摘要:
A noble method of forming thin films for producing semiconductor or flat panel display devices is disclosed. The method is a way of effectively forming thin films on a substrate even if reactants do not react readily in a time-divisional process gas supply sequence in a reactor by supplying reactant gases and a purge gas cyclically and sequentially in order to prevent gas-phase reactions between the reactant gases and also by generating plasma directly on a substrate synchronously with the process gas supply cycle. The method has advantages of effective thin film formation even if the reactant gases do not react readily, minimization of the purge gas supply time for reduction in process time, reduction of particle contamination during film formation process, as well as thin film formation at low temperatures.
摘要:
A chemical deposition reactor capable of switching rapidly from one process gas to another and method of forming a thin film using the same. The reactor of the present invention comprises: a reactor cover, having an inlet and an outlet, for keeping reactant gases from other part of the reactor where the pressure is lower than inside of the reactor; a gas flow control plate, fixed onto the reactor cover, for controlling the gas flow through inlet and outlet by the spacing between itself and the reactor cover; and a substrate supporting plate for confining a reaction cell with the reactor cover. The method of the present invention can be accomplished using the above reactor. In the method, process gases including a deposition gas, a reactant gas and a purge gas are sequentially and repeatedly supplied in the reactor to form a thin film on a substrate. A RF (Radio Frequency) plasma power is applied to a plasma electrode of the reactor synchronised with the supply of at least one among the process gases.
摘要:
An apparatus and method for controlling powers of a main LCD and a sub LCD in a dual LCD mobile communication terminal. When the main LCD and the sub LCD share buses with each other, power is periodically supplied to the main LCD, which is powered off, in order to update the sub LCD. Accordingly, complexity of a folder due to the use of buffer can be solved. Further, when an LDI is used, unnecessary power consumption can be prevented.
摘要:
A portable computer that uses multiple sub-batteries, that are the collective equivalent of one regular computer battery, that are serially connected to power a portable computer. The sub-batteries each contain a small number of battery cells and are connected to the main circuit board, or mother board, of the portable computer to supply power to the portable computer. An electric connecting means may be adapted for connecting two sub-batteries to the motherboard. The multiple sub-battery system allows a more flexible layout design for the installation of various internal components inside of the portable computer. Thus, the small sized battery seats can be placed in various, priorly unusable space, places. Now portions of the computer's battery system can be stored in the corners of the housing, or in narrow spots between other internal components.
摘要:
A portable computer for wireless communication with peripheral devices over an infrared communication link. The portable computer is capable of automatically controlling an infrared signal direction for greater data transfer efficiency over the infrared communication link. The portable computer includes an input/output controller for outputting infrared signal transmission data according to an input command, receiving infrared signal reception data, and outputting an infrared refraction control signal according to whether the infrared signal reception data is received; an infrared signal transmitter for transmitting an infrared transmission signal according to the infrared signal transmission data to the peripheral device over the infrared communication link; an infrared signal receiver for receiving an infrared reception signal from the peripheral device and outputting the infrared signal reception data; and an infrared signal direction controller for controlling the direction of the infrared transmission signal to the peripheral device, and the direction of the infrared reception signal according to the infrared refraction control signal.