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    CHARGED PARTICLE BEAM DEVICE WITH DYNAMIC FOCUS AND METHOD OF OPERATING THEREOF
    1.
    发明申请
    CHARGED PARTICLE BEAM DEVICE WITH DYNAMIC FOCUS AND METHOD OF OPERATING THEREOF 审中-公开
    具有动态聚焦的充电颗粒光束装置及其操作方法

    公开(公告)号：US20130214155A1

    公开(公告)日：2013-08-22

    申请号：US13405759

    申请日：2012-02-27

    申请人： Dieter Winkler ,  Igor Petrov

    发明人： Dieter Winkler ,  Igor Petrov

    IPC分类号： H01J37/04

    CPC分类号： H01J37/145 ,  H01J37/1474 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/28

    摘要： A retarding field scanning electron microscope is described. The microscope includes a scanning deflection assembly configured for scanning an electron beam over a specimen, one or more controllers in communication with the scanning deflection assembly for controlling the electron beam scanning pattern, and a combined magnetic-electrostatic objective lens configured for focusing the electron beam including an electrostatic lens portion. The electrostatic lens portion includes a first electrode with a high potential bias, and a second electrode disposed between the first electrode and the specimen plane with a potential bias lower than the first electrode, wherein the second electrode is configured for providing a retarding field. The microscope further includes a voltage supply connected to the second electrode for biasing the second electrode and being in communication with the controllers, wherein the controllers synchronize a variation of the potential of the second electrode with the scanning pattern.

    摘要翻译： 描述了延迟场扫描电子显微镜。 显微镜包括扫描偏转组件，其被配置为扫描试样上的电子束，与用于控制电子束扫描图案的扫描偏转组件连通的一个或多个控制器，以及组合的静电物镜，其被配置用于聚焦电子束 包括静电透镜部分。 静电透镜部分包括具有高电位偏置的第一电极和设置在第一电极和检体平面之间的电位偏压低于第一电极的第二电极，其中第二电极被配置为提供延迟场。 显微镜还包括连接到第二电极的电压源，用于偏置第二电极并与控制器连通，其中控制器使第二电极的电位变化与扫描图案同步。

    Method and system for the examination of specimen
    2.
    发明授权
    Method and system for the examination of specimen 有权
    样品检查方法和系统

    公开(公告)号：US07800062B2

    公开(公告)日：2010-09-21

    申请号：US10912792

    申请日：2004-08-06

    申请人： Alex Goldenshtein ,  Radel Ben-Av ,  Asher Pearl ,  Igor Petrov ,  Nadav Haas ,  Pavel Adamec ,  Yaron Gold

    发明人： Alex Goldenshtein ,  Radel Ben-Av ,  Asher Pearl ,  Igor Petrov ,  Nadav Haas ,  Pavel Adamec ,  Yaron Gold

    IPC分类号： G01B15/04

    CPC分类号： G01N23/22 ,  G01N23/203 ,  H01J37/1478 ,  H01J37/265 ,  H01J2237/202 ,  H01J2237/2611 ,  H01J2237/281

    摘要： The present invention provides, according to a first aspect, a method for the examination of specimen with a beam of charged particles. The method provides one or more images of the specimen made with different view angles, so that, compared to a single image of the specimen, a lot of additional information about the specimen can be accessed. The different view angles (angles of incidence) are achieved by tilting the beam between the two images and moving the specimen to a new position so that the displacement of the beam caused by the tilting of the beam is compensated. Accordingly, while displaying/recording the second image the beam scans over the same area as it has scanned while displaying/recording the first image.

