Multi-cathode metal vapor arc ion source
    1.
    发明授权
    Multi-cathode metal vapor arc ion source 失效
    多阴极金属蒸气电弧离子源

    公开(公告)号:US4785220A

    公开(公告)日:1988-11-15

    申请号:US25335

    申请日:1987-03-13

    CPC分类号: H01J27/14 H01J27/08

    摘要: An ion generating apparatus utilizing a vacuum chamber, a cathode and an anode in the chamber. A source of electrical power produces an arc or discharge between the cathode and anode. The arc is sufficient to vaporize a portion of the cathode to form a plasma. The plasma is directed to an extractor which separates the electrons from the plasma, and accelerates the ions to produce an ion beam. One embodiment of the appaatus utilizes a multi-cathode arrangement for interaction with the anode.

    摘要翻译: 一种利用真空室,阴极和阳极的离子发生装置。 电源产生阴极和阳极之间的电弧或放电。 电弧足以蒸发阴极的一部分以形成等离子体。 等离子体被引导到分离电子与等离子体的提取器,并且加速离子以产生离子束。 该应用的一个实施例利用多阴极布置来与阳极相互作用。

    Filters for cathodic arc plasmas
    3.
    发明授权
    Filters for cathodic arc plasmas 有权
    阴极电弧等离子体过滤器

    公开(公告)号:US06465780B1

    公开(公告)日:2002-10-15

    申请号:US09540679

    申请日:2000-03-31

    IPC分类号: B01D5944

    摘要: Cathodic arc plasmas are contaminated with macroparticles. A variety of magnetic plasma filters has been used with various success in removing the macroparticles from the plasma. An open-architecture, bent solenoid filter, with additional field coils at the filter entrance and exit, improves macroparticle filtering. In particular, a double-bent filter that is twisted out of plane forms a very compact and efficient filter. The coil turns further have a flat cross-section to promote macroparticle reflection out of the filter volume. An output conditioning system formed of an expander coil, a straightener coil, and a homogenizer, may be used with the magnetic filter for expanding the filtered plasma beam to cover a larger area of the target. A cathodic arc plasma deposition system using this filter can be used for the deposition of ultrathin amorphous hard carbon (a-C) films for the magnetic storage industry.

    摘要翻译: 阴极电弧等离子体被大颗粒污染。 已经使用各种磁性等离子体过滤器,其具有各种成功从血浆中除去大颗粒。 开放架构的弯曲电磁过滤器,在过滤器入口和出口处具有额外的励磁线圈,可改善大颗粒过滤。 特别地,扭曲成平面的双弯曲过滤器形成非常紧凑和有效的过滤器。 线圈匝还具有平坦的横截面以促进大颗粒反射出过滤器体积。 可以使用由膨胀器线圈,矫直线圈和均质器形成的输出调节系统与磁性过滤器一起扩展经过滤的等离子体束以覆盖目标的较大面积。 使用该过滤器的阴极电弧等离子体沉积系统可用于沉积用于磁存储工业的超薄无定形硬碳(a-C)膜。

    Apparatus for coating a surface with a metal utilizing a plasma source
    4.
    发明授权
    Apparatus for coating a surface with a metal utilizing a plasma source 失效
    用于利用等离子体源用金属涂覆表面的设备

    公开(公告)号:US5013578A

    公开(公告)日:1991-05-07

    申请号:US448379

    申请日:1989-12-11

    IPC分类号: C23C14/32 H01J27/22 H05H1/48

    CPC分类号: H01J27/22 C23C14/325 H05H1/48

    摘要: An apparatus and method for coating or layering a surface with a metal utilizing a metal vapor vacuum arc plasma source. The apparatus includes a trigger mechanism for actuating the metal vacuum vapor arc plasma source in a pulsed mode at a predetermined rate. The surface or substrate to be coated or layered is supported in position with the plasma source in a vacuum chamber. The surface is electrically biased for a selected period of time during the pulsed mode of operation of the plasma source. Both the pulsing of the metal vapor vacuum arc plasma source and the electrical biasing of the surface are synchronized for selected periods of time.

    摘要翻译: 一种利用金属蒸汽真空电弧等离子体源用金属涂覆或分层表面的装置和方法。 该装置包括用于以脉冲模式以预定速率致动金属真空蒸汽电弧等离子体源的触发机构。 要被涂覆或分层的表面或基底被支撑在真空室中的等离子体源的适当位置。 在等离子体源的脉冲操作模式期间,表面被电偏置选定的时间段。 金属蒸汽真空电弧等离子体源的脉冲和表面的电偏置都同步选定的时间段。

    High current ion source
    5.
    发明授权
    High current ion source 失效
    高电流离子源

    公开(公告)号:US4952843A

    公开(公告)日:1990-08-28

    申请号:US320475

    申请日:1989-03-08

    IPC分类号: H01J27/14 H01J37/08

    CPC分类号: H01J27/14 H01J37/08

    摘要: An ion source utilizing a cathode and anode for producing an electric arc therebetween. The arc is sufficient to vaporize a portion of the cathode to form a plasma. The plasma leaves the generation region and expands through another regon. The density profile of the plasma may be flattened using a magnetic field formed within a vacuum chamber. Ions are extracted from the plasma to produce a high current broad on beam.

