公开(公告)号：US07232761B2

公开(公告)日：2007-06-19

申请号：US10924417

申请日：2004-08-24

申请人： Shijian Li ,  Jui-Lung Li ,  Shi-Ping Wang ,  Gary Lam ,  David Mai ,  Fred C. Redeker

发明人： Shijian Li ,  Jui-Lung Li ,  Shi-Ping Wang ,  Gary Lam ,  David Mai ,  Fred C. Redeker

IPC分类号： H01L21/461

CPC分类号： H01L21/3212 ,  B24B37/042 ,  B24B37/30 ,  H01L21/7684

摘要： Method and apparatus are provided for polishing conductive materials with low dishing of features and reduced or minimal remaining residues. In one aspect, a method is provided for processing a substrate by polishing the substrate to remove bulk conductive material and polishing the substrate by a ratio of carrier head rotational speed to platen rotational speed of between about 2:1 and about 3:1 to remove residual conductive material. In another aspect, a method is provided for processing a substrate including polishing the substrate at a first relative linear velocity between about 600 mm/second and about 1900 mm/second at the center of the substrate, and polishing the substrate at a second relative linear velocity between about 100 mm/second and about 550 mm/second at the center of the substrate.

摘要翻译： 提供了用于抛光导电材料的方法和装置，其具有低的特征凹陷和减少的或最小的剩余残余物。 在一个方面，提供了一种通过抛光衬底以去除体导电材料并通过载体头部旋转速度与平板旋转速度的比率在约2:1至约3:1之间来抛光衬底来进行衬底处理的方法，以去除 残留导电材料。 在另一方面，提供了一种用于处理衬底的方法，包括在衬底的中心以约600mm /秒至约1900mm /秒的第一相对线速度抛光衬底，并以第二相对线性 在衬底的中心处的速度在约100mm /秒到约550mm /秒之间。

公开(公告)号：US06780773B2

公开(公告)日：2004-08-24

申请号：US10193469

申请日：2002-07-11

申请人： Shijian Li ,  Jui-Lung Li ,  Shi-Ping Wang ,  Gary Lam ,  David Mai ,  Fred C. Redeker

发明人： Shijian Li ,  Jui-Lung Li ,  Shi-Ping Wang ,  Gary Lam ,  David Mai ,  Fred C. Redeker

IPC分类号： H01L21641

CPC分类号： H01L21/3212 ,  B24B37/042 ,  B24B37/30 ,  H01L21/7684

摘要： Method and apparatus are provided for polishing conductive materials with low dishing of features and reduced or minimal remaining residues. In one aspect, a method is provided for processing a substrate by polishing the substrate to remove bulk conductive material and polishing the substrate by a ratio of carrier head rotational speed to platen rotational speed of between about 2:1 and about 3:1 to remove residual conductive material. In another aspect, a method is provided for processing a substrate including polishing the substrate at a first relative linear velocity between about 600 mm/second and about 1900 mm/second at the center of the substrate, and polishing the substrate at a second relative linear velocity between about 100 mm/second and about 550 mm/second at the center of the substrate.

摘要翻译： 提供了用于抛光导电材料的方法和装置，其具有低的特征凹陷和减少的或最小的剩余残余物。 在一个方面，提供了一种通过抛光衬底以去除体导电材料并通过载体头部旋转速度与平板旋转速度的比率在约2:1至约3:1之间来抛光衬底来进行衬底处理的方法，以去除 残留导电材料。 在另一方面，提供了一种用于处理衬底的方法，包括在衬底的中心以约600mm /秒至约1900mm /秒的第一相对线速度抛光衬底，并以第二相对线性 在衬底的中心处的速度在约100mm /秒到约550mm /秒之间。

公开(公告)号：US07109990B1

公开(公告)日：2006-09-19

申请号：US09724811

申请日：2000-11-28

申请人： Van Oler ,  David Mai ,  Ken Kelly

发明人： Van Oler ,  David Mai ,  Ken Kelly

IPC分类号： G06T17/00 ,  G09G3/36 ,  G02F1/133

CPC分类号： G09G3/3611 ,  G09G2320/041 ,  G09G2320/066

摘要： A circuit and method for automatically compensating display contrast for temperature changes allowing user preference setting. The invention can be applied to any device having a display, but in one embodiment, portable electronic devices such as palmtops, other portable computers, personal digital assistants, cellular telephones, portable web browsers, remote controls, pagers, etc. are described herein. The invention allows a user to set a desired contrast preference and provides display feedback to the user as the preference setting is being made. Once the preference is set, the invention automatically compensates the contrast adjustment based on variable temperature conditions to maintain the display according to the user preference. For instance, as the temperature falls, the invention automatically detects this and adjusts the contrast in a first direction to maintain the user preference. Alternatively, as the temperature rises, the invention automatically adjusts contrast in a second direction to maintain the user preference.

