公开(公告)号：US20090299512A1

公开(公告)日：2009-12-03

申请号：US12469716

申请日：2009-05-21

申请人： Junichi TANAKA ,  Masaru KURIHARA ,  Masaru IZAWA ,  Hiromasa ARAI ,  Yoichi NAKAHARA ,  Takahiro MARUYAMA ,  Nobuo FUJIWARA

发明人： Junichi TANAKA ,  Masaru KURIHARA ,  Masaru IZAWA ,  Hiromasa ARAI ,  Yoichi NAKAHARA ,  Takahiro MARUYAMA ,  Nobuo FUJIWARA

IPC分类号： G05B13/04 ,  G06F17/00 ,  G06N5/04

CPC分类号： G05B17/02

摘要： In the manufacturing system and the manufacturing method of a semiconductor device using a plasma treatment apparatus, a plasma treatment condition is controlled so that a desired shape is obtained after the plasma processing by using a processing shape prediction model for calculating the shape after the plasma processing from the inspection data of a wafer to be treated prior to the treatment and a response surface model for calculating the processing shape depending on a plasma treatment condition. In this configuration, the processing shape prediction model has an adjustable prediction model coefficient, and this prediction model coefficient is automatically calibrated.

摘要翻译： 在使用等离子体处理装置的半导体装置的制造系统和制造方法中，通过使用等离子体处理后的形状计算处理形状预测模型等离子体处理后，控制等离子体处理条件，从而获得期望的形状 从处理前的待处理晶片的检查数据和根据等离子体处理条件计算处理形状的响应面模型。 在该配置中，处理形状预测模型具有可调节的预测模型系数，并且该预测模型系数被自动校准。

公开(公告)号：US5402763A

公开(公告)日：1995-04-04

申请号：US796459

申请日：1991-11-22

申请人： Yoichi Saito ,  Takamitsu Kashima ,  Masaru Kurihara

发明人： Yoichi Saito ,  Takamitsu Kashima ,  Masaru Kurihara

IPC分类号： F02B1/02 ,  F02D19/08 ,  F02M31/135 ,  F02N19/00 ,  F02P5/15 ,  F02N17/04

CPC分类号： F02N19/04 ,  F02D19/0605 ,  F02D19/061 ,  F02D19/0686 ,  F02D19/084 ,  F02D19/087 ,  F02M31/135 ,  F02N19/001 ,  F02P5/1506 ,  F02B1/02 ,  F02B37/00 ,  F02D2200/0606 ,  Y02T10/126 ,  Y02T10/36 ,  Y02T10/46

摘要： It is determined whether an engine for a flexible fuel vehicle is in a start enabling state based on alcohol concentration of fuel supplied to the engine. When it is determined that the engine is in the start enabling state, a heater for vaporizing fuel is energized. Current flowing in the heater is compared with a reference current representing completion of warmup of the engine. When the current becomes smaller than the reference current, the heater is de-energized, and the fuel is injected to start the engine.

摘要翻译： 基于供给到发动机的燃料的酒精浓度，确定柔性燃料车辆的发动机是否处于起动使能状态。 当确定发动机处于启动使能状态时，用于使燃料蒸发的加热器通电。 将加热器中流动的电流与表示发动机预热完成的参考电流进行比较。 当电流变得小于参考电流时，加热器断电，并且燃料被注入以启动发动机。

公开(公告)号：US5167169A

公开(公告)日：1992-12-01

申请号：US756173

申请日：1991-09-06

申请人： Yoichi Saito ,  Takamitsu Kashima ,  Masaru Kurihara

发明人： Yoichi Saito ,  Takamitsu Kashima ,  Masaru Kurihara

IPC分类号： F16H59/74 ,  F16H61/14

CPC分类号： F16H61/143 ,  F16H59/74 ,  Y10T477/635 ,  Y10T477/65

摘要： An automatic transmission has a lockup clutch for a torque converter. Concentration of alcohol is detected by an alcohol concentration sensor. The lockup clutch is engaged at a lower vehicle speed when the alcohol concentration detected by the alcohol concentration sensor is higher than a predetermined reference value.

摘要翻译： 自动变速器具有用于变矩器的锁止离合器。 通过酒精浓度传感器检测酒精浓度。 当由酒精浓度传感器检测到的酒精浓度高于预定参考值时，锁止离合器以较低的车速接合。

公开(公告)号：US4387024A

公开(公告)日：1983-06-07

申请号：US103369

申请日：1979-12-13

申请人： Masaru Kurihara ,  Tadahiro Uemura ,  Kiyoshi Okada

发明人： Masaru Kurihara ,  Tadahiro Uemura ,  Kiyoshi Okada

IPC分类号： B01D69/12 ,  B01D71/56 ,  B01D71/60 ,  B01D31/00

CPC分类号： B01D69/125 ,  B01D71/56 ,  B01D71/60

摘要： A high performance semipermeable composite membrane containing a microporous substrate having a semipermeable membrane on the surface thereof. A composite ultrathin solute rejection barrier is formed on an intermediate transport layer which in turn is formed on a substrate.A mixture of a water soluble organic polymer having reactive amino groups in terminal and/or side chains, together with a monomer or monomeric polyamine is reacted with an agent having a polyfunctional group.

