公开(公告)号：US09165723B2

公开(公告)日：2015-10-20

申请号：US13672863

申请日：2012-11-09

申请人： HARRIS CORPORATION

发明人： John E. Rogers ,  Michael R. Weatherspoon

IPC分类号： H01H57/00 ,  H01H1/00 ,  H01H59/00

CPC分类号： H01H11/06 ,  H01H1/0036 ,  H01H59/0009 ,  H01H2001/0078 ,  H01H2011/065

摘要： Embodiments of switches (10) include first and second electrical conductors (34, 36) suspended within an electrically-conductive housing (28), and a contact element (16) having an electrically-conductive portion (53b) that establishes electrical contact between the first and second electrical conductors (34, 36) when the contact element (16) is in a closed position. The electrically-conductive portion (53b) is electrically isolated from a ground plane (27) of the switch (10) by adjacent electrically-insulative portions (53a, 53c) of the contact element (16).

摘要翻译： 开关（10）的实施例包括悬挂在导电壳体（28）内的第一和第二电导体（34,36），以及具有导电部分（53b）的接触元件（16），该导电部分 当接触元件（16）处于关闭位置时，第一和第二电导体（34,36）。 导电部分（53b）通过接触元件（16）的相邻电绝缘部分（53a，53c）与开关（10）的接地平面（27）电隔离。

公开(公告)号：US09070578B2

公开(公告)日：2015-06-30

申请号：US14449177

申请日：2014-08-01

申请人： International Business Machines Corporation

发明人： Michel Despont ,  Urs T. Duerig ,  Daniel Grogg ,  Armin W. Knoll ,  Elad Koren

IPC分类号： B81B3/00 ,  H01L27/092 ,  B81B7/00 ,  B81B1/00

CPC分类号： B81B3/0021 ,  B81B1/006 ,  H01H1/0094 ,  H01H1/021 ,  H01H1/027 ,  H01H1/50 ,  H01H2001/0052 ,  H01H2001/0078 ,  H01H2001/0084

摘要： The present invention is notably directed to an electromechanical switching device having: two electrodes, including: a first electrode, having layers of a first 2D layered material, which layers exhibit a first surface; and a second electrode, having layers of a second 2D layered material, which layers exhibit a second surface vis-à-vis said first surface; and an actuation mechanism, where: each of the first and second 2D layered materials is electrically conducting; and at least one of said two electrodes is actuatable by the actuation mechanism to modify a distance between the first surface and the second surface, such as to modify an electrical conductivity transverse to each of the first surface and the second surface and thereby enable current modulation between the first electrode and the second electrode.

摘要翻译： 本发明特别涉及一种机电开关装置，其具有：两个电极，包括：第一电极，具有第一2D层状材料的层，所述层呈现第一表面; 以及具有第二2D层状材料层的第二电极，所述层相对于所述第一表面呈现第二表面; 以及致动机构，其中：所述第一和第二2D分层材料中的每一个都是导电的; 并且所述两个电极中的至少一个可由所述致动机构致动以修改所述第一表面和所述第二表面之间的距离，例如改变横向于所述第一表面和所述第二表面中的每一个的导电性，从而使得能够进行电流调制 在第一电极和第二电极之间。

公开(公告)号：US20150179371A1

公开(公告)日：2015-06-25

申请号：US14553290

申请日：2014-11-25

申请人： Sony Corporation

发明人： Mitsuo Hashimoto ,  Akira Akiba ,  Hideo Niikura ,  Satoshi Mitani ,  Shinya Morita ,  Kunihiko Saruta

IPC分类号： H01H21/16

CPC分类号： H01H85/463 ,  H01H1/0036 ,  H01H2001/0078 ,  H01H2085/0275

摘要： There is provided an electronic device including a first member formed to include at least a part of a substrate material, a second member formed to include at least a part of the substrate material and configured to be relatively movable with respect to the first member, and a fuse configured to include at least a part of the substrate material and configured to electrically connect the first member to the second member via the substrate material.