摘要翻译： 用于自动补偿温度变化的显示对比度的电路和方法，允许用户偏好设置。 本发明可以应用于具有显示器的任何设备，但是在一个实施例中，本文中描述了诸如掌上电脑，其他便携式计算机，个人数字助理，蜂窝电话，便携式网络浏览器，遥控器，寻呼机等便携式电子设备。 本发明允许用户设置期望的对比偏好，并且在进行偏好设置时向用户提供显示反馈。 一旦设置了偏好，本发明根据可变温度条件自动补偿对比度调整，以根据用户偏好来维护显示。 例如，随着温度的下降，本发明自动检测并且在第一方向上调整对比度以维持用户偏好。 或者，随着温度升高，本发明在第二方向上自动调整对比度以维持用户偏好。

公开(公告)号：US20070099676A1

公开(公告)日：2007-05-03

申请号：US11476419

申请日：2006-06-28

申请人： Craig Skinner ,  David Mai ,  Edward Vertatschitsch

发明人： Craig Skinner ,  David Mai ,  Edward Vertatschitsch

IPC分类号： H04B1/38

CPC分类号： G06F1/1698 ,  G06F1/1626 ,  G06F1/1632 ,  G06F1/1635 ,  G06F1/263 ,  H02J7/0044 ,  H04M1/04

摘要： A handheld computer system is disclosed. The handheld computer system includes a housing, a display supported by the housing, and a processor coupled to the display. The handheld computer system also includes a rechargeable battery configured to power the processor and the display. Further, the handheld computer system includes a recharging connector coupled to the rechargeable battery. Further still, the handheld computer system includes a recharger coupled to the recharging connector. Yet further still, the handheld computer system includes a radio frequency transceiver coupled to the processor and powerable by the battery when the battery has a charge above a predetermined low level, the transceiver configured to send and receive data while the battery charge is below the low level and the charger provides charge to the rechargeable battery and to the transceiver.

摘要翻译： 公开了一种手持式计算机系统。 手持计算机系统包括壳体，由壳体支撑的显示器和耦合到显示器的处理器。 手持式计算机系统还包括配置成为处理器和显示器供电的可充电电池。 此外，手持计算机系统包括耦合到可再充电电池的再充电连接器。 此外，手持计算机系统包括耦合到再充电连接器的充电器。 此外，手持式计算机系统包括耦合到处理器的射频收发器，并且当电池具有高于预定低电平的电荷时由电池供电，该收发机被配置为在电池电量低于低电平时发送和接收数据 电平，充电器为充电电池和收发器充电。

公开(公告)号：US20050026442A1

公开(公告)日：2005-02-03

申请号：US10924417

申请日：2004-08-24

申请人： Shijian Li ,  Jui-Lung Li ,  Shi-Ping Wang ,  Gary Lam ,  David Mai ,  Fred Redeker

发明人： Shijian Li ,  Jui-Lung Li ,  Shi-Ping Wang ,  Gary Lam ,  David Mai ,  Fred Redeker

IPC分类号： B24B1/00 ,  B24B5/00 ,  B24B29/00 ,  B24B37/04 ,  C23F1/00 ,  H01L21/306 ,  H01L21/321 ,  H01L21/461 ,  H01L21/4763 ,  H01L21/768 ,  H01L21/302 ,  H01L21/44

CPC分类号： H01L21/3212 ,  B24B37/042 ,  B24B37/30 ,  H01L21/7684

摘要： Method and apparatus are provided for polishing conductive materials with low dishing of features and reduced or minimal remaining residues. In one aspect, a method is provided for processing a substrate by polishing the substrate to remove bulk conductive material and polishing the substrate by a ratio of carrier head rotational speed to platen rotational speed of between about 2:1 and about 3:1 to remove residual conductive material. In another aspect, a method is provided for processing a substrate including polishing the substrate at a first relative linear velocity between about 600 mm/second and about 1900 mm/second at the center of the substrate, and polishing the substrate at a second relative linear velocity between about 100 mm/second and about 550 mm/second at the center of the substrate.

