Superconductor deposition system
    2.
    发明授权
    Superconductor deposition system 失效
    超导体沉积系统

    公开(公告)号:US5207884A

    公开(公告)日:1993-05-04

    申请号:US633275

    申请日:1990-12-24

    IPC分类号: C23C14/28

    CPC分类号: C23C14/28 Y10S505/786

    摘要: To deposit a plurality of substances on a substrate while the substrate remains in a low pressure oxygen environment, several target carriers are mounted around the edge of a disc and the disc is rotated to position the targets at the focal point of a fixed laser. The target carriers are themselves rotatable in bearings on the disc and are turned by a sun gear that is carried about the same shaft that turns the disc so that the heat of the laser beam is not concentrated at one spot on the surface of the target. All the apparatus is contained in a oxygen chamber. The substrate is heated and the targets are cooled continuously.

    摘要翻译: 为了在基板保持在低压氧气环境中的同时将多种物质沉积在基板上,在圆盘的边缘周围安装有几个目标载体,并且旋转盘以将目标定位在固定激光器的焦点处。 目标托架本身可以在盘上的轴承中旋转,并且由围绕相同轴转动的太阳齿轮转动,所述恒星转动盘,使得激光束的热量不集中在目标表面上的一个点处。 所有的装置都包含在氧气室中。 将基板加热并使靶材连续冷却。

    Method of forming grain boundary junctions in high temperature
superconductor films
    4.
    发明授权
    Method of forming grain boundary junctions in high temperature superconductor films 失效
    在高温超导体膜中形成晶界的方法

    公开(公告)号:US5366953A

    公开(公告)日:1994-11-22

    申请号:US119133

    申请日:1993-12-22

    CPC分类号: H01L39/2496 Y10S505/702

    摘要: A novel method of producing weak-link grain boundary Josephson junctions in high temperature superconducting thin films is disclosed. These junctions are reliably and reproducibly formed on uniform planar substrates (10) by the action of a seed layer (40) placed intermediate the substrate (10) and the superconductor film (20). The superconductor film (22) grown atop the seed (42) is misoriented from the rest of the film (24) by an angle between 5.degree. and 90.degree.. The grain boundary (30) so formed acts as a high quality weak-link junction for superconductor devices. The performance of these junctions can be improved by the addition of buffer layers (50, 60) between the substrate (10) and the superconductor film (20).

    摘要翻译: 公开了一种在高温超导薄膜中生产弱连接晶界约瑟夫逊结的新方法。 通过位于基板(10)和超导薄膜(20)之间的种子层(40)的作用,这些结可靠地和可重复地形成在均匀的平面基板(10)上。 在种子(42)顶上生长的超导体膜(22)从膜(24)的其余部分偏向于5°和90°之间的角度。 如此形成的晶界(30)作为超导体器件的高质量弱连接结。 通过在衬底(10)和超导薄膜(20)之间加入缓冲层(50,60)可以改善这些结的性能。

    Barrier layers for oxide superconductor devices and circuits
    6.
    发明授权
    Barrier layers for oxide superconductor devices and circuits 失效
    氧化物超导体器件和电路的阻挡层

