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1.发明授权Systems, circuits and methods for reducing thermal damage and extending the detection range of an inspection system 有权用于减少热损伤并延长检查系统检测范围的系统，电路和方法公开(公告)号：US07436508B2
公开(公告)日：2008-10-14
申请号：US11181228
申请日：2005-07-14
IPC分类号： G01N21/00
CPC分类号： G01N21/47 , G01N21/21 , G01N21/9501 , G01N21/95607
摘要： Inspection systems, circuits, and methods are provided to enhance defect detection by reducing thermal damage to large particles by dynamically altering the incident laser beam power level supplied to the specimen during a surface inspection scan. In one embodiment, an inspection system includes an illumination subsystem for directing light to a specimen at a first power level, a detection subsystem for detecting light scattered from the specimen, and a power attenuator subsystem for dynamically altering the power level directed to the specimen based on the scattered light detected from the specimen. For example, the power attenuator subsystem may reduce the directed light to a second power level, which is lower than the first, if the detected scattered light exceeds a predetermined threshold level. In addition reducing thermal damage, the systems and methods described herein may be used to extend the measurement detection range of an inspection system by providing a variable-power inspection system.
摘要翻译： 提供检查系统，电路和方法以通过在表面检查扫描期间动态地改变提供给样本的入射激光束功率水平来减小对大颗粒的热损伤来增强缺陷检测。 在一个实施例中，检查系统包括用于将光引导到第一功率级的样本的照明子系统，用于检测从样本散射的光的检测子系统和用于动态地改变针对标本的功率水平的功率衰减器子系统 对从样品检测到的散射光。 例如，如果检测到的散射光超过预定的阈值电平，则功率衰减器子系统可以将定向光减少到低于第一功率电平的第二功率电平。 此外，减少热损伤，本文所述的系统和方法可以用于通过提供可变功率检查系统来扩展检查系统的测量检测范围。
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2.发明授权Inspection systems and methods for extending the detection range of an inspection system by forcing the photodetector into the non-linear range 有权用于通过强制光电探测器进入非线性范围来扩展检查系统的检测范围的检查系统和方法公开(公告)号：US07746462B2
公开(公告)日：2010-06-29
申请号：US11751293
申请日：2007-05-21
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/8851 , G01N2201/1241 , G01N2201/12769 , H01J43/18 , H01J43/30
摘要： An inspection system and method is provided herein for increasing the detection range of the inspection system. According to one embodiment, the inspection system may include a photodetector having a plurality of stages, which are adapted to convert light scattered from a specimen into an output signal, and a voltage divider network coupled for extending the detection range of the photodetector (and thus, the detection range of the inspection system) by saturating at least one of the stages. This forces the photodetector to operate in a non-linear manner. However, measurement inaccuracies are avoided by calibrating the photodetector output to remove any non-linear effects that may be created by intentionally saturating the at least one of the stages. In one example, a table of values may be generated during a calibration phase to convert the photodetector output into an actual amount of scattered light.
摘要翻译： 本文提供了一种用于增加检查系统的检测范围的检查系统和方法。 根据一个实施例，检查系统可以包括具有多个级的光电检测器，其适于将从样本散射的光转换成输出信号，以及耦合的用于扩展光电检测器的检测范围的分压器网络 ，检查系统的检测范围）通过饱和至少一个级。 这迫使光电探测器以非线性方式工作。 然而，通过校准光电检测器输出以消除可能通过故意饱和至少一个级而产生的任何非线性效应来避免测量不准确。 在一个示例中，可以在校准阶段期间生成值表，以将光电检测器输出转换成实际的散射光量。
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3.发明申请Inspection Systems and Methods for Extending the Detection Range of an Inspection System by Forcing the Photodetector into the Non-Linear Range 有权检测系统和方法通过强制光检测器进入非线性范围来扩展检测系统的检测范围公开(公告)号：US20080291454A1
公开(公告)日：2008-11-27
申请号：US11751293
申请日：2007-05-21
IPC分类号： G01N21/55
CPC分类号： G01N21/9501 , G01N21/8851 , G01N2201/1241 , G01N2201/12769 , H01J43/18 , H01J43/30
摘要： An inspection system and method is provided herein for increasing the detection range of the inspection system. According to one embodiment, the inspection system may include a photodetector having a plurality of stages, which are adapted to convert light scattered from a specimen into an output signal, and a voltage divider network coupled for extending the detection range of the photodetector (and thus, the detection range of the inspection system) by saturating at least one of the stages. This forces the photodetector to operate in a non-linear manner. However, measurement inaccuracies are avoided by calibrating the photodetector output to remove any non-linear effects that may be created by intentionally saturating the at least one of the stages. In one example, a table of values may be generated during a calibration phase to convert the photodetector output into an actual amount of scattered light.
