Abstract:
An object of the present invention is to improve the performance of a semiconductor device having a CMISFET. Each of an n channel MISFET and a p channel MISFET which form the CMISFET includes a gate insulating film composed of a silicon oxynitride film and a gate electrode including a silicon film positioned on the gate insulating film. Metal elements such as Hf are introduced near the interface between the gate electrode and the gate insulating film with a surface density of 1×1013 to 5×1014 atoms/cm2. The impurity concentration of channel regions of the n channel MISFET and the p channel MISFET is controlled to be equal to or lower than 1.2×1018/cm3.
Abstract:
A substrate to be processed by a patterning device has a group of a plurality of alignment marks formed within a predetermined area as an alignment area, each of the plurality of alignment marks being an information recording code that records its own location relative to a reference position on the substrate. In alignment of the substrate, an image of such an alignment area that includes a group of the plurality of alignment marks is captured. Thus, even if the area of image capturing is reduced with increasing image magnification, at least one of the plurality of alignment marks can be included in the image. One of the alignment marks whose images are included in this image is defined as a target mark, and the position of the substrate is derived based on the target mark in the image. Thus, the position of the substrate can be detected by a single image capturing operation.
Abstract:
A MISFET includes: a p type substrate having a channel region with an impurity concentration C; an insulating film made of SiO2 and formed on the channel region; and an insulating film made of HfSiON and formed on the gate insulating film. When there is a postulated MISFET including a postulated substrate having a channel region with the impurity concentration C and made of a material identical to the substrate and an insulating film made solely of SiON formed on the channel region, said impurity concentration C of channel region is set so that a maximum value of mobility of electrons in said channel region is higher than a maximum value of mobility of electrons in the postulated channel region. Thus, the power supply voltage can be reduced and the power consumption can be reduced.
Abstract:
There is disclosed an electron microscope equipped with a magnetic microprobe. The microscope can apply a strong electric field to a local area on a specimen made of a magnetic material. The magnetic flux density per unit area of the microprobe is high. The microscope includes a biprism for producing interference between an electron beam transmitted through the specimen and an electron beam passing through a vacuum. The specimen is held to a holder. The microprobe is made of a magnetic material and has a needle-like tip. The microscope further includes a moving mechanism capable of moving the microprobe toward and away from the specimen.
Abstract:
The present invention provides a technique for, in the case in which a failure has occurred in a shared memory, controlling a period of a pseudo through operation to reduce a period in which performance of a disk array device falls. Control information is divided into management information, which is required to be duplexed, and directory information, which is only required to simplexed, and the management information and the directory information are stored in separate shared memories. In the case in which a failure has occurred in the shared memory of an expanded memory unit (Option) storing the directory information, the directory information is reestablished in the shared memory of a basic memory unit (Basic). The pseudo through operation is cancelled at the point when the directory information is reestablished. After a package of the expanded memory unit is replaced with a normal product, the directory information is reestablished again. Management information managed in the other cluster is copied to the shared memory of the basis memory unit to complete maintenance and recovery work.
Abstract:
A 1-butene polymer satisfying the following (1), (2) and either (3) or (3′): a process for producing the polymer; a resin modifier comprising the polymer; and a hot-melt adhesive containing the polymer. (1) The intrinsic viscosity [η] as measured in tetralin solvent at 135° C. is 0.01 to 0.5 dL/g. (2) The polymer is a crystalline resin having a melting point (Tm-D) of 0 to 100° C., the melting point being defined as the top of the peak observed on the highest-temperature side in a melting endothermic curve obtained with a differential scanning calorimeter (DSC) in a test in which a sample is held in a nitrogen atmosphere at −10° C. for 5 min and then heated at a rate of 10° C./min. (3) The stereoregularity index {(mmmm)/(mmrr+rmmr)} is 30 or lower. (3′) The mesopentad content (mmmm) determined from a nuclear magnetic resonance (NMR) spectrum is 68 to 73%.
Abstract:
An active material slurry 12a obtained by a mixing a powder of the active material with a binder and a solvent for the binder is heated to a predetermined temperature inside a slurry reservoir 20, and the heated active material slurry 12a is coated and adhered to an electrically conductive core body 11. The resulting body is then fed inside a drying furnace 28 to dry the coated and adhered active material slurry 12a by heating, and is rolled to a predetermined thickness by passing it through a pair of rolling rolls 29, thereby obtaining an electrode for alkaline batteries comprising an active material layer 12 on the both sides of the electrically conductive core body 11. On drying the active material slurry 12a that is coated and adhered to the electrically conductive core body 11, the transfer of the binder inside the active material slurry 12a is suppressed, such that the decrease in the amount of the binder inside the active material layer 12 in the vicinity of the electrically conductive core body 11 is prevented from occurring. Thus is obtained an electrode for alkaline batteries 10 improved in adhesion strength.
Abstract:
An apparatus for determining the attitude of an artificial satellite by narrowing attitude candidates to a correct one in a short time. The apparatus has star sensors, a star catalog data base, star identification sections in each of which star images output from the star sensors are collated with a star catalog with respect to each star sensor to output a group of corresponding candidates, attitude computation sections for computing a value of an attitude candidate of the artificial satellite with respect to each corresponding candidate, an attitude updating section for updating the value of the attitude candidate on the basis of the star images output from the star sensor and the star catalog, and an attitude propagation section for computing the value of the attitude candidate at the present sampling time from the value of the attitude candidate at the preceding sampling time and the artificial satellite's angular velocity. An attitude candidate unification section for comparing and combining the values of attitude candidates into one candidate is provided in a loop including the attitude updating section and the attitude propagation section.
Abstract:
Annular grooves are formed on both end surfaces of a recording drum to be rotated, and two balance weights are disposed inside each of the annular grooves. The balance weight is composed of a magnet, and is attracted to the end surface of the recording drum by its magnetic force. The two balance weights are arranged at a predetermined attaching angle such that an unbalance force caused by centrifugal forces developed by a plate and a movable clamp, for example, is canceled. Every time the size and the mass of the plate are changed, the positions of the two balance weights are adjusted, so that forced vibration in the recording drum is restrained.
Abstract:
The rotary cathode X-ray tube equipment of the present invention is constructed so as to permit radiation of X-ray from all directions with respect to the whole circumference of a subject, and is used for x-ray CT. The equipment of the invention is constructed to prevent an X-ray radiation window 40 of a low strength from being influenced by atmospheric deformations of a vacuum vessel 1 or by machining and assembling errors, for example by using a joint portion disposed between the X-ray radiation window and an inner ring and having both a surface perpendicular to a rotational axis of a rotary member and a cylindrical surface parallel to the rotational axis, a face seal formed on the surface of the joint portion perpendicular to the rotational axis, and an axial seal formed on the cylindrical surface of the joint portion parallel to the rotational axis.