公开(公告)号：US20070209437A1

公开(公告)日：2007-09-13

申请号：US11348930

申请日：2006-04-07

申请人： Song Xue ,  Nurul Amin ,  Patrick Ryan ,  John Wright ,  Jeffery Berkowitz ,  Insik Jin

发明人： Song Xue ,  Nurul Amin ,  Patrick Ryan ,  John Wright ,  Jeffery Berkowitz ,  Insik Jin

IPC分类号： B81B7/02 ,  G01P15/105 ,  G01B7/00 ,  H01L27/22 ,  H01L43/00

CPC分类号： B81B3/0032 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01C19/56 ,  G01C19/5663 ,  G01D5/145 ,  G01L9/007 ,  G01P15/0802 ,  G01P15/0885 ,  G01P15/105 ,  G01P15/11 ,  G01P15/18 ,  G01P2015/0828 ,  G01P2015/084 ,  H01L29/84

摘要： The present invention relates to magnetic micro-electromechanical systems (MEMS) or magnetic MEMS devices, particularly electronic devices in which a member adjoins a base or substrate and extends from the substrate proximate to a magnetic field element having an altered output associated with movement of the member. The first magnetic field element is adapted to emit or detect a magnetic field and positioned proximate to the member, and the second magnetic field element adapted to emit or detect a magnetic field and positioned proximate to the base or substrate, such that movement of the member in a first direction by a non-magnetic force results in a variation of magnetic field strength associated with displacement of the sensor in a first direction. The invention also relates to methods for fabricating magnetic MEMS devices, transducers, sensors, and accelerometers.

摘要翻译： 本发明涉及磁微机电系统（MEMS）或磁MEMS器件，特别是电子器件，其中元件邻接基底或衬底并且从衬底附近延伸到具有改变的输出的磁场元件，该变化的输出与 会员。 第一磁场元件适于发射或检测磁场并且定位成靠近构件，并且第二磁场元件适于发射或检测磁场并且定位成靠近基底或基底，使得该构件的移动 通过非磁力在第一方向上导致与传感器在第一方向上的位移相关联的磁场强度的变化。 本发明还涉及用于制造磁MEMS器件，换能器，传感器和加速度计的方法。

公开(公告)号：US07134342B1

公开(公告)日：2006-11-14

申请号：US10932654

申请日：2004-08-31

申请人： Fred M. Mueller ,  Lawrence Bronisz ,  Holger Grube ,  David C. Nelson ,  Jonathan L. Mace

发明人： Fred M. Mueller ,  Lawrence Bronisz ,  Holger Grube ,  David C. Nelson ,  Jonathan L. Mace

IPC分类号： G01P15/105 ,  G01P15/08

CPC分类号： G01V1/181

摘要： A magnetic infrasound sensor is produced by constraining a permanent magnet inside a magnetic potential well above the surface of superconducting material. The magnetic infrasound sensor measures the position or movement of the permanent magnet within the magnetic potential well, and interprets the measurements. Infrasound sources can be located and characterized by combining the measurements from one or more infrasound sensors. The magnetic infrasound sensor can be tuned to match infrasound source types, resulting in better signal-to-noise ratio. The present invention can operate in frequency modulation mode to improve sensitivity and signal-to-noise ratio. In an alternate construction, the superconductor can be levitated over a magnet or magnets. The system can also be driven, so that time resolved perturbations are sensed, resulting in a frequency modulation version with improved sensitivity and signal-to-noise ratio.

摘要翻译： 通过在超导材料表面上方的磁势阱内约束永磁体来产生磁次声传感器。 磁次声传感器测量永磁体在磁势阱内的位置或运动，并解释测量结果。 次声源可以通过组合来自一个或多个次声传感器的测量结果来定位和表征。 可以调节磁次声传感器以匹配次声源类型，从而获得更好的信噪比。 本发明可以在频率调制模式下工作，以提高灵敏度和信噪比。 在替代结构中，超导体可以悬浮在磁体或磁体上。 该系统也可以被驱动，从而感测时间分辨的扰动，导致具有改善的灵敏度和信噪比的频率调制版本。

