Electron beam induced resonance
    82.
    发明申请
    Electron beam induced resonance 失效
    电子束诱导共振

    公开(公告)号:US20070075264A1

    公开(公告)日:2007-04-05

    申请号:US11243477

    申请日:2005-10-05

    Abstract: We describe an ultra-small structure that produces visible light of varying frequency, from a single metallic layer. In one example, a row of metallic posts are etched or plated on a substrate according to a particular geometry. When a charged particle beam passed close by the row of posts, the posts and cavities between them cooperate to resonate and produce radiation in the visible spectrum (or even higher). A plurality of such rows of different geometries can be etched or plated from a single metal layer such that the charged particle beam will yield different visible light frequencies (i.e., different colors) using different ones of the rows.

    Abstract translation: 我们描述了从单个金属层产生不同频率的可见光的超小结构。 在一个示例中,根据特定几何形状,一排金属柱被蚀刻或镀在基板上。 当带电粒子束通过柱的一列通过时,它们之间的柱和腔合作以共振并产生可见光谱(甚至更高)中的辐射。 可以从单个金属层蚀刻或镀覆多个不同几何形状的行,使得带电粒子束将使用不同的行产生不同的可见光频率(即,不同的颜色)。

    Positioning and motion control by electrons, ions, and neutrals in electric fields
    83.
    发明授权
    Positioning and motion control by electrons, ions, and neutrals in electric fields 失效
    电场中的电子,离子和中性粒子的定位和运动控制

    公开(公告)号:US07115881B2

    公开(公告)日:2006-10-03

    申请号:US10162499

    申请日:2002-06-04

    CPC classification number: F03H1/00

    Abstract: This invention deals with novel method and apparatus for positioning and motion control by rapid-response motorless linear motion, angular deflection, and continuous rotational motion utilizing the force due to electrons, ions, and/or neutrals. Thus forces and torques are produced without the use of internal moving parts. Control is achieved without recourse to magnetic fields, by means of high electric fields which may be attained at relatively low voltages. At low voltages, the instant invention exceeds the capability of conventional systems. It can perform dynamic motion control over a wide range of dimensions and signal bandwidth with independent amplitude and frequency modulation. Since there are no internal moving parts, the instant invention is the most adapted for fabrication at the micro and nanotechnology realms. Furthermore it provides less costly and greater ease of manufacture from the nano-to the macro-realm.

    Abstract translation: 本发明涉及利用由于电子,离子和/或中性的力引起的快速反应无电机直线运动,角度偏转和连续旋转运动的定位和运动控制的新颖方法和装置。 因此,在不使用内部移动部件的情况下产生力和扭矩。 通过可在相对较低的电压下获得的高电场实现控制,而无需借助于磁场。 在低电压下,本发明超出常规系统的能力。 它可以通过独立的幅度和频率调制在宽范围的尺寸和信号带宽上执行动态运动控制。 由于没有内部移动部件,本发明最适用于微纳米技术领域的制造。 此外,它从纳米到宏观领域的制造成本更低,更容易制造。

    LOW COHERENCE INTERFEROMETRY WITH SCAN ERROR CORRECTION
    84.
    发明申请
    LOW COHERENCE INTERFEROMETRY WITH SCAN ERROR CORRECTION 有权
    低相干干涉与扫描误差校正

    公开(公告)号:US20130155413A1

    公开(公告)日:2013-06-20

    申请号:US13765936

    申请日:2013-02-13

    Abstract: A system includes an interference microscope having one or more optical elements arranged to image a test object to an image plane by combining test light from the test object with reference light from a reference object to form an interference pattern at the image plane, wherein the test and reference light are derived from a common broadband light source. The system includes a scanning stage configured to scan an optical path difference (OPD) between the test and reference light, a multi-element detector positioned at the image plane and configured to record the interference pattern for each of a series of OPD increments and to generate multiple interferometry signals each having a fringe carrier frequency indicative of changes in the OPD as the OPD is scanned, where there is phase diversity among the interferometry signals, and an electronic processor coupled to the multi-element detector and scanning stage and configured to process the interference signals based on the phase diversity to determine information about the OPD increments having sensitivity to perturbations to the OPD increments at frequencies greater than the fringe carrier frequency.

