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81.
公开(公告)号:US08012316B2
公开(公告)日:2011-09-06
申请号:US12583742
申请日:2009-08-25
申请人: Kunliang Zhang , Dan Abels , Min Li , Chyu-Jiuh Torng , Chen-Jung Chien , Yu-Hsia Chen
发明人: Kunliang Zhang , Dan Abels , Min Li , Chyu-Jiuh Torng , Chen-Jung Chien , Yu-Hsia Chen
IPC分类号: C23C14/14
CPC分类号: H01L43/10 , B82Y10/00 , B82Y25/00 , B82Y40/00 , G11B5/3906 , H01F10/16 , H01F10/3236 , H01F10/3259 , H01F10/3272 , H01F41/302
摘要: A method of forming a CPP-GMR spin valve having a pinned layer with an AP2/coupling/AP1 configuration is disclosed wherein the AP2 portion is a FCC-like trilayer having a composition represented by CoZFe(100-Z)/Fe(100-X)TaX/CoZFe(100-Z) or CoZFe(100-Z)/FeYCo(100-Y)/CoZFe(100-Z) where x is 3 to 30 atomic %, y is 40 to 100 atomic %, and z is 75 to 100 atomic %. Preferably, z is 90 to provide a face centered cubic structure that minimizes electromigration. Optionally, the middle layer is comprised of an Fe rich alloy such as FeCr, FeV, FeW, FeZr, FeNb, FeHf, or FeMo. EM performance is improved significantly compared to a spin valve with a conventional AP2 Co50Fe50 or Co75Fe25 single layer. MR ratio is also increased and RA is maintained at an acceptable level. The coupling layer is preferably Ru and the AP1 layer may be comprised of a lamination of CoFe and Cu layers as in [CoFe/Cu]2/CoFe.
摘要翻译: 公开了一种形成具有AP2 /偶联/ AP1构型的钉扎层的CPP-GMR自旋阀的方法,其中AP2部分是具有由CoZFe(100-Z)/ Fe(100-Z)/ Fe X)TaX / CoZFe(100-Z)或CoZFe(100-Z)/ FeYCo(100-Y)/ CoZFe(100-Z),其中x为3至30原子%,y为40至100原子% 为75〜100原子%。 优选地,z为90以提供使电迁移最小化的面心立方结构。 任选地,中间层由富Fe合金如FeCr,FeV,FeW,FeZr,FeNb,FeHf或FeMo组成。 与具有常规AP2 Co50Fe50或Co75Fe25单层的自旋阀相比,EM性能显着提高。 MR比也增加,RA维持在可接受的水平。 耦合层优选为Ru,并且AP1层可以由如[CoFe / Cu] 2 / CoFe中的CoFe和Cu层的层叠构成。
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公开(公告)号:US07872838B2
公开(公告)日:2011-01-18
申请号:US11704399
申请日:2007-02-09
申请人: Kunliang Zhang , Min Li , Yu-Hsia Chen
发明人: Kunliang Zhang , Min Li , Yu-Hsia Chen
IPC分类号: G11B5/127
CPC分类号: G11B5/398 , B82Y25/00 , G01R33/093 , G01R33/098 , G11B5/3163 , G11B5/3906 , G11B5/3983 , Y10T428/1121
摘要: Improved performance uniformity among CPP magnetic read devices that include an oxide barrier has been achieved by fabricating the oxide layer from at least two separately formed CCP layers. Each CCP layer is given its own PIT and IAO treatment which is of shorter duration than the PIT/IAO treatment that is used when only a single CCP layer is formed.
摘要翻译: 通过从至少两个单独形成的CCP层制造氧化物层,已经实现了包括氧化物屏障的CPP磁读取装置之间的改进的性能均匀性。 给每个CCP层提供自己的PIT和IAO处理,其持续时间比仅在形成单个CCP层时使用的PIT / IAO处理更短。
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83.
公开(公告)号:US07780820B2
公开(公告)日:2010-08-24
申请号:US11280523
申请日:2005-11-16
申请人: Tong Zhao , Kunliang Zhang , Hui-Chuan Wang , Yu-Hsia Chen , Min Li
发明人: Tong Zhao , Kunliang Zhang , Hui-Chuan Wang , Yu-Hsia Chen , Min Li
IPC分类号: C23C14/34
CPC分类号: H01L43/12 , B82Y10/00 , B82Y25/00 , B82Y40/00 , G01R33/093 , G01R33/098 , G11B5/3906 , G11B5/3909 , H01F10/3254 , H01F10/3272 , H01F41/307 , Y10T428/1114 , Y10T428/1143
摘要: A high performance TMR sensor is fabricated by incorporating a tunnel barrier having a Mg/MgO/Mg configuration. The 4 to 14 Angstroms thick lower Mg layer and 2 to 8 Angstroms thick upper Mg layer are deposited by a DC sputtering method while the MgO layer is formed by a NOX process involving oxygen pressure from 0.1 mTorr to 1 Torr for 15 to 300 seconds. NOX time and pressure may be varied to achieve a MR ratio of at least 34% and a RA value of 2.1 ohm-um2. The NOX process provides a more uniform MgO layer than sputtering methods. The second Mg layer is employed to prevent oxidation of an adjacent ferromagnetic layer. In a bottom spin valve configuration, a Ta/Ru seed layer, IrMn AFM layer, CoFe/Ru/CoFeB pinned layer, Mg/MgO/Mg barrier, CoFe/NiFe free layer, and a cap layer are sequentially formed on a bottom shield in a read head.