摘要翻译： 本文提供了一种用于增加检查系统的检测范围的检查系统和方法。 根据一个实施例，检查系统可以包括具有多个级的光电检测器，其适于将从样本散射的光转换成输出信号，以及耦合的用于扩展光电检测器的检测范围的分压器网络 ，检查系统的检测范围）通过饱和至少一个级。 这迫使光电探测器以非线性方式工作。 然而，通过校准光电检测器输出以消除可能通过故意饱和至少一个级而产生的任何非线性效应来避免测量不准确。 在一个示例中，可以在校准阶段期间生成值表，以将光电检测器输出转换成实际的散射光量。
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4.发明授权Systems, circuits and methods for extending the detection range of an inspection system by avoiding circuit saturation 有权通过避免电路饱和来延长检查系统的检测范围的系统，电路和方法公开(公告)号：US07423250B2
公开(公告)日：2008-09-09
申请号：US11181237
申请日：2005-07-14
IPC分类号： H03F3/08
CPC分类号： H03F3/08
摘要： Inspection systems, circuits and methods are provided to enhance defect detection by addressing saturation levels of the amplifier and analog-digital circuitry as a limiting factor of the measurement detection range of an inspection system. In accordance with one embodiment of the invention, a method for inspecting a specimen includes directing light to the specimen and detecting light scattered from the specimen. However, the step of detecting may use only one photodetector for detecting the light scattered from the specimen and for converting the light into an electrical signal. The step of detecting also includes generating a first signal and a second signal in response to the electrical signal, where the second signal differs from the first. For example, the first signal may be generated to have a higher resolution than the second signal for detecting substantially lower levels of the scattered light. In most cases, the method may use the first signal for detecting features, defects or light scattering properties of the specimen until the first signal reaches a predetermined threshold value. Once the predetermined threshold value is reached, however, the method may use the second signal for said detecting.
摘要翻译： 提供了检查系统，电路和方法，以通过解决放大器和模拟数字电路的饱和电平作为检查系统的测量检测范围的限制因素来增强缺陷检测。 根据本发明的一个实施例，用于检查样本的方法包括将光引导到样本并检测从样本散射的光。 然而，检测步骤可以仅使用一个光电检测器来检测从样本散射的光并将光转换成电信号。 检测步骤还包括响应于电信号产生第一信号和第二信号，其中第二信号与第一信号不同。 例如，可以产生第一信号以具有比用于检测基本上较低级别的散射光的第二信号更高的分辨率。 在大多数情况下，该方法可以使用第一信号来检测样本的特征，缺陷或光散射性质，直到第一信号达到预定阈值。 然而，一旦达到预定阈值，该方法可以使用第二信号进行所述检测。
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5.发明申请SYSTEMS, CIRCUITS AND METHODS FOR REDUCING THERMAL DAMAGE AND EXTENDING THE DETECTION RANGE OF AN INSPECTION SYSTEM 有权用于减少热损害并延长检测系统检测范围的系统，电路和方法公开(公告)号：US20090096505A1
公开(公告)日：2009-04-16
申请号：US12251227
申请日：2008-10-14
IPC分类号： G05F1/00
CPC分类号： G01N21/47 , G01N21/21 , G01N21/9501 , G01N21/95607
摘要： Inspection systems, circuits, and methods are provided to enhance defect detection by reducing thermal damage to large particles by dynamically altering the incident laser beam power level supplied to the specimen during a surface inspection scan. In one embodiment, an inspection system includes an illumination subsystem for directing light to a specimen at a first power level, a detection subsystem for detecting light scattered from the specimen, and a power attenuator subsystem for dynamically altering the power level directed to the specimen based on the scattered light detected from the specimen. For example, the power attenuator subsystem may reduce the directed light to a second power level, which is lower than the first, if the detected scattered light exceeds a predetermined threshold level. In addition reducing thermal damage, the systems and methods described herein may be used to extend the measurement detection range of an inspection system by providing a variable-power inspection system.