公开(公告)号：US4086215A

公开(公告)日：1978-04-25

申请号：US647138

申请日：1976-01-07

申请人： Masaru Kurihara ,  Soichi Tokizane ,  Tatsundo Tanaka ,  Masamitsu Tanimura ,  Yoichi Shimokawa

发明人： Masaru Kurihara ,  Soichi Tokizane ,  Tatsundo Tanaka ,  Masamitsu Tanimura ,  Yoichi Shimokawa

IPC分类号： B01D71/56 ,  B01D71/58 ,  B01D71/78 ,  B01D71/80 ,  B01D71/82 ,  C08L77/10 ,  C08L79/06 ,  C08G69/48

CPC分类号： B01D71/56 ,  C08K3/10

摘要： Permselective membranes are prepared by crosslinking synthetic organic polyamides or polyhydrazides having --CO.sub.2 H groups and/or --SO.sub.3 H groups with a salt of metal selected from the class consisting of alkaline earth metals, transition metals, aluminum group metals and lead group metals.The membranes are useful in separating components of fluid mixtures or solutions such as water containing dissolved salts, and are especially useful in producing pure water from saline water.

摘要翻译： 通过将具有-CO 2 H基团和/或-SO 3 H基团的合成有机聚酰胺或聚酰肼与选自碱土金属，过渡金属，铝族金属和铅族金属的金属盐交联来制备选择性渗透膜。

公开(公告)号：US07915055B2

公开(公告)日：2011-03-29

申请号：US11693776

申请日：2007-03-30

申请人： Masaru Kurihara ,  Masaru Izawa ,  Junichi Tanaka

发明人： Masaru Kurihara ,  Masaru Izawa ,  Junichi Tanaka

IPC分类号： H01L21/66 ,  G01R31/26

CPC分类号： H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention provides a manufacturing technique of a semiconductor device that reduces fluctuation of electric characteristic and a working size of a semiconductor device and can manufacture semiconductor devices at high quality and at high yield. In a semiconductor device manufacturing system, a control method for a manufacturing process of a semiconductor device having a function (a data collecting unit) of collecting examination data at a plurality of examining steps including an examining step of setting a length of a measurement region in a wiring direction to at least 10 times a wire width to measure the wire width and an examining step of examining the wire width, a function (a data analyzing unit) of generating a prediction model of electric characteristic or working size of a semiconductor device using the examination data to generate a control model from the prediction model, and a function (a process control unit) of properly controlling processing conditions for a control process based upon examination data of the plurality of examining steps in the manufacturing process of a semiconductor device and the control model is realized.

摘要翻译： 本发明提供一种能够降低半导体装置的电气特性和工作尺寸的波动的半导体装置的制造技术，能够高质量，高产率地制造半导体装置。 在半导体器件制造系统中，具有在多个检查步骤中收集检查数据的功能（数据收集单元）的半导体器件的制造过程的控制方法包括将测量区域的长度设置在 布线方向为线宽的至少10倍以测量线宽度和检查线宽度的检查步骤，产生半导体器件的电特性或工作尺寸的预测模型的功能（数据分析单元），其使用 根据预测模型生成控制模型的检查数据和根据半导体装置的制造过程中的多个检查步骤的检查数据适当地控制用于控制处理的处理条件的功能（过程控制单元），以及 实现了控制模型。

公开(公告)号：US07720632B2

公开(公告)日：2010-05-18

申请号：US12128364

申请日：2008-05-28

申请人： Masaru Kurihara ,  Masaru Izawa ,  Junichi Tanaka

发明人： Masaru Kurihara ,  Masaru Izawa ,  Junichi Tanaka

IPC分类号： G01B15/00 ,  G01N23/00

CPC分类号： H01L22/12 ,  H01J2237/2813

摘要： A dimension measuring apparatus used for measuring a dimension of a semiconductor device having a first pattern of repeated structure and a second pattern that is linear and formed on the first pattern to extend over the repeated structure. The invention includes a shape information acquisition unit which acquires information on a shape of the first pattern; a width value acquisition unit which acquires a width value of each portion of the second pattern; an analytic area setting unit, which sets a plurality of analytic areas on the second pattern; and a dimension determining unit, which extracts, for each of the set analytic areas, width values of portions included in the analytic area, and uses the extracted width values to determine a dimension of the second pattern at portions overlapping the first pattern.