摘要翻译： 提供了一种电子设备，其包括形成为包括至少一部分基板材料的第一构件，形成为包括至少一部分基板材料并被配置为相对于第一构件相对移动的第二构件，以及 熔丝，其被配置为包括所述基板材料的至少一部分并且经配置以经由所述基板材料将所述第一构件电连接到所述第二构件。

公开(公告)号：US20150170863A1

公开(公告)日：2015-06-18

申请号：US14634231

申请日：2015-02-27

申请人： OMRON Corporation

发明人： Takahiro Masuda ,  Junya Yamamoto

IPC分类号： H01H59/00 ,  H01H45/14

CPC分类号： H01H59/0009 ,  H01H45/14 ,  H01H2001/0078 ,  H01H2221/036 ,  H01H2235/02 ,  H01H2239/008

摘要： In an electrostatic relay in which a moving contact and a movable electrode are displaced in parallel with a base substrate, an opening force is increased when the movable electrode is separated from a fixed electrode, and a structure is simplified to enhance a degree of freedom of design. A fixed contact portion and a fixed electrode portion are fixed to the base substrate. The fixed electrode portion and a movable electrode portion constitute an electrostatic actuator that displaces the movable electrode portion and a moving contact portion. A movable spring provided in a spring supporting portion retains the movable electrode portion in a displaceable manner. A cantilever secondary spring is provided in the spring supporting portion, and a projection portion is provided in a front end face of the movable electrode portion. The secondary spring abuts on the projection portion while being not deformed until abutting on the projection portion, before the moving contact of the moving contact portion abuts on the fixed contact of the fixed contact portion when the moving contact portion and the movable electrode portion are displaced.

摘要翻译： 在可移动触点和可动电极与基底平行移动的静电继电器中，当可动电极与固定电极分离时，开启力增加，并且简化结构以提高自由度 设计。 固定接触部分和固定电极部分固定到基底基板上。 固定电极部分和可动电极部分构成使可动电极部分和可移动接触部分移动的静电致动器。 设置在弹簧支撑部分中的可移动弹簧以可移动的方式保持可动电极部分。 悬臂二次弹簧设置在弹簧支撑部分中，并且突出部分设置在可动电极部分的前端面中。 第二弹簧在活动接触部和可动电极部位移动时，在活动接触部的移动接触抵接在固定接触部的固定接点上之前，不会变形直到抵接在突出部上 。

公开(公告)号：US20140360851A1

公开(公告)日：2014-12-11

申请号：US14286331

申请日：2014-05-23

申请人： STMicroelectronics (Rousset) SAS

发明人： Christian Rivero ,  Pascal Fornara ,  Antonio di-Giacomo ,  Brice Arrazat

IPC分类号： H01H59/00 ,  H01L21/822 ,  H01L27/06

CPC分类号： H01H59/0009 ,  B81B2201/018 ,  B81C1/00246 ,  B81C2203/0735 ,  B81C2203/0771 ,  H01H1/0036 ,  H01H57/00 ,  H01H2001/0068 ,  H01H2001/0078 ,  H01H2059/0054 ,  H01L21/8221 ,  H01L23/522 ,  H01L27/0617 ,  H01L27/0688 ,  H01L2924/0002 ,  H01L2924/00

摘要： An integrated circuit includes an interconnection part with several metallization levels. An electrically activatable switching device within the interconnection part has an assembly that includes a beam held by a structure. The beam and structure are located within the same metallization level. Locations of fixing of the structure on the beam are arranged so as to define for the beam a pivot point situated between these fixing locations. The structure is substantially symmetric with respect to the beam and to a plane perpendicular to the beam in the absence of a potential difference. The beam is able to pivot in a first direction in the presence of a first potential difference applied between a first part of the structure and to pivot in a second direction in the presence of a second potential difference applied between a second part of the structure.

摘要翻译： 集成电路包括具有多个金属化级别的互连部件。 互连部件内的可电激活的开关装置具有包括由结构保持的梁的组件。 梁和结构位于相同的金属化水平内。 布置结构在梁上的固定位置，以便为梁定义位于这些固定位置之间的枢转点。 该结构在不存在电位差的情况下相对于光束和垂直于光束的平面基本对称。 在存在施加在结构的第一部分之间的第一电位差并且在存在施加在结构的第二部分之间的第二电位差的情况下在第二方向上枢转时，梁能够在第一方向上枢转。

公开(公告)号：US20140145804A1

公开(公告)日：2014-05-29

申请号：US14062698

申请日：2013-10-24

申请人： STMicroelectronics S.r.l.

