公开(公告)号：US20120114856A1

公开(公告)日：2012-05-10

申请号：US13346470

申请日：2012-01-09

申请人： Hyung Sang Park ,  Seung Woo Choi ,  Jong Su Kim ,  Dong Rak Jung ,  Jeong Ho Lee ,  Chun Soo Lee

发明人： Hyung Sang Park ,  Seung Woo Choi ,  Jong Su Kim ,  Dong Rak Jung ,  Jeong Ho Lee ,  Chun Soo Lee

IPC分类号： C23C16/04 ,  C23C16/458

CPC分类号： C23C16/40 ,  C23C16/4408 ,  C23C16/45519

摘要： A deposition apparatus configured to form a thin film on a substrate includes: a reactor wall; a substrate support positioned under the reactor wall; and a showerhead plate positioned above the substrate support. The showerhead plate defines a reaction space together with the substrate support. The apparatus also includes one or more gas conduits configured to open to a periphery of the reaction space at least while an inert gas is supplied therethrough. The one or more gas conduits are configured to supply the inert gas inwardly toward the periphery of the substrate support around the reaction space. This configuration prevents reactant gases from flowing between a substrate and the substrate support during a deposition process, thereby preventing deposition of an undesired thin film and impurity particles on the back side of the substrate.

摘要翻译： 构造成在基板上形成薄膜的沉积装置包括：反应器壁; 位于反应器壁下方的衬底支撑件; 以及位于基板支撑件上方的喷头板。 喷头板与基板支撑件一起限定反应空间。 该装置还包括一个或多个气体管道，其构造成至少在通过其供应惰性气体时向反应空间的周边开放。 一个或多个气体导管构造成向反应空间周围的衬底支撑件的周围向内供应惰性气体。 这种构造防止了在沉积工艺期间反应气体在衬底和衬底支撑件之间流动，从而防止不期望的薄膜和杂质颗粒沉积在衬底的背面上。

公开(公告)号：US07825912B2

公开(公告)日：2010-11-02

申请号：US11701967

申请日：2007-02-02

申请人： Chun Soo Lee

发明人： Chun Soo Lee

IPC分类号： G06F3/042

CPC分类号： G06F3/0416 ,  G06F1/3262 ,  G06F3/0421

摘要： A touch screen of a mobile terminal and a power saving method thereof are provided. The power saving method of a touch screen for a mobile terminal includes determining whether a touch panel is contacted by controlling light emitting elements to emit light with a first scan speed and detecting whether light is received by light receiving elements; and decreasing, if the touch panel is determined not to be contacted for a predetermined time duration, a scan speed from the first scan speed to a second scan speed after lapse of the predetermined time duration. Therefore, if a contact occurs within the predetermined time duration, the contact is detected by executing the scan with the first scan speed, and if no contact is detected before lapse of the predetermined time duration, the scan speed is decreased, whereby electric current waste due to the scan can be minimized.

摘要翻译： 提供了移动终端的触摸屏及其省电方法。 用于移动终端的触摸屏的省电方法包括：通过控制发光元件以第一扫描速度发光并检测光是否被光接收元件接收来确定触摸面板是否接触; 并且如果在预定持续时间内确定触摸面板不被接触，则在经过预定持续时间之后，从第一扫描速度到第二扫描速度的扫描速度降低。 因此，如果在预定持续时间内发生接触，则通过以第一扫描速度执行扫描来检测接触，并且如果在经过预定持续时间之前没有检测到接触，则扫描速度降低，由此电流浪费 由于扫描可以最小化。

公开(公告)号：US20060146045A1

公开(公告)日：2006-07-06

申请号：US11292032

申请日：2005-12-01

申请人： Chun-Soo Lee

发明人： Chun-Soo Lee

IPC分类号： G09G5/00

CPC分类号： G09G3/36 ,  G09G2310/0221 ,  G09G2330/022 ,  Y10T307/50

摘要： An apparatus and method for controlling powers of a main LCD and a sub LCD in a dual LCD mobile communication terminal. When the main LCD and the sub LCD share buses with each other, power is periodically supplied to the main LCD, which is powered off, in order to update the sub LCD. Accordingly, complexity of a folder due to the use of buffer can be solved. Further, when an LDI is used, unnecessary power consumption can be prevented.