    Abstract translation: 一种系统包括具有一个或多个光学元件的干涉显微镜,该光学元件被布置成通过将来自测试对象的测试光与来自参考对象的参考光组合在一起而在图像平面上形成干涉图案来将测试对象图像成像平面,其中测试 参考光源自普通宽带光源。 该系统包括被配置为扫描测试和参考光之间的光程差(OPD)的扫描级,位于图像平面处的多元件检测器,并且被配置为记录一系列OPD增量中的每一个的干涉图案,并且 生成多个干涉测量信号,每个干涉测量信号具有指示在扫描OPD时OPD变化的边缘载波频率,其中在干涉测量信号之间存在相位分集,以及耦合到多元件检测器和扫描级的电子处理器并且被配置为处理 基于相位分集的干扰信号以确定关于具有对大于边缘载波频率的频率的对OPD的扰动敏感度的OPD增量的信息。

    Fiber-based interferometer system for monitoring an imaging interferometer
    85.
    发明授权
    Fiber-based interferometer system for monitoring an imaging interferometer 有权
    用于监测成像干涉仪的基于光纤的干涉仪系统

    公开(公告)号:US08379218B2

    公开(公告)日:2013-02-19

    申请号:US12551308

    申请日:2009-08-31

    Abstract: Apparatus include a microscope including an objective and a stage for positioning a test object relative to the objective, the stage being moveable with respect to the objective, and a sensor system, that includes a sensor light source, an interferometric sensor configured to receive light from the sensor light source, to introduce an optical path difference (OPD) between a first portion and a second portion of the light, the OPD being related to a distance between the objective lens and the stage, and to combine the first and second portions of the light to provide output light, a detector configured to detect the output light from the interferometric sensor, a fiber waveguide configured to direct light between the sensor light source, the interferometric sensor and the detector, a tunable optical cavity in a path of the light from the sensor light source and the interferometric sensor, and an electronic controller in communication with the detector, the electronic controller being configured to determine information related to the OPD based on the detected output light.

    Abstract translation: 装置包括显微镜,其包括物镜和用于相对于物镜定位测试对象的台,该台可相对于物镜移动;以及传感器系统,其包括传感器光源,干涉测量传感器,其被配置为从 所述传感器光源在所述光的第一部分和所述第二部分之间引入光程差(OPD),所述OPD与所述物镜与所述台之间的距离有关,并且将所述第一和第二部分 提供输出光的光,被配置为检测来自干涉测量传感器的输出光的检测器,配置成在传感器光源,干涉测量传感器和检测器之间引导光的光纤波导,在光的路径中的可调光学腔 来自传感器光源和干涉测量传感器以及与检测器通信的电子控制器,该电子控制器是共同的 根据检测到的输出光确定与OPD相关的信息。

    Scan error correction in low coherence scanning interferometry
    86.
    发明授权
    Scan error correction in low coherence scanning interferometry 有权
    低相干扫描干涉测量中的扫描误差校正

    公开(公告)号:US08004688B2

    公开(公告)日:2011-08-23

    申请号:US12509098

    申请日:2009-07-24

    Abstract: In general, in one aspect, the invention features apparatus that includes a broadband scanning interferometry system including interferometer optics for combining test light from a test object with reference light from a reference object to form an interference pattern on a detector, wherein the test and reference light are derived from a common light source. The interferometry system further includes a scanning stage configured to scan an optical path difference (OPD) between the test and reference light from the common source to the detector and a detector system including the detector for recording the interference pattern for each of a series of OPD increments, wherein the frequency of each OPD increment defines a frame rate. The interferometer optics are configured to produce at least two monitor interferometry signals each indicative of changes in the OPD as the OPD is scanned, wherein the detector system is further configured to record the monitor interferometry signals. The apparatus also includes an electronic processor electronically coupled to the detection system and scanning stage and configured to determine information about the OPD increments with sensitivity to perturbations to the OPD increments at frequencies greater than the frame rate.

