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    System for delivering ultrasonic energy to a liquid and use for cleaning of solid parts
    81.
    发明授权
    System for delivering ultrasonic energy to a liquid and use for cleaning of solid parts 有权

    公开(公告)号：US09673373B2

    公开(公告)日：2017-06-06

    申请号：US13967950

    申请日：2013-08-15

    Applicant: IMEC

    Inventor： Steven Brems ,  Paul Mertens

    IPC: H01L41/09 ,  B08B3/12 ,  B06B1/06 ,  H01L21/67

    CPC classification number: H01L41/09 ,  B06B1/0622 ,  B06B1/0688 ,  B06B2201/20 ,  B06B2201/71 ,  B08B3/12 ,  H01L21/67086

    Abstract: This present application relates to a system for delivering megasonic energy to a liquid, involving one or more megasonic transducers, each transducer having a single operating frequency within an ultrasound bandwidth and comprising two or more groups of piezoelectric elements arranged in one or more rows, and a megasonic generator means for driving the one or more transducers at frequencies within the bandwidth, the generator means being adapted for changing the voltage applied to each group of piezoelectric elements so as to achieve substantially the same maximum acoustic pressure for each group of piezoelectric elements. The generator means and transducers being constructed and arranged so as to produce ultrasound within the liquid. Such a system may be part of an apparatus for cleaning a surface of an article such as a semiconductor wafer or a medical implant.

    SYSTEM AND METHOD FOR CONTROLLING AN ULTRASOUND TRANSMISSION/RECEPTION APPARATUS
    82.
    发明申请
    SYSTEM AND METHOD FOR CONTROLLING AN ULTRASOUND TRANSMISSION/RECEPTION APPARATUS 审中-公开
    用于控制超声波传输/接收装置的系统和方法

    公开(公告)号：US20170065258A1

    公开(公告)日：2017-03-09

    申请号：US15145132

    申请日：2016-05-03

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： STEFANO PASSI

    IPC: A61B8/00 ,  A61B8/14

    CPC classification number: A61B8/54 ,  A61B8/14 ,  A61B8/4483 ,  B06B1/0207 ,  B06B2201/20 ,  G01S15/8915 ,  G10K11/346

    Abstract: A control system for an ultrasound transmission/reception apparatus with a plurality of acoustic transducers for transmitting and receiving ultrasound signals may include driving device operatively coupled to the acoustic transducers and a control unit. The control unit may cyclically control the acoustic transducers in a transmission state for transmitting ultrasound signals, and in a reception state for receiving echoes of the transmitted ultrasound signals. The control unit may include an input stage which receives an external timing signal, and a processing stage which detects a first edge of the timing signal to determine the start time of a transmission phase during which the acoustic transducers are controlled in the transmission state, and a second edge of the timing signal to determine the stop time of a reception phase during which the acoustic transducers are controlled in the reception state.

    Abstract translation: 用于具有用于发送和接收超声信号的多个声换能器的超声发射/接收装置的控制系统可以包括可操作地耦合到声换能器的驱动装置和控制单元。 控制单元可以在用于发送超声信号的发送状态中循环地控制声换能器，并且在用于接收所发送的超声信号的回波的接收状态中。 控制单元可以包括接收外部定时信号的输入级，以及检测定时信号的第一边沿以确定在换能器中控制声换能器的传输阶段的开始时间的处理级，以及 定时信号的第二边缘，以确定在接收状态下控制声换能器的接收阶段的停止时间。

    ACTIVE BEAM-FORMING TECHNIQUE FOR PIEZOELECTRIC ULTRASONIC TRANSDUCER ARRAY
    85.
    发明申请
    ACTIVE BEAM-FORMING TECHNIQUE FOR PIEZOELECTRIC ULTRASONIC TRANSDUCER ARRAY 有权
    用于压电超声波传感器阵列的主动波束形成技术

    公开(公告)号：US20160131747A1

    公开(公告)日：2016-05-12

    申请号：US14883585

    申请日：2015-10-14

    Applicant: QUALCOMM Incorporated

    Inventor： Hao-Yen Tang ,  Yipeng Lu ,  Hrishikesh Vijaykumar Panchawagh

    IPC: G01S7/52 ,  G10K11/34

    CPC classification number: G01S7/5208 ,  B06B1/0207 ,  B06B1/0607 ,  B06B1/0644 ,  B06B1/0666 ,  B06B2201/20 ,  B06B2201/55 ,  G01S7/521 ,  G01S15/04 ,  G01S15/89 ,  G01S15/8915 ,  G06F3/0412 ,  G06F3/0416 ,  G06F3/043 ,  G06F3/0436 ,  G06F2203/04101 ,  G06K9/0002 ,  G06K9/00335 ,  G10K11/26 ,  G10K11/34 ,  G10K11/341 ,  G10K11/346 ,  H01L41/047 ,  H01L41/08