摘要翻译： 一种用于控制双LCD移动通信终端中的主LCD和副LCD的功率的装置和方法。 当主液晶显示器和副液晶显示器共享总线时，电源被定期供给主电源供电，以便更新副液晶显示器。 因此，可以解决由于使用缓冲器而导致的文件夹的复杂性。 此外，当使用LDI时，可以防止不必要的功率消耗。

公开(公告)号：US6160702A

公开(公告)日：2000-12-12

申请号：US219871

申请日：1998-12-24

申请人： Chun-Soo Lee ,  Jae-Wook Kim

发明人： Chun-Soo Lee ,  Jae-Wook Kim

IPC分类号： H01M2/00 ,  G06F1/16

CPC分类号： G06F1/1635 ,  G06F1/1626

摘要： A portable computer that uses multiple sub-batteries, that are the collective equivalent of one regular computer battery, that are serially connected to power a portable computer. The sub-batteries each contain a small number of battery cells and are connected to the main circuit board, or mother board, of the portable computer to supply power to the portable computer. An electric connecting means may be adapted for connecting two sub-batteries to the motherboard. The multiple sub-battery system allows a more flexible layout design for the installation of various internal components inside of the portable computer. Thus, the small sized battery seats can be placed in various, priorly unusable space, places. Now portions of the computer's battery system can be stored in the corners of the housing, or in narrow spots between other internal components.

摘要翻译： 一种便携式计算机，其使用多个子电池，其是等同于一个普通计算机电池的集体相当于串行连接以为便携式计算机供电的便携式计算机。 子电池各自包含少量的电池单元，并且连接到便携式计算机的主电路板或母板，以向便携式计算机供电。 电连接装置可以适于将两个子电池连接到母板。 多个子电池系统允许在便携式计算机内安装各种内部组件的更灵活的布局设计。 因此，小型电池座可以放置在各种先前不可用的空间中。 现在，计算机电池系统的一部分可以存储在壳体的角部，或者存储在其它内部组件之间的狭窄位置。

公开(公告)号：US20130052348A1

公开(公告)日：2013-02-28

申请号：US13598998

申请日：2012-08-30

申请人： Seung Woo Choi ,  Gwang Lae Park ,  Chun Soo Lee ,  Jeong Ho Lee ,  Young Seok Choi

发明人： Seung Woo Choi ,  Gwang Lae Park ,  Chun Soo Lee ,  Jeong Ho Lee ,  Young Seok Choi

IPC分类号： C23C16/455 ,  B23P11/00

CPC分类号： C23C16/45591 ,  C23C16/45504 ,  C23C16/45527 ,  H01L21/68742 ,  H01L21/68792

摘要： A reactor configured to subject a substrate to alternately repeated surface reactions of vapor-phase reactants is disclosed. The reactor may include a reaction chamber that defines a reaction space and a gas flow control guide structure; and a substrate holder. The gas flow control guide includes one or more channels. Each of the channels widens as the channel extends from the inlet to the reaction space. At least one of the channels is configured to generate a non-uniform laminar flow at a first portion of the periphery of the reaction space such that the laminar flow includes a plurality of flow paths that provide different amounts of a fluid. The reaction chamber may include a reactor base and a reactor cover detachable from each other; and a driver configured to independently adjust at least three portions of the reactor base to provide a substantially perfect seal to the reactor space.

摘要翻译： 公开了一种被配置成使基板交替重复表面反应的反应器的反应器。 反应器可以包括限定反应空间和气体流量控制引导结构的反应室; 和基板支架。 气体流量控制引导件包括一个或多个通道。 当通道从入口延伸到反应空间时，每个通道变宽。 至少一个通道构造成在反应空间的周边的第一部分处产生不均匀的层流，使得层流包括提供不同量的流体的多个流动路径。 反应室可以包括可以彼此分离的反应器基座和反应器盖; 以及被配置为独立地调整反应器基座的至少三个部分以向反应器空间提供基本上完美的密封的驱动器。