    Abstract translation: 一般来说,一方面,本发明的特征在于,包括宽带扫描干涉测量系统的装置,其包括用于将来自测试对象的测试光与来自参考物体的参考光组合在一起的干涉仪光学元件,以在检测器上形成干涉图案,其中测试和参考 光源自普通光源。 所述干涉测量系统还包括扫描台,被配置为扫描来自所述公共源的所述测试参考光与所述检测器之间的光程差(OPD);以及检测器系统,包括用于记录一系列OPD中的每一个的所述干涉图案的检测器 增量,其中每个OPD增量的频率定义帧速率。 干涉仪光学器件被配置为产生至少两个监视器干涉测量信号,每个监视器干涉测量信号指示当OPD被扫描时OPD的变化,其中检测器系统还被配置为记录监视器干涉测量信号。 该装置还包括电子处理器,其电耦合到检测系统和扫描级,并且被配置为以大于帧速率的频率灵敏地确定对OPD增量的扰动的OPD增量的信息。

    HETEROGENEOUS DATABASE MANAGEMENT SYSTEM
    87.
    发明申请
    HETEROGENEOUS DATABASE MANAGEMENT SYSTEM 有权
    异构数据库管理系统

    公开(公告)号:US20100161574A1

    公开(公告)日:2010-06-24

    申请号:US12342684

    申请日:2008-12-23

    CPC classification number: G06F17/30306 G06F17/30572

    Abstract: An administration server in a database management system retrieves log files in a plurality of formats from a plurality of clients through helper programs running on the clients. The plurality of clients can include Web servers, application servers, and database servers. The log files can be generated by software modules on the clients. An administration engine converts log entries in the log files into a unified format for display. The converted log entries can be stored in a log database. Upon a user request, the administration server presents the log entries to the user in a log viewer. The log viewer can display log entries originated from heterogeneous software modules in a unified view.

    Abstract translation: 数据库管理系统中的管理服务器通过在客户端上运行的帮助程序从多个客户端检索多种格式的日志文件。 多个客户端可以包括Web服务器,应用服务器和数据库服务器。 日志文件可以由客户端上的软件模块生成。 管理引擎将日志文件中的日志条目转换为统一格式进行显示。 转换的日志条目可以存储在日志数据库中。 根据用户请求,管理服务器在日志查看器中向用户显示日志条目。 日志查看器可以在统一视图中显示源自异构软件模块的日志条目。

    Coupling a signal through a window
    88.
    发明授权
    Coupling a signal through a window 失效
    通过窗口耦合信号

    公开(公告)号:US07741934B2

    公开(公告)日:2010-06-22

    申请号:US11418128

    申请日:2006-05-05

    CPC classification number: H01P1/208 H01P7/06

    Abstract: A device and method is provided that includes a window for coupling a signal between cavities of a device or between cavities of different devices. A wall or microstructure is formed on a surface and defines a cavity. The window is formed in the wall and comprises at least a portion of the wall and is electrically conductive. The cavity can be sized to resonate at various frequencies within the terahertz portion of the electromagnetic spectrum and generate an electromagnetic wave to carry the signal. The window allows surface currents to flow without disruption on the inside surface of the cavity.

