Semiconductor device and manufacturing of the same
    1.
    发明授权
    Semiconductor device and manufacturing of the same 有权
    半导体器件及其制造相同

    公开(公告)号:US07915686B2

    公开(公告)日:2011-03-29

    申请号:US11439260

    申请日:2006-05-24

    IPC分类号: H01L29/76

    摘要: An object of the present invention is to improve the performance of a semiconductor device having a CMISFET. Each of an n channel MISFET and a p channel MISFET which form the CMISFET includes a gate insulating film composed of a silicon oxynitride film and a gate electrode including a silicon film positioned on the gate insulating film. Metal elements such as Hf are introduced near the interface between the gate electrode and the gate insulating film with a surface density of 1×1013 to 5×1014 atoms/cm2. The impurity concentration of channel regions of the n channel MISFET and the p channel MISFET is controlled to be equal to or lower than 1.2×1018/cm3.

    摘要翻译: 本发明的目的是提高具有CMISFET的半导体器件的性能。 形成CMISFET的n沟道MISFET和p沟道MISFET中的每一个包括由氮氧化硅膜和包括位于栅极绝缘膜上的硅膜的栅电极构成的栅极绝缘膜。 诸如Hf之类的金属元素以1×1013至5×1014原子/ cm2的表面密度引入栅电极和栅绝缘膜之间的界面附近。 n沟道MISFET和p沟道MISFET的沟道区域的杂质浓度被控制在等于或低于1.2×1018 / cm3。

    POSITION DETECTING METHOD AND DEVICE, PATTERNING DEVICE, AND SUBJECT TO BE DETECTED
    2.
    发明申请
    POSITION DETECTING METHOD AND DEVICE, PATTERNING DEVICE, AND SUBJECT TO BE DETECTED 审中-公开
    位置检测方法和装置,绘图装置,并且被检测

    公开(公告)号:US20080112609A1

    公开(公告)日:2008-05-15

    申请号:US11933490

    申请日:2007-11-01

    申请人: Masao INOUE

    发明人: Masao INOUE

    IPC分类号: G06K9/62

    摘要: A substrate to be processed by a patterning device has a group of a plurality of alignment marks formed within a predetermined area as an alignment area, each of the plurality of alignment marks being an information recording code that records its own location relative to a reference position on the substrate. In alignment of the substrate, an image of such an alignment area that includes a group of the plurality of alignment marks is captured. Thus, even if the area of image capturing is reduced with increasing image magnification, at least one of the plurality of alignment marks can be included in the image. One of the alignment marks whose images are included in this image is defined as a target mark, and the position of the substrate is derived based on the target mark in the image. Thus, the position of the substrate can be detected by a single image capturing operation.

    摘要翻译: 由图案形成装置处理的基板具有形成在预定区域内的多个对准标记的一组作为对准区域,多个对准标记中的每一个是信息记录代码,其相对于参考位置记录其自己的位置 在基板上。 在基板的对准中,捕获包括一组多个对准标记的这种对准区域的图像。 因此,即使图像拍摄的区域随着图像放大率的增加而减小,多个对准标记中的至少一个可以包括在图像中。 将图像包括在该图像中的对准标记中的一个被定义为目标标记,并且基于图像中的目标标记导出基板的位置。 因此,可以通过单次图像捕获操作来检测基板的位置。

    Semiconductor device with gate insulating film and manufacturing method thereof
    3.
    发明申请
    Semiconductor device with gate insulating film and manufacturing method thereof 审中-公开
    具有栅极绝缘膜的半导体器件及其制造方法

    公开(公告)号:US20060208325A1

    公开(公告)日:2006-09-21

    申请号:US11373112

    申请日:2006-03-13

    IPC分类号: H01L29/94

    摘要: A MISFET includes: a p type substrate having a channel region with an impurity concentration C; an insulating film made of SiO2 and formed on the channel region; and an insulating film made of HfSiON and formed on the gate insulating film. When there is a postulated MISFET including a postulated substrate having a channel region with the impurity concentration C and made of a material identical to the substrate and an insulating film made solely of SiON formed on the channel region, said impurity concentration C of channel region is set so that a maximum value of mobility of electrons in said channel region is higher than a maximum value of mobility of electrons in the postulated channel region. Thus, the power supply voltage can be reduced and the power consumption can be reduced.

