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公开(公告)号：US08839670B2
公开(公告)日：2014-09-23
申请号：US13249902
申请日：2011-09-30
申请人： Jin Qiu , Joe Seeger , Alexander Castro , Igor Tchertkov , Richard Li
发明人： Jin Qiu , Joe Seeger , Alexander Castro , Igor Tchertkov , Richard Li
IPC分类号： G01P15/125 , G01P21/00
CPC分类号： G01P15/125 , G01P15/02 , G01P21/00
摘要： Described herein is an accelerometer that can be sensitive to acceleration, but not anchor motion due to sources other than acceleration. The accelerometer can employ a set of electrodes and/or transducers that can register motion of the proof mass and support structure and employ and output-cancelling mechanism so that the accelerometer can distinguish between acceleration and anchor motion due to sources other than acceleration. For example, the effects of anchor motion can be cancelled from an output signal of the accelerometer so that the accelerometer exhibits sensitivity to only acceleration.
摘要翻译： 这里描述的是加速度计，其可以对加速度敏感，但是不是由于加速度以外的源而是锚定运动。 加速度计可以使用一组电极和/或换能器，其可以记录检测质量块和支撑结构的运动并采用和输出消除机构，使得加速度计能够区分由加速度以外的源而导致的加速度和锚运动。 例如，可以从加速度计的输出信号中消除锚定运动的影响，使得加速度计仅对加速度表现出灵敏度。
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2.发明授权Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures 有权具有保持在各种压力下的多个密封腔的CMOS-MEMS集成器件的方法公开(公告)号：US09540230B2
公开(公告)日：2017-01-10
申请号：US13535180
申请日：2012-06-27
申请人： Michael Daneman , Martin Lim , Kegang Huang , Igor Tchertkov
发明人： Michael Daneman , Martin Lim , Kegang Huang , Igor Tchertkov
CPC分类号： B81B7/02 , B81C1/0023 , B81C1/00293 , B81C2203/0145 , B81C2203/019
摘要： A Microelectromechanical systems (MEMS) structure comprises a MEMS wafer. A MEMS wafer includes a handle wafer with cavities bonded to a device wafer through a dielectric layer disposed between the handle and device wafers. The MEMS wafer also includes a moveable portion of the device wafer suspended over a cavity in the handle wafer. Four methods are described to create two or more enclosures having multiple gas pressure or compositions on a single substrate including, each enclosure containing a moveable portion. The methods include: A. Forming a secondary sealed enclosure, B. Creating multiple ambient enclosures during wafer bonding, C. Creating and breaching an internal gas reservoir, and D. Forming and subsequently sealing a controlled leak/breach into the enclosure.
摘要翻译： 微机电系统（MEMS）结构包括MEMS晶片。 MEMS晶片包括具有通过布置在手柄和器件晶片之间的电介质层与器件晶片结合的空腔的手柄晶片。 MEMS晶片还包括悬挂在处理晶片中的空腔上的器件晶片的可移动部分。 描述了四种方法以在单个基底上产生具有多个气体压力或组成的两个或更多个外壳，包括每个外壳包含可移动部分。 方法包括：A.形成二次密封外壳，B.在晶片接合期间创建多个环境外壳，C.创建和破坏内部气体储存器，以及D.形成并随后将受控的泄漏/泄漏密封到外壳中。
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3.发明申请PROCESS FOR A SEALED MEMS DEVICE WITH A PORTION EXPOSED TO THE ENVIRONMENT 审中-公开具有暴露于环境的部件的密封MEMS器件的工艺公开(公告)号：US20130001710A1
公开(公告)日：2013-01-03
申请号：US13536896
申请日：2012-06-28
CPC分类号： H01L23/10 , B81B2201/0264 , B81B2201/047 , B81B2207/115 , B81C1/00238 , B81C2203/0109 , B81C2203/0145 , B81C2203/0792 , G01P15/0802 , G01P15/125 , G02B26/0833 , H01L2224/48091 , H01L2924/1461 , H01L2924/00014 , H01L2924/00
摘要： A method and system for providing a MEMS device with a portion exposed to an outside environment are disclosed. The method comprises bonding a handle wafer to a device wafer to form a MEMS substrate with a dielectric layer disposed between the handle and device wafers. The method includes lithographically defining at least one standoff on the device wafer and bonding the at least one standoff to an integrated circuit substrate to form a sealed cavity between the MEMS substrate and the integrated circuit substrate. The method includes defining at least one opening in the handle wafer, standoff, or integrated circuit substrate to expose a portion of the to expose a portion of the device wafer to the outside environment.
