公开(公告)号：US07800062B2

公开(公告)日：2010-09-21

申请号：US10912792

申请日：2004-08-06

申请人： Alex Goldenshtein ,  Radel Ben-Av ,  Asher Pearl ,  Igor Petrov ,  Nadav Haas ,  Pavel Adamec ,  Yaron Gold

发明人： Alex Goldenshtein ,  Radel Ben-Av ,  Asher Pearl ,  Igor Petrov ,  Nadav Haas ,  Pavel Adamec ,  Yaron Gold

IPC分类号： G01B15/04

CPC分类号： G01N23/22 ,  G01N23/203 ,  H01J37/1478 ,  H01J37/265 ,  H01J2237/202 ,  H01J2237/2611 ,  H01J2237/281

摘要： The present invention provides, according to a first aspect, a method for the examination of specimen with a beam of charged particles. The method provides one or more images of the specimen made with different view angles, so that, compared to a single image of the specimen, a lot of additional information about the specimen can be accessed. The different view angles (angles of incidence) are achieved by tilting the beam between the two images and moving the specimen to a new position so that the displacement of the beam caused by the tilting of the beam is compensated. Accordingly, while displaying/recording the second image the beam scans over the same area as it has scanned while displaying/recording the first image.

摘要翻译： 根据第一方面，本发明提供一种用带电粒子束检查样品的方法。 该方法提供了具有不同视角的样本的一个或多个图像，使得与样本的单个图像相比，可以访问大量关于样本的附加信息。 通过在两个图像之间倾斜光束并将样本移动到新位置来实现不同的视角（入射角），使得由光束的倾斜引起的光束的位移被补偿。 因此，当显示/记录第二图像时，在显示/记录第一图像的同时，光束扫描与其扫描的相同的区域。

公开(公告)号：US20060049348A1

公开(公告)日：2006-03-09

申请号：US10937802

申请日：2004-09-08

申请人： Igor Petrov ,  Pavel Adamec ,  Zvika Rosenberg

发明人： Igor Petrov ,  Pavel Adamec ,  Zvika Rosenberg

IPC分类号： G01N23/225 ,  H01J37/28

CPC分类号： H01J37/28 ,  G01N23/2204 ,  G01N23/2251 ,  H01J2237/04756 ,  H01J2237/24578 ,  H01J2237/24592 ,  H01J2237/2817

摘要： A method and system are presented for controlling inspection of a sample with a charged particle beam. A certain given voltage is supplied to an anode of the column to provide a required accelerating voltage for a charged particle beam. A certain negative voltage is supplied to the sample selected so as to provide a desirably high effective voltage of the column at said given voltage of the anode. A certain voltage is supplied an electrode of a lens arrangement located closer to the sample, this voltage being selected to satisfy one of the following conditions: the electrode voltage is either equal to or slightly lower than that of the sample; and the electrode voltage is significantly higher than that of the sample.

公开(公告)号：US06825475B2

公开(公告)日：2004-11-30

申请号：US10247104

申请日：2002-09-19

申请人： Igor Petrov ,  Igor Krivts ,  Zvika Rosenberg ,  Pavel Adamec

发明人： Igor Petrov ,  Igor Krivts ,  Zvika Rosenberg ,  Pavel Adamec

IPC分类号： H01J3710

CPC分类号： H01J37/1475

摘要： A deflection system is presented for use in a lens arrangement of a charged particle beam column for inspecting a sample. The system comprises a magnetic deflector operable to create a magnetic field, and a pole piece assembly at least partly accommodated within the magnetic field. The pole piece assembly has a portion made of a soft magnetic material and is formed with an opening for a charged particle beam propagation therethrough. The deflection system allows for conducting the magnetic field created by the magnetic deflector through the pole piece assembly towards the opening in the pole piece assembly. This enables to increase the magnetic field value in the vicinity of the sample at the optical axis of the lens arrangement at a given electric current through the excitation coils of the magnetic deflector, without a need to increase a working distance.