    摘要翻译: MISFET包括:具有杂质浓度C的沟道区的p型衬底; 形成在沟道区上的由SiO 2构成的绝缘膜; 以及由栅极绝缘膜形成的由HfSiON构成的绝缘膜。 当存在假设的MISFET,其包括具有杂质浓度C并且由与衬底相同的材料制成的沟道区域和由沟道区域上形成的仅由SiON制成的绝缘膜的假定衬底时,沟道区的杂质浓度C 使得所述沟道区中的电子的迁移率的最大值高于假定沟道区中的电子的迁移率的最大值。 因此,可以降低电源电压并且可以降低功耗。

    Electron microscope equipped with magnetic microprobe
    4.
    发明申请
    Electron microscope equipped with magnetic microprobe 有权
    电子显微镜配有磁性微探针

    公开(公告)号:US20050274889A1

    公开(公告)日:2005-12-15

    申请号:US11134090

    申请日:2005-05-20

    IPC分类号: H01J37/26 G21K7/00

    摘要: There is disclosed an electron microscope equipped with a magnetic microprobe. The microscope can apply a strong electric field to a local area on a specimen made of a magnetic material. The magnetic flux density per unit area of the microprobe is high. The microscope includes a biprism for producing interference between an electron beam transmitted through the specimen and an electron beam passing through a vacuum. The specimen is held to a holder. The microprobe is made of a magnetic material and has a needle-like tip. The microscope further includes a moving mechanism capable of moving the microprobe toward and away from the specimen.

    摘要翻译: 公开了一种配备有磁性微探针的电子显微镜。 显微镜可以将强电场施加到由磁性材料制成的试样上的局部区域。 微探针单位面积的磁通密度高。 显微镜包括用于产生透射通过样品的电子束与通过真空的电子束之间的干涉的双棱镜。 标本被固定在一个支架上。 微探针由磁性材料制成并具有针状尖端。 显微镜还包括能够将微探针朝向和远离样品移动的移动机构。

    Disk array device and maintenance method for disk array device
    5.
    发明申请
    Disk array device and maintenance method for disk array device 有权
    磁盘阵列设备和磁盘阵列设备的维护方法

    公开(公告)号:US20050132136A1

    公开(公告)日:2005-06-16

    申请号:US10768146

    申请日:2004-02-02

    IPC分类号: G06F3/06 G06F12/16

    摘要: The present invention provides a technique for, in the case in which a failure has occurred in a shared memory, controlling a period of a pseudo through operation to reduce a period in which performance of a disk array device falls. Control information is divided into management information, which is required to be duplexed, and directory information, which is only required to simplexed, and the management information and the directory information are stored in separate shared memories. In the case in which a failure has occurred in the shared memory of an expanded memory unit (Option) storing the directory information, the directory information is reestablished in the shared memory of a basic memory unit (Basic). The pseudo through operation is cancelled at the point when the directory information is reestablished. After a package of the expanded memory unit is replaced with a normal product, the directory information is reestablished again. Management information managed in the other cluster is copied to the shared memory of the basis memory unit to complete maintenance and recovery work.

    摘要翻译: 本发明提供了一种在共享存储器中发生故障的情况下,控制伪通过操作的周期以减少磁盘阵列设备的性能下降的周期的技术。 将控制信息划分为需要双工的管理信息和仅需要进行单工的目录信息,并将管理信息和目录信息存储在单独的共享存储器中。 在存储目录信息的扩展存储器单元(Option)的共享存储器中发生故障的情况下,在基本存储器单元(Basic)的共享存储器中重新建立目录信息。 在重新建立目录信息时,伪通过操作被取消。 在扩展的存储器单元的包装被正常产品替换之后,目录信息被重新建立。 在另一个集群中管理的管理信息被复制到基础存储器单元的共享存储器中,以完成维护和恢复工作。