摘要翻译： 公开了一种用于向MEMS器件提供暴露于外部环境的部分的方法和系统。 该方法包括将处理晶片结合到器件晶片以形成具有设置在手柄和器件晶片之间的介电层的MEMS衬底。 该方法包括光刻地限定器件晶片上的至少一个间隔，并将至少一个支架结合到集成电路衬底，以在MEMS衬底和集成电路衬底之间形成密封空腔。 该方法包括在处理晶片，支座或集成电路基板中限定至少一个开口，以暴露一部分将器件晶片的一部分暴露于外部环境。
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4.发明申请公开(公告)号：US20130307857A1
公开(公告)日：2013-11-21
申请号：US13474129
申请日：2012-05-17
申请人： Koorosh Aflatooni , Igor Tchertkov
发明人： Koorosh Aflatooni , Igor Tchertkov
CPC分类号： G02B26/001
摘要： This disclosure provides systems, methods and apparatus for mitigating or reducing stiction in electromechanical systems devices. The systems and methods described herein include a piezo-electric layer disposed over at least a portion of the deformable region of the electromechanical systems devices. To reduce or mitigate stiction, a restorative mechanical force is generated by reverse piezo-electric effect to return the deformable region of the electromechanical systems devices to the un-deformed state.
摘要翻译： 本公开提供了用于减轻或减少机电系统装置中的静摩擦的系统，方法和装置。 本文所述的系统和方法包括设置在机电系统装置的可变形区域的至少一部分上的压电层。 为了减小或减轻静摩擦，通过反向压电效应产生恢复性机械力，以将机电系统装置的可变形区域返回到未变形状态。
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5.发明授权Magnetoresistive displacement sensor and variable resistor using a moving domain wall 失效磁阻位移传感器和可变电阻器使用移动域壁
公开(公告)号：US5936400A
公开(公告)日：1999-08-10
申请号：US772723
申请日：1996-12-23
申请人： Igor Tchertkov , Jon Klinkhamer
发明人： Igor Tchertkov , Jon Klinkhamer
摘要： The displacement sensor employing a magnetoresistive effect laminate structure consisting of a bottom ferromagnetic layer with a field oriented in one direction, a middle non-magnetic layer, and a top softer magnetic layer. The top softer magnetic layer has two regions of opposing magnetic fields separated by a domain wall, where the magnetic field in one region is aligned with the bottom layer magnetic field. The resistance of the laminate structure changes as the location of the domain wall changes. In one improvement, the domain wall is induced by a pair of opposing semicylindrical magnets magnetized along their semicylindrical surface, forming parallel field lines and leading to a stronger domain wall. In another improvement, there are four laminate structures in an electrical bridge configuration. The bridge is excited by an alternating current source and the output is synchronously measured. The laminate structures are arranged in either a stack or such that pairs of laminate structures are deposited on opposite sides of a common substrate.
摘要翻译： 采用磁阻效应层叠结构的位移传感器，其由沿一个方向取向的场的底部铁磁层，中间非磁性层和顶部更软的磁性层组成。 顶部较软的磁性层具有由畴壁分离的相反磁场的两个区域，其中一个区域中的磁场与底层磁场对准。 层状结构的阻力随畴壁的位置变化而变化。 在一个改进中，畴壁由沿其半圆柱形表面磁化的一对相对的半圆柱形磁体感应，形成平行的场线并导致更强的畴壁。 在另一改进中，电桥配置中有四个层叠结构。 该桥由交流电源激励，同步测量输出。 层压结构被布置成堆叠或者这样的层压结构对被沉积在共同的基底的相对侧上。
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6.发明申请HERMETICALLY SEALED MEMS DEVICE WITH A PORTION EXPOSED TO THE ENVIRONMENT WITH VERTICALLY INTEGRATED ELECTRONICS 审中-公开具有暴露于垂直集成电子环境的部件的密封式MEMS器件公开(公告)号：US20130001550A1
公开(公告)日：2013-01-03
申请号：US13536798
申请日：2012-06-28
申请人： Joseph SEEGER , Igor TCHERTKOV , Hasan AKYOL , Goksen G. YARALIOGLU , Steven S. NASIRI , Ilya GURIN
发明人： Joseph SEEGER , Igor TCHERTKOV , Hasan AKYOL , Goksen G. YARALIOGLU , Steven S. NASIRI , Ilya GURIN
CPC分类号： G01L9/0073 , B81B7/02 , B81B2201/025 , B81B2201/0257 , B81B2201/0264 , B81B2207/015 , B81C99/0045 , B81C2203/0771 , G01L1/142 , G01L5/223 , G01L19/0636 , G01L27/007 , G01P15/125 , G01P2015/084 , H01L2924/16235
摘要： A system and method for providing a MEMS device with integrated electronics are disclosed. The MEMS device comprises an integrated circuit substrate and a MEMS subassembly coupled to the integrated circuit substrate. The integrated circuit substrate includes at least one circuit coupled to at least one fixed electrode. The MEMS subassembly includes at least one standoff formed by a lithographic process, a flexible plate with a top surface and a bottom surface, and a MEMS electrode coupled to the flexible plate and electrically coupled to the at least one standoff. A force acting on the flexible plate causes a change in a gap between the MEMS electrode and the at least one fixed electrode.
