PROCESSING METHOD FOR FORMING STRUCTURE INCLUDING AMORPHOUS CARBON FILM
    81.
    发明申请
    PROCESSING METHOD FOR FORMING STRUCTURE INCLUDING AMORPHOUS CARBON FILM 有权
    用于形成包括非晶碳膜的结构的处理方法

    公开(公告)号:US20120238107A1

    公开(公告)日:2012-09-20

    申请号:US13485424

    申请日:2012-05-31

    IPC分类号: H01L21/3205 G05B15/02

    摘要: A processing method for forming a structure including an amorphous carbon film includes performing a preliminary treatment of removing water from a surface of the underlying layer by heating the inside of the reaction chamber at a preliminary treatment temperature of 800 to 950° C. and supplying a preliminary treatment gas selected from the group consisting of nitrogen gas and ammonia gas into the reaction chamber while exhausting gas from inside the reaction chamber; and, then performing main CVD of forming an amorphous carbon film on the underlying layer by heating the inside of the reaction chamber at a main process temperature and supplying a hydrocarbon gas into the reaction chamber while exhausting gas from inside the reaction chamber.

    摘要翻译: 用于形成包括非晶碳膜的结构的加工方法包括通过在800-950℃的预处理温度下加热反应室的内部,进行从下层的表面除去水的预处理, 在从反应室内排出气体的同时,从氮气和氨气中选出的预处理气体进入反应室; 然后通过在主处理温度下加热反应室的内部并在从反应室内排出气体的同时将烃气体供给到反应室中,进行下层形成非晶质碳膜的主要CVD。

    Batch processing method for forming structure including amorphous carbon film
    82.
    发明授权
    Batch processing method for forming structure including amorphous carbon film 有权
    用于形成包括无定形碳膜的结构的批处理方法

    公开(公告)号:US08222162B2

    公开(公告)日:2012-07-17

    申请号:US12792274

    申请日:2010-06-02

    IPC分类号: H01L21/31 H01L21/469

    摘要: A batch processing method for forming a structure including an amorphous carbon film includes performing a preliminary treatment of removing water from a surface of the underlying layer by heating the inside of the reaction chamber at a preliminary treatment temperature of 800 to 950° C. and supplying a preliminary treatment gas selected from the group consisting of nitrogen gas and ammonia gas into the reaction chamber while exhausting gas from inside the reaction chamber; and, then performing main CVD of forming an amorphous carbon film on the underlying layer by heating the inside of the reaction chamber at a main process temperature and supplying a hydrocarbon gas into the reaction chamber while exhausting gas from inside the reaction chamber.

    摘要翻译: 用于形成包括无定形碳膜的结构的批处理方法包括:通过在800-950℃的预处理温度下加热反应室的内部,进行从下层的表面除去水的预处理, 将从氮气和氨气组成的组中选出的预处理气体进入反应室,同时从反应室内排出气体; 然后通过在主处理温度下加热反应室的内部并在从反应室内排出气体的同时将烃气体供给到反应室中,进行下层形成非晶质碳膜的主要CVD。

    Image decoder
    83.
    发明授权
    Image decoder 有权
    图像解码器

    公开(公告)号:US08184700B2

    公开(公告)日:2012-05-22

    申请号:US12059030

    申请日:2008-03-31

    IPC分类号: H04N11/02

    CPC分类号: H04N19/436 H04N19/44

    摘要: The present invention relates to an image decoder which implements high speed image decoding with a low cost and simple configuration. By a stream dividing module, an input video stream is divided in units of frames as a plurality of frame rows for distribution. Each of plural decoders generates decoded images by decoding a distributed frame row. Of the decoded images generated by the decoders, reference images to be referred to when a subsequent frame is decoded is stored in a reference image frame memory. A timing control module receives information about stream distribution from the stream dividing module and controls the respective timings of decoding frames distributed to the decoders.

    摘要翻译: 本发明涉及以低成本,简单的结构实现高速图像解码的图像解码器。 通过流分割模块,输入视频流以帧为单位划分为多个帧行用于分发。 多个解码器中的每一个通过解码分布式帧行来生成解码图像。 在由解码器生成的解码图像中,当将后续帧解码时参考的参考图像存储在参考图像帧存储器中。 定时控制模块从流分割模块接收关于流分布的信息,并控制分配给解码器的帧解码的相应定时。

    TRANSMISSION SYSTEM
    84.
    发明申请
    TRANSMISSION SYSTEM 审中-公开
    传输系统

    公开(公告)号:US20120050466A1

    公开(公告)日:2012-03-01

    申请号:US13164435

    申请日:2011-06-20

    IPC分类号: H04N13/00

    摘要: In a method of simultaneously transmitting a plurality of uncompressed video signals, when transmitting different video signals for the right eye and the left eye using a 3D video signal transmission format, information representing that a plurality of video signals are being transmitted is added to a packet of additional information related to the video signals. A transmission method of audio signals at the time of simultaneously transmitting a plurality of video signals is provided. Further, the present invention is consistency with 3D video signal transmission in which two video signals for the right eye and the left eye are transmitted.