    摘要翻译: 利用阴极和阳极在其间产生电弧的离子源。 电弧足以蒸发阴极的一部分以形成等离子体。 血浆离开生成区域并扩张通过另一个离子。 可以使用在真空室内形成的磁场使等离子体的密度分布变平。 从等离子体中提取离子以产生大电流宽的光束。

    Low temperature formation of electrode having electrically conductive
metal oxide surface
    6.
    发明授权
    Low temperature formation of electrode having electrically conductive metal oxide surface 失效
    具有导电金属氧化物表面的电极的低温形成

    公开(公告)号:US5827580A

    公开(公告)日:1998-10-27

    申请号:US625270

    申请日:1996-03-27

    摘要: A low temperature process is disclosed for forming metal suboxides on substrates by cathodic arc deposition by either controlling the pressure of the oxygen present in the deposition chamber, or by controlling the density of the metal flux, or by a combination of such adjustments, to thereby control the ratio of oxide to metal in the deposited metal suboxide coating. The density of the metal flux may, in turn, be adjusted by controlling the discharge current of the arc, by adjusting the pulse length (duration of on cycle) of the arc, and by adjusting the frequency of the arc, or any combination of these parameters. In a preferred embodiment, a low temperature process is disclosed for forming an electrically conductive metal suboxide, such as, for example, an electrically conductive suboxide of titanium, on an electrode surface, such as the surface of a nickel oxide electrode, by such cathodic arc deposition and control of the deposition parameters. In the preferred embodiment, the process results in a titanium suboxide-coated nickel oxide electrode exhibiting reduced parasitic evolution of oxygen during charging of a cell made using such an electrode as the positive electrode, as well as exhibiting high oxygen overpotential, resulting in suppression of oxygen evolution at the electrode at full charge of the cell.

    摘要翻译: 公开了一种低温工艺,用于通过阴极电弧沉积在基板上形成金属低氧化物,方法是控制存在于沉积室中的氧气的压力,或通过控制金属熔剂的密度,或通过这些调节的组合,从而 控制沉积的金属低氧化物涂层中氧化物与金属的比例。 通过调整电弧的脉冲长度(周期的持续时间),并通过调整电弧的频率,或通过调整电弧的频率,可以通过控制电弧的放电电流来调整金属焊剂的密度 这些参数。 在优选实施例中,公开了一种低温工艺,用于在电极表面(例如氧化镍电极的表面)上形成导电金属低氧化物,例如钛的导电低氧化物,通过这种阴极 电弧沉积和沉积参数的控制。 在优选的实施方案中,该方法产生了一种低氧化钛涂层的氧化镍电极,其在使用如正极这样的电极制成的电池充电期间表现出减少的氧的寄生放电,并且表现出高的氧超电势,导致抑制 在电池完全充电时电极的氧气释放。

    Sheet feeders
    7.
    发明授权
    Sheet feeders 失效
    送纸器

    公开(公告)号:US4735409A

    公开(公告)日:1988-04-05

    申请号:US10604

    申请日:1987-02-04

    申请人: Ian G. Brown

    发明人: Ian G. Brown

    摘要: A sheet feeder for dealing with simplex or duplex copy sheets from a copier or like reprographic machine uses four rollers forming three sheet-feeding nips. All sheets enter the central nip: on leaving it they are selectively diverted into one or other of two sheet pockets, from which they bounce or are otherwise fed back into an aligned other nip. Sheets passing through one outer nip may be fed to an output tray, while those passing through the other nip may go back into the machine for further processing.

    摘要翻译: 用于从复印机或类似的复印机处理单面或双面复印纸的送纸器使用形成三个送纸辊的四个辊。 所有的纸张进入中央压区:在离开它们时,它们被选择性地转移到两个纸袋中的一个或另外两个纸袋中,从它们反弹或以其它方式反馈回到对准的其他辊隙中。 穿过一个外部辊隙的片材可以被输送到出纸盘,而穿过另一个辊隙的片材可以返回机器进行进一步处理。

    Ion beam generating apparatus
    10.
    发明授权
    Ion beam generating apparatus 失效
    离子束发生装置

    公开(公告)号:US4714860A

    公开(公告)日:1987-12-22

    申请号:US696460

    申请日:1985-01-30

    IPC分类号: H01J27/14 H01J7/24 H05B31/26

    CPC分类号: H01J27/14

    摘要: An ion generating apparatus utilizing a vacuum chamber, a cathode and an anode in the chamber. A source of electrical power produces an arc or discharge between the cathode and anode. The arc is sufficient to vaporize a portion of the cathode to form a plasma. The plasma is directed to an extractor which separates the electrons from the plasma, and accelerates the ions to produce an ion beam.

    摘要翻译: 一种利用真空室,阴极和阳极的离子发生装置。 电源产生阴极和阳极之间的电弧或放电。 电弧足以蒸发阴极的一部分以形成等离子体。 等离子体被引导到分离电子与等离子体的提取器,并且加速离子以产生离子束。