公开(公告)号：US4898557A

公开(公告)日：1990-02-06

申请号：US193149

申请日：1988-05-06

Applicant: Jurgen Engemann

Inventor： Jurgen Engemann

IPC: H01L21/302 ,  H01J9/02 ,  H01J9/14 ,  H01J27/02 ,  H01J37/08

CPC classification number: H01J27/024 ,  H01J37/08 ,  H01J9/14

Abstract: Process for producing extraction grids for ion sources. A mounting plate (1) of a thermostable material is provided on both sides with a continuous metal coating (2, 3). An essentially congruent pattern of holes is produced in the mounting plate (1) and in the metal coatings (2, 3). In such an extraction system, the metal coatings, electrically separated on either side, form extraction grids or electrodes. By disposing a core region (1a) of a conducting or semiconducting material in the mounting plate (1), a third electrode can be produced for controlling the ion beam.

Abstract translation: 用于生产离子源的萃取网格的方法。 在两侧设置有耐热材料的安装板（1），其具有连续的金属涂层（2,3）。 在安装板（1）和金属涂层（2,3）中产生基本上一致的孔的图案。 在这种提取系统中，在任一侧电分离的金属涂层形成提取网格或电极。 通过在安装板（1）中设置导电或半导体材料的芯区（1a），可以制造用于控制离子束的第三电极。

公开(公告)号：US5021919A

公开(公告)日：1991-06-04

申请号：US420243

申请日：1989-10-12

Applicant: Jurgen Engemann

Inventor： Jurgen Engemann

IPC: H01J27/18 ,  H05H3/00 ,  H05H7/18

CPC classification number: H05H7/18 ,  H01J27/18 ,  H05H3/00

Abstract: The invention relates to a device for the generation of electrically charged and/or uncharged particles in which into a cavity resonator (5) filled with a gas or gas mixture electromagnetic energy is introduced and in which a first magnetic field (19, 20) permeates the gas or gas mixture. With the aid of a second magnetic field (H.sub.ext, 40, 41) permeating the gyromagnetic material the cavity resonator (5) is tuned. Usually, the tuning is carried out in such a manner that a hollow space resonator (5) which is loaded and mistuned by the plasma is again brought into resonance.

Abstract translation: 本发明涉及一种用于产生带电荷和/或不带电粒子的装置，其中引入填充有气体或气体混合物的空腔谐振器（5）中引入电磁能，并且其中第一磁场（19,20）渗透 气体或气体混合物。 借助于渗入回旋磁性材料的第二磁场（Hext，40,41），空腔谐振器（5）被调谐。 通常，以通过等离子体加载和失谐的中空空间谐振器（5）再次谐振的方式进行调谐。

公开(公告)号：US20090122941A1

公开(公告)日：2009-05-14

申请号：US11988810

申请日：2006-07-14

Applicant: Jurgen Engemann ,  Markus Teschke

Inventor： Jurgen Engemann ,  Markus Teschke

IPC: H05H1/24

CPC classification number: H01L41/107 ,  H05H1/2475 ,  H05H2001/2481

Abstract: The invention relates inter alia to a device (10) for producing an atmospheric pressure plasma (20, 20a, 20b, 20c, 20d), especially for treating a substrate, said device comprising a unit (11, 11a, 11b, 11c) produced from a piezoelectric material. Said unit has at least one primary region (12, 12a, 12b, 12c) in which at least two electrodes (17a, 17b, 17c) for applying a low AC voltage are arranged, and a secondary region (13), along the longitudinal direction (L) of which potential differences are produced when the primary region is incited. The invention is inter alia characterized in that the secondary region (13) comprises two partial regions (14, 14a, 14b, 14c, 15, 15a, 15b, 15c) that have an opposite polarity along the longitudinal direction (L).

Abstract translation: 本发明尤其涉及用于生产大气压等离子体（20,20a，20b，20c，20d）的装置（10），特别是用于处理基板，所述装置包括产生的单元（11,11a，11b，11c） 来自压电材料。 所述单元具有至少一个初级区域（12,12a，12b，12c），其中布置有用于施加低AC电压的至少两个电极（17a，17b，17c），以及沿着纵向的第二区域（13） 方向（L），当主区域被煽动时，其产生电位差。 本发明的特征在于，次级区域（13）包括沿着纵向（L）具有相反极性的两个部分区域（14,14a，14b，14c，15,15a，15b，15c）。

公开(公告)号：US20080260578A1

公开(公告)日：2008-10-23

申请号：US11663926

申请日：2005-09-20

Applicant: Jurgen Engemann ,  Axel Schwabedissen

Inventor： Jurgen Engemann ,  Axel Schwabedissen

IPC: G01N21/77 ,  B01J19/08

CPC classification number: A61L2/202 ,  A23L3/28 ,  A23L3/32 ,  A61L2/0011 ,  A61L2/10 ,  A61L2/14 ,  H05H1/2406 ,  H05H2001/2412 ,  H05H2245/1225

Abstract: The invention relates to a device (10) for treating goods (14) with the aid of an electric discharge in a receiving chamber (13) for the goods, which is defined by a wall (11, 11a, 11b, 12a, 12b, 12c, 12d, 12e) made of a dielectric material having at least two electrodes (16a, 16b) arranged on the outer side thereof (15). The invention is characterised in that at least one counter-electrode (21) is coupled in a capacitive manner to both of the outer electrodes on the inner side (20) of the wall (11).

