摘要:
An imprinting stamp and a nano-imprinting method using the imprinting stamp are provided. The imprinting stamp includes a first substrate; one or more field regions on the first substrate, the first substrate including nano-patterns; and a first dummy pattern region on the first substrate and adjacent to the field region, the dummy pattern region including first dummy patterns having greater dimensions than that of the nano-patterns, the first dummy patterns being a plurality of polygons, each of the polygons having a vertex pointing in a first direction proceeding from the field region toward the first dummy pattern region.
摘要:
The present invention relates to an offshore wind power generator, a lifting jig for transferring the offshore wind power generator, and a method for installing the offshore wind power generator using the lifting jig. The offshore wind power generator according to an embodiment of the present invention includes a blade, a nacelle including a power generator for generating power by the rotation of the blade, and a tower supporting the nacelle and installed on a support structure installed offshore. Also, the offshore wind power generator includes a tower support structure installed on the tower so that the tower is lifted using a predetermined transfer unit in a state where the blade, the nacelle, and the tower are integrally assembled. The tower support structure is disposed above a center of gravity of the wind power generator at which the blade, nacelle, and the tower are integrally assembled.
摘要:
A process and an apparatus for performing a UV nano-imprint lithography are provided. The process uses a polymer pad which allows a uniform application of pressure to a patterned template and an easy removal of a residual resin layer. The apparatus includes a tilt and decentering corrector which allows an accurate alignment of layers during the nano-imprint lithography process.
摘要:
A stamp includes at least one protrusion on a protrusion pattern, and an end portion of the at least one protrusion may have a non-planarized surface. The end portion of the protrusion may have a concave structure, that is, the end portion includes a center region and an edge region, and the edge region is higher than the center region.
摘要:
A method of fabricating a nanoimprint stamp includes forming a resist pattern having a nano size width on a stamp substrate by performing imprint processes repeatedly. In the imprint processes, resist layers that are selectively etched are sequentially used. The stamp substrate is etched using the resist pattern as an etch mask.
摘要:
Organic-inorganic hybrid materials may be inorganic-based materials including more inorganic material than organic material. The organic-inorganic hybrid materials may include a backbone material, a release material, and a photoinitiator. The backbone material may be formed of an inorganic material, and at least one of the release material and the photoinitiator may be formed of an organic material. The backbone material may include a compound (e.g., an oxide or a nitride) containing at least one selected from the group consisting of Si, In, Zn, Al, and Ti. The release material may include at least one selected from the group consisting of alkyl (CnH2n+1), C, F, and Si.
摘要翻译:有机 - 无机混合材料可以是包括比有机材料更多的无机材料的无机基材料。 有机 - 无机混合材料可以包括骨架材料,剥离材料和光引发剂。 骨架材料可以由无机材料形成,并且剥离材料和光引发剂中的至少一种可以由有机材料形成。 骨架材料可以包括含有选自Si,In,Zn,Al和Ti中的至少一种的化合物(例如,氧化物或氮化物)。 剥离材料可以包括选自烷基(C n H 2n + 1),C,F和Si中的至少一种。
摘要:
A cross point memory array includes a structure in which holes are formed in an insulating layer and a storage node is formed in each of the holes. The storage node may include a memory resistor and a switching structure. The master for an imprint process used to form the cross-point memory array includes various pattern shapes, and the method of manufacturing the master uses various etching methods.
摘要:
Humanized antibodies specifically binding to hTNF-α are prepared from a mouse monoclonal antibody by the CDR (complementarity determining region) grafting method, and they show an antigen binding affinity similar to the original mouse monoclonal antibody and significantly low immunogenicity. Therefore, the humanized antibodies can be effectively used for treating a hTNF-α-related disease such as rheumatoid arthritis, Crohn's disease, psoriatic arthritis, psoriasis, septicemia, asthma, Wegener's granulomatosis, inflammation, and ankylosing spondylitis.
摘要:
A process and an apparatus for performing a UV nano-imprint lithography are provided. The process uses a polymer pad which allows a uniform application of pressure to a patterned template and an easy removal of a residual resin layer. The apparatus includes a tilt and decentering corrector which allows an accurate alignment of layers during the nano-imprint lithography process.
摘要:
A method of manufacturing a solvent-soluble stamp for nano-imprint lithography is provided. According to the method, a stamp is formed on a master substrate made of an ultraviolet-transparent material, using a material which is soluble in a solvent, and then a metal stamp or another stamp for a nano-imprint lithography is manufactured using the solvent-soluble stamp. Next, the stamp for nano-imprint lithography can be achieved by melting the soluble stamp. Therefore, it is possible to reuse the master several times. Further, it is possible to solve a problem in which a mold cannot be separated from the stamp. Furthermore, a uniform and clean stamp with a nano size can be obtained.