请号：US11955491

申请日：2007-12-13

申请人： Rick Carter ,  Michael P. Chudzik ,  Rashmi Jha ,  Naim Moumen

发明人： Rick Carter ,  Michael P. Chudzik ,  Rashmi Jha ,  Naim Moumen

IPC分类号： H01L27/00 ,  H01L21/8238

CPC分类号： H01L21/823807 ,  H01L21/823842 ,  H01L21/82385

摘要： A PFET having tailored dielectric constituted in part by an NFET threshold voltage (Vt) work function tuning layer in a gate stack thereof, related methods and integrated circuit are disclosed. In one embodiment, the PFET includes an n-type doped silicon well (N-well), a gate stack including: a doped band engineered PFET threshold voltage (Vt) work function tuning layer over the N-well; a tailored dielectric layer over the doped band engineered PFET Vt work function tuning layer, the tailored dielectric layer constituted by a high dielectric constant layer over the doped band engineered PFET Vt work function tuning layer and an n-type field effect transistor (NFET) threshold voltage (Vt) work function tuning layer over the high dielectric constant layer; and a metal over the NFET Vt work function tuning layer.

摘要翻译： 公开了一种具有由其栅极堆叠中的NFET阈值电压（Vt）功函数调谐层，相关方法和集成电路部分构成的定制电介质的PFET。 在一个实施例中，PFET包括n型掺杂硅阱（N阱），栅堆叠，其包括：在N阱上的掺杂带工程化PFET阈值电压（Vt）功函数调谐层; 在掺杂带工程化的PFET Vt功函数调谐层之上的定制电介质层，由掺杂带工程化的PFET Vt功函数调谐层和n型场效应晶体管（NFET）阈值上的高介电常数层构成的调整后的介电层 电压（Vt）工作功能调谐层在高介电常数层上; 和NFET Vt功能调谐层上的金属。

公开(公告)号：US20090108356A1

公开(公告)日：2009-04-30

申请号：US11924053

申请日：2007-10-25

申请人： Kangguo Cheng ,  Michael P. Chudzik ,  Rama Divakaruni ,  Geng Wang ,  Robert C. Wong ,  Haining S. Yang

发明人： Kangguo Cheng ,  Michael P. Chudzik ,  Rama Divakaruni ,  Geng Wang ,  Robert C. Wong ,  Haining S. Yang

IPC分类号： H01L29/78 ,  H01L21/44

CPC分类号： H01L21/28088 ,  H01L21/823842 ,  H01L21/823857 ,  H01L27/105 ,  H01L27/1052 ,  H01L27/10894 ,  H01L27/10897 ,  H01L27/11 ,  H01L27/1116 ,  H01L29/4966 ,  H01L29/513 ,  H01L29/517

摘要： A metal gate stack containing a metal layer having a mid-band-gap work function is formed on a high-k gate dielectric layer. A threshold voltage adjustment oxide layer is formed over a portion of the high-k gate dielectric layer to provide devices having a work function near a first band gap edge, while another portion of the high-k dielectric layer remains free of the threshold voltage adjustment oxide layer. A gate stack containing a semiconductor oxide based gate dielectric and a doped polycrystalline semiconductor material may also be formed to provide a gate stack having a yet another work function located near a second band gap edge which is the opposite of the first band gap edge. A dense circuit containing transistors of p-type and n-type with the mid-band-gap work function are formed in the region containing the threshold voltage adjustment oxide layer.

摘要翻译： 在高k栅极电介质层上形成包含具有中带隙功函数的金属层的金属栅极堆叠。 在高k栅介质层的一部分上形成阈值电压调整氧化物层，以提供在第一带隙边缘附近具有功函数的器件，而高k电介质层的另一部分保持没有阈值电压调整 氧化层。 还可以形成包含半导体氧化物基栅极电介质和掺杂多晶半导体材料的栅极堆叠，以提供具有位于与第一带隙边缘相反的第二带隙边缘附近的又一功能功能的栅极堆叠。 在包含阈值电压调整氧化物层的区域中形成包含具有中带功函数的p型和n型晶体管的密集电路。

公开(公告)号：US07459913B2

公开(公告)日：2008-12-02

申请号：US10710947

申请日：2004-08-13

申请人： Michael P. Chudzik ,  Joseph F. Shepard, Jr.