摘要翻译： 一种尺寸测量装置，用于测量具有重复结构的第一图案和第二图案的半导体器件的尺寸，该第二图案是线性的并形成在第一图案上以在重复结构上延伸。 本发明包括获取关于第一图案的形状的信息的形状信息获取单元; 宽度值获取单元，其获取所述第二图案的每个部分的宽度值; 分析区域设置单元，其设置所述第二图案上的多个分析区域; 以及尺寸确定单元，其针对每个所述分析区域提取包括在所述分析区域中的部分的宽度值，并且使用所提取的宽度值来确定与所述第一图案重叠的部分处的所述第二图案的尺寸。

公开(公告)号：US5289683A

公开(公告)日：1994-03-01

申请号：US86616

申请日：1993-07-01

申请人： Masaru Kurihara

发明人： Masaru Kurihara

IPC分类号： F02B37/12 ,  F02B37/18 ,  F02D41/00

CPC分类号： F02D41/0007 ,  F02B37/18 ,  F02B37/186 ,  Y02T10/144

摘要： An automotive engine has a turbocharger, a wastegate valve for controlling flow rate of exhaust gas applied to a turbine of the turbocharger, and an actuator for controlling the wastegate valve. A standard supercharging pressure is determined dependent on characteristics of the wastegate valve, and a desired supercharging pressure is set in accordance with engine operating conditions. A difference between the desired supercharging pressure and the standard supercharging pressure is calculated, and a ratio of the difference to a detected actual supercharging pressure is calculated. From the calculated ratio, a control value applied to the actuator is calculated.

摘要翻译： 汽车发动机具有涡轮增压器，用于控制施加到涡轮增压器的涡轮机的废气的流量的废气门阀以及用于控制废气门阀的致动器。 取决于废气门阀的特性来确定标准增压压力，并且根据发动机操作条件设定所需的增压压力。 计算出期望的增压压力和标准增压压力之间的差异，并且计算该差值与检测到的实际增压压力之比。 根据计算出的比例，计算施加到致动器的控制值。

公开(公告)号：US5259950A

公开(公告)日：1993-11-09

申请号：US776267

申请日：1992-01-21

申请人： Kuniyasu Shiro ,  Yoshio Himeshima ,  Shinichi Yamada ,  Tetsuo Watanabe ,  Tadahiro Uemura ,  Masaru Kurihara

发明人： Kuniyasu Shiro ,  Yoshio Himeshima ,  Shinichi Yamada ,  Tetsuo Watanabe ,  Tadahiro Uemura ,  Masaru Kurihara

IPC分类号： B01D69/12 ,  B01D71/66 ,  B01D67/00

CPC分类号： B01D71/66 ,  B01D69/12 ,  B01D69/125

摘要： A composite membrane excelling in organic solvent resistance, heat resistance and organic vapor resistance is disclosed. The composite membrane of the present invention comprises a porous membrane including as a major constituent a polymer having a repeating unit represented by the formula (I)--Ph--S--Ph--SO.sub.2).sub.n (I)(wherein Ph represents phenyl group, n represents a natural number) and an active layer formed on said porous membrane. The composite membrane of the present invention may be used as a composite membrane for pervaporation, gas separation membrane and as a reverse osmosis membrane.

公开(公告)号：US5088350A

公开(公告)日：1992-02-18

申请号：US643569

申请日：1991-01-18

申请人： Masaru Kurihara ,  Yoichi Saito

发明人： Masaru Kurihara ,  Yoichi Saito

IPC分类号： F16H61/10 ,  F16H59/74 ,  F16H61/02

CPC分类号： F16H61/0213 ,  F16H59/74 ,  F16H61/686 ,  Y10T477/692 ,  Y10T477/693625 ,  Y10T477/6937

摘要： An automatic transmission for an alcohol engine is upshifted in accordance with one of first and second shift patterns. The transmission is upshifted at a higher vehicle speed in accordance with the first shift pattern, and the transmission is upshifted at a lower vehicle speed by the second shift pattern. Concentration of the alcohol is detected by an alcohol concentration sensor. The second shift pattern is provided when the detected alcohol concentration is higher than a reference value.

摘要翻译： 根据第一和第二换档模式之一，用于酒精发动机的自动变速器被升档。 变速器根据第一变速模式以更高的车速升档，并且变速器以较低的车速通过第二换档模式升档。 通过酒精浓度传感器检测酒精浓度。 当检测到的醇浓度高于参考值时，提供第二移位模式。