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公开(公告)号：US06872958B2
公开(公告)日：2005-03-29
申请号：US10059048
申请日：2002-01-28
IPC分类号： F16D3/56 , G01Q10/00 , G01Q20/00 , G01Q30/16 , G03F7/20 , H01J37/20 , H01L21/00 , H01L21/027 , H01L21/68 , F16B1/00
CPC分类号： G03F7/70716 , G03F7/70841 , G03F7/709 , H01J37/20 , H01L21/67259 , H01L21/682 , Y10T403/45
摘要： A system for precisely positioning and moving a platform relative to a support structure is disclosed herein. The platform is particularly suitable for carrying wafers. Charged particle optics can be attached to the support structure. The platform positioning system comprises a stage, comprising a base, a platform and stage actuators, the stage actuators being coupled to the platform and the platform being coupled to the base; a frame attached to the base; a support structure mechanically coupled to the frame; stage sensors attached to the support structure, for sensing the position of the platform relative to the support structure; and a current control system coupled to the stage sensors and the stage actuators. The current control system may include a predictor for generating an ouptut signal anticipating the actual position of the platform relative to the support structure in real time.
摘要翻译： 本文公开了一种用于相对于支撑结构精确地定位和移动平台的系统。 该平台特别适用于承载晶圆。 带电粒子光学元件可以附着在支撑结构上。 该平台定位系统包括一个台，包括基座，平台和平台致动器，平台致动器联接到平台并且平台联接到基座; 一个连接到基座的框架; 机架地连接到所述框架的支撑结构; 附接到支撑结构的级传感器，用于感测平台相对于支撑结构的位置; 以及耦合到载物台传感器和载物台致动器的电流控制系统。 当前控制系统可以包括用于生成预测平台相对于支撑结构的实际位置的实时发射信号的预测器。
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公开(公告)号：US5039997A
公开(公告)日：1991-08-13
申请号：US651092
申请日：1991-01-22
CPC分类号： B41J2/17596 , B41J2/04 , B41J2202/05
摘要： An ink jet chamber communicates with an ink reservoir through an opening in a diaphragm plate. The chamber also includes a nozzle through which ink may be ejected on demand. A mass, such as a ball, is reciprocally driven into the diaphragm plate. The ball, upon striking the diaphragm, closes the chamber opening, pressurizing the ink in the chamber to eject a droplet from the nozzle. The ball is driven by a printer driver wire to which it may be attached. Large arrays may be constructed.
摘要翻译： 喷墨室通过隔膜板中的开口与储墨器连通。 该腔室还包括喷嘴，通过该喷嘴可以根据需要喷射墨水。 诸如球的质量被往复驱动进入隔膜板。 球撞击隔膜时，关闭腔室开口，对腔室中的墨水加压以从喷嘴喷出液滴。 球由可以连接的打印机驱动器线驱动。 可以构建大阵列。
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公开(公告)号：US5032850A
公开(公告)日：1991-07-16
申请号：US452686
申请日：1989-12-18
CPC分类号： B41J2/215 , B41J2/2103
摘要： A method of vapor jet printing is described, along with several embodiments of apparatus for practicing such method. The vapor phase of a sublimable dye is mixed with a carrier gas. The resulting mixture is then jetted toward a recording medium. The carrier gas in indirectly heated by the sublimable dye to maintain the latter in its vaporous state during its travel to the recording medium. One embodiment of the apparatus includes a removable cartridge for the sublimable dye which enables color interchangeability and a limited downtime for dye recharging.