Abstract translation: 本发明涉及一种用于在货物的接收室（13）中借助于放电来处理货物（14）的装置（10），其由壁（11,11a，11b，12a ，12b，12c，12d，12e）由具有布置在其外侧（15）上的至少两个电极（16a，16b）的电介质材料制成。 本发明的特征在于，至少一个对电极（21）以电容方式耦合到壁（11）的内侧（20）上的两个外电极。

公开(公告)号：US5517085A

公开(公告)日：1996-05-14

申请号：US142667

申请日：1993-10-25

Applicant: Jurgen Engemann ,  Frank Werner

Inventor： Jurgen Engemann ,  Frank Werner

IPC: H01J37/32 ,  H05H1/46

CPC classification number: H01J37/32247 ,  H01J37/32192 ,  H05H1/46

Abstract: A low-pressure high-density plasma is excited in a plasma chamber surrounded by a cylindrical inner wall of a ring-shaped waveguide resonator to which the microwave energy is fed by a coupling from a microwave generator. The output coupling of the microwave energy from the standing wave maintained in the waveguide resonator to the plasma chamber is effected through a multiplicity of equispaced slits whose spacing is one half or one waveguide wavelength and which extend parallel to the generatrices of the cylindrical inner wall of the ring-shaped waveguide resonator.

Abstract translation: 在由微波发生器的耦合馈送微波能量的环形波导谐振器的圆柱形内壁围绕的等离子体室中激发低压高密度等离子体。 通过保持在波导谐振器中的驻波的微波能量与等离子体室的输出耦合是通过多个等间隔的狭缝来实现的，其间隔是一半或一个波导波长，并且平行于圆柱形内壁的母线 环形波导谐振器。

公开(公告)号：US5177398A

公开(公告)日：1993-01-05

申请号：US530857

申请日：1990-05-31

Applicant: Jurgen Engemann

Inventor： Jurgen Engemann

IPC: H01J9/14 ,  H01J27/02 ,  H01J37/09

CPC classification number: H01J9/14 ,  H01J27/022 ,  H01J37/09 ,  H01J2237/08

Abstract: A grid assembly for ion beam sources includes grid structures that are etched from a semiconductor wafer using microelectronic fabrication techniques with the grid structures constrained in an aligned manner by a ceramic carrier having embedded electrically conductive pads for effecting electrical contact with the grid structures. The grid structures are fabricated by creating oxide and photoresist layers on a starting silicon wafer and exposing the photoresist through a mask carrying the aperture pattern. After the photoresist is developed, the oxide layer is etched to form openings therethrough and the silicon wafer is anisotropically etched from both sides with the etching proceeding anisotropically so that the {111} planes are etched to form the apertures in which the {111} planes face each other across the aperture with opposite {111} planes at a 90.degree. angle relative to one another to provide a plurality of apertures each defining a volume in the form of an inverted truncated 4-sided pyramid. The ceramic carrier is assembled as a preform from a flexible Al.sub.2 O.sub.3 /polymer dielectric tape and is initially fabricated by cutting the various laminae L.sub.1, L.sub.2, L.sub.n-1, . . . L.sub.n into the desired configuration and assembling the laminae in a stacked configuration for burnout and firing to form a unitary ceramic carrier. The etchant formed grids are cemented into place in the carrier with an electrically conductive high-temperature cement.

Abstract translation: 用于离子束源的栅格组件包括使用微电子制造技术从半导体晶片蚀刻的栅格结构，栅格结构通过具有嵌入的导电焊盘的陶瓷载体以对准的方式约束，以实现与栅格结构的电接触。 通过在起始硅晶片上产生氧化物和光致抗蚀剂层并通过携带孔径图案的掩模曝光光致抗蚀剂来制造栅格结构。 在光致抗蚀剂显影后，蚀刻氧化物层以形成开口，并且从各侧各向异性地蚀刻硅晶片，同时以各向异性进行蚀刻，使得{111}面被蚀刻以形成其中{111}面 相对于彼此以90度角相对地穿过具有相对的{111}平面的孔径彼此面对，以提供多个孔，每个孔限定呈倒截的四边形金字塔形式的体积。 陶瓷载体由柔性Al2O3 /聚合物电介质胶带组装成预成型体，最初通过切割各种薄片L1，L2，Ln-1来制造。 。 。 Ln进入所需的构造并将层组装成堆叠构造，用于烧尽和烧制以形成一体的陶瓷载体。 形成网格的蚀刻剂用导电高温水泥胶合到载体中。