摘要:
In a substrate processing apparatus according to the present invention, wafer transfer timing with which wafers are to be transferred to individual processing chambers from a cassette container is determined in correspondence to each processing chamber, based upon the lengths of time required to process a single wafer in the processing chambers. Then, wafers are transferred from the cassette container in conformance to the transfer timing thus determined. By setting the wafer transfer timing with which wafers are transferred from the cassette container in coordination with the lengths of processing time at the individual processing chambers, the operation rates in the processing chambers are improved and ultimately, the throughput of the apparatus is improved.
摘要:
In the present invention, two coil-shaped probes each detecting the intensity of a magnetic field in a direction around a center axis of a processing space are provided in a process vessel of a plasma processing apparatus. Each of the probes detects an induced electromotive force generated in the coil, and a computer calculates an amount of radio-frequency current from the induced electromotive force, based on a predetermined calculation principle. A difference between the amounts of the radio-frequency current detected by the probes is calculated, and a loss radio-frequency current amount passing out of a plasma area between upper and lower electrodes is calculated, whereby the flow of the radio-frequency current in the plasma is known.
摘要:
Even when a cell electrode plate with broader width is press formed to enhance bulk density of electrode active material, it is made possible to positively and reliably provide a high-quality cell electrode plate with good productivity. From upstream to downstream in a travel direction of a cell electrode plate including a core member with electrode active material applied thereon, an uncoiler, a tension applicator, a four-high mill type roll press device, a thickness detector, a tension applicator and a coiler are arranged in the order named.
摘要:
A scanned image management device comprises a receiving unit which receives a scanned image. A selecting unit causes a user to select a tag from among a set of pre-defined tags or newly generated tags. A first registering unit generates an image-to-tag association between a scanned image and a selected tag to register the scanned image with the image-to-tag association. A second registering unit generates a tag-to-tag association between tags independently defined for scanned images to register the tag-to-tag association. A retrieving unit retrieves a target scanned image by using the selected tag, the image-to-tag association, and the tag-to-tag association.
摘要:
A cell array selection circuit, a cell array bit line precharge circuit, and a sense amplifier bit line precharge circuit are provided in a semiconductor storage apparatus. In a standby state of read/write operation, the cell array selection circuit is controlled to an inactive state, and the bit line precharge circuits are controlled to an active state. In an active state of read/write operation, the cell array selection circuit to be selected is controlled to an active state, and the cell array bit line precharge circuit and the sense amplifier bit line precharge circuit are controlled to an inactive state. Cell array selection transistors, sense amplifier bit line precharge transistors, and control signals supplied to gate electrodes of the transistors are set in which change in potential provided on a cell array bit line pair when the states of the transistors change is cancelled.
摘要:
A developing device that supplies developer to an image carrier. In a developing device having a developer carrier that is driven in rotation by drive force applied to a gear provided on the shaft section thereof, the developer carrier being pressed in the direction of the image carrier, the effect of the gear drive force on the pressing force of the developer carrier onto the image carrier can be eliminated. The bearing that supports the shaft section is made slidable and the sliding direction of the bearing with respect to the direction of the drive force is set at about 90°.
摘要:
An engine unit and a control unit are connected via an interface. A power source supplies electric power to the interface. The engine unit is controlled based on a reference clock generated in the control unit and transmitted to the engine unit via the interface. Only when a voltage output from the power source to the interface is in the operating-voltage range, the clock generator sends the reference clock to the engine unit via the interface.
摘要:
A microelectronic device, including at least one transistor including: on a substrate, a semiconductor zone with a channel zone covered with a gate dielectric zone, a mobile gate, suspended above the gate dielectric zone and separated from the gate dielectric zone by an empty space, which the gate is located at an adjustable distance from the gate dielectric zone, and a piezoelectric actuation device including a stack formed by at least one layer of piezoelectric material resting on a first biasing electrode, and a second biasing electrode resting on the piezoelectric material layer, wherein the gate is attached to the first biasing electrode and is in contact with the first biasing electrode, and the piezoelectric actuation device is configured to move the gate with respect to the channel zone.
摘要:
The present invention relates to an image processing system and an image processing method, an image pickup apparatus and an image pickup method, and an image display device and an image display method, which can faithfully pick up and display the colors of an object. Slit light of an optical image of the object that has passed through a slit 42 is divided into a spectrum by a light divider 43. A light sensor 44 outputs image data based on the spectrum of the slit light of the optical image of the object. A micromirror array 74 causes the exiting of reflection light formed by extracting spectrum portions based on the image data from a spectrum of incident white light from a light divider 73. The spectrum portions of the reflection light exiting from the micromirror array 74 are synthesized by a spectrum synthesizer 77 and are projected onto a screen 111. The present invention is applicable to the image processing system.
摘要:
A logic diagram search device of the present invention includes a movement amount estimation section, a computation element/signal line correspondence calculation section, and a similarity degree calculation section. The movement amount estimation section estimates a diagram movement amount between a criterion diagram and a comparative diagram based on a coordinates variation amount. The computation element/signal line correspondence calculation section generates correspondence between a signal line in the criterion diagram connecting the computation elements that have been objects of a correspondence generation operation and a signal line in the comparative diagram connecting the computation elements that have been objects of the correspondence generation operation. The similarity degree calculation section calculates the degree of similarity between the criterion diagram and the comparative diagram based on the computation elements and the signal lines for which the correspondence is generated.