摘要翻译： 提供检查系统，电路和方法以通过在表面检查扫描期间动态地改变提供给样本的入射激光束功率水平来减小对大颗粒的热损伤来增强缺陷检测。 在一个实施例中，检查系统包括用于将光引导到第一功率级的样本的照明子系统，用于检测从样本散射的光的检测子系统和用于动态地改变针对标本的功率水平的功率衰减器子系统 对从样品检测到的散射光。 例如，如果检测到的散射光超过预定的阈值电平，则功率衰减器子系统可以将定向光减少到低于第一功率电平的第二功率电平。 此外，减少热损伤，本文所述的系统和方法可以用于通过提供可变功率检查系统来扩展检查系统的测量检测范围。
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6.发明授权Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation 有权用于通过避免检测器饱和来扩展检测系统的检测范围的系统，电路和方法公开(公告)号：US07414715B2
公开(公告)日：2008-08-19
申请号：US11181519
申请日：2005-07-14
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/95607 , H01J43/30
摘要： Inspection systems, circuits and methods are provided to enhance defect detection by addressing anode saturation as a limiting factor of the measurement detection range of a photomultiplier tube (PMT) detector. In accordance with one embodiment of the invention, a method for inspecting a specimen includes directing light to the specimen and detecting light scattered from the specimen. The step of detecting may include monitoring an anode current of the PMT detector, and detecting features, defects or light scattering properties of the specimen using the anode current until the anode current reaches a predetermined threshold. Thereafter, the method may use a dynode current of the PMT for detecting the features, defects or light scattering properties of the specimen.
摘要翻译： 提供检测系统，电路和方法，以通过寻址阳极饱和度作为光电倍增管（PMT）检测器的测量检测范围的限制因素来增强缺陷检测。 根据本发明的一个实施例，用于检查样本的方法包括将光引导到样本并检测从样本散射的光。 检测步骤可以包括监测PMT检测器的阳极电流，并且使用阳极电流检测样品的特征，缺陷或光散射特性，直到阳极电流达到预定阈值。 此后，该方法可以使用PMT的倍增电流来检测样品的特征，缺陷或光散射性质。
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7.发明授权Systems, circuits and methods for reducing thermal damage and extending the detection range of an inspection system 有权用于减少热损伤并延长检查系统检测范围的系统，电路和方法公开(公告)号：US07671982B2
公开(公告)日：2010-03-02
申请号：US12251227
申请日：2008-10-14
IPC分类号： G01N21/00
CPC分类号： G01N21/47 , G01N21/21 , G01N21/9501 , G01N21/95607
摘要： Inspection systems, circuits, and methods are provided to enhance defect detection by reducing thermal damage to large particles by dynamically altering the incident laser beam power level supplied to the specimen during a surface inspection scan. In one embodiment, an inspection system includes an illumination subsystem for directing light to a specimen at a first power level, a detection subsystem for detecting light scattered from the specimen, and a power attenuator subsystem for dynamically altering the power level directed to the specimen based on the scattered light detected from the specimen. The power attenuator subsystem may reduce the directed light to a second power level, which is lower than the first, if the detected scattered light exceeds a predetermined threshold level. The systems and methods described herein may also be used to extend the measurement detection range of an inspection system by providing a variable-power inspection system.
