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公开(公告)号：US09709903B2
公开(公告)日：2017-07-18
申请号：US13446133
申请日：2012-04-13
申请人： DongSub Choi , David Tien
发明人： DongSub Choi , David Tien
CPC分类号： G03F7/70683 , G03F7/70633
摘要： An overlay target for use in imaging based metrology is disclosed. The overlay target includes a plurality of target structures including three or more target structures, each target structure including a set of two or more pattern elements, wherein the target structures are configured to provide metrology information pertaining to different pitches, different coverage ratios, and linearity. Pattern elements may be separated from adjacent pattern elements by non-uniform distance; pattern elements may have non-uniform width; or pattern elements may be designed to demonstrate a specific offset as compared to pattern elements in a different layer.
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公开(公告)号：US08655469B2
公开(公告)日：2014-02-18
申请号：US13156865
申请日：2011-06-09
申请人： DongSub Choi , Amir Widmann , Daniel Kandel , David Tien
发明人： DongSub Choi , Amir Widmann , Daniel Kandel , David Tien
IPC分类号： G06F19/00
CPC分类号： G03F7/70525
摘要： A method for automatic process control (APC) performance monitoring may include, but is not limited to: computing one or more APC performance indicators for one or more production lots of semiconductor devices; and displaying a mapping of the one or more APC performance indicators to the one or more production lots of semiconductor devices.
摘要翻译： 用于自动过程控制（APC）性能监控的方法可以包括但不限于：计算一个或多个生产批次的半导体器件的一个或多个APC性能指标; 以及显示所述一个或多个APC性能指示符到所述一个或多个半导体器件的生产批次的映射。
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公开(公告)号：US20100137472A1
公开(公告)日：2010-06-03
申请号：US12476997
申请日：2009-06-02
IPC分类号： C09D5/00
CPC分类号： C10M169/04 , A61L29/085 , A61L29/16 , A61L2300/206 , A61L2300/208 , A61L2300/404 , B05D3/0254 , B05D3/067 , C08F220/18 , C08F222/1006 , C09D4/06 , C09D5/14 , C09D5/1668 , C10M2201/105 , C10M2205/14 , C10M2215/04 , C10M2215/06 , C10M2229/0515 , C10N2220/082 , C10N2230/16 , C10N2240/66
摘要： Antimicrobial compositions and methods are disclosed. The antimicrobial compositions are particularly useful in providing antimicrobial capability to a wide-range of medical devices. In one aspect, the invention relates to a mild solvent coating using acrylate-type mild solution coating. These compositions include rheological modifiers as necessary. The compositions also include antimicrobial agents, which may be selected from a wide array of agents. Representative antimicrobial agents include cetyl pyridium chloride, cetrimide, alexidine, chlorexidine diacetate, benzalkonium chloride, and o-phthalaldehyde. Additionally, the compositions comprise one or more suitable mild solvents, such as a low molecular weight alcohol, alkane, ketone, and combinations thereof.
摘要翻译： 公开了抗微生物组合物和方法。 抗微生物组合物特别可用于向广泛的医疗装置提供抗菌能力。 一方面，本发明涉及使用丙烯酸酯型温和溶液涂层的温和溶剂涂层。 这些组合物包括必要的流变改性剂。 组合物还包括抗微生物剂，其可以选自广泛的试剂。 代表性的抗微生物剂包括氯化十六烷基吡啶，西曲肽，二甲苯胺，二氯乙酸，苯扎氯铵和邻邻甲醛。 另外，组合物包含一种或多种合适的温和溶剂，例如低分子量醇，烷烃，酮及其组合。
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公开(公告)号：US20100135949A1
公开(公告)日：2010-06-03
申请号：US12397760
申请日：2009-03-04
CPC分类号： C10M169/04 , A61L29/085 , A61L29/16 , A61L2300/206 , A61L2300/208 , A61L2300/404 , B05D3/0254 , B05D3/067 , C08F220/18 , C08F222/1006 , C09D4/06 , C09D5/14 , C09D5/1668 , C10M2201/105 , C10M2205/14 , C10M2215/04 , C10M2215/06 , C10M2229/0515 , C10N2220/082 , C10N2230/16 , C10N2240/66
摘要： Antimicrobial compositions and methods are disclosed. The antimicrobial compositions are particularly useful in providing antimicrobial capability to a wide-range of medical devices. In one aspect the invention relates a UV curable antimicrobial coating comprising a UV curable composition comprising an oligomer, a momoner, and a photoinitiator which are together capable of forming a UV curable polymer composition. The compositions include rheology modifiers as necessary. The compositions also include antimicrobial agents, which may be selected from a wide array of agents. Representative antimicrobial agents include cetyl pyridium chloride, cetrimide, alexidine, chlorexidine diacetate, benzalkonium chloride, and o-phthalaldehyde.
