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    Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
    3.
    发明申请
    Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics 有权
    垂直集成的3轴MEMS角加速度计与集成电子

    公开(公告)号：US20090145225A1

    公开(公告)日：2009-06-11

    申请号：US11953762

    申请日：2007-12-10

    申请人： Steven S. NASIRI ,  Goksen G. YARALIOGLU ,  Joseph SEEGER ,  Babak TAHERI

    发明人： Steven S. NASIRI ,  Goksen G. YARALIOGLU ,  Joseph SEEGER ,  Babak TAHERI

    IPC分类号： G01P15/02

    CPC分类号： G01P15/0888 ,  B60R2021/01327 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18

    摘要： Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/or Y, and/or Z, by at least one linkage and is responsive to angular accelerations about the X, and/or Y, and/or Z directions. Finally, the sensor includes at least one electrode at the base plate or perpendicular to the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the angular acceleration. Multi-axis detection is enabled by adjusting a configuration of flexures and electrodes.

    摘要翻译： 公开了用于测量围绕三个相互正交的轴X，Y，Z或围绕这些轴的组合的角加速度的传感器。 传感器包括传感器子组件。 传感器子组件还包括基本上平行于X-Y感测平面的基座; 设置在XY感测平面中并被约束以基于X和/或Y和/或Z 1至少一个连杆旋转的检测质量体，并响应于围绕X和/或Y的角加速度和/ 或Z方向。 最后，传感器在基板处包括至少一个电极或垂直于基板，以及至少一个传感器，用于响应于角加速度的传感器子组件的每个感测方向。 通过调整弯曲和电极的配置可实现多轴检测。

    X-Y AXIS DUAL-MASS TUNING FORK GYROSCOPE WITH VERTICALLY INTEGRATED ELECTRONICS AND WAFER-SCALE HERMETIC PACKAGING
    4.
    发明申请
    X-Y AXIS DUAL-MASS TUNING FORK GYROSCOPE WITH VERTICALLY INTEGRATED ELECTRONICS AND WAFER-SCALE HERMETIC PACKAGING 有权
    X-Y AXIS双质量调音枪具有垂直集成电子和水平放大包装

    公开(公告)号：US20100132460A1

    公开(公告)日：2010-06-03

    申请号：US12621463

    申请日：2009-11-18

    申请人： Joseph SEEGER ,  Steven S. NASIRI ,  Alexander CASTRO

    发明人： Joseph SEEGER ,  Steven S. NASIRI ,  Alexander CASTRO

    IPC分类号： G01C19/56

    CPC分类号： G01C19/56 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/574

    摘要： An angular velocity sensor has two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame. In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly of wafers provides a hermetic barrier between the masses and an ambient environment.

    摘要翻译： 角速度传感器具有横向设置在X-Y平面中并间接连接到框架的两个质量块。 两个质量通过联动使得它们必须沿着相反方向移动。传感器绕Y轴的角速度可以通过将两个质量驱动成Z向反相振荡并测量角振荡幅度来感测 传给框架。 在优选实施例中，角速度传感器由体MEMS陀螺仪晶片，盖晶片和参考晶片制成。 在另一优选实施例中，晶片组件提供了质量和周围环境之间的密封屏障。

    PERFORMANCE-ENHANCING TWO-SIDED MEMS ANCHOR DESIGN FOR VERTICALLY INTEGRATED MICROMACHINED DEVICES
    6.
    发明申请
    PERFORMANCE-ENHANCING TWO-SIDED MEMS ANCHOR DESIGN FOR VERTICALLY INTEGRATED MICROMACHINED DEVICES 有权
    性能增强的两面MEMS锚固设计用于垂直集成的微型设备

    公开(公告)号：US20100252897A1

    公开(公告)日：2010-10-07

    申请号：US12418554

    申请日：2009-04-03

    申请人： Joseph SEEGER ,  Goksen G. YARALIOGLU ,  Bruno BOROVIC ,  Alexander CASTRO

    发明人： Joseph SEEGER ,  Goksen G. YARALIOGLU ,  Bruno BOROVIC ,  Alexander CASTRO

    IPC分类号： H01L29/84

    CPC分类号： B81C1/00039 ,  B81B2203/0307

    摘要： An anchoring assembly for anchoring MEMS device is disclosed. The anchoring assembly comprises: a top substrate; a bottom substrate substantially parallel to the top substrate; and a first portion of the anchor between the top substrate and the bottom substrate. The first portion of the anchor is rigidly connected to the top substrate; and the first portion of the anchor is rigidly connected to the bottom substrate. A second portion of the anchor is between the top substrate and the bottom substrate. The second portion of the anchor is rigidly connected to the top substrate; the second portion of the anchor being an anchoring point for the MEMS device. A substantially flexible mechanical element coupling the first portion of the anchor and the second portion of the anchor; the flexible element providing the electrical connection between the first portion of the anchor and the second portion of the anchor.