    Highly flowable 1-butene polymer and process for producing the same
    6.
    发明申请
    Highly flowable 1-butene polymer and process for producing the same 有权
    高度流动的1-丁烯聚合物及其制备方法

    公开(公告)号:US20050119428A1

    公开(公告)日:2005-06-02

    申请号:US10505264

    申请日:2003-02-19

    摘要: A 1-butene polymer satisfying the following (1), (2) and either (3) or (3′): a process for producing the polymer; a resin modifier comprising the polymer; and a hot-melt adhesive containing the polymer. (1) The intrinsic viscosity [η] as measured in tetralin solvent at 135° C. is 0.01 to 0.5 dL/g. (2) The polymer is a crystalline resin having a melting point (Tm-D) of 0 to 100° C., the melting point being defined as the top of the peak observed on the highest-temperature side in a melting endothermic curve obtained with a differential scanning calorimeter (DSC) in a test in which a sample is held in a nitrogen atmosphere at −10° C. for 5 min and then heated at a rate of 10° C./min. (3) The stereoregularity index {(mmmm)/(mmrr+rmmr)} is 30 or lower. (3′) The mesopentad content (mmmm) determined from a nuclear magnetic resonance (NMR) spectrum is 68 to 73%.

    摘要翻译: 满足以下(1),(2)和(3)或(3')的1-丁烯聚合物:制备聚合物的方法; 包含所述聚合物的树脂改性剂; 和含有聚合物的热熔性粘合剂。 (1)在135℃下在四氢化萘溶剂中测定的特性粘度η为0.01〜0.5dL / g。 (2)聚合物是熔点(Tm-D)为0〜100℃的结晶性树脂,熔点定义为在获得的熔融吸热曲线中在最高温度侧观察到的峰的顶部 在差示扫描量热仪(DSC)中,将试样在-10℃的氮气气氛中保持5分钟,然后以10℃/ min的速度加热。 (3)立构规整度指数{(mmmm)/(mmrr + rmmr为30以下。(3')由核磁共振(NMR)光谱确定的孔隙度含量(mmmm)为68〜73%。

    Method for producing electrode for alkali batteries

    公开(公告)号:US06641869B2

    公开(公告)日:2003-11-04

    申请号:US10084161

    申请日:2002-02-28

    IPC分类号: B05D312

    CPC分类号: H01M4/242 H01M4/30 H01M4/661

    摘要: An active material slurry 12a obtained by a mixing a powder of the active material with a binder and a solvent for the binder is heated to a predetermined temperature inside a slurry reservoir 20, and the heated active material slurry 12a is coated and adhered to an electrically conductive core body 11. The resulting body is then fed inside a drying furnace 28 to dry the coated and adhered active material slurry 12a by heating, and is rolled to a predetermined thickness by passing it through a pair of rolling rolls 29, thereby obtaining an electrode for alkaline batteries comprising an active material layer 12 on the both sides of the electrically conductive core body 11. On drying the active material slurry 12a that is coated and adhered to the electrically conductive core body 11, the transfer of the binder inside the active material slurry 12a is suppressed, such that the decrease in the amount of the binder inside the active material layer 12 in the vicinity of the electrically conductive core body 11 is prevented from occurring. Thus is obtained an electrode for alkaline batteries 10 improved in adhesion strength.

    Apparatus for determining attitude of artificial satellite
    8.
    发明授权
    Apparatus for determining attitude of artificial satellite 失效
    用于确定人造卫星姿态的装置

    公开(公告)号:US06523786B2

    公开(公告)日:2003-02-25

    申请号:US09879918

    申请日:2001-06-14

    IPC分类号: B64G136

    CPC分类号: B64G1/361 B64G2001/245

    摘要: An apparatus for determining the attitude of an artificial satellite by narrowing attitude candidates to a correct one in a short time. The apparatus has star sensors, a star catalog data base, star identification sections in each of which star images output from the star sensors are collated with a star catalog with respect to each star sensor to output a group of corresponding candidates, attitude computation sections for computing a value of an attitude candidate of the artificial satellite with respect to each corresponding candidate, an attitude updating section for updating the value of the attitude candidate on the basis of the star images output from the star sensor and the star catalog, and an attitude propagation section for computing the value of the attitude candidate at the present sampling time from the value of the attitude candidate at the preceding sampling time and the artificial satellite's angular velocity. An attitude candidate unification section for comparing and combining the values of attitude candidates into one candidate is provided in a loop including the attitude updating section and the attitude propagation section.

