Substrate processing apparatus and substrate transfer method adopted in substrate processing apparatus
    1.
    发明授权

    公开(公告)号:US08078311B2

    公开(公告)日:2011-12-13

    申请号:US11289316

    申请日:2005-11-30

    申请人: Tatsuya Ogi

    发明人: Tatsuya Ogi

    IPC分类号: G06F7/00

    摘要: In a substrate processing apparatus according to the present invention, wafer transfer timing with which wafers are to be transferred to individual processing chambers from a cassette container is determined in correspondence to each processing chamber, based upon the lengths of time required to process a single wafer in the processing chambers. Then, wafers are transferred from the cassette container in conformance to the transfer timing thus determined. By setting the wafer transfer timing with which wafers are transferred from the cassette container in coordination with the lengths of processing time at the individual processing chambers, the operation rates in the processing chambers are improved and ultimately, the throughput of the apparatus is improved.

    摘要翻译: 在根据本发明的衬底处理装置中,基于处理单个晶片所需的时间长度,根据每个处理室确定晶片从盒式存储器转移到各个处理室的晶片传送定时 在处理室中。 然后,根据这样确定的传送时间,从盒式容器传送晶片。 通过与各个处理室的处理时间的长度一致地设置从盒式存储器传送晶片的晶片传送时间,处理室中的操作速度得到改善,并且最终提高了设备​​的吞吐量。

    Plasma processing apparatus and method of measuring amount of radio-frequency current in plasma
    2.
    发明授权
    Plasma processing apparatus and method of measuring amount of radio-frequency current in plasma 有权
    等离子体处理装置和测量等离子体中射频电流量的方法

    公开(公告)号:US07993487B2

    公开(公告)日:2011-08-09

    申请号:US11692340

    申请日:2007-03-28

    申请人: Yohei Yamazawa

    发明人: Yohei Yamazawa

    IPC分类号: H01L21/00 C23C16/00 C23C14/00

    摘要: In the present invention, two coil-shaped probes each detecting the intensity of a magnetic field in a direction around a center axis of a processing space are provided in a process vessel of a plasma processing apparatus. Each of the probes detects an induced electromotive force generated in the coil, and a computer calculates an amount of radio-frequency current from the induced electromotive force, based on a predetermined calculation principle. A difference between the amounts of the radio-frequency current detected by the probes is calculated, and a loss radio-frequency current amount passing out of a plasma area between upper and lower electrodes is calculated, whereby the flow of the radio-frequency current in the plasma is known.

    摘要翻译: 在本发明中,在等离子体处理装置的处理容器中设置有两个在处理空间的中心轴方向上检测磁场强度的线圈形探针。 每个探针检测线圈中产生的感应电动势,并且计算机基于预定的计算原理从感应电动势计算射频电流量。 计算由探针检测的射频电流量之间的差异,并计算从上,下电极之间的等离子体区域流出的损失射频电流量,由此,射频电流 等离子体是已知的。

    Facility for forming cell electrode plate
    3.
    发明授权
    Facility for forming cell electrode plate 有权
    电池电极板成型设备

    公开(公告)号:US07967594B2

    公开(公告)日:2011-06-28

    申请号:US11813108

    申请日:2005-01-25

    IPC分类号: B21B31/02

    摘要: Even when a cell electrode plate with broader width is press formed to enhance bulk density of electrode active material, it is made possible to positively and reliably provide a high-quality cell electrode plate with good productivity. From upstream to downstream in a travel direction of a cell electrode plate including a core member with electrode active material applied thereon, an uncoiler, a tension applicator, a four-high mill type roll press device, a thickness detector, a tension applicator and a coiler are arranged in the order named.

    摘要翻译: 即使压制形成宽度较宽的电池电极板以提高电极活性物质的体积密度,也能够以良好的生产率正确,可靠地提供高质量的电池电极板。 在包括具有施加电极活性物质的芯构件的电池电极板的行进方向的上游到下游,开卷机,张力施加器,四辊轧机型辊压装置,厚度检测器,张力施加器和 卷取机按照命名排列。

    Scanned image management device
    4.
    发明授权
    Scanned image management device 有权
    扫描图像管理设备

    公开(公告)号:US07949206B2

    公开(公告)日:2011-05-24

    申请号:US11608038

    申请日:2006-12-07

    IPC分类号: G06K9/60 G06F7/00 G06F17/30

    摘要: A scanned image management device comprises a receiving unit which receives a scanned image. A selecting unit causes a user to select a tag from among a set of pre-defined tags or newly generated tags. A first registering unit generates an image-to-tag association between a scanned image and a selected tag to register the scanned image with the image-to-tag association. A second registering unit generates a tag-to-tag association between tags independently defined for scanned images to register the tag-to-tag association. A retrieving unit retrieves a target scanned image by using the selected tag, the image-to-tag association, and the tag-to-tag association.