摘要翻译： 呈现偏转系统用于带电粒子束柱的透镜布置，用于检查样品。 该系统包括可操作以产生磁场的磁偏转器和至少部分地容纳在磁场内的极片组件。 极片组件具有由软磁材料制成的部分，并且形成有用于带电粒子束传播的开口。 偏转系统允许通过磁极组件朝磁极组件的开口传导由磁偏转器产生的磁场。 这样就能够使透镜装置的光轴附近的样品在通过磁导流板的激励线圈的给定电流上增加磁场值，而不需要增加工作距离。

公开(公告)号：US07067807B2

公开(公告)日：2006-06-27

申请号：US10937802

申请日：2004-09-08

申请人： Igor Petrov ,  Pavel Adamec ,  Zvika Rosenberg

发明人： Igor Petrov ,  Pavel Adamec ,  Zvika Rosenberg

IPC分类号： H01J37/28 ,  H01J37/145

CPC分类号： H01J37/28 ,  G01N23/2204 ,  G01N23/2251 ,  H01J2237/04756 ,  H01J2237/24578 ,  H01J2237/24592 ,  H01J2237/2817

摘要： A method and system are presented for controlling inspection of a sample with a charged particle beam. A certain given voltage is supplied to an anode of the column to provide a required accelerating voltage for a charged particle beam. A certain negative voltage is supplied to the sample selected so as to provide a desirably high effective voltage of the column at said given voltage of the anode. A certain voltage is supplied an electrode of a lens arrangement located closer to the sample, this voltage being selected to satisfy one of the following conditions: the electrode voltage is either equal to or slightly lower than that of the sample; and the electrode voltage is significantly higher than that of the sample.

摘要翻译： 提出了一种用于控制带有带电粒子束的样品检查的方法和系统。 将一定的给定电压提供给柱的阳极以提供用于带电粒子束的所需加速电压。 向选择的样品提供一定的负电压，以便在阳极的所述给定电压下提供柱的期望的高有效电压。 向位于更靠近样品的透镜装置的电极提供一定电压，该电压被选择为满足以下条件之一：电极电压等于或略低于样品的电压; 电极电压明显高于样品。

公开(公告)号：US07034297B2

公开(公告)日：2006-04-25

申请号：US10382789

申请日：2003-03-05

申请人： Igor Petrov ,  Zvika Rosenberg ,  Pavel Adamec ,  Igor Krayvitz

发明人： Igor Petrov ,  Zvika Rosenberg ,  Pavel Adamec ,  Igor Krayvitz

IPC分类号： G21G5/00 ,  G01R31/28 ,  H01J37/28 ,  H01J37/26

CPC分类号： H01J37/28 ,  G01N23/225 ,  H01J2237/20207

摘要： A method and apparatus for use in monitoring a sample with a charged particle beam are presented. A mechanical displacement between a plane defined by the sample's surface and an optical axis defined by a beam directing arrangement is provided so as to orient the sample at a certain non-right angle θ1 with respect to the optical axis. A primary charged particle beam propagating towards the sample is deflected so as to affect the trajectory of the primary charged particle beam to provide a certain non-zero angle θ2 between the primary beam propagation axis and said optical axis.

摘要翻译： 提出了一种用于监测带有带电粒子束的样品的方法和装置。 提供了由样品表面限定的平面和由光束引导装置限定的光轴之间的机械位移，以使样品相对于光轴以一定的非直角θ1取向 。 向样品传播的初级带电粒子束被偏转，以影响初级带电粒子束的轨迹，以在主光束传播轴和所述光轴之间提供一定的非零角度θ2。

公开(公告)号：US09153413B2

公开(公告)日：2015-10-06

申请号：US12528307

申请日：2008-02-22

申请人： Gilad Almogy ,  Avishai Bartov ,  Juergen Frosien ,  Pavel Adamec ,  Helmut Banzhof