    Abstract: An apparatus includes an array of pixels, each pixel including in-cell pixel logic and a piezoelectric micromechanical ultrasonic transducer (PMUT) element, each in-cell pixel logic being communicatively coupled with at least one adjacent pixel in the array. Transceiver electronics may operate the array in a selectable one of a first mode and a second mode. In the first mode, the array may generate a substantially plane ultrasonic wave. In the second mode, the array may generate, from at least one superpixel region, a focused beam of relatively high acoustic pressure, each superpixel region including at least one inner pixel disposed in a central portion of the superpixel region and at least a first group of outer pixels disposed in an outer portion of the superpixel region. The transceiver electronics may be configured to operate the array by configuring at least one in-cell pixel logic.

    Abstract translation: 一种设备包括像素阵列，每个像素包括单元内像素逻辑和压电微机械超声换能器（PMUT）元件，每个单元内像素逻辑与阵列中的至少一个相邻像素通信耦合。 收发器电子器件可以以第一模式和第二模式中的可选择的一个操作阵列。 在第一模式中，阵列可以产生基本平面的超声波。 在第二模式中，阵列可以从至少一个超像素区域产生相对高声压的聚焦光束，每个超像素区域包括设置在超像素区域的中心部分中的至少一个内像素和至少一第一组 设置在超像素区域的外部的外部像素。 收发器电子设备可以被配置为通过配置至少一个单元内像素逻辑来操作阵列。

    Ultrasonic measurement device, ultrasonic head unit, ultrasonic probe, and ultrasonic image device
    86.
    发明授权
    Ultrasonic measurement device, ultrasonic head unit, ultrasonic probe, and ultrasonic image device 有权
    超声波测量装置，超声波头单元，超声波探头和超声波图像装置

    公开(公告)号：US09199277B2

    公开(公告)日：2015-12-01

    申请号：US14164579

    申请日：2014-01-27

    Applicant: SEIKO EPSON CORPORATION

    Inventor： Takao Miyazawa

    IPC: G10K11/18 ,  B06B1/06 ,  B06B1/02

    CPC classification number: B06B1/0629 ,  B06B1/0215 ,  B06B2201/20 ,  B06B2201/55

    Abstract: An ultrasonic measurement device includes: an ultrasonic element array that has at least one reception column connected to a reception terminal, and equipped with ultrasonic elements for reception and that has at least one transmission column connected to a transmission terminal, and equipped with ultrasonic elements for transmission; a reception circuit that receives a signal from the reception terminal; and a transmission circuit that outputs a signal to the transmission terminal. The reception column and the transmission column are alternately arranged every column, or any multiple of columns in a scanning direction. The ultrasonic elements for reception and the ultrasonic elements for transmission are arranged along a orthogonal direction that is orthogonal to the scanning direction. The reception terminal is arranged at one end of the array in the orthogonal direction, and the transmission terminal is arranged at the other end of the array in that direction.

    Abstract translation: 超声波测量装置包括：超声波元件阵列，其具有连接到接收终端的至少一个接收列，并且配备有用于接收的超声波元件，并且具有连接到传输终端的至少一个传输列，并且配备有用于 传输; 接收来自接收终端的信号的接收电路; 以及向发送端子输出信号的发送电路。 接收列和发送列交替地布置在扫描方向上的每列或任何多个列。 用于接收的超声波元件和用于透射的超声波元件沿着与扫描方向正交的正交方向布置。 接收端子在正交方向上配置在阵列的一端，并且发送端子沿着该方向排列在阵列的另一端。

    METHOD AND DEVICE FOR DRIVING CAPACITANCE TRANSDUCER
    88.
    发明申请
    METHOD AND DEVICE FOR DRIVING CAPACITANCE TRANSDUCER 有权
    用于驱动电容式传感器的方法和装置

    公开(公告)号：US20150146502A1

    公开(公告)日：2015-05-28

    申请号：US14547884

    申请日：2014-11-19

    Applicant: CANON KABUSHIKI KAISHA

    Inventor： Ayako Kato ,  Kazutoshi Torashima

    IPC: B06B1/02

    CPC classification number: B06B1/0292 ,  B06B1/0207 ,  B06B2201/20

    Abstract: Provided are a method, a device and the like for driving a capacitance transducer that enable reduction of transmission sound pressure variation caused by variation in characteristics of a capacitance transducer used for, e.g., an ultrasound conversion element. A method for driving a capacitance transducer including a plurality of elements each including cells each having a structure in which a vibration membrane including one electrode of a pair of electrodes formed with a cavity therebetween is supported in such a manner that the vibration membrane can vibrate is provided.