    公开(公告)号:US5696392A

    公开(公告)日:1997-12-09

    申请号:US345318

    申请日:1994-11-28

    摘要: A conductor suitable for use in oxide-based electronic devices and circuits is disclosed. Metallic oxides having the general composition AMO.sub.3, where A is a rare or alkaline earth or an alloy of rare or alkaline earth elements, and M is a transition metal, exhibit metallic behavior and are compatible with high temperature ceramic processing. Other useful metallic oxides have compositions (A.sub.1-x A'.sub.x)A".sub.2 (M.sub.1-y M'.sub.y).sub.3 O.sub.7-.delta. or (A.sub.1-x A'.sub.x).sub.m (M.sub.1-y M'.sub.y).sub.n O.sub.2m+n, where 0.ltoreq.x, y.ltoreq.1 and 0.5.ltoreq.m, n.ltoreq.3, A and A' are rare or alkaline earths, or alloys of rare or alkaline earths, A' and A" are alkaline earth elements, alloys of alkaline earth elements, rare earth elements, alloys of rare earth elements, or alloys of alkaline earth and rare earth elements, and M and M' are transition metal elements or alloys of transition metal elements. The metallic oxides grow epitaxially on oxide superconductors as well as on substrates and buffer layers commonly used for growth of oxide superconductors. The oxide superconductors can also be grown epitaxially on these metallic oxides. Vastly improved performance of superconductor-normal-superconductor (SNS) junctions in high temperature superconductor materials are obtained when the normal material is a metallic oxide of the type disclosed. In the preferred embodiment, the conducting oxide CaRuO.sub.3 is used as the normal material in an SNS junelion with YBa.sub.2 Cu.sub.3 O.sub.7-.delta. as superconductor. A dc superconducting quantum interference device (SQUID) functioning at 77K fabricated with this type of junction exhibits large modulation and low noise.

    摘要翻译: 公开了一种适用于氧化物基电子器件和电路的导体。 具有一般组成AMO3的金属氧化物,其中A是稀土或碱土金属或稀土或碱土金属的合金,M是过渡金属,具有金属性能并与高温陶瓷加工兼容。 其它有用的金属氧化物具有组成(A1-xA'x)A'2(M1-yM'y)3O7-δ或(A1-xA'x)m(M1-yM'y)nO2m + n,其中0 < / = x,y <= 1和0.5

    Grain boundary junctions in high temperature superconductor films
    7.
    发明授权
    Grain boundary junctions in high temperature superconductor films 失效
    高温超导体膜中的晶界结

    公开(公告)号:US5157466A

    公开(公告)日:1992-10-20

    申请号:US672664

    申请日:1991-03-19

    CPC分类号: H01L39/2496 Y10S505/702

    摘要: Grain boundary, weak-link junctions are formed at a predermined location of a uniform, planar substrate by depositing superconducting film on two sections of the substrate. The film is grown as a bicrystal having two distinct areas of superconducting film whose crystal lattices are rotated with respect to each other, either in-plane or out-of-plane, by more than 5.degree. and less than 90.degree.. The grain boundary acts as a weak link junction. The film can be induced to grow as a bicrystal by depositing intermediate strata such as seed layers or buffer layers or by modifying the growth conditions during deposition.

    摘要翻译: 通过在衬底的两个部分上沉积超导膜,在均匀的平面衬底的预制位置处形成晶界,弱连接结。 该膜生长为具有两个不同区域的超导膜的双晶体,其晶格相对于彼此旋转,面内或外面超过5度且小于90度。 晶界作为弱连接点。 通过沉积中间层如种子层或缓冲层,或者通过在沉积期间改变生长条件,可以将膜诱导成双晶体生长。

    Substrate heater utilizing protective heat sinking means
    9.
    发明授权
    Substrate heater utilizing protective heat sinking means 失效
    衬底加热器采用保护散热装置

    公开(公告)号:US5126533A

    公开(公告)日:1992-06-30

    申请号:US494738

    申请日:1990-03-19

    IPC分类号: H01L21/00 H01L39/24

    CPC分类号: H01L21/67103 H01L39/2422

    摘要: A substrate heater for the production of superconducting films utilizing a nickel alloy block uniformly heated with a resistance heating element fully immersed in a brazing material that fills a recess in the block. Massive electric power connectors surround the heating element leads outside the braze material so as to provide a protective heat sink therefor and also to mechanically strengthen the block against warpage.

    摘要翻译: 一种用于生产超导薄膜的基板加热器,该超导薄膜利用完全浸入填充块中的凹部的钎焊材料的电阻加热元件均匀加热的镍合金块。 大容量电力连接器将加热元件引线环绕在钎焊材料外部,以便为其提供保护性散热器,并且还可以使块体抵抗翘曲而机械地加强。