公开(公告)号：US06940277B2

公开(公告)日：2005-09-06

申请号：US10651160

申请日：2003-08-28

申请人： David P. Fries

发明人： David P. Fries

IPC分类号： G01D5/14 ,  G01D5/16 ,  G01D5/245 ,  G01P13/00 ,  G01P15/105 ,  G11B5/40 ,  G01B7/14 ,  G01B7/30 ,  G01R33/06 ,  H01L43/08

CPC分类号： G01D5/145 ,  G01D5/2451 ,  G01P13/00 ,  G01P15/105 ,  G11B5/40

摘要： An encoder (10) for a nanopostioner (24) includes a strip of magnetic bits (18) for producing discrete magnetic fields and a giant magnetoresistor (GMR) (14) which changes in electrical resistance in response to changes in the magnetic fields. The GMR (14) is connected to a mass (12) which moves along a path proximate to the strip of magnetic bits (18). A voltage sensor (20) is connected to the GMR (14) to produce digital signals based on the changes in electrical resistance of the GMR (14). A processor (22) calculates the position of the nanopositioner (24) based on the digital signals.

摘要翻译： 用于纳米级放射线检测器（24）的编码器（10）包括用于产生离散磁场的磁头条（18）和响应于磁场变化而改变电阻的巨磁电阻（GMR）（14）。 GMR（14）连接到沿着靠近磁头条（18）的路径移动的质量块（12）。 电压传感器（20）连接到GMR（14），以根据GMR（14）的电阻的变化产生数字信号。 处理器（22）基于数字信号计算纳米定位器（24）的位置。

公开(公告)号：US6139053A

公开(公告)日：2000-10-31

申请号：US59946

申请日：1998-04-14

申请人： Matthew J. Knox

发明人： Matthew J. Knox

IPC分类号： B60R22/343 ,  B60R22/44 ,  B60R22/48 ,  G01C9/06 ,  G01C9/10 ,  G01P15/093 ,  G01P15/105 ,  G01P15/18 ,  H05K1/18 ,  B60R21/32

CPC分类号： G01C9/06 ,  G01C9/10 ,  G01P15/093 ,  G01P15/105 ,  G01P15/18 ,  B60R22/343 ,  B60R22/44 ,  G01C2009/064 ,  G01C2009/066 ,  H05K1/18

摘要： A sensor designed and adapted to operate with vehicle restraints whose primary purpose is to sense low "g" accelerations and vehicle tilting, the results of which lead to the activation or deactivation of the primary occupant restraints through a control module. This invention specifically addresses the reliability of vehicle acceleration and tilt sensors. By employing fewer numbers of components and by having a fewer number of failure mechanisms this invention provides a sensor of increased reliability and lower manufacturing cost. Furthermore, this sensor invention restrains effect z-axis accelerations often encountered when a vehicle is merely traveling over rough roads. This invention employs innovative detector technology, alternatively using an IR detector or a Hall Effect Device detector.

摘要翻译： 设计和适用于与车辆限制器一起操作的传感器，其主要目的是感测低“g”加速度和车辆倾斜，其结果导致通过控制模块激活或停用主要乘员约束。 本发明具体涉及车辆加速度和倾斜传感器的可靠性。 通过采用较少数量的部件并且通过具有较少数量的故障机构，本发明提供了增加可靠性和降低制造成本的传感器。 此外，该传感器发明限制了当车辆仅在粗糙的道路上行驶时经常遇到的z轴加速度的影响。 本发明采用创新的检测器技术，或者使用IR检测器或霍尔效应器件检测器。