    摘要翻译: 在同时发送多个未压缩视频信号的方法中,当使用3D视频信号传输格式发送用于右眼和左眼的不同视频信号时,将表示正在发送多个视频信号的信息添加到分组 与视频信号相关的附加信息。 提供同时发送多个视频信号时的音频信号的发送方法。 此外,本发明与发送用于右眼和左眼的两个视频信号的3D视频信号传输一致。

    SUPPORT STRUCTURE AND PROCESSING APPARATUS
    85.
    发明申请
    SUPPORT STRUCTURE AND PROCESSING APPARATUS 审中-公开
    支持结构和加工设备

    公开(公告)号:US20110309562A1

    公开(公告)日:2011-12-22

    申请号:US13161920

    申请日:2011-06-16

    IPC分类号: B23Q3/00

    摘要: A support structure for supporting a plurality of objects to be processed and to be disposed in a processing container structure in which a processing gas flows from the bottom to the top or from the top to the bottom, includes: a top plate portion; a bottom portion; and a plurality of support posts connecting the top plate portion and the bottom portion. A plurality of support portions for supporting the objects to be processed are formed in each support post along the longitudinal direction, and the pitch of the support portions is set larger on the downstream side than on the upstream side in the flow direction of the processing gas. The support structure can enhance the in-plane uniformity of the thickness of a film formed on a processing object.

    摘要翻译: 一种支撑结构,用于支撑待处理的多个物体,并且被设置在处理气体从底部流向顶部或从顶部到顶部的处理容器结构中,包括:顶板部分; 底部; 以及连接顶板部分和底部部分的多个支撑柱。 沿着长度方向在各个支柱上形成有用于支撑待处理物体的多个支撑部,在处理气体的流动方向的下游侧比上游侧的支撑部的间距大 。 支撑结构可以增强在加工对象上形成的膜的厚度的面内均匀性。

    METHOD AND APPARATUS FOR IMAGE ENCODING
    86.
    发明申请
    METHOD AND APPARATUS FOR IMAGE ENCODING 审中-公开
    图像编码的方法和装置

    公开(公告)号:US20110235929A1

    公开(公告)日:2011-09-29

    申请号:US12909489

    申请日:2010-10-21

    IPC分类号: G06T9/00

    摘要: An image encoding method for encoding an image using intra coding and interframe coding is offered. A refreshing area in which image refreshing is performed by intra coding is established. The refreshing area is shifted in an equal increment every frame such that the refreshing area traverses through the whole frame periodically. Where a macroblock that have passed through the refreshing area is interframe coded, a motion compensation vector of the macroblock is selected such that an image which has passed through the refreshing area is referenced.

    摘要翻译: 提供了一种使用帧内编码和帧间编码对图像进行编码的图像编码方法。 建立通过帧内编码进行图像刷新的刷新区域。 刷新区域每帧以相等的增量移位,使得刷新区域周期性地穿过整个帧。 在通过刷新区域的宏块进行帧间编码的情况下,选择宏块的运动补偿矢量,使得参照了通过刷新区域的图像。

    Film formation apparatus for semiconductor process and method for using same
    88.
    发明授权
    Film formation apparatus for semiconductor process and method for using same 有权
    用于半导体工艺的成膜装置及其使用方法

    公开(公告)号:US07964516B2

    公开(公告)日:2011-06-21

    申请号:US12401214

    申请日:2009-03-10

    IPC分类号: H01L21/31 C23C16/00

    摘要: A method for using a film formation apparatus includes, in order to inhibit metal contamination: performing a cleaning process using a cleaning gas on an inner wall of a process container and a surface of a holder with no productive target objects held thereon; and then, performing a coating process of forming a silicon nitride film by alternately supplying a silicon source gas and a nitriding gas to cover with the silicon nitride film the inner wall of the process container and the surface of the holder with no productive target objects held thereon.

    摘要翻译: 使用成膜装置的方法包括:为了抑制金属污染:在处理容器的内壁和保持有没有生产目标物体的保持器的表面上执行使用清洁气体的清洁处理; 然后,通过交替地供给硅源气体和氮化气体,以氮化硅膜覆盖处理容器的内壁和保持器的表面而不产生生产目标物体来进行形成氮化硅膜的涂覆工艺 上。

    Method for forming poly-silicon film
    90.
    发明申请
    Method for forming poly-silicon film 有权
    多晶硅膜的形成方法

    公开(公告)号:US20090124077A1

    公开(公告)日:2009-05-14

    申请号:US12285574

    申请日:2008-10-08

    IPC分类号: H01L21/443

    摘要: A poly-silicon film formation method for forming a poly-silicon film doped with phosphorous or boron includes heating a target substrate placed in a vacuum atmosphere inside a reaction container, and supplying into the reaction container a silicon film formation gas, a doping gas for doping a film with phosphorous or boron, and a grain size adjusting gas containing a component to retard columnar crystal formation from a poly-silicon crystal and to promote miniaturization of the poly-silicon crystal, thereby depositing a silicon film doped with phosphorous or boron on the target substrate.

    摘要翻译: 用于形成掺杂有磷或硼的多晶硅膜的多晶硅膜形成方法包括加热放置在反应容器内部的真空气氛中的目标衬底,并将反应容器中的硅膜形成气体,用于 用磷或硼掺杂膜,以及含有成分以阻止多晶硅晶体形成柱状晶体的颗粒尺寸调节气体,并促进多晶硅晶体的小型化,从而将掺杂有磷或硼的硅膜沉积在 目标基板。