发明人： Michael P. Chudzik ,  Joseph F. Shepard, Jr.

IPC分类号： G01N27/60 ,  G01R31/26 ,  G01R27/08

CPC分类号： H01L21/02263 ,  C23C16/45525 ,  C23C16/52 ,  H01L21/0228 ,  H01L21/314

摘要： A method for determining film continuity and growth modes in thin dielectric films includes: depositing a material on the substrate using a first value of a growth metric; depositing an amount of charge on a surface of the material; repetitively measuring a surface voltage of the material until an onset of tunneling to provide a Vtunnel (or Etunnel) value; repeating the above steps for different values of the growth metric; and comparing the Vtunnel (or Etunnel) values for different values of the growth metric to provide a measure of the continuity of the material on the substrate. The growth modes of the material can be determined by comparing the first derivative of the Vtunnel or Etunnel per growth metric curve versus the growth metric, and examining the linearity of the results of the comparison. The growth metric parameters may include thickness, time, precursor cycles, or temperature.

摘要翻译： 用于确定薄介电膜中的膜连续性和生长模式的方法包括：使用生长度量的第一值将材料沉积在衬底上; 在所述材料的表面上沉积一定量的电荷; 重复地测量材料的表面电压，直到隧道开始，以提供Vtunnel（或Etunnel）值; 对生长度量的不同值重复上述步骤; 以及比较生长度量值的不同值的Vtunnel（或Etunnel）值，以提供衬底上材料的连续性的量度。 材料的生长模式可以通过比较Vtunnel或Etunnel的每个生长度量曲线的一阶导数与生长指标，并检查比较结果的线性来确定。 生长度量参数可以包括厚度，时间，前体循环或温度。

公开(公告)号：US07425497B2

公开(公告)日：2008-09-16

申请号：US11336727

申请日：2006-01-20

申请人： Michael P. Chudzik ,  Bruce B. Doris ,  Supratik Guha ,  Rajarao Jammy ,  Vijay Narayanan ,  Vamsi K. Paruchuri ,  Yun Y. Wang ,  Keith Kwong Hon Wong

发明人： Michael P. Chudzik ,  Bruce B. Doris ,  Supratik Guha ,  Rajarao Jammy ,  Vijay Narayanan ,  Vamsi K. Paruchuri ,  Yun Y. Wang ,  Keith Kwong Hon Wong

IPC分类号： H01L21/283

CPC分类号： H01L29/517 ,  H01L21/28088 ,  H01L21/823828 ,  H01L21/823857 ,  H01L29/4966 ,  H01L29/513 ,  H01L29/78 ,  H01L2924/0002 ,  H01L2924/00

摘要： Semiconductor structures, such as, for example, field effect transistors (FETs) and/or metal-oxide-semiconductor capacitor (MOSCAPs), are provided in which the workfunction of a conductive electrode stack is changed by introducing metal impurities into a metal-containing material layer which, together with a conductive electrode, is present in the electrode stack. The choice of metal impurities depends on whether the electrode is to have an n-type workfunction or a p-type workfunction. The present invention also provides a method of fabricating such semiconductor structures. The introduction of metal impurities can be achieved by codeposition of a layer containing both a metal-containing material and workfunction altering metal impurities, forming a stack in which a layer of metal impurities is present between layers of a metal-containing material, or by forming a material layer including the metal impurities above and/or below a metal-containing material and then heating the structure so that the metal impurities are introduced into the metal-containing material.