摘要翻译： 连同实施这种方法的设备的几个实施例一起描述了蒸气喷射印刷的方法。 将可升华染料的气相与载气混合。 然后将所得混合物朝向记录介质喷射。 载气通过可升华的染料间接加热，以使后者在其进入记录介质期间处于其蒸气状态。 该装置的一个实施例包括用于升华染料的可移除盒，其使颜色可互换性和染料再充电的有限的停机时间。
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公开(公告)号：US4921393A
公开(公告)日：1990-05-01
申请号：US166095
申请日：1988-03-09
CPC分类号： B25J19/0091 , B23Q11/0014 , B25J18/002 , B25J9/046 , B25J9/104 , Y10T74/20207
摘要： A manipulator is disclosed which includes first and second interconnected limb sections, the second section of which is elongated and flexible in at least one direction normal to the longitudinal axis. The first limb section is connected to a base, and the second limb section is connected to an end effector. Relative to a reference frame with origin at the first limb section, the stiffness matrix of the second limb section is variable, and is under motor control. In one embodiment, the second limb section is inflexible in a direction orthogonal to the one direction and the longitudinal axis, and is supported by the first limb section for rotation about the longitudinal axis. In another embodiment, the second limb section is flexible in all directions normal to the longitudinal axis, and a plurality of adjustable-tension stays attached to the second limb section adjacent opposite ends thereof are used to control the stiffness matrix thereof. Methods of damping vibration of the flexible beam are shown.
摘要翻译： 公开了一种操纵器，其包括第一和第二互连的肢体部分，其第二部分在垂直于纵向轴线的至少一个方向上是细长的和柔性的。 第一肢体部分连接到基部，并且第二肢体部分连接到末端执行器。 相对于起始于第一肢段的参考框架，第二肢段的刚度矩阵是可变的，并且在电机控制下。 在一个实施例中，第二肢体部分在与一个方向和纵向轴线正交的方向上是不灵活的，并且由第一肢体部分支撑以围绕纵向轴线旋转。 在另一个实施例中，第二肢体部分在垂直于纵向轴线的所有方向上是柔性的，并且多个可连接到第二肢体部分的可调节的张紧支架邻近其相对端用于控制其刚度矩阵。 示出了柔性梁的阻尼振动方法。
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公开(公告)号：US4333832A
公开(公告)日：1982-06-08
申请号：US828903
申请日：1977-08-29
申请人： Thomas L. Siwecki , Gerry B. Andeen
发明人： Thomas L. Siwecki , Gerry B. Andeen
IPC分类号： C02F1/44 , B01D20060101 , B01D61/02 , B01D61/08 , B01D61/10 , B01D61/12 , B01D61/54 , B01D63/04 , B01D63/16 , B01D65/08 , C02F1/38 , C02F1/58 , B01D31/00
CPC分类号： B01D61/08 , B01D61/025 , B01D63/04 , B01D63/12 , B01D63/16 , B01D2311/02 , B01D2315/02 , B01D2317/04
摘要： Salt water and other solutions are accelerated in a rotating structure and applied to a cannister containing reverse osmosis membrane material. The desalinated water is removed after passing through the large surface area concentration of membrane material in the cannister. The enriched brine is removed from the cannister at a point furthest from the axis of the rotating structure and returned to the vicinity of the axis to prevent the buildup of dense material. The membrane material is configured in the cannister so that the flow is generally radially with respect to the axis of the rotating structure.
摘要翻译： 盐水和其他溶液在旋转结构中加速并施加到含有反渗透膜材料的罐上。 经过大面积浓缩的膜材料后，脱盐水被除去。 浓缩的盐水在距离旋转结构的轴线最远的点处从罐中除去并返回到轴线附近以防止致密材料的积聚。 膜材料构造在罐中，使得流动通常相对于旋转结构的轴线径向。
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公开(公告)号：US3988934A
公开(公告)日：1976-11-02
申请号：US646657
申请日：1976-01-05
CPC分类号： G01L5/161 , A61B5/117 , G06K9/00154 , G07C9/0015 , A61B2562/0261
摘要： A compact apparatus for analyzing a signature or other handwritten markings, including a horizontal platen which can support paper on which a signature is written, a pair of inner beams extending horizontally from opposite sides of the platen to an intermediate structure, and a pair of outer beams extending horizontally, and in directions perpendicular to the inner beams, between the intermediate structure and a supporting frame. Strain gauges are attached to the sides of the inner and outer beams to sense forces applied to the platen by the tip of a writing instrument in the horizontal "X" and "Y" directions, and additional strain gauges are attached to opposite faces of the outer beams to sense forces in the vertical, or "Z," direction.
