公开(公告)号：US06426117B1

公开(公告)日：2002-07-30

申请号：US09554443

申请日：2000-05-10

申请人： Kyoung Soo Yi ,  Won Yong Koh ,  Sang Won Kang

发明人： Kyoung Soo Yi ,  Won Yong Koh ,  Sang Won Kang

IPC分类号： C23C1634

CPC分类号： H01L21/76843 ,  C23C16/34 ,  C23C16/45531 ,  H01L21/28562 ,  H01L21/76846 ,  H01L2221/1078

摘要： A method for forming a three-component film containing metal, silicon and nitrogen for use in semiconductor devices on a substrate. The method of the present invention comprises the steps of: preparing separate reactive gases each including at least one selected from the group consisting of a gaseous metal compound, a gaseous silicon compound and an ammonia gas under conditions such that the gaseous meta compound and the ammonia gas does not form a mixture; determining a sequential gas supply cycle of the reactive gases so that supplies of the gaseous metal compound, the gaseous silicon compound and the ammonia gas are each included at least once within one gas supply cycle; and applying the reactive gases to the substrate by repeating the gas supply cycle at least once. According to the present invention, a three-component nitride film can be formed with a uniform thickness despite unevenness of a semiconductor substrate surface.

摘要翻译： 一种用于形成用于半导体器件中的金属，硅和氮的三组分膜的方法。 本发明的方法包括以下步骤：制备各自包括选自气态金属化合物，气态硅化合物和氨气中的至少一种的单独的反应性气体，使得气态化合物和氨 气体不形成混合物; 确定反应气体的顺序气体供应循环，使得气体金属化合物，气态硅化合物和氨气的供应在一个气体供应循环内至少包含一次; 并且通过重复气体供应循环至少一次将反应性气体施加到基底。 根据本发明，即使半导体衬底表面的不均匀，也可以均匀地形成三组分氮化物膜。

公开(公告)号：US5577621A

公开(公告)日：1996-11-26

申请号：US353255

申请日：1994-12-02

申请人： Kyoung-Soo Yi

发明人： Kyoung-Soo Yi

IPC分类号： B65D85/86 ,  H01L21/205 ,  H01L21/22 ,  H01L21/673 ,  A47F7/00

CPC分类号： H01L21/6732 ,  H01L21/67309

摘要： A wafer installing cassette for semiconductor manufacturing apparatus is disclosed, in which various sizes of wafer can be installed within a certain range. In the present invention, the wafer installing cassette includes two or more shelves each having a plurality of annular steps, and a shelf securing means for supporting the shelves, so that a plurality of wafers of different sizes can be loaded.

摘要翻译： 公开了一种用于半导体制造装置的晶片安装盒，其中可将各种尺寸的晶片安装在一定范围内。 在本发明中，晶片安装盒包括两个或多个每个具有多个环形台阶的搁架，以及用于支撑搁板的搁板固定装置，从而可以装载多个不同尺寸的晶片。

公开(公告)号：US06645574B1

公开(公告)日：2003-11-11

申请号：US09719103

申请日：2000-12-06

申请人： Chun-Soo Lee ,  Won-Gu Kang ,  Kyu-Hong Lee ,  Kyoung-Soo Yi

发明人： Chun-Soo Lee ,  Won-Gu Kang ,  Kyu-Hong Lee ,  Kyoung-Soo Yi

IPC分类号： C23C1606

CPC分类号： C30B25/14 ,  C23C16/45529 ,  C23C16/4554 ,  C23C16/45561 ,  C23C16/515 ,  C23C16/56 ,  C30B25/105

摘要： A noble method of forming thin films for producing semiconductor or flat panel display devices is disclosed. The method is a way of effectively forming thin films on a substrate even if reactants do not react readily in a time-divisional process gas supply sequence in a reactor by supplying reactant gases and a purge gas cyclically and sequentially in order to prevent gas-phase reactions between the reactant gases and also by generating plasma directly on a substrate synchronously with the process gas supply cycle. The method has advantages of effective thin film formation even if the reactant gases do not react readily, minimization of the purge gas supply time for reduction in process time, reduction of particle contamination during film formation process, as well as thin film formation at low temperatures.

