摘要:
The present invention improves the production yield of a semiconductor device having nonvolatile memory cells of a split gate structure. The level difference of a lower layer resist film with which an end of a memory mat is covered is gentled, the uniformity of the thickness of a resist intermediate layer formed over the lower layer resist film is improved, and local thickness reduction or disappearance is prevented by, after forming a silicon oxide film and a silicon nitride film over each of selective gate electrodes formed in a memory cell region of a semiconductor substrate, removing the silicon oxide film and the silicon nitride film over the selective gate electrode located on the outermost side (a dummy cell region) of the memory mat in the gate length direction.
摘要:
The present invention relates to a cell fusion chamber in which two types of cells having different diameters are fused, the cell fusion chamber including: a cell fusion region in which cell fusion is carried out; a pair of electrodes formed by a conductor and disposed opposite to each other in the cell fusion region; and a partition wall having at least one fine pore; near the fine pore, a cell fusion device including a cell fusion container containing a cell fusion region; a pair of electrodes; a spacer; and an insulator disposed between the spacer and one of the electrodes and having at least one fine pore; and an electronic power supply which applies an alternating voltage and a voltage pulsed direct current to the electrodes, and a cell fusion method using the same.
摘要:
A heat conductive cured product which can be handled even in a single layer or thin film form, can be readily attached to a heat-generating component or heat-dissipating member, and exhibits an appropriate tack and heat conductivity in a thin film form is provided as well as a method for preparing the same. A heat conductive cured product is prepared by applying a heat conductive composition as a thin film to a substrate which has been treated to have a silicone pressure-sensitive adhesive releasable surface, and curing the composition, the composition comprising as essential components, (a) an organopolysiloxane having alkenyl radicals, (b) a heat conductive filler, the filler containing at least 30 vol % of aluminum powder based on its total volume, (c) an organohydrogenpolysiloxane, (d) a platinum group metal catalyst, (e) a reaction regulator, and (f) a silicone resin.
摘要:
Carbon atoms are fed to a catalytic metal particle 10 having a atomic arrangement of triangular lattices in a round (or partly round) of a side wall, and a graphen sheet 18 having a six-membered structure reflecting the atomic arrangement of the triangular lattices is consecutively formed by the metal catalyst, whereby a tubular structure of the carbon atoms is formed. Thus, the chirality of the tubular structure can be controlled by the growth direction of the graphen sheet with respect to the direction of the triangular lattices, and the diameter of the tubular structure can be controlled by the size of the catalytic metal particle.
摘要:
There are provided a semiconductor device which can be miniaturized without being deteriorated in characteristics, and a manufacturing method thereof. The semiconductor device includes a semiconductor substrate having a main surface, a source region and a drain region formed apart from each other in the main surface, a gate electrode layer formed over the main surface sandwiched between the source region and the drain region, a first conductive layer formed so as to be in contact with the surface of the source region, and a second conductive layer formed so as to be in contact with the surface of the drain region. A recess is formed in the main surface so as to extend from the contact region between the first conductive layer and the source region through a part underlying the gate electrode layer to the contact region between the second conductive layer and the drain region.
摘要:
The cell selection apparatus includes: a cell selection vessel which has a pair of electrodes and a sheet-like insulating material having a plurality of micropores, with a recognition molecule bindable to the specific substance being disposed on a bottom face of the micropore; and a power supply, wherein the power supply includes a cell-immobilization power supply and a cell-taking power supply. The cell selection method uses the cell selection apparatus, including; introducing cells into a cell selection area; immobilizing these cells in the micropores; effecting a binding reaction between the specific substance and the recognition molecule; thereafter, taking out a cell of which the specific substance is not or is weakly bound to the recognition molecule, from the micropore; otherwise alternatively, leaving a cell of which the specific substance on the surface of the cell is strongly bound to the recognition molecule, behind in the micropore.
摘要:
A ceramic heater comprising a rod-like ceramic member in which a metallized layer is formed on at least a part of an outer surface of the ceramic member, and a tubular metal fitting in which at least a part of the ceramic member is inserted, the inner surface of the tubular metal fitting and the metallized layer being brazed through a brazing member. The ceramic member has a small diameter portion in a region which is located closer to a first end of the ceramic member than the metallized layer and which is inside the tubular metal fitting. A part of the space between the small diameter portion and the inner surface of the tubular metal fitting is filled with the brazing member, the inner surface facing to the part of the small diameter. Consequently, even under severe conditions, such as a high temperature and/or a high pressure, a highly durable brazing structure, such as the ceramic heater, including a brazed portion which has high welding reliability can be obtained.
摘要:
Carbon atoms are fed to a catalytic metal particle 10 having a atomic arrangement of triangular lattices in a round (or partly round) of a side wall, and a graphen sheet 18 having a six-membered structure reflecting the atomic arrangement of the triangular lattices is consecutively formed by the metal catalyst, whereby a tubular structure of the carbon atoms is formed. Thus, the chirality of the tubular structure can be controlled by the growth direction of the graphen sheet with respect to the direction of the triangular lattices, and the diameter of the tubular structure can be controlled by the size of the catalytic metal particle.
摘要:
The technology which can control a threshold value appropriately, adopting the material which fitted each gate electrode of the MOS structure from which a threshold value differs without making the manufacturing process complicated, and does not make remarkable diffusion to the channel region from the gate electrode is offered.The PMOS transistor has a gate electrode GP, and an N type well which confronts each other via a gate insulating film with this, and the NMOS transistor has a gate electrode GN, and an P type well which confronts each other via a gate insulating film with this. While gate electrode GN includes a polycrystalline silicon layer, gate electrode GP is provided with the laminated structure of a metal layer/polycrystalline silicon layer.
摘要:
In a semiconductor device manufacturing method of the invention, a metal film, for forming a gate electrode, is formed on a gate insulating film. Subsequently, when the metal film is processed, part of the metal film is removed by a wet etching process using a given chemical liquid.