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公开(公告)号:US07610674B2
公开(公告)日:2009-11-03
申请号:US11352676
申请日:2006-02-13
申请人: Kunliang Zhang , Daniel G Abels , Min Li , Yu-Hsia Chen
发明人: Kunliang Zhang , Daniel G Abels , Min Li , Yu-Hsia Chen
CPC分类号: G11B5/398 , B82Y25/00 , G01R33/093 , G11B5/3906 , H01L43/08 , H01L43/12 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要: Concerns about inadequate electromigration robustness in CCP CPP GMR devices have been overcome by adding magnesium to the current confining structures that are presently in use. In one embodiment the alumina layer, in which the current carrying copper regions are embedded, is fully replaced by a magnesia layer. In other embodiments, alumina is still used but a layer of magnesium is included within the structure before it is subjected to ion assisted oxidation.
摘要翻译: 通过向当前使用的当前限制结构添加镁,克服了对CCP CPP GMR器件的电迁移鲁棒性不足的担忧。 在一个实施例中,其中载流电铜区域的氧化铝层被氧化镁层完全替代。 在其它实施方案中,仍然使用氧化铝,但在进行离子辅助氧化之前,该结构中包含一层镁。
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公开(公告)号:US20090194833A1
公开(公告)日:2009-08-06
申请号:US12319734
申请日:2009-01-12
申请人: Hui-Chuan Wang , Kunliang Zhang , Tong Zhao , Min Li
发明人: Hui-Chuan Wang , Kunliang Zhang , Tong Zhao , Min Li
IPC分类号: H01L29/82
CPC分类号: H01F10/30 , B82Y10/00 , B82Y25/00 , B82Y40/00 , G11B5/3906 , G11B5/3909 , H01F10/3254 , H01F10/3259 , H01F10/3295 , H01F41/302 , H01L43/10 , Y10T428/1291
摘要: A MTJ structure is disclosed in which the seed layer is made of a lower Ta layer, a middle Hf layer, and an upper NiFe or NiFeX layer where X is Co, Cr, or Cu. Optionally, Zr, Cr, HfZr, or HfCr may be employed as the middle layer and materials having FCC structures such as CoFe and Cu may be used as the upper layer. As a result, the overlying layers in a TMR sensor will be smoother and less pin dispersion is observed. The Hex/Hc ratio is increased relative to that for a MTJ having a conventional Ta/Ru seed layer configuration. The trilayer seed configuration is especially effective when an IrMn AFM layer is grown thereon and thereby reduces Hin between the overlying pinned layer and free layer. Ni content in the NiFe or NiFeX middle layer is above 30 atomic % and preferably >80 atomic %.
摘要翻译: 公开了一种MTJ结构,其中种子层由下Ta层,中Hf层和上NiFe或NiFeX层制成,其中X是Co,Cr或Cu。 可选地,可以使用Zr,Cr,HfZr或HfCr作为中间层,并且可以使用具有FCC结构的诸如CoFe和Cu的材料作为上层。 结果,TMR传感器中的上覆层将变得更平滑,并且观察到较少的引脚分散。 相对于具有常规Ta / Ru种子层构型的MTJ,Hex / Hc比增加。 当IrMn AFM层在其上生长时,三层种子构型特别有效,从而在覆盖的被钉扎层和自由层之间降低了Hin。 NiFe或NiFeX中间层的Ni含量在30原子%以上,优选为80原子%以上。
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公开(公告)号:US20080246103A1
公开(公告)日:2008-10-09
申请号:US11784076
申请日:2007-04-05
申请人: Hui-Chuan Wang , Tong Zhao , Min Li , Kunliang Zhang
发明人: Hui-Chuan Wang , Tong Zhao , Min Li , Kunliang Zhang
IPC分类号: H01L43/00
CPC分类号: H01L43/08 , B82Y25/00 , B82Y40/00 , G11C11/16 , H01F10/325 , H01F10/3254 , H01F41/303 , H01L43/12
摘要: The dR/R ratios of TMR and GMR devices, having a FeCo/NiFe type of free layer, have been significantly increased by inserting a suitable surfactant layer within (as opposed to above or below) the free layer. Our preferred surfactant material has been oxygen but similar-acting materials could be substituted. The concept can be applied to GMR CPP, CIP, and CCP sensor designs.