公开(公告)号：US5983724A

公开(公告)日：1999-11-16

申请号：US984684

申请日：1997-12-03

申请人： Yuki Yoshida

发明人： Yuki Yoshida

IPC分类号： G01L5/00 ,  G01P15/00 ,  G01P15/105 ,  G01P15/12 ,  G01R33/09 ,  H01H35/14 ,  G01N1/00 ,  G01V1/16

CPC分类号： G01P15/105 ,  H01H35/147

摘要： A shock sensor detects shocks from all directions in a plane. A shock-sensing member extends longitudinally and is housed in a case. The shock-sensing member is rotatably supported by a supporting pin at an off-center point in terms of mass of the shock-sensing member. The shock-sensing member has a magnet mounted on each of two diametrically opposing ends of the shock-sensing member. Each magnet opposes a magnetoresistive effect element fixed in the case. The magnetoresistive effect element may include four elements electrically connected in a bridge configuration. When the shock-sensing member receives a shock, the shock-sensing member rotates about the supporting member causing the magnetoresistive effect element to be subjected to a change in the magnetic field of the magnet. The output of the magnetoresistance changes with changes in the magnetic field and is processed by an output circuit which in turn outputs a sensor output accordingly.

摘要翻译： 震动传感器检测飞机上各个方向的震动。 冲击感应构件纵向延伸并容纳在壳体中。 冲击感测构件在冲击感测构件的质量方面在偏心位置处由支撑销可旋转地支撑。 冲击感测构件具有安装在冲击感测构件的两个直径相对的端部中的每一个上的磁体。 每个磁体与固定在这种情况下的磁阻效应元件相反。 磁阻效应元件可以包括以桥式配置电连接的四个元件。 当冲击感测构件受到冲击时，冲击感测构件围绕支撑构件旋转，导致磁阻效应元件受到磁体磁场的变化。 磁阻的输出随着磁场的变化而变化，并由输出电路进行处理，输出电路又相应地输出传感器输出。

公开(公告)号：US5756896A

公开(公告)日：1998-05-26

申请号：US764263

申请日：1996-12-12

申请人： Robert E. Schendel

发明人： Robert E. Schendel

IPC分类号： G01P1/00 ,  G01P15/105 ,  G01P15/08

CPC分类号： G01P1/003 ,  G01P15/105

摘要： A low noise extended dynamic range accelerometer useful for sensitive seismic observations. The accelerometer's extended range is obtained by utilizing fixed end magnets which non-linearly oppose movement of the magnetic proof mass. Additionally, an aluminum housing material contributes eddy current dampening which produces a critically damped system over a broad range of accelerations.

摘要翻译： 用于敏感地震观测的低噪声扩展动态范围加速度计。 加速度计的扩展范围通过利用非线性地抵抗磁性体的运动的固定端磁体获得。 另外，铝外壳材料提供涡流阻尼，其在宽范围的加速度上产生严格衰减的系统。

公开(公告)号：US5339699A

公开(公告)日：1994-08-23

申请号：US844126

申请日：1992-03-02

申请人： Forest J. Carignan

发明人： Forest J. Carignan

IPC分类号： G01L1/00 ,  G01D5/14 ,  G01L1/14 ,  G01P15/08 ,  G01P15/105 ,  G01P15/18 ,  G01L1/12

CPC分类号： G01L1/14 ,  G01D5/145 ,  G01P15/105

摘要： A device for measuring displacement and force comprises two masses of material linked together by a parallel beam linkage which permits displacement of one mass relative to the other in a single direction. The displacement or force input to be measured is applied to one of the masses in the allowable direction. The displacement of the masses with respect to each other is sensed by a sensor. In a preferred embodiment, the sensor comprises a Hall effect sensor attached to one of the masses positioned between two magnets attached to the other mass. Movement of one mass relative to the other changes the magnetic field around the Hall effect sensor. The change is sensed by the Hall effect sensor.

摘要翻译： 用于测量位移和力的装置包括通过平行梁连杆连接在一起的两个质量的材料，其允许一个质量相对于另一个在单个方向上相对移动。 要测量的位移或力输入被施加到允许方向上的一个质量块。 质量相对于彼此的位移由传感器感测。 在优选实施例中，该传感器包括一个霍尔效应传感器，该霍尔效应传感器连接到位于另一个物体附近的两个磁体之间的一个质量块 一个质量相对于另一个的运动改变了霍尔效应传感器周围的磁场。 该变化由霍尔效应传感器感测。

公开(公告)号：US4984463A

公开(公告)日：1991-01-15

申请号：US412494

申请日：1989-09-26

申请人： Takaharu Idogaki ,  Ikuo Hayashi ,  Toshihisa Ishihara ,  Hideo Inoue ,  Tatsuo Sugitani

