摘要:
The present invention relates to an optical imaging device capable of responding to a writing long-wave radiation (w) emitted by any object or scene. Said device is configured to operate in reflection mode or in transmission mode and comprises a reading light unit (2), writing light unit (4), resonant optically-addressed spatial light modulator (ROASLM) (3) with an optically-responsive resonant structure (ORRS) (100) and a detector (40), wherein said (ORRS) (100) comprises: a photosensitive layer (101) deposited on a transparent substrate for absorbing the writing radiation (w) in a form of the long-wave image of the object or scene (1) and transforming said image into the stimulating signal across the ORRS (100), optical layers (102) for inducing resonance effect to the stimulating signal formed in the ORRS (100), optional alignment layers (103) for aligning liquid crystal molecules, and the conversion layer (104) for converting the resonant long-wave image of the object or scene (1) into a visible-range image.
摘要:
The present invention describes a liquid crystal composite tunable device for fast polarisation-independent modulation of an incident light beam comprising: (a) two supporting and functional panels, at least one of them coated with a transparent conductive electrode layer and with optionally at least one additional layer selected from an alignment layer, antireflective coating layer, thermochromic or electrochromic layer, photoconductive or photosensitive layer, and (b) a composite structure sandwiched between said two panels and made of a liquid crystal and porous microparticles infiltrated with said liquid crystal. The porous microparticles have an average refractive index approximately equals to one of the liquid crystal principal refractive indices, matching that of the liquid crystal at one orientational state (for example, parallel n∥), and exhibiting large mismatch at another orientational state (for example, perpendicular n⊥). This refractive index mismatch between said microparticles and said liquid crystal is tuned by applying an external electric or magnetic field, thermally or optically.
摘要:
The invention is a surface plasmon resonance (SPR) sensor to determine the presence and quantity of biological or chemical entities in an analyte. The sensor comprises a metal periodic structure deposited as a thin layer of a noble metal, comprising a one dimensional array of nanoslits or a two dimensional array of nanoholes on a transparent dielectric substrate, a nm-thick layer of transparent dielectric protection layer on top of the metal periodic structure and a functionalization layer, which acts as a binding layer to biological or biochemical entities in an analyte that is in contact with the functionaliztion layer.
摘要:
A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
摘要:
A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
摘要:
A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
摘要:
A fast spectral modulator for modulating intensity, phase, and spectrum of light beam, is described in the present invention. The spectral modulator comprises at least one liquid crystal composite and a photonic structure. Said at least one liquid crystal composite is made of a liquid crystal and porous microparticles infiltrated within said liquid crystal, wherein: (i) said porous microparticles have an average refractive index approximately equals to one of the liquid crystal principal refractive indices; and (ii) concentration of said microparticles in said composite is less than 0.1% for avoiding significant light scattering.
摘要:
The present invention describes a liquid crystal composite tunable device for fast polarisation-independent modulation of an incident light beam comprising: (a) two supporting and functional panels, at least one of them coated with a transparent conductive electrode layer and with optionally at least one additional layer selected from an alignment layer, antireflective coating layer, thermochromic or electrochromic layer, photoconductive or photosensitive layer, and (b) a composite structure sandwiched between said two panels and made of a liquid crystal and porous microparticles infiltrated with said liquid crystal. The porous microparticles have an average refractive index approximately equals to one of the liquid crystal principal refractive indices, matching that of the liquid crystal at one orientational state (for example, parallel n∥), and exhibiting large mismatch at another orientational state (for example, perpendicular n⊥). This refractive index mismatch between said microparticles and said liquid crystal is tuned by applying an external electric or magnetic field, thermally or optically.
摘要:
An optical coherence tomography (OCT) imager comprising: a low coherence light source that provides light; a photosensor for imaging light; optics that directs a first portion of the light along a first optical path so that it is imaged on the photosensor and a second portion of the light along a second optical path so that it is reflected by material in the target to the photosensor where it is imaged to interfere with light from the first portion to form an interference pattern; and a mask through which light from at least one of the first and second portions of light passes that generates a relative phase perturbation between portions of light that passes through it.
摘要:
Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The measurement device may include an illumination system and a detection system. The illumination system and the detection system may be configured such that the system may be configured to determine multiple properties of the specimen. For example, the system may be configured to determine multiple properties of a specimen including, but not limited to, critical dimension and overlay misregistration. In this manner, a measurement device may perform multiple optical and/or non-optical metrology and/or inspection techniques.