摘要翻译： 提供了用于抛光导电材料的方法和装置，其具有低的特征凹陷和减少的或最小的剩余残余物。 在一个方面，提供了一种通过抛光衬底以去除体导电材料并通过载体头部旋转速度与平板旋转速度的比率在约2:1至约3:1之间来抛光衬底来进行衬底处理的方法，以去除 残留导电材料。 在另一方面，提供了一种用于处理衬底的方法，包括在衬底的中心以约600mm /秒至约1900mm /秒的第一相对线速度抛光衬底，并以第二相对线性 在衬底的中心处的速度在约100mm /秒到约550mm /秒之间。

公开(公告)号：US06790768B2

公开(公告)日：2004-09-14

申请号：US10025144

申请日：2001-12-18

申请人： Yongsik Moon ,  David Mai ,  Kapila Wijekoon ,  Rajeev Bajaj ,  Rahul Surana ,  Yongqi Hu ,  Tony S. Kaushal ,  Shijian Li ,  Jui-Lung Li ,  Shi-Ping Wang ,  Gary Lam ,  Fred C. Redeker

发明人： Yongsik Moon ,  David Mai ,  Kapila Wijekoon ,  Rajeev Bajaj ,  Rahul Surana ,  Yongqi Hu ,  Tony S. Kaushal ,  Shijian Li ,  Jui-Lung Li ,  Shi-Ping Wang ,  Gary Lam ,  Fred C. Redeker

IPC分类号： B24B100

CPC分类号： H01L21/3212 ,  B24B37/042 ,  B24B37/30 ,  H01L21/7684

摘要： Method and apparatus are provided for polishing substrates comprising conductive and low k dielectric materials with reduced or minimum substrate surface damage and delamination. In one aspect, a method is provided for processing a substrate including positioning a substrate having a conductive material formed thereon in a polishing apparatus having one or more rotational carrier heads and one or more rotatable platens, wherein the carrier head comprises a retaining ring and a membrane for securing a substrate and the platen has a polishing article disposed thereon, contacting the substrate surface and the polishing article to each other at a retaining ring contact pressure of about 0.4 psi or greater than a membrane pressure, and polishing the substrate to remove conductive material.

摘要翻译： 提供了用于抛光衬底的方法和装置，其包括具有降低或最小衬底表面损伤和分层的导电和低k电介质材料。 在一个方面，提供了一种用于处理衬底的方法，包括将具有形成在其上的导电材料的衬底定位在具有一个或多个旋转载体头和一个或多个可旋转压板的抛光装置中，其中所述载体头包括保持环和 用于固定基板的薄膜和压板具有设置在其上的抛光制品，其以约0.4psi或更大于膜压力的保持环接触压力将基板表面和抛光制品彼此接触，并抛光基板以去除导电 材料。

公开(公告)号：US20050032381A1

公开(公告)日：2005-02-10

申请号：US10939750

申请日：2004-09-13

申请人： Yongsik Moon ,  David Mai ,  Kapila Wijekoon ,  Rajeev Bajaj ,  Rahul Surana ,  Yongqi Hu ,  Tony Kaushal ,  Shijian Li ,  Jui-Lung Li ,  Shi-Ping Wang ,  Gary Lam ,  Fred Redeker

发明人： Yongsik Moon ,  David Mai ,  Kapila Wijekoon ,  Rajeev Bajaj ,  Rahul Surana ,  Yongqi Hu ,  Tony Kaushal ,  Shijian Li ,  Jui-Lung Li ,  Shi-Ping Wang ,  Gary Lam ,  Fred Redeker

IPC分类号： B24B1/00 ,  B24B5/00 ,  B24B29/00 ,  B24B37/04 ,  C23F1/00 ,  H01L21/306 ,  H01L21/321 ,  H01L21/461 ,  H01L21/4763 ,  H01L21/768

CPC分类号： H01L21/3212 ,  B24B37/042 ,  B24B37/30 ,  H01L21/7684

摘要： Method and apparatus are provided for polishing substrates comprising conductive and low k dielectric materials with reduced or minimum substrate surface damage and delamination. In one aspect, a method is provided for processing a substrate including positioning a substrate having a conductive material formed thereon in a polishing apparatus having one or more rotational carrier heads and one or more rotatable platens, wherein the carrier head comprises a retaining ring and a membrane for securing a substrate and the platen has a polishing article disposed thereon, contacting the substrate surface and the polishing article to each other at a retaining ring contact pressure of about 0.4 psi or greater than a membrane pressure, and polishing the substrate to remove conductive material.

