摘要:
An improved CMOS fabrication process which uses separate masking steps to pattern N-channel and P-channel transistor gates from a single layer of conductively-doped polycrystalline silicon (poly). The object of the improved process is to reduce the cost and improve the reliability and manufacturability of CMOS devices by dramatically reducing the number of photomasking steps required to fabricate transistors. By processing N-channel and P-channel devices separately, the number of photomasking steps required to fabricate complete CMOS circuitry in a single-polysilicon-layer or single-metal layer process can be reduced from eleven to eight. Starting with a substrate of P-type material, N-channel devices are formed first, with unetched poly left in the future P-channel regions until N-channel processing is complete. The improved CMOS process provides the following advantages over conventional process technology. Use of a masked high-energy punch-through implant for N-channel devices is not required; individual optimization of N-channel and P-channel transistors is made possible; a lightly-doped drain (LDD) design for both N-channel and P-channel transistors is readily implemented; source/drain-to-gate offset may be changed independently for N-channel and P-channel devices; and N-channel and P-channel transistors can be independently controlled and optimized for best LDD performance and reliability.
摘要:
A memory array (e.g., DRAM) is provided with a potential maintenance circuit which provides sufficient current to maintain a high potential node of the memory array at a predetermined potential. The potential maintenance circuit is gated ON after receipt of a clock signal and gated OFF at the predetermined potential. This permits the high voltage node to be maintained, while reducing current requirements. The invention is particularly useful when used in conjunction with a circuit which rapidly pulls up the high node to a value of V.sub.CC -V.sub.T (where VT is a threshold voltage of a transistor).
摘要:
A method of manufacturing a semiconductor ICF target is described. On an n-type silicon wafer a plurality of hard mask layers are etched to a desired via pattern. Then isotropically etching hemispherical cavities, lithographically patterning the hard mask layers, conformally depositing ablator/drive material(s) and shell layer material(s), inserting hollow silicon dioxide fuel spheres in the hemisphere cavities, thermally bonding a mating wafer with matching hemisphere cavities and etching in ethylene diamine-pryrocatechol-water mixture to selectively remove n-type silicon and liberate the spherical targets.
摘要:
A method for forming a floating gate semiconductor device such as an electrically erasable programmable read only memory is provided. The device includes a silicon substrate having an electrically isolated active area. A gate oxide, as well as other components of a FET (e.g., source, drain) are formed in the active area. A self aligned floating gate is formed by depositing a conductive layer (e.g., polysilicon) into the recess and over the gate oxide. The conductive layer is then chemically mechanically planarized to an endpoint of the isolation layer so that all of the conductive layer except material in the recess and on the gate oxide is removed. Following formation of the floating gate an insulating layer is formed on the floating gate and a control gate is formed on the insulating layer.
摘要:
Briefly, in accordance with an embodiment of the invention, a memory and a method to manufacture the memory is provided. The memory may include a phase change material over a substrate. The memory may further include a switching material coupled to the phase change material, wherein the switching material comprises a chalcogen other than oxygen and wherein the switching material and the phase change material form portions of a vertical structure over the substrate.
摘要:
A radio frequency identification device includes an integrated circuit including a receiver, a transmitter, and a microprocessor. The receiver and transmitter together define an active transponder. The integrated circuit is preferably a monolithic single die integrated circuit including the receiver, the transmitter, and the microprocessor. Because the device includes an active transponder, instead of a transponder which relies on magnetic coupling for power, the device has a much greater range.
摘要:
An apparatus including a volume of phase change material disposed between a first conductor and a second conductor on a substrate, and a plurality of electrodes coupled to the volume of phase change material and the first conductor. A method including introducing, over a first conductor on a substrate, a plurality of electrodes coupled to the first conductor, introducing a phase change material over the plurality of electrodes and in electrical communication with the plurality of electrodes, and introducing a second conductor over the phase change material and coupled to the phase change material.
摘要:
A memory device includes memory cells, bit lines, active area lines running generally in parallel to the bit lines, and transistors formed in each active area line and electrically coupling memory cells to corresponding bit lines. Each bit line includes slanted portions that intersect a corresponding portion of an active area line at an angle. Contacts electrically coupling the bit line to portions of the active area line are formed in a region generally defined by the angled intersection of the bit line to the active area line. The memory cells can have an area of about 6F2, and the bit lines can be coupled to sense amplifiers in a folded bit line configuration. Each bit line includes a first level portion and a second level portion.
摘要:
A phase-change memory may be formed with at least two phase-change material layers separated by a barrier layer. The use of more than one phase-change layer enables a reduction in the programming volume while still providing adequate thermal insulation.
摘要:
In an aspect, an apparatus is provided that sets and reprograms the state of programmable devices. In an aspect, a method is provided such that an opening is formed through a dielectric exposing a contact, the contact formed on a substrate. An electrode is conformally deposited on a wall of the dielectric, utilizing atomic layer deposition (ALD). A programmable material is formed on the electrode and a conductor is formed to the programmable material. In an aspect, a barrier is conformally deposited utilizing ALD, between the electrode and the programmable material.