    摘要翻译： 根据第一方面，本发明提供一种用带电粒子束检查样品的方法。 该方法提供了具有不同视角的样本的一个或多个图像，使得与样本的单个图像相比，可以访问大量关于样本的附加信息。 通过在两个图像之间倾斜光束并将样本移动到新位置来实现不同的视角（入射角），使得由光束的倾斜引起的光束的位移被补偿。 因此，当显示/记录第二图像时，在显示/记录第一图像的同时，光束扫描与其扫描的相同的区域。

    Beam directing system and method for use in a charged particle beam column
    3.
    发明授权
    Beam directing system and method for use in a charged particle beam column 有权
    光束引导系统和用于带电粒子束柱的方法

    公开(公告)号：US07112803B2

    公开(公告)日：2006-09-26

    申请号：US10897635

    申请日：2004-07-23

    申请人： Igor Petrov ,  Igor Krivts (Krayvitz) ,  Albert Karabekov

    发明人： Igor Petrov ,  Igor Krivts (Krayvitz) ,  Albert Karabekov

    IPC分类号： H01J37/10 ,  H01J37/147

    CPC分类号： H01J37/147 ,  H01J37/026 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/0044 ,  H01J2237/1405 ,  H01J2237/1526

    摘要： A method and system are presented for directing a charged particle beam towards and away from a sample. The system comprises a lens arrangement having an electrode formed with a beam opening for a charged particle beam passage therethrough; and a magnetic deflector. The magnetic deflector has a magnetic circuit formed by a core part for carrying excitation coils and a polepieces part. The polepieces of the magnetic deflector are in electrical communication with the electrode of the lens arrangement and are electrically insulated from the other part of the magnetic circuit.

    摘要翻译： 提出了一种用于将带电粒子束朝向和远离样品引导的方法和系统。 该系统包括透镜装置，其具有形成有用于带电粒子束通过的光束开口的电极; 和磁偏转器。 磁偏转器具有由用于承载励磁线圈的芯部和极靴部分形成的磁路。 磁偏转器的极点与透镜装置的电极电连通，并且与磁路的另一部分电绝缘。

    Method and system for the examination of specimen
    4.
    发明申请
    Method and system for the examination of specimen 有权
    样品检查方法和系统

    公开(公告)号：US20050116164A1

    公开(公告)日：2005-06-02

    申请号：US10912792

    申请日：2004-08-06

    申请人： Alex Goldenshtein ,  Radel Ben-Av ,  Asher Pearl ,  Igor Petrov ,  Nadav Haas

    发明人： Alex Goldenshtein ,  Radel Ben-Av ,  Asher Pearl ,  Igor Petrov ,  Nadav Haas

    IPC分类号： G01N23/203 ,  G01N23/22 ,  G21K7/00 ,  G01N23/00

    CPC分类号： G01N23/22 ,  G01N23/203 ,  H01J37/1478 ,  H01J37/265 ,  H01J2237/202 ,  H01J2237/2611 ,  H01J2237/281

    摘要： The present invention provides, according to a first aspect, a method for the examination of specimen with a beam of charged particles. The method provides one or more images of the specimen made with different view angles, so that, compared to a single image of the specimen, a lot of additional information about the specimen can be accessed. The different view angles (angles of incidence) are achieved by tilting the beam between the two images and moving the specimen to a new position so that the displacement of the beam caused by the tilting of the beam is compensated. Accordingly, while displaying/recording the second image the beam scans over the same area as it has scanned while displaying/recording the first image.

    摘要翻译： 根据第一方面，本发明提供一种用带电粒子束检查样品的方法。 该方法提供了具有不同视角的样本的一个或多个图像，使得与样本的单个图像相比，可以访问大量关于样本的附加信息。 通过在两个图像之间倾斜光束并将样本移动到新位置来实现不同的视角（入射角），使得由光束的倾斜引起的光束的位移被补偿。 因此，当显示/记录第二图像时，在显示/记录第一图像的同时，光束扫描与其扫描的相同的区域。

    Particle trap for electrostatic chuck
    6.
    发明授权
    Particle trap for electrostatic chuck 有权
    静电吸盘用颗粒捕集器

    公开(公告)号：US07317606B2

    公开(公告)日：2008-01-08

    申请号：US11119316

    申请日：2005-04-28

    申请人： Igor Petrov ,  Igor Krivts (Krayvitz) ,  Eitan Kidron ,  Guy Eitan ,  Igal Ben-Dayan

    发明人： Igor Petrov ,  Igor Krivts (Krayvitz) ,  Eitan Kidron ,  Guy Eitan ,  Igal Ben-Dayan

    IPC分类号： H02N13/00

    CPC分类号： H01L21/6833 ,  H02N13/00

    摘要： Wafer supporting apparatus, including an electrostatic chuck for supporting the wafer. The apparatus further includes an electrostatic shield which is positioned in proximity to the chuck and the wafer, and a voltage source which is coupled to apply an electric field between the chuck and the wafer. The voltage source applies one or more potentials to the electrostatic shield so as to prevent penetration of particles to the wafer.

