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1.发明授权Method for making diaphragm-based sensors and apparatus constructed therewith 失效用于制造基于膜片的传感器的方法和由其构造的装置
公开(公告)号：US5683594A
公开(公告)日：1997-11-04
申请号：US217044
申请日：1994-03-24
Applicant: G. Benjamin Hocker , David W. Burns , Akintunde I. Akinwande , Robert D. Horning , Amir R. Mirza , Thomas G. Stratton , Deidrich J. Saathoff , James K. Carney , Scott A. McPherson
Inventor： G. Benjamin Hocker , David W. Burns , Akintunde I. Akinwande , Robert D. Horning , Amir R. Mirza , Thomas G. Stratton , Deidrich J. Saathoff , James K. Carney , Scott A. McPherson
IPC: G01L9/04 , B81C1/00 , G01L9/00 , G01L9/12 , H01L21/02 , H01L21/20 , H01L21/306 , H01L29/84 , B32B31/00
CPC classification number: B81C1/00182 , G01L9/0042 , G01L9/0073 , H01L21/2007 , B81B2201/0292 , B81B2203/0127
Abstract: This patent relates to the fabrication of diaphragm-based microstructures used primarily for sensing physical phenomena by detecting a change in deflection, resonance, or curvature of the diaphragm. The methods of fabrication described and claimed herein relate primarily to diaphragm-based diaphragms made of silicon, either single crystal or polycrystalline in form, although other materials may be used.
Abstract translation: 该专利涉及通过检测隔膜的偏转，共振或曲率的变化来主要用于感测物理现象的基于隔膜的微结构的制造。 本文所述和要求保护的制造方法主要涉及由硅制成的隔膜式隔膜，其形式为单晶或多晶，尽管可以使用其他材料。
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公开(公告)号：US5534111A
公开(公告)日：1996-07-09
申请号：US172118
申请日：1988-02-29
Applicant: G. Benjamin Hocker , James O. Holmen , Robert G. Johnson
Inventor： G. Benjamin Hocker , James O. Holmen , Robert G. Johnson
CPC classification number: G01J5/02 , B81C1/0069 , G01J5/023 , G01J5/04 , G01J5/046 , H01L27/16 , B81B2203/0109
Abstract: A thermal isolation microstructure fabricated by a process which allows the ultra thinning of support legs for the microdetector.
Abstract translation: 通过允许微型检测器的支撑腿超薄的方法制造的热隔离微结构。
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Patent Agency Ranking
公开(公告)号：US4468294A
公开(公告)日：1984-08-28
申请号：US496143
申请日：1983-05-19
Applicant: G. Benjamin Hocker , John D. Skogen
Inventor： G. Benjamin Hocker , John D. Skogen
CPC classification number: C25D5/54 , C03C25/108
Abstract: In the field of fiber optic acoustic sensors, a method for acoustic desensitization of certain sections of optic fibers by means of the use of higher elastic modulus coatings, such as an electrodeposited nickel jacket.
Abstract translation: 在光纤声学传感器领域中，通过使用较高弹性模量涂层（诸如电沉积的镍护套）来对某些光纤部分进行声学脱敏的方法。
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公开(公告)号：US07315368B2
公开(公告)日：2008-01-01
申请号：US10946748
申请日：2004-09-22
Applicant: G. Benjamin Hocker
Inventor： G. Benjamin Hocker
CPC classification number: G01J3/18 , G01J3/28 , G01J2003/1286 , G01J2003/1876
Abstract: A spectra generator having an electrically programmable diffraction grating. There may be a broad band light source that emits light which is diffracted by the grating. Diffracting elements in the grating may be individually adjustable so that generation of a specific spectrum or spectra may be achieved. The diffracting elements may be adjusted according to electrical signals of a program from a computer. The generated synthetic spectra may be used for testing and calibration of spectrometers or other devices. Synthetic spectra may also be used for scene generation and other purposes.
Abstract translation: 具有电可编程衍射光栅的光谱发生器。 可能存在发射由光栅衍射的光的宽带光源。 光栅中的衍射元件可以是单独调节的，从而可以实现特定光谱或光谱的产生。 可以根据来自计算机的程序的电信号来调整衍射元件。 生成的合成光谱可用于光谱仪或其他设备的测试和校准。 合成光谱也可用于场景生成和其他目的。
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公开(公告)号：US5295395A
公开(公告)日：1994-03-22
申请号：US652148
申请日：1991-02-07
Applicant: G. Benjamin Hocker , David W. Burns , Akintunde I. Akinwande , Robert D. Horning , Amir R. Mirza , Thomas G. Stratton , Deidrich J. Saathoff , James K. Carney , Scott A. McPherson
Inventor： G. Benjamin Hocker , David W. Burns , Akintunde I. Akinwande , Robert D. Horning , Amir R. Mirza , Thomas G. Stratton , Deidrich J. Saathoff , James K. Carney , Scott A. McPherson
IPC: G01L9/04 , B81C1/00 , G01L9/00 , G01L9/12 , H01L21/02 , H01L21/20 , H01L21/306 , H01L29/84 , G01L13/02
CPC classification number: B81C1/00182 , G01L9/0042 , G01L9/0073 , H01L21/2007 , B81B2201/0292 , B81B2203/0127
Abstract: The formation of diaphragms by silicon wafer bonding provides for a structure having at least two such diaphragms with cavities in the wafers to which the diaphragm layer is bonded. Passageways through the wafers provide for communication of a fluid to the diaphragms. In some locations less than all of a plurality of diaphragms may be bonded to only one wafter having a cavity adjacent the diaphragm.
Abstract translation: 通过硅晶片接合形成隔膜提供了具有至少两个这样的隔膜的结构，其中隔膜层与晶片层结合在晶片上。 通过晶片的通道提供流体到膜片的连通。 在一些位置中，少于所有多个隔膜的位置可以仅结合到具有与隔膜相邻的空腔的一个凹部。
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公开(公告)号：US06853449B2
公开(公告)日：2005-02-08
申请号：US10352828
申请日：2003-01-28
Applicant: G. Benjamin Hocker
Inventor： G. Benjamin Hocker
CPC classification number: G01N29/2425 , G01J3/28 , G01J3/457 , G01N21/1702 , G01N2021/1725 , G01N2201/0635 , G01N2201/0691
Abstract: A programmable substance detector includes a light source, a sample cell, a programmable diffraction grating positioned to receive light from the light source and to direct diffracted light to the sample cell, and a detector associated with the cell to detect a match between a characteristic of the diffracted light and a corresponding characteristic of a substance within the cell.
Abstract translation: 可编程物质检测器包括光源，样品池，定位成接收来自光源的光并将衍射光引导到样品池的可编程衍射光栅，以及与该电池相关联的检测器，用于检测 衍射光和细胞内物质的相应特征。
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公开(公告)号：US4201446A
公开(公告)日：1980-05-06
申请号：US953154
申请日：1978-10-20
Applicant: John J. Geddes , G. Benjamin Hocker
Inventor： John J. Geddes , G. Benjamin Hocker
Abstract: This invention provides apparatus for remote temperature sensing by means of fiber optics in which the sensor is optical and passive, with no electrical power required at the sensor. The temperature-sensing section of the fiber optic makes use of a transparent liquid as core or cladding and in which the transparent liquid has a temperature-dependent index of refraction.
Abstract translation: 本发明提供了通过光纤进行远程温度感测的装置，其中传感器是光学和无源的，传感器没有电力需要。 光纤的温度感测部分使用透明液体作为芯或包层，其中透明液体具有温度依赖的折射率。
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