摘要翻译： 提供检查系统，电路和方法以通过在表面检查扫描期间动态地改变提供给样本的入射激光束功率水平来减小对大颗粒的热损伤来增强缺陷检测。 在一个实施例中，检查系统包括用于将光引导到第一功率级的样本的照明子系统，用于检测从样本散射的光的检测子系统和用于动态地改变针对标本的功率水平的功率衰减器子系统 对从样品检测到的散射光。 如果检测到的散射光超过预定的阈值电平，则功率衰减器子系统可将定向光减少至低于第一功率电平的第二功率电平。 本文所述的系统和方法还可以用于通过提供可变功率检查系统来扩展检查系统的测量检测范围。
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8.发明授权Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturation 有权用于通过避免检测器饱和来扩展检测系统的检测范围的系统，电路和方法公开(公告)号：US07777875B2
公开(公告)日：2010-08-17
申请号：US12193469
申请日：2008-08-18
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/95607 , H01J43/30
摘要： Inspection systems, circuits and methods are provided to enhance defect detection by addressing anode saturation as a limiting factor of the measurement detection range of a photomultiplier tube (PMT) detector. In accordance with one embodiment of the invention, a method for inspecting a specimen includes directing light to the specimen and detecting light scattered from the specimen. The step of detecting may include monitoring an anode current of the PMT detector, and detecting features, defects or light scattering properties of the specimen using the anode current until the anode current reaches a predetermined threshold. Thereafter, the method may use a dynode current of the PMT for detecting the features, defects or light scattering properties of the specimen.
摘要翻译： 提供检测系统，电路和方法，以通过寻址阳极饱和度作为光电倍增管（PMT）检测器的测量检测范围的限制因素来增强缺陷检测。 根据本发明的一个实施例，用于检查样本的方法包括将光引导到样本并检测从样本散射的光。 检测步骤可以包括监测PMT检测器的阳极电流，并且使用阳极电流检测样品的特征，缺陷或光散射特性，直到阳极电流达到预定阈值。 此后，该方法可以使用PMT的倍增电流来检测样品的特征，缺陷或光散射性质。
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9.发明申请SYSTEMS, CIRCUITS AND METHODS FOR EXTENDING THE DETECTION RANGE OF AN INSPECTION SYSTEM BY AVOIDING DETECTOR SATURATION 有权用于通过避免检测器饱和度来扩展检测系统的检测范围的系统，电路和方法公开(公告)号：US20090040511A1
公开(公告)日：2009-02-12
申请号：US12193469
申请日：2008-08-18
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/95607 , H01J43/30
摘要： Inspection systems, circuits and methods are provided to enhance defect detection by addressing anode saturation as a limiting factor of the measurement detection range of a photomultiplier tube (PMT) detector. In accordance with one embodiment of the invention, a method for inspecting a specimen includes directing light to the specimen and detecting light scattered from the specimen. The step of detecting may include monitoring an anode current of the PMT detector, and detecting features, defects or light scattering properties of the specimen using the anode current until the anode current reaches a predetermined threshold. Thereafter, the method may use a dynode current of the PMT for detecting the features, defects or light scattering properties of the specimen.
摘要翻译： 提供检测系统，电路和方法，以通过寻址阳极饱和度作为光电倍增管（PMT）检测器的测量检测范围的限制因素来增强缺陷检测。 根据本发明的一个实施例，用于检查样本的方法包括将光引导到样本并检测从样本散射的光。 检测步骤可以包括监测PMT检测器的阳极电流，并且使用阳极电流检测样品的特征，缺陷或光散射特性，直到阳极电流达到预定阈值。 此后，该方法可以使用PMT的倍增电流来检测样品的特征，缺陷或光散射性质。
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公开(公告)号：US07607647B2
公开(公告)日：2009-10-27
申请号：US11688720
申请日：2007-03-20
申请人： Guoheng Zhao , Alexander Belyaev , Christian H. Wolters , Paul Andrew Doyle , Howard W. Dando , Mehdi Vaez-Iravani
发明人： Guoheng Zhao , Alexander Belyaev , Christian H. Wolters , Paul Andrew Doyle , Howard W. Dando , Mehdi Vaez-Iravani
IPC分类号： B25B11/00
CPC分类号： B25B11/005 , F16C29/025 , F16C32/0603 , H01L21/67784 , H01L21/6838
摘要： Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload.
摘要翻译： 公开了基板处理方法和装置。 基板处理装置包括具有真空预载的非接触式空气轴承卡盘。
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