摘要翻译： 公开了一种形成用于制造半导体或平板显示装置的薄膜的高贵方法。 该方法是在基板上有效地形成薄膜的方法，即使反应物在反应器中的分时工艺气体供应顺序中不容易反应，通过循环和顺序地供应反应气体和吹扫气体来反应，以防止气相 反应气体之间的反应，也是通过与工艺气体供应循环同步在衬底上直接产生等离子体。 该方法具有有效的薄膜形成的优点，即使反应物气体不容易反应，减少吹扫气体供应时间以减少处理时间，减少成膜过程中的颗粒污染，以及在低温下形成薄膜 。

公开(公告)号：US06539891B1

公开(公告)日：2003-04-01

申请号：US09763238

申请日：2001-02-14

申请人： Chun-Soo Lee ,  Won-Gu Kang ,  Kyu-Hong Lee ,  Kyoung-Soo Yi

发明人： Chun-Soo Lee ,  Won-Gu Kang ,  Kyu-Hong Lee ,  Kyoung-Soo Yi

IPC分类号： C23C1600

CPC分类号： C23C16/515 ,  C23C16/4405 ,  C23C16/45536 ,  C23C16/45544 ,  C23C16/45561 ,  C23C16/45591 ,  C23C16/509

摘要： A chemical deposition reactor capable of switching rapidly from one process gas to another and method of forming a thin film using the same. The reactor of the present invention comprises: a reactor cover, having an inlet and an outlet, for keeping reactant gases from other part of the reactor where the pressure is lower than inside of the reactor; a gas flow control plate, fixed onto the reactor cover, for controlling the gas flow through inlet and outlet by the spacing between itself and the reactor cover; and a substrate supporting plate for confining a reaction cell with the reactor cover. The method of the present invention can be accomplished using the above reactor. In the method, process gases including a deposition gas, a reactant gas and a purge gas are sequentially and repeatedly supplied in the reactor to form a thin film on a substrate. A RF (Radio Frequency) plasma power is applied to a plasma electrode of the reactor synchronised with the supply of at least one among the process gases.

摘要翻译： 能够从一种工艺气体迅速地切换到另一种工艺气体的化学沉积反应器和使用其形成薄膜的方法。 本发明的反应器包括：具有入口和出口的反应器盖，用于保持来自反应器其他部分的反应气体，其中压力低于反应器内部; 固定在反应器盖上的气流控制板，用于通过入口和出口通过其本身与反应器盖之间的间隔来控制气流; 以及用于将反应池限制在反应器盖上的基板支撑板。 本发明的方法可以使用上述反应器来实现。 在该方法中，包括沉积气体，反应气体和吹扫气体的处理气体在反应器中顺序地和重复地供给，以在基板上形成薄膜。 将RF（射频）等离子体功率施加到反应器的等离子体电极，与处理气体中的至少一个的供给同步。

公开(公告)号：US07764170B2

公开(公告)日：2010-07-27

申请号：US11760890

申请日：2007-06-11

申请人： Kyoung-soo Yi

发明人： Kyoung-soo Yi

IPC分类号： G08B1/08

CPC分类号： A61B5/0006 ,  A61B5/002 ,  A61B5/02405 ,  A61B5/0404 ,  A61B5/14532 ,  A61B5/7405

摘要： An emergency alarm system is provided, including: a mobile communication terminal to measure and transmit a user's bio signal and to output sound data with a bell sound when an emergency alarm signal is received from a health care server; and a health care server to determine from the bio signal whether or not the user is in an emergency, and to transmit an emergency alarm signal to the mobile communication terminal when the user is determined to be in an emergency.

摘要翻译： 提供了一种紧急报警系统，包括：移动通信终端，用于测量和发送用户的生物信号，并且当从医疗保健服务器接收到紧急警报信号时，输出具有铃声的声音数据; 以及医疗保健服务器，根据生物信号确定用户是否处于紧急状态，并且在确定用户处于紧急状态时，向移动通信终端发送紧急警报信号。

公开(公告)号：US20070285226A1

公开(公告)日：2007-12-13

申请号：US11760890

申请日：2007-06-11

申请人： Kyoung-soo Yi

发明人： Kyoung-soo Yi

IPC分类号： G08B1/08 ,  A61B5/00

CPC分类号： A61B5/0006 ,  A61B5/002 ,  A61B5/02405 ,  A61B5/0404 ,  A61B5/14532 ,  A61B5/7405

摘要： An emergency alarm system is provided, including: a mobile communication terminal to measure and transmit a user's bio signal and to output sound data with a bell sound when an emergency alarm signal is received from a health care server; and a health care server to determine from the bio signal whether or not the user is in an emergency, and to transmit an emergency alarm signal to the mobile communication terminal when the user is determined to be in an emergency.

摘要翻译： 提供了一种紧急报警系统，包括：移动通信终端，用于测量和发送用户的生物信号，并且当从医疗保健服务器接收到紧急警报信号时，输出具有铃声的声音数据; 以及医疗保健服务器，根据生物信号确定用户是否处于紧急状态，并且在确定用户处于紧急状态时，向移动通信终端发送紧急警报信号。