    摘要翻译: 一种用于通过在短时间内将姿态候选缩小到正确的姿态来确定人造卫星的姿态的装置。 该装置具有星形传感器,星型目录数据库,星型识别部分,其中从星形传感器输出的星形图像与星形传感器相关的星形目录进行整理,以输出一组相应的候选者,姿态计算部分用于 计算人造卫星相对于每个相应候选人的姿态候选的值,姿态更新部分,用于基于从星形传感器和星形目录输出的星形图像来更新姿态候选者的值,以及姿态 传播部分,用于根据前一采样时间的姿态候选值和人造卫星的角速度计算当前采样时间的姿态候选值。 在姿态更新部和姿态传播部的回路中设置用于将姿态候选的值进行比较和组合成一个候选的姿态候补统一部。

    Drawing apparatus and method of attaching balance weights
    9.
    发明授权
    Drawing apparatus and method of attaching balance weights 有权
    附着平衡重的牵引装置和方法

    公开(公告)号:US06505142B1

    公开(公告)日:2003-01-07

    申请号:US09249088

    申请日:1999-02-12

    IPC分类号: G06C2300

    CPC分类号: B41J29/38 B41J29/08

    摘要: Annular grooves are formed on both end surfaces of a recording drum to be rotated, and two balance weights are disposed inside each of the annular grooves. The balance weight is composed of a magnet, and is attracted to the end surface of the recording drum by its magnetic force. The two balance weights are arranged at a predetermined attaching angle such that an unbalance force caused by centrifugal forces developed by a plate and a movable clamp, for example, is canceled. Every time the size and the mass of the plate are changed, the positions of the two balance weights are adjusted, so that forced vibration in the recording drum is restrained.

    摘要翻译: 环形槽形成在要转动的记录鼓的两个端面上,并且在每个环形槽内设置两个平衡重。 平衡重由磁体构成,并通过其磁力被吸引到记录鼓的端面。 这两个平衡配重被布置成预定的附着角度,使得例如由板和可动夹具产生的离心力引起的不平衡力被消除。 每当板的尺寸和质量改变时,调整两个平衡重的位置,从而抑制记录鼓中的强制振动。

    Rotary cathode x-ray tube equipment
    10.
    发明授权
    Rotary cathode x-ray tube equipment 失效
    旋转阴极x射线管设备

    公开(公告)号:US5592526A

    公开(公告)日:1997-01-07

    申请号:US531872

    申请日:1995-09-21

    摘要: The rotary cathode X-ray tube equipment of the present invention is constructed so as to permit radiation of X-ray from all directions with respect to the whole circumference of a subject, and is used for x-ray CT. The equipment of the invention is constructed to prevent an X-ray radiation window 40 of a low strength from being influenced by atmospheric deformations of a vacuum vessel 1 or by machining and assembling errors, for example by using a joint portion disposed between the X-ray radiation window and an inner ring and having both a surface perpendicular to a rotational axis of a rotary member and a cylindrical surface parallel to the rotational axis, a face seal formed on the surface of the joint portion perpendicular to the rotational axis, and an axial seal formed on the cylindrical surface of the joint portion parallel to the rotational axis.

    摘要翻译: 本发明的旋转阴极X射线管设备被构造为允许相对于被摄体的整个周边从各个方向发射X射线,并且用于X射线CT。 本发明的设备被构造成防止低强度的X射线辐射窗40受到真空容器1的大气变形的影响,或者通过加工和组装误差,例如通过使用设置在X射线 并且具有垂直于旋转构件的旋转轴线的表面和平行于旋转轴线的圆柱形表面的表面,形成在垂直于旋转轴线的接合部分的表面上的面密封件,以及 形成在与旋转轴线平行的关节部分的圆柱形表面上的轴向密封。