    Abstract translation: 提供了用于驱动电容换能器的方法，装置等，其能够降低由用于例如超声波转换元件的电容换能器的特性变化引起的透射声压变化。 一种用于驱动电容换能器的方法，该电容换能器包括多个元件，每个元件包括各自具有这样的结构的单元，所述单元具有其中包括形成有空腔的一对电极的一个电极的振动膜以使振动膜能够振动的方式被支撑 提供。

    PIEZOELECTRIC ARRAY EMPLOYING INTEGRATED MEMS SWITCHES
    89.
    发明申请
    PIEZOELECTRIC ARRAY EMPLOYING INTEGRATED MEMS SWITCHES 有权
    采用集成MEMS开关的压电阵列

    公开(公告)号：US20140232241A1

    公开(公告)日：2014-08-21

    申请号：US13768820

    申请日：2013-02-15

    Applicant: Arman HAJATI

    Inventor： Arman HAJATI

    IPC: B81B7/00 ,  H01L41/08 ,  H01L41/09 ,  B81B7/02

    CPC classification number: B81B7/008 ,  B06B1/0207 ,  B06B1/0629 ,  B06B2201/20 ,  B81B7/02 ,  G01N29/262 ,  G01S7/52017 ,  G01S15/8925 ,  G10K11/346 ,  H01H1/0036 ,  H01L27/20 ,  H01L41/0825 ,  H01L41/0973

    Abstract: Switchable micromachined transducer arrays are described where a MicroElectroMechanical Systems (MEMS) switch, or relay, is monolithically integrated with a transducer element. In embodiments, the MEMS switch is implemented in the same substrate as the transducer array to implement one or more logic, addressing, or transducer control function. In embodiments, each transducer element of an array is a piezoelectric element coupled to at least one MEMS switch to provide element-level addressing within the array. In certain embodiments the same piezoelectric material employed in the transducer is utilized in the MEMS switch.

    Abstract translation: 描述了可切换的微机械传感器阵列，其中微电子机械系统（MEMS）开关或继电器与换能器元件单片集成。 在实施例中，MEMS开关实现在与换能器阵列相同的衬底中，以实现一个或多个逻辑，寻址或换能器控制功能。 在实施例中，阵列的每个换能器元件是耦合到至少一个MEMS开关的压电元件，以在阵列内提供元件级寻址。 在某些实施例中，在MEMS开关中使用在换能器中使用的相同的压电材料。

    Gigasonic brush for cleaning surfaces
    90.
    发明授权
    Gigasonic brush for cleaning surfaces 失效
    用于清洁表面的千斤顶刷

    公开(公告)号：US08539969B2

    公开(公告)日：2013-09-24

    申请号：US12847621

    申请日：2010-07-30

    Applicant: Abbas Rastegar

    Inventor： Abbas Rastegar

    IPC: B08B3/12

    CPC classification number: H01L21/67046 ,  B06B1/0276 ,  B06B1/0622 ,  B06B2201/20 ,  B06B2201/55 ,  B06B2201/71 ,  B08B3/12 ,  H01L21/02041

    Abstract: An apparatus, system, and method for a Gigasonic Brush for cleaning surfaces is presented. One embodiment of the system includes an array of acoustic transducers coupled to a substrate where the individual acoustic transducers have sizes in the range of 9 um2 to 250,000 um2. The system may include a positioning mechanism coupled to at least one of a target surface or the array of acoustic transducers, and configured to position the array of acoustic transducers within 1 millimeter of a target surface. The system may also include a cleaning liquid supply arranged to provide cleaning liquid for coupling the array of acoustic transducers to the target surface. The system may further include a controller coupled to the array of acoustic transducers and configured to activate the array of acoustic transducers.

    Abstract translation: 介绍了一种用于清洁表面的Gigasonic Brush的设备，系统和方法。 该系统的一个实施例包括耦合到衬底的声学换能器阵列，其中各个声学换能器的尺寸在9um2至250,000um2的范围内。 系统可以包括耦合到目标表面或声换能器阵列中的至少一个的定位机构，并且被配置为将声换能器阵列定位在目标表面的1毫米内。 该系统还可以包括布置成提供用于将声换能器阵列耦合到目标表面的清洁液体的清洁液体供应。 系统还可以包括耦合到声换能器阵列并被配置为激活声换能器阵列的控制器。

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