    摘要翻译： 公开了一种用于锚定MEMS装置的锚固组件。 锚固组件包括：顶部基底; 基本上平行于顶部衬底的底部衬底; 以及锚固件在顶部基底和底部基底之间的第一部分。 锚的第一部分刚性地连接到顶部基底; 并且锚的第一部分刚性地连接到底部基底。 锚的第二部分在顶部基底和底部基底之间。 锚的第二部分刚性地连接到顶部基底; 锚的第二部分是用于MEMS装置的锚定点。 将锚固件的第一部分和锚固件的第二部分联接的基本上柔性的机械元件; 所述柔性元件提供所述锚固件的第一部分和所述锚固件的第二部分之间的电连接。

    DUAL MODE SENSING FOR VIBRATORY GYROSCOPE
    7.
    发明申请
    DUAL MODE SENSING FOR VIBRATORY GYROSCOPE 有权
    用于振动陀螺仪的双模式感测

    公开(公告)号：US20090193892A1

    公开(公告)日：2009-08-06

    申请号：US12026490

    申请日：2008-02-05

    申请人： Joseph SEEGER

    发明人： Joseph SEEGER

    IPC分类号： G01P9/04

    CPC分类号： G01C19/5719

    摘要： An angular rate sensor is disclosed. The angular rate sensor comprises a substrate and a drive subsystem partially supported by a substrate. The drive subsystem includes at least one spring, at least one anchor, and at least one mass; the at least one mass of the drive subsystem is oscillated by at least one actuator along a first axis. Coriolis force acts on moving the drive subsystem along or around a second axis in response to angular velocity of the substrate around the third axis. The angular rate sensor also includes a sense subsystem partially supported by a substrate. The sense subsystem includes at least one spring, at least one anchor, and at least one mass.

    摘要翻译： 公开了一种角速度传感器。 角速率传感器包括基板和由基板部分支撑的驱动子系统。 驱动子系统包括至少一个弹簧，至少一个锚和至少一个质量块; 驱动子系统的至少一个质量块沿着第一轴线由至少一个致动器振荡。 科里奥利力响应于基板围绕第三轴线的角速度而沿着或围绕第二轴线移动驱动子系统。 角速率传感器还包括由衬底部分支撑的感测子系统。 感测子系统包括至少一个弹簧，至少一个锚和至少一个质量块。

    MICROMACHINED GYROSCOPE INCLUDING A GUIDED MASS SYSTEM
    8.
    发明申请
    MICROMACHINED GYROSCOPE INCLUDING A GUIDED MASS SYSTEM 有权
    MICROMACHINED GYROSCOPE包括引导质量系统

    公开(公告)号：US20130068018A1

    公开(公告)日：2013-03-21

    申请号：US13235296

    申请日：2011-09-16

    申请人： Joseph SEEGER ,  Ozan ANAC

    发明人： Joseph SEEGER ,  Ozan ANAC

    IPC分类号： G01C19/56

    CPC分类号： G01C19/5733 ,  G01C19/5712 ,  G01C19/574 ,  G01C19/5755

    摘要： A gyroscope is disclosed. The gyroscope comprises a substrate; and a guided mass system. The guided mass system comprises proof-mass and guiding arm. The proof-mass and the guiding arm are disposed in a plane parallel to the substrate. The proof-mass is coupled to the guiding arm. The guiding arm is also coupled to the substrate through a spring. The guiding arm allows motion of the proof-mass to a first direction in the plane. The guiding arm and the proof-mass rotate about a first sense axis. The first sense axis is in the plane and parallel to the first direction. The gyroscope includes an actuator for vibrating the proof-mass in the first direction. The gyroscope also includes a transducer for sensing motion of the proof-mass-normal to the plane in response to angular velocity about a first input axis that is in the plane and orthogonal to the first direction.

    摘要翻译： 公开了一种陀螺仪。 陀螺仪包括基板; 和引导质量体系。 引导质量系统包括检验质量和引导臂。 证明物质和引导臂设置在平行于基底的平面中。 证明物质联接到引导臂。 引导臂也通过弹簧与基板相连。 引导臂允许证明物质在平面中的第一方向的运动。 引导臂和证明质量围绕第一感测轴线旋转。 第一感测轴在平面内并且平行于第一方向。 陀螺仪包括用于在第一方向上振动证明物质的致动器。 陀螺仪还包括用于响应于围绕在平面中并与第一方向正交的第一输入轴的角速度来感测与平面相反的质量法向运动的换能器。

    LOW INERTIA FRAME FOR DETECTING CORIOLIS ACCELERATION
    9.
    发明申请
    LOW INERTIA FRAME FOR DETECTING CORIOLIS ACCELERATION 有权
    用于检测矫正加速度的低惯性框架

    公开(公告)号：US20120216612A1

    公开(公告)日：2012-08-30

    申请号：US13427784

    申请日：2012-03-22

    申请人： Joseph SEEGER ,  Bruno BOROVIC

    发明人： Joseph SEEGER ,  Bruno BOROVIC

    IPC分类号： G01P3/44

    CPC分类号： G01C19/5719

    摘要： A sensing frame is disclosed. The sensing frame includes a first rail and a second rail. The first and second rails are constrained to move along a first axis parallel to the first and second rails. The frame includes a base and at least two guiding arms for ensuring that the first rail and the second rail move in anti-phase fashion along the first axis. First and second guiding arms are flexibly coupled to the first rail and second rail. The first guiding arm is flexibly suspended to the base at first anchoring points for allowing rotation of the first guiding arm, and the second guiding arm is suspended to the base at a second anchoring point allowing rotation of the second guiding arm. The sensing frame includes a plurality of coupling flexures and a transducer for sensing motion of the first and second rails.

    摘要翻译： 公开了一种感测框架。 感测框架包括第一轨道和第二轨道。 第一轨道和第二轨道被限制为沿着平行于第一轨道和第二轨道的第一轴线移动。 框架包括底座和至少两个引导臂，用于确保第一轨道和第二轨道沿着第一轴线以相位方式移动。 第一和第二引导臂柔性地联接到第一轨道和第二轨道。 第一引导臂在第一锚固点处被柔性地悬挂到基部，以允许第一引导臂的旋转，并且第二引导臂在允许第二引导臂旋转的第二锚定点处悬挂到基部。 感测框架包括多个耦合弯曲部和用于感测第一和第二导轨的运动的换能器。