摘要翻译： 提供半导体结构，例如场效应晶体管（FET）和/或金属氧化物半导体电容器（MOSCAP），其中通过将金属杂质引入到含金属的物质中来改变导电电极堆叠的功函数 材料层与导电电极一起存在于电极堆叠中。 金属杂质的选择取决于电极是否具有n型功函数或p型功函数。 本发明还提供一种制造这种半导体结构的方法。 金属杂质的引入可以通过共沉积含有金属的材料和改变金属杂质的功函数的层来形成，形成其中金属杂质层存在于含金属材料的层之间的叠层，或通过形成 包括在含金属材料上方和/或下面的金属杂质的材料层，然后加热该结构，使得金属杂质被引入到含金属的材料中。

公开(公告)号：US07186625B2

公开(公告)日：2007-03-06

申请号：US10709768

申请日：2004-05-27

申请人： Michael P. Chudzik ,  Louis L. Hsu ,  Joseph F. Shepard, Jr. ,  William R. Tonti

发明人： Michael P. Chudzik ,  Louis L. Hsu ,  Joseph F. Shepard, Jr. ,  William R. Tonti

IPC分类号： H01L21/20

CPC分类号： H01L28/91 ,  H01L23/5223 ,  H01L23/5227 ,  H01L28/87 ,  H01L2924/0002 ,  H01L2924/00

摘要： A structure, apparatus and method for utilizing vertically interdigitated electrodes serves to increase the capacitor area surface while maintaining a minimal horizontal foot print. Since capacitance is proportional to the surface area the structure enables continual use of current dielectric materials such as Si3N4 at current thicknesses. In a second embodiment of the interdigitated MIMCAP structure the electrodes are formed in a spiral fashion which serves to increase the physical strength of the MIMCAP. Also included is a spiral shaped capacitor electrode which lends itself to modular design by offering a wide range of discrete capacitive values easily specified by the circuit designer.

摘要翻译： 用于利用垂直交错电极的结构，装置和方法用于增加电容器面积，同时保持最小的水平脚印。 由于电容与表面积成比例，因此该结构能够连续使用当前厚度的当前介电材料，例如Si 3 N 4。 在叉指MIMCAP结构的第二实施例中，电极以螺旋方式形成，其用于增加MIMCAP的物理强度。 还包括螺旋形电容器电极，其通过提供电路设计者容易指定的宽范围的离散电容值来适应模块化设计。

公开(公告)号：US06555430B1

公开(公告)日：2003-04-29

申请号：US09723420

申请日：2000-11-28

申请人： Michael P. Chudzik ,  Johnathan Faltermeier ,  Rajarao Jammy ,  Stephan Kudelka ,  Irene McStay ,  Kenneth T. Settlemyer, Jr. ,  Helmut Horst Tews

发明人： Michael P. Chudzik ,  Johnathan Faltermeier ,  Rajarao Jammy ,  Stephan Kudelka ,  Irene McStay ,  Kenneth T. Settlemyer, Jr. ,  Helmut Horst Tews

IPC分类号： H01L218242

CPC分类号： H01L27/1087 ,  H01L28/84 ,  Y10S438/964

摘要： Methods forming a trench region of a trench capacitor structure having increase surface area are provided. One method includes the steps of forming a discontinuous polysilicon layer on exposed walls of a lower trench region, the discontinuous polysilicon layer having gaps therein which expose portions of said substrate; oxidizing the lower trench region such that the exposed portions of said substrate provided by the gaps in the discontinuous polysilicon layer are oxidized into oxide material which forms a smooth and wavy layer with the discontinuous polysilicon layer; and etching said oxide material so as to form smooth hemispherical grooves on the walls of the trench region.