发明人： Gilad Almogy ,  Avishai Bartov ,  Juergen Frosien ,  Pavel Adamec ,  Helmut Banzhof

IPC分类号： G21K7/00 ,  H01J37/05 ,  H01J37/10 ,  H01J37/147 ,  H01J37/28

CPC分类号： H01J37/05 ,  H01J37/10 ,  H01J37/147 ,  H01J37/28 ,  H01J2237/0635 ,  H01J2237/1508 ,  H01J2237/2449 ,  H01J2237/2817

摘要： A multi-beam scanning electron beam device (100) is described. The multi-bea scanning electron beam device having a column, includes a multi-beam emitter (110) for emitting a plurality of electron beams (12,13,14), at least one common electron beam optical element (130) having a common opening for at least two of the plurality of electron beams and being adapted for commonly influencing at least two of the plurality of electron beams, at least one individual electron beam optical element (140) for individually influencing the plurality of electron beams, a common objective lens assembly (150) for focusing the plurality of electrons beams having a common excitation for focusing at least two of the plurality of electron beams, and adapted for focusing the plurality of electron beams onto a specimen (20) for generation of a plurality of signal beams (121, 131,141), and a detection assembly (170) for individually detecting each signal beam on a corresponding detection element.

摘要翻译： 描述了多光束扫描电子束装置（100）。 具有列的多头扫描电子束装置包括用于发射多个电子束（12,13,14）的多光束发射器（110），至少一个共同的电子束光学元件（130） 用于多个电子束中的至少两个的开口，并适用于共同影响多个电子束中的至少两个，用于单独影响多个电子束的至少一个单独的电子束光学元件（140），共同的目标 透镜组件（150），用于聚焦具有用于聚焦多个电子束中的至少两个的共同激发的多个电子束，并且适于将多个电子束聚焦到样本（20）上以产生多个信号 光束（121,131,141）和检测组件（170），用于分别检测相应检测元件上的每个信号光束。

公开(公告)号：US08878148B2

公开(公告)日：2014-11-04

申请号：US12888978

申请日：2010-09-23

申请人： Pavel Adamec ,  Ivo Li{hacek over (s)}ka ,  Gennadij Gluchman ,  Milan Snabl

发明人： Pavel Adamec ,  Ivo Li{hacek over (s)}ka ,  Gennadij Gluchman ,  Milan Snabl

IPC分类号： G21K5/00 ,  H01J37/06

CPC分类号： H01J37/06 ,  H01J2237/022 ,  H01J2237/06316 ,  H01J2237/06341

摘要： A method of pre-treating an ultra high vacuum charged particle gun chamber by ion stimulated desorption is provided. The method includes generating a plasma for providing a plasma ion source, and applying a negative potential to at least one surface in the gun chamber, wherein the negative potential is adapted for extracting an ion flux from the plasma ion source to the at least one surface for desorbing contamination particles from the at least one surface by the ion flux impinging on the at least one surface.

摘要翻译： 提供了一种通过离子刺激解吸预处理超高真空带电粒子枪室的方法。 该方法包括产生用于提供等离子体离子源的等离子体，以及向枪室中的至少一个表面施加负电位，其中负电位适于将离子通量从等离子体离子源提取到至少一个表面 用于通过撞击在至少一个表面上的离子通量从至少一个表面解吸污染颗粒。

公开(公告)号：US20110163229A1

公开(公告)日：2011-07-07

申请号：US12528306

申请日：2008-02-22

申请人： Juergen Frosien ,  Helmut Banzhof ,  Pavel Adamec

发明人： Juergen Frosien ,  Helmut Banzhof ,  Pavel Adamec

IPC分类号： G01N23/225 ,  G01N23/227 ,  G01N23/22 ,  G01N23/203 ,  H01J1/50

CPC分类号： H01J37/05 ,  H01J37/10 ,  H01J37/147 ,  H01J37/28 ,  H01J2237/0635 ,  H01J2237/1508 ,  H01J2237/2449 ,  H01J2237/2817

摘要： A scanning charged particle beam device (100) is described. The scanning charged particle beam device includes a beam emitter (102) for emitting a primary electron beam, a first scan stage for scanning the beam over a specimen, an achromatic beam separator (130) adapted for separating a signal electron beam from the primary electron beam, and a detection unit (172,174,178) for detecting signal electrons.