摘要翻译： 公开了一种用于向MEMS器件提供集成电子器件的系统和方法。 MEMS器件包括集成电路基板和耦合到集成电路基板的MEMS子组件。 集成电路基板包括耦合到至少一个固定电极的至少一个电路。 MEMS子组件包括由光刻工艺形成的至少一个支座，具有顶表面和底表面的柔性板，以及耦合到柔性板并电耦合到至少一个支座的MEMS电极。 作用在柔性板上的力导致MEMS电极与至少一个固定电极之间的间隙的变化。
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7.发明申请METHODS FOR CMOS-MEMS INTEGRATED DEVICES WITH MULTIPLE SEALED CAVITIES MAINTAINED AT VARIOUS PRESSURES 有权用于各种压力保持多个密封腔的CMOS-MEMS集成器件的方法公开(公告)号：US20120326248A1
公开(公告)日：2012-12-27
申请号：US13535180
申请日：2012-06-27
申请人： Michael DANEMAN , Martin LIM , Kegang HUANG , Igor TCHERTKOV
发明人： Michael DANEMAN , Martin LIM , Kegang HUANG , Igor TCHERTKOV
CPC分类号： B81B7/02 , B81C1/0023 , B81C1/00293 , B81C2203/0145 , B81C2203/019
摘要： A Microelectromechanical systems (MEMS) structure comprises a MEMS wafer. A MEMS wafer includes a handle wafer with cavities bonded to a device wafer through a dielectric layer disposed between the handle and device wafers. The MEMS wafer also includes a moveable portion of the device wafer suspended over a cavity in the handle wafer. Four methods are described to create two or more enclosures having multiple gas pressure or compositions on a single substrate including, each enclosure containing a moveable portion. The methods include: A. Forming a secondary sealed enclosure, B. Creating multiple ambient enclosures during wafer bonding, C. Creating and breaching an internal gas reservoir, and D. Forming and subsequently sealing a controlled leak/breach into the enclosure.
摘要翻译： 微机电系统（MEMS）结构包括MEMS晶片。 MEMS晶片包括具有通过布置在手柄和器件晶片之间的电介质层与器件晶片结合的空腔的手柄晶片。 MEMS晶片还包括悬挂在处理晶片中的空腔上的器件晶片的可移动部分。 描述了四种方法以在单个基底上产生具有多个气体压力或组成的两个或更多个外壳，包括每个外壳包含可移动部分。 方法包括：A.形成二次密封外壳，B.在晶片接合期间创建多个环境外壳，C.创建和破坏内部气体储存器，以及D.形成并随后将受控的泄漏/泄漏密封到外壳中。
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公开(公告)号：US20120125104A1
公开(公告)日：2012-05-24
申请号：US13249902
申请日：2011-09-30
申请人： Jin Qiu , Joe Seeger , Alexander Castro , Igor Tchertkov , Richard Li
发明人： Jin Qiu , Joe Seeger , Alexander Castro , Igor Tchertkov , Richard Li
IPC分类号： G01P15/125 , G01P15/00
CPC分类号： G01P15/125 , G01P15/02 , G01P21/00
摘要： Described herein is an accelerometer that can be sensitive to acceleration, but not anchor motion due to sources other than acceleration. The accelerometer can employ a set of electrodes and/or transducers that can register motion of the proof mass and support structure and employ and output-cancelling mechanism so that the accelerometer can distinguish between acceleration and anchor motion due to sources other than acceleration. For example, the effects of anchor motion can be cancelled from an output signal of the accelerometer so that the accelerometer exhibits sensitivity to only acceleration.
摘要翻译： 这里描述的是加速度计，其可以对加速度敏感，但是不是由于加速度以外的源而是锚定运动。 加速度计可以使用一组电极和/或换能器，其可以记录检测质量块和支撑结构的运动并采用和输出消除机构，使得加速度计能够区分由加速度以外的源而导致的加速度和锚运动。 例如，可以从加速度计的输出信号中消除锚定运动的影响，使得加速度计仅对加速度表现出灵敏度。
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