摘要翻译： 提供了形成具有增加的表面积的沟槽电容器结构的沟槽区域的方法。 一种方法包括以下步骤：在下沟槽区域的暴露的壁上形成不连续的多晶硅层，所述不连续的多晶硅层在其中具有暴露所述衬底的部分的间隙; 氧化下沟槽区域，使得由不连续多晶硅层中的间隙提供的所述衬底的暴露部分被氧化成与不连续的多晶硅层形成平滑波浪层的氧化物材料; 并蚀刻所述氧化物材料，以在沟槽区域的壁上形成平滑的半球状凹槽。

公开(公告)号：US08778750B2

公开(公告)日：2014-07-15

申请号：US13464966

申请日：2012-05-05

申请人： Eduard Albert Cartier ,  Michael P. Chudzik ,  Andreas Kerber ,  Siddarth Krishnan ,  Naim Moumen

发明人： Eduard Albert Cartier ,  Michael P. Chudzik ,  Andreas Kerber ,  Siddarth Krishnan ,  Naim Moumen

IPC分类号： H01L21/8238

CPC分类号： H01L21/823857 ,  H01L21/76224

摘要： A method for fabricating a CMOS device includes the following steps. A wafer is provided. STI is used to form at least one active area in the wafer. A silicon oxide layer is deposited onto the wafer covering the active area. A first high-k material is deposited onto the silicon oxide layer. Portions of the silicon oxide layer and the first high-k material are selectively removed, such that the silicon oxide layer and the first high-k material remain over one or more first regions of the active area and are removed from over one or more second regions of the active area. A second high-k material is deposited onto the first high-k material over the one or more first regions of the active area and onto a surface of the wafer in the one or more second regions of the active area. A CMOS device is also provided.

摘要翻译： 一种制造CMOS器件的方法包括以下步骤。 提供晶片。 STI用于在晶片中形成至少一个有效区域。 氧化硅层沉积在覆盖有源区的晶片上。 第一高k材料沉积在氧化硅层上。 选择性地去除氧化硅层和第一高k材料的部分，使得氧化硅层和第一高k材料保留在有源区的一个或多个第一区上，并从一个或多个第二个 活跃区域。 在有源区域的一个或多个第一区域上并且在有源区域的一个或多个第二区域中的晶片的表面上沉积第二高k材料到第一高k材料上。 还提供了CMOS器件。

公开(公告)号：US08728925B2

公开(公告)日：2014-05-20

申请号：US13463283

申请日：2012-05-03

申请人： Michael P. Chudzik ,  William K. Henson ,  Unoh Kwon

发明人： Michael P. Chudzik ,  William K. Henson ,  Unoh Kwon

IPC分类号： H01L21/3205 ,  H01L21/4763

CPC分类号： H01L21/28176 ,  H01L21/28079 ,  H01L21/823857 ,  H01L29/495 ,  H01L29/517 ,  H01L29/6659

摘要： Adjustment of a switching threshold of a field effect transistor including a gate structure including a Hi-K gate dielectric and a metal gate is achieved and switching thresholds coordinated between NFETs and PFETs by providing fixed charge materials in a thin interfacial layer adjacent to the conduction channel of the transistor that is provided for adhesion of the Hi-K material, preferably hafnium oxide or HfSiON, depending on design, to semiconductor material rather than diffusing fixed charge material into the Hi-K material after it has been applied. The greater proximity of the fixed charge material to the conduction channel of the transistor increases the effectiveness of fixed charge material to adjust the threshold due to the work function of the metal gate, particularly where the same metal or alloy is used for both NFETs and PFETs in an integrated circuit; preventing the thresholds from being properly coordinated.

摘要翻译： 实现了包括包括Hi-K栅极电介质和金属栅极的栅极结构的场效应晶体管的开关阈值的调整，并且通过在与导电沟道相邻的薄界面层中提供固定的电荷材料来在NFET和PFET之间协调切换阈值 根据设计将Hi-K材料，优选氧化铪或HfSiON粘附到半导体材料上而不是将固定的电荷材料扩散到Hi-K材料中之后施加的晶体管。 固定电荷材料与晶体管的导通通道的接近程度增加了由于金属栅极的功函数而导致的固定电荷材料的调整阈值的有效性，特别是当相同的金属或合金用于NFET和PFET时 在集成电路中; 防止阈值正确协调。