发明人： Takaharu Idogaki ,  Ikuo Hayashi ,  Toshihisa Ishihara ,  Hideo Inoue ,  Tatsuo Sugitani

IPC分类号： B60R21/01 ,  G01P15/08 ,  G01P15/105 ,  G01P15/18

CPC分类号： G01P15/105 ,  B60R21/0132 ,  G01P15/0888 ,  G01P15/18

摘要： An acceleration sensor for detecting an acceleration in a plane, and having a housing, and a disk magnet arranged in a magnetic fludi stored in the housing. The movement of disk magnet is limited, i.e., a translational movement or rotational movement thereof can occur only in the plane, by projections formed in the housing, between which projections portions of the magnetic fluid having an increased density are formed adjacent to the poles of the disk magnet so that only a translational movement is allowed, or by small circumferential walls between the housing and the disk magnet and radial projections formed between end walls of the housing and disk magnet so that only a rotational movement is allowed. A Hall element issues a signal corresponding to a position of the disk magnet, to thereby determine the acceleration rate.

摘要翻译： 一种用于检测平面中的加速度并具有壳体的加速度传感器和布置在存储在壳体中的磁性纤维中的盘状磁体。 磁盘磁体的移动受到限制，即，平移运动或其旋转运动只能在平面内，通过形成在壳体中的凸起发生，其中具有增加的密度的磁性流体的突出部分形成在邻近于 盘状磁体，使得仅允许平移运动，或者通过壳体和磁盘磁体之间的小圆周壁以及形成在壳体和磁盘磁体的端壁之间的径向突起，使得仅允许旋转运动。 霍尔元件发出对应于磁盘磁体位置的信号，从而确定加速度。

公开(公告)号：US4967598A

公开(公告)日：1990-11-06

申请号：US233428

申请日：1988-08-18

申请人： Noboru Wakatsuki ,  Shigemi Kurashima ,  Nobuyoshi Shimizu ,  Michiko Endoh ,  Akira Tanaka

发明人： Noboru Wakatsuki ,  Shigemi Kurashima ,  Nobuyoshi Shimizu ,  Michiko Endoh ,  Akira Tanaka

IPC分类号： G01P15/08 ,  G01P15/105

CPC分类号： G01P15/105 ,  G01P15/0802 ,  G01P2015/0817 ,  Y10S73/03

摘要： An acceleration sensor including a cantilever beam having a free end to which a permanent magnet is attached. A pair of magnetic sensors, each comprising a barber-pole type magnetoresistive sensing element, is arranged in symmetrically spaced and opposed relationship and in a common plane extending parallel to the magnetic flux of the permanent magnet with respect to respective, opposite sides of the magnet. The cantilever is bent and the magnet is moved accordingly in response to an acceleration force, which is detected as outputs from the magnetoresistive sensing elements.

公开(公告)号：US4922753A

公开(公告)日：1990-05-08

申请号：US199747

申请日：1988-05-27

申请人： Takaharu Idogaki ,  Ikuo Hayashi ,  Toshihisa Ishihara ,  Tatsuo Sugitani ,  Hideo Inoue

发明人： Takaharu Idogaki ,  Ikuo Hayashi ,  Toshihisa Ishihara ,  Tatsuo Sugitani ,  Hideo Inoue

IPC分类号： G01P15/02 ,  G01P15/08 ,  G01P15/105 ,  G01P15/11

CPC分类号： G01P15/11 ,  G01P15/08 ,  G01P15/105

摘要： An acceleration sensor including a magnetic fluid, a permanent magnet emplaced movably in the magnetic fluid, a nonmagnetic case, in which case the magnetic fluid and the permanent magnet are sealed and from which case air is substantially excluded, the shape of internal receptacle of the case dominating the shape of the magnetic fluid, whereby the path of the magnetic flux generated by the permanent magnet is restricted and the permanent magnet in the magnetic fluid is given an automatic positioning function, a unit for detecting the position of the permanent magnet, and a processing circuit for processing signals from the detection unit.