摘要翻译： 一种用于分析签名或其他手写标记的小型装置，包括可以支撑写有签名的纸的水平压板，从压板的相对侧水平延伸到中间结构的一对内梁，以及一对外部 在中间结构和支撑框架之间水平延伸的垂直于内梁的方向的横梁。 应变计连接到内梁和外梁的侧面，以感测由书写工具的尖端在水平“X”和“Y”方向上施加到压板的力，并且额外的应变计连接到 外梁在垂直或“Z”方向上感测力。
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公开(公告)号：US06355994B1
公开(公告)日：2002-03-12
申请号：US09543265
申请日：2000-04-05
申请人： Gerry B. Andeen , Martin E. Lee
发明人： Gerry B. Andeen , Martin E. Lee
IPC分类号： H02K3300
CPC分类号： G03F7/70716 , G03F7/70841 , G03F7/709 , H01J37/20 , H01L21/67259 , H01L21/682 , Y10T403/45
摘要： An ultra-high precision stage incorporating a novel, legged design suitable for applications requiring high voltage and vacuum is disclosed herein. The stage comprises: a base; a frame attached to the base; a platform with a bottom platform surface; at least three adjustable limbs coupled to the base and the bottom platform surface, each limb comprising a raising member attached to the base, a first attachment member attached to the raising member, a leg, a bottom end of the leg attached to the first attachment member, a second attachment member attached to a top end of the leg and the second attachment member attached to the bottom platform surface; and platform movement members coupled to the platform and the frame, providing precise positioning and movement of the platform. The attachment members can be flexure joints; further, they can be flexural thrust joints. The platform can have six degrees of freedom of movement and accommodate wafers with diameters of 300 mm. The stage can weigh less than 100 lbs.
摘要翻译： 本文公开了一种结合适用于需要高电压和真空的应用的新颖的腿式设计的超高精度级。 舞台包括：一个基地; 一个连接到基座的框架; 具有底部平台表面的平台; 至少三个可调节的肢体，其联接到所述基部和所述底部平台表面，每个肢体包括附接到所述基部的提升构件，附接到所述提升构件的第一附接构件，腿部，所述腿部的底端附接到所述第一附件 构件，附接到所述腿的顶端的第二附接构件和附接到所述底部平台表面的所述第二附接构件; 以及平台运动构件，其联接到平台和框架，提供平台的精确定位和移动。 附接构件可以是挠性接头; 此外，它们可以是弯曲推力接头。 该平台可以具有六个运动自由度，并适应直径为300 mm的晶圆。 舞台可以重量小于100磅。
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公开(公告)号：US4647945A
公开(公告)日：1987-03-03
申请号：US826788
申请日：1986-02-06
CPC分类号： B41J2/04
摘要： Disclosed is an image recording method and its apparatus, in which dye vapor generated by heating sublimable dye is mixed with condensable vapor generated by heating condensable substance and formed into mixed vapor having higher pressure than the pressure outside a recording head and the mixed vapor thus formed and provided with a force to blow out by the pressure difference between inside and outside the recording head is adapted to jet from a nozzle with its jet amount controlled by control means, and according to which, high speed image recording is made possible although the temperature for heating the sublimable dye can be kept low, and the condensable vapor included in the mixed vapor is cooled while flying or upon reaching the surface of a recording member to reduce in volume, and therefore, the picture element is made smaller in diameter and spreading out of the jet around the nozzle along the surface of the recording member is prevented so that recording of high resolution is made possible.