发明人： Alberto Pagani

IPC分类号： H01H50/00 ,  H01H50/16

CPC分类号： H01H50/16 ,  H01H1/0036 ,  H01H50/005 ,  H01H51/26 ,  H01H2001/0078 ,  H01H2001/0084 ,  H01H2050/007

摘要： A magnetic relay device having a substrate of semiconductor material houses two through magnetic vias of electrically conductive ferromagnetic material. At least one coil is arranged underneath a first surface of the substrate in proximity of at least one between the first and second magnetic vias, and a contact structure, of ferromagnetic material, is arranged over a second surface of the substrate and is controlled by the magnetic field generated by the coil so as to switch between an open position, wherein the contact structure electrically disconnects the first and second magnetic vias, and a close position, wherein the contact structure electrically connects the first and second magnetic vias.

摘要翻译： 具有半导体材料的基板的磁继电器装置容纳两个通过导电铁磁材料的磁通孔。 至少一个线圈布置在衬底的第一表面的下方，靠近第一和第二磁通道之间的至少一个，并且铁磁材料的接触结构布置在衬底的第二表面上，并且由 所述线圈产生的磁场在所述接触结构电断开所述第一和第二磁通孔的打开位置与闭合位置之间切换，其中所述接触结构电连接所述第一和第二磁通孔。

公开(公告)号：US20140033964A1

公开(公告)日：2014-02-06

申请号：US13957065

申请日：2013-08-01

申请人： STMicroelectronics S.r.l.

发明人： Attilio Frangi ,  Biagio De Masi ,  Leonardo Baldasarre

IPC分类号： G01L5/00

CPC分类号： G01L5/0052 ,  G01P15/04 ,  G01P15/06 ,  G01P15/12 ,  G01P15/125 ,  G01P15/135 ,  G01P15/18 ,  H01H1/0036 ,  H01H35/14 ,  H01H35/146 ,  H01H2001/0068 ,  H01H2001/0078

摘要： A shock sensor includes: a supporting body; a bistable mechanism, configured to switch from a first stable mechanical configuration to a second stable mechanical configuration in response to an impact force applied along a detection axis and such as to supply to the bistable mechanism an amount of energy higher than a transition energy; and a detection device, coupled to the bistable mechanism and having a first state, when the bistable mechanism is in an initial stable mechanical configuration and a second state, after the bistable mechanism has made a transition from the initial stable mechanical configuration to a final stable mechanical configuration. The bistable mechanism includes at least one elastic element, constrained to the supporting body in at least two opposite peripheral regions and defining a first concavity in the first stable mechanical configuration and a second concavity, opposite to the first concavity, in the second stable mechanical configuration.

摘要翻译： 冲击传感器包括：支撑体; 双稳态机构，被配置为响应于沿着检测轴施加的冲击力从第一稳定机械构造切换到第二稳定机械构造，并且向双稳态机构提供高于过渡能量的能量; 以及耦合到双稳态机构并具有第一状态的检测装置，当双稳态机构处于初始稳定的机械构造和第二状态时，在双稳态机构已经从初始稳定的机械构造转变到最终稳定之后 机械配置。 双稳态机构包括至少一个弹性元件，其在至少两个相对的周边区域中被限制到支撑体，并且在第二稳定机械构造中限定第一稳定机械构造中的第一凹部和与第一凹部相对的第二凹部 。

公开(公告)号：US08519809B1

公开(公告)日：2013-08-27

申请号：US13042333

申请日：2011-03-07

申请人： Yee-Chung Fu

发明人： Yee-Chung Fu

IPC分类号： H01H51/22

CPC分类号： H01H59/0009 ,  H01H1/0036 ,  H01H2001/0078 ,  H01P1/127

摘要： A micro-electromechanical (MEMS) switch includes a substrate, stationary actuator comb teeth extending from a stationary actuator pad supported above the substrate, stationary contact comb teeth extending from a stationary contact pad supported above the substrate, and a body suspended over the substrate for rotation about an axis perpendicular to the substrate. The body includes movable actuator comb teeth interdigitated in-plane with the stationary actuator comb teeth where the shortest distance between adjacent movable and stationary actuator comb teeth has a first value. The body further includes movable contact comb teeth interdigitated in-plane with the stationary contact comb teeth where the shortest distance between adjacent movable and stationary contact comb teeth has a second value smaller than the first value.

