Abstract:
A novel thick film resistor configuration and a method for fabricating thick film resistors, by which such resistors can be processed to achieve targeted electrical properties in an as-fired condition. The configuration and method of this invention involve creating a thick film resistor in the form of a series of short resistors whose combined resistance values approximately equal the predetermined resistance value required of the thick film resistor by its hybrid electronic circuit, yet with the use of minimal post-firing trimming. Such a configuration and method enable the production of thick film resistors from the same ink composition but with significantly different aspect ratios, yet which exhibit minimal differences between TCR values. Consequently, thick film resistors configured and fabricated in accordance with this invention are characterized by enhanced production throughput, repeatability, and reliability.
Abstract:
A method of for manufacture of a semiconductor device on a semiconductor substrate including an SRAM cell with a resistor comprises formation of a first polysilicon layer on the semiconductor substrate, patterning and etching the first polysilicon layer, formation of an interpolysilicon layer over the first polysilicon layer, patterning and etching an opening through the interpolysilicon layer exposing a contact area on the surface of the first polysilicon layer, forming a dielectric load resistor in the opening upon the contact area on the first polysilicon layer, and formation of a second polysilicon layer on the device over the dielectric load resistor, over the interpolysilicon layer.
Abstract:
A semiconductor device includes a pass transistor (28) electrically coupled to a driver transistor (16) by a common drain region (52). The pass transistor (28) includes the pass gate electrode (44) having a polycrystalline silicon layer (68). The driver transistor (16) includes a driver gate electrode (40) having a polycrystalline silicon layer (74). The dopant concentration in polycrystalline silicon layer (74) is greater than the dopant concentration in polycrystalline silicon layer (68). The differential and dopant concentration between the pass gate electrode (44) and the driver gate electrode (40) results in a greater current gain in the driver transistor (16) relative to the pass transistor (28). When incorporated into an SRAM memory cell (10), the driver transistor (16) and the pass transistor (28) provide greater cell stability by improving the immunity of the cell to electrical disturbance through the pass transistor (28).
Abstract:
A memory cell of an SRAM prevents imbalance between GND potentials of a pair of driver transistors. In the memory cell, the driver transistors Q.sub.1 and Q.sub.2 in a pair have the common source region.
Abstract:
An SRAM semiconductor device comprises a first layer, a second layer and a third layer of polysilicon are separated by dielectric layers formed on a substrate, and a split gate structure with transistors formed in different polysilicon levels. Preferably, the split gate structure includes pull down transistors and pass gate transistors formed in different polysilicon levels; the second polysilicon layer extends into contact with the substrate; the second polysilicon layer contacts the third polysilicon layer in an interconnection region; and the third polysilicon layer comprises a polysilicon load resistor.
Abstract:
A SRAM having its memory cell constructed to include transfer MISFETs to be controlled by word lines and a flip-flop circuit having driver MISFETs and load MISFETs. Plate electrodes of large area fixed on predetermined power source lines are arranged over the load MISFETs such that the plate electrodes over the offset region of the load MISFETs are formed with an opening. A silicon nitride film having a thickness permeable to hydrogen but not to humidity is formed over the transfer MISFETs and the driver MISFETs formed over the main surface of a semiconductor substrate and the load MISFETs formed of a polycrystalline silicon film deposited on the driver MISFETs.
Abstract:
A memory cell of the type employing a pair of cross-coupled CMOS inverters of a SRAM is provided in which the load MISFETs are stacked above the semiconductor substrate and over the drive MISFETs. Each load MISFET of a memory cell consists of a source, drain and channel region formed of a semiconductor strip, such as a polycrystalline silicon film strip, and a gate electrode consisting of a different layer conductive film than that of the drive MISFETs. A wiring line, formed as a separate conductive layer, is provided in the stacking arrangement of the drive and load MISFETs of a memory cell for applying a ground potential to source regions of the drive MISFETs thereof.
Abstract:
An SRAM memory cell structure is provided which has the access transistor gates formed from a different layer than that of the word line. The first access transistor gate of a first memory cell is connected to the first access transistor gate of an adjacent second memory cell, and a second access transistor gate of the first memory cell is connected to a second access transistor gate of an third oppositely adjacent memory cell. Each pair of coupled gates are formed separate from the access transistor gates in adjacent memory cells. The word lines connect the separated access transistor gates. The word lines are formed on an insulating layer above the gates of the access transistors. The word lines are, however, electrically connected to the gates of the access transistors through contact holes formed in the insulating layer. Each memory cell is arranged symmetrically with respect to an adjacent memory cell, and the components of each memory cell are symmetrical. Therefore, a structure and a method for a reduction in the area of an SRAM cell of the conventional circuit design is provided, resulting in a larger layout margin and a more reliable and more highly integrated SRAM device.
Abstract:
A MOSFET constituting a flip-flop circuit and a MOSFET for control of reading and writing data out of and into a memory cell are formed on a semiconductor. The gate electrode of the first MOSFET and the gate electrode of the second MOSFET are formed by layers of different levels. The gate electrodes have an overlapped portion R. The first and second MOSFETs are arranged symmetrically with respect to a certain point P. By virtue of the above structure, the degree of integration of a static RAM is enhanced.
Abstract:
A compact MOS type active device is constructed at least partially in an opening in an insulation layer, such as an oxide layer, above a portion of a semiconductor substrate forming a first source/drain region of the MOS type active device. A semiconductor material, on the sidewall of the opening, and in electrical communication with the portion of the substrate forming the first source/drain region of the device, comprises the channel portion of the MOS device. A second source/drain region, in communication with an opposite end of the channel, is formed on the insulation layer adjacent the opening and in electrical communication with the channel material in the opening. A gate oxide layer is formed over the channel portion and at least partially in the opening, and a conductive gate electrode is then formed above the gate oxide.