摘要:
Systems and methods for creating arbitrarily-shaped ion energy distribution functions using shaped-pulse-bias. In an embodiment, a method includes applying a negative jump voltage to an electrode of a process chamber to set a wafer voltage for a wafer, modulating an amplitude of the wafer voltage to produce a train of groups of pulse bursts with different amplitudes, and repeating the modulating of the amplitude of the wafer voltage to repeat the train of the groups of pulse bursts to create an ion energy distribution function having more than one energy peak. In some embodiments, the negative jump voltage can include a single-cycle voltage waveform with a voltage ramp during an ion-current phase, in which the voltage ramp can be positive or negative and a duration of the ion-current phase can comprise more or less than fifty percent of a period of the waveform.
摘要:
A surface cleaning apparatus (10) is described including a dirt collection container (18b) and an inlet passage (99) leading to the dirt collection container (18b) through which dirt-laden air is drawn by a source of suction. The apparatus further includes a moveable blocking member (120) positioned in the passage (99) where the blocking member (120) is moveable between a blocking position, in which the passage (99) is blocked or substantially blocked, and an unblocking position, in which air can pass through the passage (99). The apparatus includes a receiving formation (130) for receiving at least a portion of the moveable blocking member (120) when the blocking member is in its unblocking position.
摘要:
Methods and systems for detecting a change in the state of plasma confinement within a capacitively coupled RF driven plasma processing chamber are disclosed. In one or more embodiments, the plasma unconfinement detection methods employ an analog or digital circuit that can actively poll the RF voltage at the powered electrode in the form of an Electrostatic Chuck (ESC) as well as the open loop response of the power supply (PSU) responsible for chucking a wafer to ESC. The circuit provides a means detecting both a change in RF voltage delivered to the ESC as well as a change in the open loop response of the PSU. By simultaneously monitoring these electrical signals, the disclosed algorithm can detect when plasma changes from a confined to an unconfined state.
摘要:
A number of flat tubes, flat tube heat exchangers, and methods of manufacturing both are described and illustrated. The flat tubes can be constructed of one, two, or more pieces of sheet material. A profiled insert integral with the flat tube or constructed from another sheet of material can be used to define multiple flow channels through the flat tube. The flat tubes can be constructed of relatively thin material, and can be reinforced with folds of the flat tube material and/or of an insert in areas subject to higher pressure and thermal stresses. Also, the relatively thin flat tube material can have a corrosion layer enabling the material to resist failure due to corrosion. Heat exchangers having such flat tubes connected to collection tubes arc also disclosed, as are manners in which such tubes can be provided with fins.
摘要:
The invention consists, generally, of a method for automatically reducing power to an electron emitting cathode by sensing an operating condition of the electron emitting cathode, calculating a condition number based upon the operating condition, comparing the condition number to a threshold value, and reducing the power to the electron emitting cathode when the condition number is greater than the threshold. The apparatus and method may be implemented upon a system having a high voltage power source, an RF tube, a control processor, and a signal processor.
摘要:
Cutting assemblies are disclosed that include an entrance portion and a receiving portion, with the receiving portion defining a receiving opening configured to be axially aligned with an entrance opening of the entrance portion when mounted to the surface of a cutting apparatus. Cutting assemblies are also provided that include a material carriage configured to be borne by a cutting apparatus. Cutting assemblies that include a material receiving portion configured to be slidably mounted to a surface of a cutting apparatus are also disclosed. Cutting methods are also disclosed that can include rotating a piece of material around the materials longitudinal axis and delivering the material to a cutting tool while the longitudinal axis of the material is aligned substantially opposite the direction of rotation of the cutting tool.
摘要:
A number of flat tubes, flat tube heat exchangers, and methods of manufacturing both are described and illustrated. The flat tubes can be constructed of one, two, or more pieces of sheet material. A profiled insert integral with the flat tube or constructed from another sheet of material can be used to define multiple flow channels through the flat tube. The flat tubes can be constructed of relatively thin material, and can be reinforced with folds of the flat tube material and/or of an insert in areas subject to higher pressure and thermal stresses. Also, the relatively thin flat tube material can have a corrosion layer enabling the material to resist failure due to corrosion. Heat exchangers having such flat tubes connected to collection tubes are also disclosed, as are manners in which such tubes can be provided with fins.
摘要:
A system for simultaneously propagating dual polarized signals in a polarimetric radar system includes a system for coding at least one of the two signals. The simultaneous dual polarization weather radar transmits signals in both the horizontal and vertical orientations at the same time. Upon reception, the signals in each channel are decoded and a number of standard and polarimetric parameters characterizing atmospheric conditions are determined. The accuracy upon which these parameters can be determined depends partially upon the interference between these two channels. The system and method isolates the vertical and horizontal channels to minimize the interference.
摘要:
A method and system for inserting television commercials that are selected according to the unique interests and purchasing habits of viewers in individual households, or the relative location of the household within a local broadcast area. The present system provides a cable or satellite television set top box that stores a plurality of television commercials for products or services that have been found to be of interest to viewers in a household that uses the set top box. At commercial breaks during the broadcast of network television programs, the television network indicates when the set top box is authorized to insert a stored television commercial instead of a broadcast commercial. If the set top box locates a locally stored commercial that is appropriate for the television program and the user, the commercial is inserted into the commercial break.
摘要:
Polynucleotides that encode proteins associated with oil content in plants are useful in constructs to make transgenic plants, e.g., maize or soybean, with desirable oil content phenotype and progeny of any generation derived from the fertile transgenic plants. Markers associated with oil content QTL are useful in breeding for plants with desired oil content.