    摘要翻译: 扫描图像管理装置包括接收扫描图像的接收单元。 选择单元使得用户从一组预定义标签或新生成的标签中选择标签。 第一注册单元在扫描图像和所选标签之间生成图像到标签关联,以用图像到标签关联来注册扫描图像。 第二注册单元在为被扫描的图像独立地定义的标签之间生成标签到标签关联以注册标签到标签关联。 检索单元通过使用所选标​​签,图像到标签关联以及标签到标签关联来检索目标扫描图像。

    Semiconductor storage apparatus
    5.
    发明授权
    Semiconductor storage apparatus 失效
    半导体存储装置

    公开(公告)号:US07619939B2

    公开(公告)日:2009-11-17

    申请号:US11950732

    申请日:2007-12-05

    申请人: Yasuyuki Kajitani

    发明人: Yasuyuki Kajitani

    IPC分类号: G11C7/00

    摘要: A cell array selection circuit, a cell array bit line precharge circuit, and a sense amplifier bit line precharge circuit are provided in a semiconductor storage apparatus. In a standby state of read/write operation, the cell array selection circuit is controlled to an inactive state, and the bit line precharge circuits are controlled to an active state. In an active state of read/write operation, the cell array selection circuit to be selected is controlled to an active state, and the cell array bit line precharge circuit and the sense amplifier bit line precharge circuit are controlled to an inactive state. Cell array selection transistors, sense amplifier bit line precharge transistors, and control signals supplied to gate electrodes of the transistors are set in which change in potential provided on a cell array bit line pair when the states of the transistors change is cancelled.

    摘要翻译: 单元阵列选择电路,单元阵列位线预充电电路和读出放大器位线预充电电路设置在半导体存储装置中。 在读/写操作的待机状态下,将单元阵列选择电路控制为无效状态,并将位线预充电电路控制为活动状态。 在读/写操作的有效状态下,要选择的单元阵列选择电路被控制为有效状态,并且单元阵列位线预充电电路和读出放大器位线预充电电路被控制为非活动状态。 设置单元阵列选择晶体管,读出放大器位线预充电晶体管和提供给晶体管的栅电极的控制信号,其中当晶体管的状态改变时,在单元阵列位线对上提供的电位变化被消除。

    Image processing apparatus and method of transmitting reference clock
    7.
    发明授权
    Image processing apparatus and method of transmitting reference clock 有权
    图像处理装置和发送参考时钟的方法

    公开(公告)号:US07930582B2

    公开(公告)日:2011-04-19

    申请号:US11936451

    申请日:2007-11-07

    申请人: Yuuichi Nagasawa

    发明人: Yuuichi Nagasawa

    IPC分类号: G06F1/00 G06F11/00

    CPC分类号: H03K17/22

    摘要: An engine unit and a control unit are connected via an interface. A power source supplies electric power to the interface. The engine unit is controlled based on a reference clock generated in the control unit and transmitted to the engine unit via the interface. Only when a voltage output from the power source to the interface is in the operating-voltage range, the clock generator sends the reference clock to the engine unit via the interface.

    摘要翻译: 引擎单元和控制单元通过接口连接。 电源为接口供电。 发动机单元基于在控制单元中产生的参考时钟进行控制,并通过接口发送到发动机单元。 只有当从电源输出到接口的电压处于工作电压范围时,时钟发生器才会通过接口将参考时钟发送到引擎单元。

    Suspended-gate MOS transistor with non-volatile operation
    8.
    发明授权
    Suspended-gate MOS transistor with non-volatile operation 有权
    具有非易失性操作的悬挂栅极MOS晶体管

    公开(公告)号:US07812410B2

    公开(公告)日:2010-10-12

    申请号:US12168417

    申请日:2008-07-07

    摘要: A microelectronic device, including at least one transistor including: on a substrate, a semiconductor zone with a channel zone covered with a gate dielectric zone, a mobile gate, suspended above the gate dielectric zone and separated from the gate dielectric zone by an empty space, which the gate is located at an adjustable distance from the gate dielectric zone, and a piezoelectric actuation device including a stack formed by at least one layer of piezoelectric material resting on a first biasing electrode, and a second biasing electrode resting on the piezoelectric material layer, wherein the gate is attached to the first biasing electrode and is in contact with the first biasing electrode, and the piezoelectric actuation device is configured to move the gate with respect to the channel zone.