摘要翻译： 公开了一种图像记录方法及其装置，其中通过加热可升华的染料产生的染料蒸汽与通过加热可冷凝物质产生的可冷凝蒸气混合并形成为具有比记录头外部的压力高的压力的混合蒸汽和由此形成的混合蒸气 并且设置有通过记录头内外压差而吹出的力适于以其控制装置控制的喷射量从喷嘴喷射，并且根据该喷射量，可以实现高速图像记录，尽管温度 用于加热可升华染料的加热可以保持较低，并且包含在混合蒸气中的可冷凝蒸汽在飞行时或达到记录部件的表面而被冷却以减小体积，因此使得像素的直径更小并且扩展 防止沿着记录部件表面的喷嘴周围的喷射流出，使得记录高分辨率 成为可能
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9.发明授权Method of and apparatus for collecting solar radiation utilizing variable curvature cylindrical reflectors 失效采用可变曲率圆柱反射器收集太阳辐射的方法和装置
公开(公告)号：US4141626A
公开(公告)日：1979-02-27
申请号：US801671
申请日：1977-05-31
CPC分类号： F24J2/4623 , F24J2/145 , F24J2/54 , Y02E10/45 , Y02E10/47
摘要： A heliostat apparatus includes a frame which is rotatable about an axis which is parallel to the aperture plane of an elongate receiver. A plurality of flat flexible mirror elements are mounted to the frame between several parallel, uniformly spaced resilient beams which are pivotally connected at their ends to the frame. Channels are mounted to the sides of the beams for supporting the edges of the mirror elements. Each of the beams has a longitudinally varying configuration designed to bow into predetermined, generally circular curvatures of varying radii when the center of the beam is deflected relative to the pivotally connected ends of the beams. All of the parallel resilient beams are simultaneously deflected by a cam shaft assembly extending through openings in the centers of the beams, whereby the mirror elements together form an upwardly concave, cylindrical reflecting surface. The heliostat is rotated about its axis to track the apparent diurnal movement of the sun, while the reflecting surface is substantially simultaneously bowed into a cylindrical trough having a radius adapted to focus incident light at the plane of the receiver aperture.
摘要翻译： 定日镜装置包括可围绕平行于细长接收器的孔平面的轴线旋转的框架。 多个平的柔性镜元件在几个平行的，均匀间隔的弹性梁之间安装到框架上，弹性梁在其端部枢转地连接到框架。 通道安装到梁的侧面以支撑镜元件的边缘。 每个梁具有纵向变化的构造，其设计成当梁的中心相对于梁的可枢转地连接的端部偏转时，弯曲成具有不同半径的预定的大致圆形曲率。 所有的平行的弹性梁同时被凸轮轴组件偏转，所述凸轮轴组件延伸穿过梁的中心的开口，由此反射镜元件一起形成向上凹的圆柱形反射表面。 定日镜围绕其轴线旋转以跟踪太阳的明显的昼夜运动，而反射表面基本上同时弯曲成具有适于将入射光聚焦在接收器孔的平面处的半径的圆柱形槽。
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公开(公告)号：USRE29765E
公开(公告)日：1978-09-19
申请号：US844276
申请日：1977-10-21
申请人： Hewitt D. Crane , Jon C. Taenzer , Gerry B. Andeen
发明人： Hewitt D. Crane , Jon C. Taenzer , Gerry B. Andeen
IPC分类号： B43K29/08 , G01L1/22 , G01L5/16 , G01L9/04 , G01P5/02 , G01P13/02 , G06F3/033 , G06F3/048 , G06K9/24
CPC分类号： G06F3/04815 , B43K29/08 , G01L1/22 , G01L5/161 , G01L9/04 , G01P13/02 , G01P5/02 , G06F3/03545 , G06K9/24
摘要： A writing instrument is provided which generates electrical signals indicative of the force applied and the direction of motion taken by the writing instrument as one is writing with it. The writing instrument uses strain gauges for providing these signals.
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