摘要翻译： 公开了抗微生物组合物和方法。 抗微生物组合物特别可用于向广泛的医疗装置提供抗菌能力。 一方面，本发明涉及一种紫外光固化抗微生物涂层，其包含UV固化性组合物，其包含能够形成UV可固化聚合物组合物的低聚物，共聚物和光引发剂。 组合物包括必要的流变改性剂。 组合物还包括抗微生物剂，其可以选自广泛的试剂。 代表性的抗微生物剂包括氯化十六烷基吡啶，西曲肽，二甲苯胺，二氯乙酸，苯扎氯铵和邻邻甲醛。
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公开(公告)号：US20130107259A1
公开(公告)日：2013-05-02
申请号：US13446133
申请日：2012-04-13
申请人： Dongsub Choi , David Tien
发明人： Dongsub Choi , David Tien
IPC分类号： G01B11/00 , H01L23/544
CPC分类号： G03F7/70683 , G03F7/70633
摘要： An overlay target for use in imaging based metrology is disclosed. The overlay target includes a plurality of target structures including three or more target structures, each target structure including a set of two or more pattern elements, wherein the target structures are configured to provide metrology information pertaining to different pitches, different coverage ratios, and linearity. Pattern elements may be separated from adjacent pattern elements by non-uniform distance; pattern elements may have non-uniform width; or pattern elements may be designed to demonstrate a specific offset as compared to pattern elements in a different layer.
摘要翻译： 公开了一种用于基于成像的计量学的覆盖目标。 覆盖目标包括包括三个或更多个目标结构的多个目标结构，每个目标结构包括一组两个或多个模式元素，其中目标结构被配置为提供关于不同间距，不同覆盖率和线性的度量信息 。 图案元素可以通过不均匀的距离与相邻图案元素分离; 图案元素可能具有不均匀的宽度; 或者图案元素可被设计为与不同层中的图案元素相比显示特定的偏移。
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公开(公告)号：US20060242313A1
公开(公告)日：2006-10-26
申请号：US11449058
申请日：2006-06-07
申请人： Chinh Le , David Tien , Thanh Truong
发明人： Chinh Le , David Tien , Thanh Truong
IPC分类号： G06F15/16
摘要： Packets received over a network are routed using a packet engine of the invention based on information contained in layer 4 or above. The information for switching is contained in the header information of the packet. Based on this higher level information, the packet engine may drop the packet, redirect the packet, load balance the packet, perform bandwidth provisioning (e.g., limit the speed of a connection), or adjust quality of service (e.g., change priority or rearrange a queue of packets to be handled), or combinations of these.
摘要翻译： 基于第4层以上的信息，使用本发明的分组引擎来路由在网络上接收的分组。 用于切换的信息包含在分组的报头信息中。 基于这种较高级别的信息，分组引擎可能丢弃分组，重定向分组，负载平衡分组，执行带宽配置（例如，限制连接的速度）或调整服务质量（例如，改变优先级或重新排列 要处理的数据包的队列）或这些的组合。
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7.发明授权公开(公告)号：US10295993B2
公开(公告)日：2019-05-21
申请号：US13597944
申请日：2012-08-29
申请人： Dongsub Choi , David Tien
发明人： Dongsub Choi , David Tien
IPC分类号： G05B13/02 , G05B19/418 , G05B13/04
摘要： The invention may be embodied in a system and method for monitoring and controlling feedback control in a manufacturing process, such as an integrated circuit fabrication process. The process control parameters may include translation, rotation, magnification, dose and focus applied by a photolithographic scanner or stepper operating on silicon wafers. Overlay errors are used to compute measured parameters used in the feedback control process. Statistical parameters are computed, normalized and graphed on a common set of axes for at-a-glance comparison of measured parameters and process control parameters to facilitate the detection of problematic parameters. Parameter trends and context relaxation scenarios are also compared graphically. Feedback control parameters, such as EWMA lambdas, may be determined and used as feedback parameters for refining the APC model that computes adjustments to the process control parameters based on the measured parameters.