摘要翻译： 微机电（MEMS）开关包括基板，从支撑在基板上方的固定致动器垫延伸的固定致动器梳齿，从支撑在基板上方的固定接触垫延伸的固定接触梳齿，以及悬挂在基板上的主体， 围绕垂直于衬底的轴旋转。 主体包括与固定致动器梳齿平面内的可移动致动器梳齿，其中相邻的可动和静止致动器梳齿之间的最短距离具有第一值。 主体还包括与固定接触梳齿平面地交叉指向的可动接触梳齿，其中相邻的可动和固定接触梳齿之间的最短距离具有小于第一值的第二值。

公开(公告)号：US08470628B2

公开(公告)日：2013-06-25

申请号：US13164126

申请日：2011-06-20

申请人： Michael A Guillorn ,  Eric A Joseph ,  Fei Liu ,  Zhen Zhang

发明人： Michael A Guillorn ,  Eric A Joseph ,  Fei Liu ,  Zhen Zhang

IPC分类号： H01L21/66

CPC分类号： B81C1/00666 ,  B81C1/00952 ,  H01H1/0094 ,  H01H2001/0078

摘要： A method is disclosed to fabricate an electro-mechanical device such as a MEMS or NEMS switch. The method includes providing a silicon layer disposed over an insulating layer that is disposed on a silicon substrate; releasing a portion of the silicon layer from the insulating layer so that it is at least partially suspended over a cavity in the insulating layer; depositing a metal (e.g., Pt) on at least one surface of at least the released portion of the silicon layer and, using a thermal process, fully siliciding at least the released portion of the silicon layer using the deposited metal. The method eliminates silicide-induced stress to the released Si member, as the entire Si member is silicided. Furthermore no conventional wet chemical etch is used after forming the fully silicided material thereby reducing a possibility of causing corrosion of the silicide and an increase in stiction.

摘要翻译： 公开了一种制造诸如MEMS或NEMS开关的机电装置的方法。 该方法包括提供设置在设置在硅衬底上的绝缘层上的硅层; 从所述绝缘层释放所述硅层的一部分，使得其至少部分地悬挂在所述绝缘层中的空腔上; 在至少所述硅层的释放部分的至少一个表面上沉积金属（例如Pt），并且使用热处理，使用沉积的金属至少完全硅化硅层的释放部分。 当整个Si元件被硅化时，该方法消除了对释放的Si元件的硅化物引起的应力。 此外，在形成完全硅化材料之后，也不使用常规的湿化学蚀刻，从而减少引起硅化物腐蚀和粘性增加的可能性。

公开(公告)号：US20130020183A1

公开(公告)日：2013-01-24

申请号：US13625294

申请日：2012-09-24

申请人： Michael A. Guillorn ,  Eric A. Joseph ,  Fei Liu ,  Zhen Zhang

发明人： Michael A. Guillorn ,  Eric A. Joseph ,  Fei Liu ,  Zhen Zhang

IPC分类号： H01H59/00

CPC分类号： B81C1/00666 ,  B81C1/00952 ,  H01H1/0094 ,  H01H2001/0078

摘要： A miniaturized electro-mechanical switch includes a moveable portion having a contact configured to make, when the switch is actuated, an electrical connection between two stationary points. At least the contact is composed of a fully silicided material. A structure includes a silicon layer formed over an insulator layer and a micromechanical switch formed at least partially within the silicon layer. The micromechanical switch has a conductive structure, and where at least electrically contacting portions of the conductive structure are comprised of fully silicided material.

摘要翻译： 小型化机电开关包括具有触点的可移动部分，该触点构造成当开关被致动时使得两个静止点之间的电连接。 至少接触由完全硅化的材料组成。 一种结构包括形成在绝缘体层上的硅层和至少部分地形成在硅层内的微机电开关。 微机械开关具有导电结构，并且其中导电结构的至少电接触部分由完全硅化材料构成。