    摘要翻译： 晶片支撑装置，包括用于支撑晶片的静电卡盘。 该装置还包括位于卡盘和晶片附近的静电屏蔽，以及耦合以在卡盘和晶片之间施加电场的电压源。 电压源对静电屏蔽施加一个或多个电位，以防止颗粒渗透到晶片。

    Objective lens arrangement for use in a charged particle beam column
    9.
    发明授权
    Objective lens arrangement for use in a charged particle beam column 有权
    用于带电粒子束柱的物镜布置

    公开(公告)号：US06897442B2

    公开(公告)日：2005-05-24

    申请号：US10423289

    申请日：2003-04-25

    申请人： Igor Petrov

    发明人： Igor Petrov

    IPC分类号： G01Q30/02 ,  H01J37/145 ,  H01J37/28 ,  H01J37/244

    CPC分类号： H01J37/145 ,  H01J37/28

    摘要： An objective lens arrangement is presented for mounting in a charged particle beam column adjacent to an anode tube that defines a beam drift space for a charged particle beam propagating towards a sample. The lens arrangement comprises a magnetic lens and an electrostatic lens, wherein the electrostatic lens includes upper and lower electrodes arranged in a spaced-apart coaxial relationship along an optical axis of the lens arrangement.

    摘要翻译： 提出了一种用于安装在邻近阳极管的带电粒子束列中的物镜布置，其限定了朝向样品传播的带电粒子束的波束漂移空间。 透镜装置包括磁透镜和静电透镜，其中静电透镜包括沿着透镜装置的光轴以间隔开的同轴关系布置的上电极和下电极。

    Deflection method and system for use in a charged particle beam column
    10.
    发明授权
    Deflection method and system for use in a charged particle beam column 有权
    用于带电粒子束柱的偏转方法和系统

    公开(公告)号：US06825475B2

    公开(公告)日：2004-11-30

    申请号：US10247104

    申请日：2002-09-19

    申请人： Igor Petrov ,  Igor Krivts ,  Zvika Rosenberg ,  Pavel Adamec

    发明人： Igor Petrov ,  Igor Krivts ,  Zvika Rosenberg ,  Pavel Adamec

    IPC分类号： H01J3710

    CPC分类号： H01J37/1475

    摘要： A deflection system is presented for use in a lens arrangement of a charged particle beam column for inspecting a sample. The system comprises a magnetic deflector operable to create a magnetic field, and a pole piece assembly at least partly accommodated within the magnetic field. The pole piece assembly has a portion made of a soft magnetic material and is formed with an opening for a charged particle beam propagation therethrough. The deflection system allows for conducting the magnetic field created by the magnetic deflector through the pole piece assembly towards the opening in the pole piece assembly. This enables to increase the magnetic field value in the vicinity of the sample at the optical axis of the lens arrangement at a given electric current through the excitation coils of the magnetic deflector, without a need to increase a working distance.

    摘要翻译： 呈现偏转系统用于带电粒子束柱的透镜布置，用于检查样品。 该系统包括可操作以产生磁场的磁偏转器和至少部分地容纳在磁场内的极片组件。 极片组件具有由软磁材料制成的部分，并且形成有用于带电粒子束传播的开口。 偏转系统允许通过磁极组件朝磁极组件的开口传导由磁偏转器产生的磁场。 这样就能够使透镜装置的光轴附近的样品在通过磁导流板的激励线圈的给定电流上增加磁场值，而不需要增加工作距离。