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公开(公告)号：US08426348B2
公开(公告)日：2013-04-23
申请号：US12436404
申请日：2009-05-06
IPC分类号： C10M125/18 , C10M133/06 , C10M169/02
CPC分类号： C10M169/04 , A61L29/085 , A61L29/16 , A61L2300/206 , A61L2300/208 , A61L2300/404 , B05D3/0254 , B05D3/067 , C08F220/18 , C08F222/1006 , C09D4/06 , C09D5/14 , C09D5/1668 , C10M2201/105 , C10M2205/14 , C10M2215/04 , C10M2215/06 , C10M2229/0515 , C10N2220/082 , C10N2230/16 , C10N2240/66
摘要： Antimicrobial lubricant compositions are disclosed. The antimicrobial lubricant compositions are particularly useful in providing antimicrobial capability to a wide-range of medical devices. The compositions include an oil lubricant. Representative lubricants may include polydimethyl siloxane, trifluoropropyl copolymer polysiloxane, and a copolymer of dimethylsiloxane and trifluoropropylmethylsiloxane. The compositions include rheology modifiers as necessary. The compositions also include antimicrobial agents, which may be selected from a wide array of agents. Representative antimicrobial agents include of aldehydes, anilides, biguanides, bis-phenols, quaternary ammonium compounds, cetyl pyridium chloride, cetrimide, alexidine, chlorhexidine diacetate, benzalkonium chloride, and o-phthalaldehyde.
摘要翻译： 公开了抗微生物润滑剂组合物。 抗微生物润滑剂组合物特别可用于向广泛的医疗装置提供抗微生物能力。 组合物包括油润滑剂。 代表性的润滑剂可以包括聚二甲基硅氧烷，三氟丙基共聚物聚硅氧烷和二甲基硅氧烷和三氟丙基甲基硅氧烷的共聚物。 组合物包括必要的流变改性剂。 组合物还包括抗微生物剂，其可以选自广泛的试剂。 代表性的抗微生物剂包括醛，酰苯胺，双胍，双酚，季铵化合物，氯化十六烷基，氯化三苯胺，吖啶啶，二醋酸氯己定，苯扎氯铵和邻邻醛。
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公开(公告)号：US20120022679A1
公开(公告)日：2012-01-26
申请号：US13156865
申请日：2011-06-09
申请人： DongSub Choi , Amir Widmann , Daniel Kandel , David Tien
发明人： DongSub Choi , Amir Widmann , Daniel Kandel , David Tien
IPC分类号： G06F19/00
CPC分类号： G03F7/70525
摘要： A method for automatic process control (APC) performance monitoring may include, but is not limited to: computing one or more APC performance indicators for one or more production lots of semiconductor devices; and displaying a mapping of the one or more APC performance indicators to the one or more production lots of semiconductor devices.
摘要翻译： 用于自动过程控制（APC）性能监控的方法可以包括但不限于：计算一个或多个生产批次的半导体器件的一个或多个APC性能指标; 以及显示所述一个或多个APC性能指示符到所述一个或多个半导体器件的生产批次的映射。
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公开(公告)号：US08691887B2
公开(公告)日：2014-04-08
申请号：US12476997
申请日：2009-06-02
CPC分类号： C10M169/04 , A61L29/085 , A61L29/16 , A61L2300/206 , A61L2300/208 , A61L2300/404 , B05D3/0254 , B05D3/067 , C08F220/18 , C08F222/1006 , C09D4/06 , C09D5/14 , C09D5/1668 , C10M2201/105 , C10M2205/14 , C10M2215/04 , C10M2215/06 , C10M2229/0515 , C10N2220/082 , C10N2230/16 , C10N2240/66
摘要： Antimicrobial compositions and methods are disclosed. The antimicrobial compositions are particularly useful in providing antimicrobial capability to a wide-range of medical devices. In one aspect, the invention relates to a mild solvent coating using acrylate-type mild solution coating. These compositions include rheological modifiers as necessary. The compositions also include antimicrobial agents, which may be selected from a wide array of agents. Representative antimicrobial agents include cetyl pyridium chloride, cetrimide, alexidine, chlorexidine diacetate, benzalkonium chloride, and o-phthalaldehyde. Additionally, the compositions comprise one or more suitable mild solvents, such as a low molecular weight alcohol, alkane, ketone, and combinations thereof.
摘要翻译： 公开了抗微生物组合物和方法。 抗微生物组合物特别可用于向广泛的医疗装置提供抗菌能力。 一方面，本发明涉及使用丙烯酸酯型温和溶液涂层的温和溶剂涂层。 这些组合物包括必要的流变改性剂。 组合物还包括抗微生物剂，其可以选自广泛的试剂。 代表性的抗微生物剂包括氯化十六烷基吡啶，西曲肽，二甲苯胺，二氯乙酸，苯扎氯铵和邻邻甲醛。 另外，组合物包含一种或多种合适的温和溶剂，例如低分子量醇，烷烃，酮及其组合。
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