摘要翻译: 具有FeCo / NiFe类型的自由层的TMR和GMR器件的dR / R比已经通过在自由层(相对于上方或下方)插入合适的表面活性剂层而显着增加。 我们优选的表面活性剂材料是氧气,但可以代替类似作用的材料。 该概念可以应用于GMR CPP,CIP和CCP传感器设计。
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公开(公告)号:US20080219042A1
公开(公告)日:2008-09-11
申请号:US11715097
申请日:2007-03-07
申请人: Hui-Chuan Wang , Tong Zhao , Kunliang Zhang , Min Li
发明人: Hui-Chuan Wang , Tong Zhao , Kunliang Zhang , Min Li
IPC分类号: G11C11/16
CPC分类号: G11C11/15
摘要: By inserting a spin polarizing layer (typically pure iron) within the free layer of a MTJ or GMR memory cell, dR/R can be improved without significantly affecting other free layer properties such as Hc. Additional performance improvements can be achieved by also inserting a surfactant layer (typically oxygen) within the free layer.
摘要翻译: 通过在MTJ或GMR存储器单元的自由层内插入自旋偏振层(通常为纯铁),可以改善dR / R,而不显着影响其它自由层性质如Hc。 还可以通过在自由层内插入表面活性剂层(通常为氧)来实现另外的性能改进。
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公开(公告)号:US07352543B2
公开(公告)日:2008-04-01
申请号:US11043624
申请日:2005-01-26
申请人: Min Li , Kunliang Zhang , Chyu-Jiuh Torng , Yu-Hsia Chen
发明人: Min Li , Kunliang Zhang , Chyu-Jiuh Torng , Yu-Hsia Chen
IPC分类号: G11B5/33
CPC分类号: G11B5/39
摘要: The effectiveness of an IrMn pinning layer in a CPP GMR device at high switching fields has been improved by replacing the conventional single layer seed by a layer of tantalum and either ruthenium or copper. The tantalum serves to cancel out the crystallographic influence of underlying layers while the ruthenium or copper provide a suitable base on which to grow the IrMn layer.
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公开(公告)号:US07288281B2
公开(公告)日:2007-10-30
申请号:US10933031
申请日:2004-09-02
申请人: Min Li , Kunliang Zhang , Cheng T. Horng , Chyu Jiuh Torng , Yu-Hsia Chen , Ru-Ying Tong
发明人: Min Li , Kunliang Zhang , Cheng T. Horng , Chyu Jiuh Torng , Yu-Hsia Chen , Ru-Ying Tong
IPC分类号: B05D5/12
CPC分类号: B82Y25/00 , B82Y10/00 , G11B5/3929 , G11B2005/3996
摘要: Fe rich CoFe can be used in AP1 to enhance CPP GMR. However, this is found to degrade the electro-migration performance of the device. This problem has been solved by using an AP1 that is a laminate of several CoFe(25%) layers, separated from one another by copper layers. Ultra-thin layers of iron-rich CoFe are then inserted at all the copper-CoFe interfaces.
摘要翻译: FeFe CoFe可用于AP1,以提高CPP GMR。 然而,这被发现降低了器件的电迁移性能。 通过使用作为多层CoFe(25%)层的层叠体的AP1,通过铜层彼此分离,解决了该问题。 然后在所有铜 - 钴Fe界面上插入超薄的富铁CoFe层。
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公开(公告)号:US20070188936A1
公开(公告)日:2007-08-16
申请号:US11352676
申请日:2006-02-13
申请人: Kunliang Zhang , Daniel Abels , Min Li , Yu-Hsia Chen
发明人: Kunliang Zhang , Daniel Abels , Min Li , Yu-Hsia Chen
CPC分类号: G11B5/398 , B82Y25/00 , G01R33/093 , G11B5/3906 , H01L43/08 , H01L43/12 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要: Concerns about inadequate electromigration robustness in CCP CPP GMR devices have been overcome by adding magnesium to the current confining structures that are presently in use. In one embodiment the alumina layer, in which the current carrying copper regions are embedded, is fully replaced by a magnesia layer. In other embodiments, alumina is still used but a layer of magnesium is included within the structure before it is subjected to ion assisted oxidation.
摘要翻译: 通过向当前使用的当前限制结构添加镁,克服了对CCP CPP GMR器件的电迁移鲁棒性不足的担忧。 在一个实施例中,其中载流电铜区域的氧化铝层被氧化镁层完全替代。 在其它实施方案中,仍然使用氧化铝,但在进行离子辅助氧化之前,该结构中包含一层镁。
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