公开(公告)号：US20080062150A1

公开(公告)日：2008-03-13

申请号：US11701967

申请日：2007-02-02

申请人： Chun Soo Lee

发明人： Chun Soo Lee

IPC分类号： G06F3/042

CPC分类号： G06F3/0416 ,  G06F1/3262 ,  G06F3/0421

摘要： A touch screen of a mobile terminal and a power saving method thereof are provided. The power saving method of a touch screen for a mobile terminal includes determining whether a touch panel is contacted by controlling light emitting elements to emit light with a first scan speed and detecting whether light is received by light receiving elements; and decreasing, if the touch panel is determined not to be contacted for a predetermined time duration, a scan speed from the first scan speed to a second scan speed after lapse of the predetermined time duration. Therefore, if a contact occurs within the predetermined time duration, the contact is detected by executing the scan with the first scan speed, and if no contact is detected before lapse of the predetermined time duration, the scan speed is decreased, whereby electric current waste due to the scan can be minimized.

摘要翻译： 提供了一种移动终端的触摸屏及其省电方法。 用于移动终端的触摸屏的省电方法包括：通过控制发光元件以第一扫描速度发光并检测光是否被光接收元件接收来确定触摸面板是否接触; 并且如果在预定持续时间内确定触摸面板不被接触，则在经过预定持续时间之后，从第一扫描速度到第二扫描速度的扫描速度降低。 因此，如果在预定持续时间内发生接触，则通过以第一扫描速度执行扫描来检测接触，并且如果在经过预定持续时间之前没有检测到接触，则扫描速度降低，由此电流浪费 由于扫描可以最小化。

公开(公告)号：US20090163024A1

公开(公告)日：2009-06-25

申请号：US12337141

申请日：2008-12-17

申请人： Jeon Ho Kim ,  Hyung Sang Park ,  Seung Woo Choi ,  Dong Rak Jung ,  Chun Soo Lee

发明人： Jeon Ho Kim ,  Hyung Sang Park ,  Seung Woo Choi ,  Dong Rak Jung ,  Chun Soo Lee

IPC分类号： H01L21/443

CPC分类号： H01L21/28556 ,  C23C16/16 ,  C23C16/18 ,  H01L21/76843 ,  H01L21/76846

摘要： A method of depositing includes: loading a substrate into a reactor; and conducting a plurality of atomic layer deposition cycles on the substrate in the reactor. At least one of the cycles includes steps of: supplying a ruthenium precursor to the reactor; supplying a purge gas to the reactor; and supplying non-plasma ammonia gas to the reactor after supplying the ruthenium precursor. The method allows formation of a ruthenium layer having an excellent step-coverage at a relatively low deposition temperature at a relatively high deposition rate. In situ isothermal deposition of barrier materials, such as TaN at 200-300° C., is also facilitated.

摘要翻译： 一种沉积方法包括：将基底装载到反应器中; 并在反应器中的衬底上进行多个原子层沉积循环。 所述循环中的至少一个包括以下步骤：向所述反应器供应钌前体; 向反应器供应净化气体; 并在供应钌前体之后向反应器供应非等离子体氨气。 该方法允许以相对高的沉积速率在相对低的沉积温度下形成具有优异的阶梯覆盖率的钌层。 隔离材料的原位等温沉积，例如在200-300℃的TaN也是有利的。

公开(公告)号：US20090156015A1

公开(公告)日：2009-06-18

申请号：US12334135

申请日：2008-12-12

申请人： Hyung Sang Park ,  Seung Woo Choi ,  Jong Su Kim ,  Dong Rak Jung ,  Jeong Ho Lee ,  Chun Soo Lee

发明人： Hyung Sang Park ,  Seung Woo Choi ,  Jong Su Kim ,  Dong Rak Jung ,  Jeong Ho Lee ,  Chun Soo Lee

IPC分类号： H01L21/30 ,  C23C16/54

CPC分类号： C23C16/40 ,  C23C16/4408 ,  C23C16/45519

摘要： A deposition apparatus configured to form a thin film on a substrate includes: a reactor wall; a substrate support positioned under the reactor wall; and a showerhead plate positioned above the substrate support. The showerhead plate defines a reaction space together with the substrate support. The apparatus also includes one or more gas conduits configured to open to a periphery of the reaction space at least while an inert gas is supplied therethrough. The one or more gas conduits are configured to supply the inert gas inwardly toward the periphery of the substrate support around the reaction space. This configuration prevents reactant gases from flowing between a substrate and the substrate support during a deposition process, thereby preventing deposition of an undesired thin film and impurity particles on the back side of the substrate.