    摘要翻译: 一种微电子器件,包括至少一个晶体管,其包括:在衬底上,具有覆盖有栅极介电区的沟道区的半导体区,悬浮在栅极介电区上方的移动栅极,并与栅极介电区隔开空位 栅极位于与栅极介电区域可调节的距离处,以及压电致动装置,其包括由至少一层静电在第一偏置电极上的压电材料形成的叠层,以及沉积在压电材料上的第二偏置电极 层,其中所述栅极附接到所述第一偏置电极并且与所述第一偏置电极接触,并且所述压电致动装置被配置为相对于所述沟道区移动所述栅极。

    Image processing system and method for pick up and display of an object including division of an optical image of the object into a spectrum
    9.
    发明授权
    Image processing system and method for pick up and display of an object including division of an optical image of the object into a spectrum 失效
    用于拾取和显示对象的图像处理系统和方法,包括将对象的光学图像划分为光谱

    公开(公告)号:US07724298B2

    公开(公告)日:2010-05-25

    申请号:US10574590

    申请日:2004-10-12

    CPC分类号: G03B21/005

    摘要: The present invention relates to an image processing system and an image processing method, an image pickup apparatus and an image pickup method, and an image display device and an image display method, which can faithfully pick up and display the colors of an object. Slit light of an optical image of the object that has passed through a slit 42 is divided into a spectrum by a light divider 43. A light sensor 44 outputs image data based on the spectrum of the slit light of the optical image of the object. A micromirror array 74 causes the exiting of reflection light formed by extracting spectrum portions based on the image data from a spectrum of incident white light from a light divider 73. The spectrum portions of the reflection light exiting from the micromirror array 74 are synthesized by a spectrum synthesizer 77 and are projected onto a screen 111. The present invention is applicable to the image processing system.

    摘要翻译: 本发明涉及一种图像处理系统和图像处理方法,图像拾取装置和图像拾取方法以及能够忠实地拾取和显示对象的颜色的图像显示装置和图像显示方法。 已经通过狭缝42的物体的光学图像的狭缝光被分光器43分成光谱。光传感器44基于物体的光学图像的狭缝光的光谱输出图像数据。 微镜阵列74通过基于来自分光器73的入射白光的光谱的图像数据提取光谱部分而形成的反射光的出射。从微反射镜阵列74出射的反射光的光谱部分由 频谱合成器77并被投影到屏幕111上。本发明可应用于图像处理系统。

    Logic diagram search device
    10.
    发明授权
    Logic diagram search device 有权
    逻辑图搜索装置

    公开(公告)号:US08495054B2

    公开(公告)日:2013-07-23

    申请号:US13366693

    申请日:2012-02-06

    IPC分类号: G06F17/30

    CPC分类号: G06F17/30259

    摘要: A logic diagram search device of the present invention includes a movement amount estimation section, a computation element/signal line correspondence calculation section, and a similarity degree calculation section. The movement amount estimation section estimates a diagram movement amount between a criterion diagram and a comparative diagram based on a coordinates variation amount. The computation element/signal line correspondence calculation section generates correspondence between a signal line in the criterion diagram connecting the computation elements that have been objects of a correspondence generation operation and a signal line in the comparative diagram connecting the computation elements that have been objects of the correspondence generation operation. The similarity degree calculation section calculates the degree of similarity between the criterion diagram and the comparative diagram based on the computation elements and the signal lines for which the correspondence is generated.

    摘要翻译: 本发明的逻辑图搜索装置包括移动量估计部分,计算元件/信号线对应计算部分和相似度计算部分。 移动量估计部基于坐标变化量来估计基准图和比较图之间的图表移动量。 计算元件/信号线对应计算部生成将连接了对应生成动作的对象的计算元素的标准图中的信号线与连接作为对象生成动作的对象的计算元素的比较图中的信号线之间的对应关系 通信生成操作。 相似度计算部分基于计算元素和产生对应关系的信号线来计算标准图和比较图之间的相似度。