    Abstract translation: 提供了一种装置和方法,其包括用于在装置的腔之间或不同装置的腔之间耦合信号的窗口。 在表面上形成壁或微观结构并限定空腔。 窗口形成在壁中并且包括壁的至少一部分并且是导电的。 空腔的尺寸可以在电磁谱的太赫兹部分内的各种频率下谐振,并产生电磁波以携带该信号。 窗口允许表面电流在腔体内表面流动而不中断。

    Coupled nano-resonating energy emitting structures
    89.
    发明授权
    Coupled nano-resonating energy emitting structures 失效
    耦合纳米共振能量发射结构

    公开(公告)号:US07728397B2

    公开(公告)日:2010-06-01

    申请号:US11418123

    申请日:2006-05-05

    CPC classification number: H01J25/78 B82Y20/00 B82Y30/00

    Abstract: A nano-resonating structure constructed and adapted to couple energy from a beam of charged particles into said nano-resonating structure and to transmit coupled energy outside the nano-resonating structure. A plurality of the nano-resonant substructures may be formed adjacent one another in a stacked array, and each may have various shapes, including segmented portions of shaped structures, circular, semi-circular, oval, square, rectangular, semi-rectangular, C-shaped, U-shaped and other shapes as well as designs having a segmented outer surface or area, and arranged in a vertically stacked array comprised of one or more ultra-small resonant structures. The vertically stacked arrays may be symmetric or asymmetric, tilted, and/or staggered.

    Abstract translation: 纳米谐振结构构造并适于将来自带电粒子束的能量耦合到所述纳米谐振结构中并在纳米谐振结构外部传输耦合能量。 多个纳米谐振子结构可以以堆叠的阵列形式彼此相邻地形成,并且每个可以具有各种形状,包括成形结构的分段部分,圆形,半圆形,椭圆形,正方形,矩形,半矩形,C U形和其他形状以及具有分段外表面或区域的设计,并且布置在由一个或多个超小型谐振结构构成的垂直堆叠阵列中。 垂直堆叠的阵列可以是对称的或不对称的,倾斜的和/或交错的。

    SCAN ERROR CORRECTION IN LOW COHERENCE SCANNING INTERFEROMETRY
    90.
    发明申请
    SCAN ERROR CORRECTION IN LOW COHERENCE SCANNING INTERFEROMETRY 有权
    低相干扫描干涉测量中的扫描误差校正

    公开(公告)号:US20100128280A1

    公开(公告)日:2010-05-27

    申请号:US12509098

    申请日:2009-07-24

    Abstract: In general, in one aspect, the invention features apparatus that includes a broadband scanning interferometry system including interferometer optics for combining test light from a test object with reference light from a reference object to form an interference pattern on a detector, wherein the test and reference light are derived from a common light source. The interferometry system further includes a scanning stage configured to scan an optical path difference (OPD) between the test and reference light from the common source to the detector and a detector system including the detector for recording the interference pattern for each of a series of OPD increments, wherein the frequency of each OPD increment defines a frame rate. The interferometer optics are configured to produce at least two monitor interferometry signals each indicative of changes in the OPD as the OPD is scanned, wherein the detector system is further configured to record the monitor interferometry signals. The apparatus also includes an electronic processor electronically coupled to the detection system and scanning stage and configured to determine information about the OPD increments with sensitivity to perturbations to the OPD increments at frequencies greater than the frame rate.

    Abstract translation: 一般来说,一方面,本发明的特征在于,包括宽带扫描干涉测量系统的装置,其包括用于将来自测试对象的测试光与来自参考物体的参考光组合在一起的干涉仪光学元件,以在检测器上形成干涉图案,其中测试和参考 光源自普通光源。 所述干涉测量系统还包括扫描级,其被配置为扫描来自所述公共源的所述测试参考光与所述检测器之间的光程差(OPD);以及检测器系统,包括用于记录一系列OPD中的每一个的干涉图案的检测器 增量,其中每个OPD增量的频率定义帧速率。 干涉仪光学器件被配置为产生至少两个监视器干涉测量信号,每个监视器干涉测量信号指示当OPD被扫描时OPD的变化,其中检测器系统还被配置为记录监视器干涉测量信号。 该装置还包括电子处理器,其电耦合到检测系统和扫描级,并且被配置为以大于帧速率的频率灵敏地确定对OPD增量的扰动的OPD增量的信息。

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