摘要翻译： 构造成在基板上形成薄膜的沉积装置包括：反应器壁; 位于反应器壁下方的衬底支撑件; 以及位于基板支撑件上方的喷头板。 喷头板与基板支撑件一起限定反应空间。 该装置还包括一个或多个气体管道，其构造成至少在通过其供应惰性气体时向反应空间的周边开放。 一个或多个气体导管构造成向反应空间周围的衬底支撑件的周围向内供应惰性气体。 这种构造防止了在沉积工艺期间反应气体在衬底和衬底支撑件之间流动，从而防止不期望的薄膜和杂质颗粒沉积在衬底的背面上。

公开(公告)号：US07485349B2

公开(公告)日：2009-02-03

申请号：US11552898

申请日：2006-10-25

申请人： Won-Yong Koh ,  Chun-soo Lee

发明人： Won-Yong Koh ,  Chun-soo Lee

IPC分类号： H05H1/24

CPC分类号： C23C16/4554 ,  C23C16/34 ,  C23C16/36 ,  C23C16/40 ,  C23C16/403 ,  C23C16/405 ,  C23C16/409 ,  C23C16/515 ,  H01L21/31691

摘要： A method for forming thin films of a semiconductor device is provided. The thin film formation method presented here is based upon a time-divisional process gas supply in a chemical vapor deposition (CVD) method, where the process gases are supplied and purged sequentially, and additionally plasma is generated in synchronization with the cycle of pulsing reactant gases. A method of forming thin films that possess a property of gradient composition profile is also presented.

摘要翻译： 提供了一种用于形成半导体器件的薄膜的方法。 这里介绍的薄膜形成方法是基于化学气相沉积（CVD）方法中的时间分割工艺气体供应，其中工艺气体被依次供应和清洗，另外等离子体与脉冲反应物的循环同步产生 气体。 还提出了一种形成具有梯度组成轮廓性质的薄膜的方法。

公开(公告)号：US07138336B2

公开(公告)日：2006-11-21

申请号：US10486311

申请日：2001-08-06

申请人： Chun Soo Lee ,  Min Sub Oh ,  Hyung Sang Park

发明人： Chun Soo Lee ,  Min Sub Oh ,  Hyung Sang Park

IPC分类号： H01L21/44 ,  H01L21/311

CPC分类号： C23C16/45544 ,  C23C16/4412 ,  C23C16/45508 ,  C23C16/45519 ,  C23C16/4554 ,  C23C16/45565 ,  C23C16/45591 ,  C23C16/50 ,  C23C16/5096 ,  H01J37/32082 ,  H01J37/3244 ,  H01J37/32449 ,  H01L21/28562 ,  H01L21/3141 ,  H01L21/318

摘要： A plasma enhanced atomic layer deposition (PEALD) apparatus and a method of forming a conductive thin film using the same are disclosed. According to the present invention of a PEALD apparatus and a method, a process gas inlet tube and a process gas outlet tube are installed symmetrically and concentrically with respect to a substrate, thereby allowing the process gas to flow uniformly, evenly and smoothly over the substrate, thereby forming a thin film uniformly over the substrate. A uniquely designed showerhead assembly provides not only reduces the volume of the reactor space, but also allows the process gases to flow uniformly, evenly and smoothly throughout the reation space area and reduces the volume of the reaction space, and the smaller volume makes it easier and fast to change the process gases for sequential and repeated process operation.

摘要翻译： 公开了等离子体增强原子层沉积（PEALD）装置和使用其形成导电薄膜的方法。 根据本发明的PEALD设备和方法，工艺气体入口管和工艺气体出口管相对于基底对称地和同心地安装，从而使处理气体均匀地均匀地流过衬底 从而在衬底上均匀地形成薄膜。 独特设计的喷头组件不仅减少了反应器空间的体积，而且使得工艺气体能够均匀，均匀和平稳地流过整个反应空间区域，并且减小了反应空间的体积，并且较小的体积使其更容易 并快速改变工艺气体以进行连续和重复的工艺操作。