摘要翻译： 描述扫描带电粒子束装置（100）。 扫描带电粒子束装置包括用于发射一次电子束的射束发射器（102），用于扫描试样上的束的第一扫描级，适于从一次电子分离信号电子束的消色束分离器（130） 以及用于检测信号电子的检测单元（172,174,178）。

公开(公告)号：US07872239B2

公开(公告)日：2011-01-18

申请号：US12181171

申请日：2008-07-28

申请人： Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

发明人： Pavel Adamec ,  Carlo Salvesen ,  Ivo Liska

IPC分类号： H01J37/28 ,  H01J37/244 ,  G01R31/305

CPC分类号： H01J37/12 ,  H01J37/145 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/121 ,  H01J2237/1405 ,  H01J2237/28

摘要： A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode having a conically shaped portion, a second electrode having a conically shaped portion, and a first insulator having a conically shaped portion, wherein the first insulator comprises two extending portions towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.

摘要翻译： 提供一种具有用于带电粒子束系统的静电透镜部件的透镜组件。 组件包括：具有锥形部分的第一电极，具有锥形部分的第二电极和具有锥形部分的第一绝缘体，其中第一绝缘体包括朝向其每个端部的两个延伸部分，并且其中两个 形成延伸部分以在绝缘体和每个相邻电极之间产生间隙。

公开(公告)号：US20100320382A1

公开(公告)日：2010-12-23

申请号：US12528307

申请日：2008-02-22

申请人： Gilad Almogy ,  Avishai Bartov ,  Jürgen Frosien ,  Pavel Adamec ,  Helmut Banzhof

发明人： Gilad Almogy ,  Avishai Bartov ,  Jürgen Frosien ,  Pavel Adamec ,  Helmut Banzhof

IPC分类号： G01N23/00 ,  H01J37/147

CPC分类号： H01J37/05 ,  H01J37/10 ,  H01J37/147 ,  H01J37/28 ,  H01J2237/0635 ,  H01J2237/1508 ,  H01J2237/2449 ,  H01J2237/2817

摘要： A multi-beam scanning electron beam device (100) is described. The multi-bea scanning electron beam device having a column, includes a multi-beam emitter (110) for emitting a plurality of electron beams (12,13,14), at least one common electron beam optical element (130) having a common opening for at least two of the plurality of electron beams and being adapted for commonly influencing at least two of the plurality of electron beams, at least one individual electron beam optical element (140) for individually influencing the plurality of electron beams, a common objective lens assembly (150) for focusing the plurality of electrons beams having a common excitation for focusing at least two of the plurality of electron beams, and adapted for focusing the plurality of electron beams onto a specimen (20) for generation of a plurality of signal beams (121, 131,141), and a detection assembly (170) for individually detecting each signal beam on a corresponding detection element.

摘要翻译： 描述了多光束扫描电子束装置（100）。 具有列的多头扫描电子束装置包括用于发射多个电子束（12,13,14）的多光束发射器（110），至少一个共同的电子束光学元件（130） 用于多个电子束中的至少两个的开口，并适用于共同影响多个电子束中的至少两个，用于单独影响多个电子束的至少一个单独的电子束光学元件（140），共同的目标 透镜组件（150），用于聚焦具有用于聚焦多个电子束中的至少两个的共同激发的多个电子束，并且适于将多个电子束聚焦到样本（20）上以产生多个信号 光束（121,131,141）和检测组件（170），用于分别检测相应检测元件上的每个信号光束。