公开(公告)号：US06437543B1

公开(公告)日：2002-08-20

申请号：US09717198

申请日：2000-11-20

申请人： Van Oler ,  David Mai ,  Ken Kelly

发明人： Van Oler ,  David Mai ,  Ken Kelly

IPC分类号： H01M1046

CPC分类号： H02J7/0091 ,  H01M2/1066 ,  H01M10/44 ,  H01M10/46 ,  H01M2200/10 ,  H02J7/0042

摘要： A system for controlling battery charging. The system comprises a battery charging device, a temperature sensor, and a controller. The battery may be a Lithium polymer battery, or the like. The temperature sensor senses the battery temperature and outputs a temperature data signal. The controller inputs the temperature data signal and determines if the temperature data is outside of a range with an upper limit and lower limit. If so, the controller disables the battery charging circuit, wherein the battery is prevented from being charged. In this fashion, the battery's lifetime (e.g., number of charge/discharge cycles) is extended. In another embodiment, the system further comprises a display. The controller outputs a signal to the display, directing it to display a message indicating that the battery is not being charged because the temperature is out of the pre-determined range.

摘要翻译： 控制电池充电的系统。 该系统包括电池充电装置，温度传感器和控制器。 电池可以是锂聚合物电池等。 温度传感器检测电池温度并输出温度数据信号。 控制器输入温度数据信号，并确定温度数据是否超出上限和下限范围。 如果是这样，则控制器禁用电池充电电路，其中防止电池充电。 以这种方式，延长了电池的寿命（例如充电/放电循环次数）。 在另一个实施例中，系统还包括显示器。 控制器向显示器输出信号，指示它显示一条消息，指示电池未充电，因为温度超出预定范围。

公开(公告)号：US07383065B2

公开(公告)日：2008-06-03

申请号：US11476419

申请日：2006-06-28

申请人： Craig S. Skinner ,  David Mai ,  Edward Joseph Vertatschitsch

发明人： Craig S. Skinner ,  David Mai ,  Edward Joseph Vertatschitsch

IPC分类号： H04Q7/32

CPC分类号： G06F1/1698 ,  G06F1/1626 ,  G06F1/1632 ,  G06F1/1635 ,  G06F1/263 ,  H02J7/0044 ,  H04M1/04

摘要： A handheld computer system is disclosed. The handheld computer system includes a housing, a display supported by the housing, and a processor coupled to the display. The handheld computer system also includes a rechargeable battery configured to power the processor and the display. Further, the handheld computer system includes a recharging connector coupled to the rechargeable battery. Further still, the handheld computer system includes a recharger coupled to the recharging connector. Yet further still, the handheld computer system includes a radio frequency transceiver coupled to the processor and powerable by the battery when the battery has a charge above a predetermined low level, the transceiver configured to send and receive data while the battery charge is below the low level and the charger provides charge to the rechargeable battery and to the transceiver.

摘要翻译： 公开了一种手持式计算机系统。 手持计算机系统包括壳体，由壳体支撑的显示器和耦合到显示器的处理器。 手持式计算机系统还包括配置成为处理器和显示器供电的可充电电池。 此外，手持计算机系统包括耦合到可再充电电池的再充电连接器。 此外，手持计算机系统包括耦合到再充电连接器的充电器。 此外，手持式计算机系统包括耦合到处理器的射频收发器，并且当电池具有高于预定低电平的电荷时可由电池供电，该收发机被配置为在电池电量低于低电平时发送和接收数据 电平，充电器为充电电池和收发器充电。

公开(公告)号：US07096049B2

公开(公告)日：2006-08-22

申请号：US09865657

申请日：2001-05-25

申请人： Craig S. Skinner ,  David Mai ,  Edward Joseph Vertatschitsch

发明人： Craig S. Skinner ,  David Mai ,  Edward Joseph Vertatschitsch

IPC分类号： H04Q7/32

CPC分类号： G06F1/1698 ,  G06F1/1626 ,  G06F1/1632 ,  G06F1/1635 ,  G06F1/263 ,  H02J7/0044 ,  H04M1/04

摘要： A handheld computer system is disclosed. The handheld computer system includes a housing, a display supported by the housing, and a processor coupled to the display. The handheld computer system also includes a rechargeable battery configured to power the processor and the display. Further, the handheld computer system includes a recharging connector coupled to the rechargeable battery. Further still, the handheld computer system includes a recharger coupled to the recharging connector. Yet further still, the handheld computer system includes a radio frequency transceiver coupled to the processor and powerable by the battery when the battery has a charge above a predetermined low level, the transceiver configured to send and receive data while the battery charge is below the low level and the charger provides charge to the rechargeable battery and to the transceiver.