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公开(公告)号：US08841932B2
公开(公告)日：2014-09-23
申请号：US13094604
申请日：2011-04-26
CPC分类号： G01R1/073 , G01R1/04 , G01R31/2891
摘要： A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.
摘要翻译： 用于在衬底上测试重复结构中的器件的探测器设置有探针保持板，安装在板上的探针支架和与每个支架相关联的测试探针。 每个测试探针可通过连接到探针保持器的操纵器移位，并且基底载体固定地支撑基底。 实现了在衬底上以重复结构位置的器件的测试，而不需要衬底移动并且避免相对于器件上的接触岛单独操作测试探针，因为探头保持器固定在 共用探针支架板和探头支架板相对于测试基板移动。
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公开(公告)号：US20090179658A1
公开(公告)日：2009-07-16
申请号：US12345980
申请日：2008-12-30
IPC分类号： G01R31/02
CPC分类号： G01R1/073 , G01R1/04 , G01R31/2891
摘要： A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.
摘要翻译： 用于在衬底上测试重复结构中的器件的探测器设置有探针保持板，安装在板上的探针支架和与每个支架相关联的测试探针。 每个测试探针可通过连接到探针保持器的操纵器移位，并且基底载体固定地支撑基底。 实现了在衬底上以重复结构位置的器件的测试，而不需要衬底移动并且避免相对于器件上的接触岛单独操作测试探针，因为探头保持器固定在 共用探针支架板和探头支架板相对于测试基板移动。
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公开(公告)号：US20110316574A1
公开(公告)日：2011-12-29
申请号：US13094604
申请日：2011-04-26
IPC分类号： G01R31/20
CPC分类号： G01R1/073 , G01R1/04 , G01R31/2891
摘要： A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.
摘要翻译： 用于在衬底上测试重复结构中的器件的探测器设置有探针保持板，安装在板上的探针支架和与每个支架相关联的测试探针。 每个测试探针可通过连接到探针保持器的操纵器移位，并且基底载体固定地支撑基底。 实现了在衬底上以重复结构位置的器件的测试，而不需要衬底移动并且避免相对于器件上的接触岛单独操作测试探针，因为探头保持器固定在 共用探针支架板和探头支架板相对于测试基板移动。
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公开(公告)号：US07932737B2
公开(公告)日：2011-04-26
申请号：US12345980
申请日：2008-12-30
IPC分类号： G01R31/00
CPC分类号： G01R1/073 , G01R1/04 , G01R31/2891
摘要： A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.
摘要翻译： 用于在衬底上测试重复结构中的器件的探测器设置有探针保持板，安装在板上的探针支架和与每个支架相关联的测试探针。 每个测试探针可通过连接到探针保持器的操纵器移位，并且基底载体固定地支撑基底。 实现了在衬底上以重复结构位置的器件的测试，而不需要衬底移动并且避免相对于器件上的接触岛单独操作测试探针，因为探头保持器固定在 共用探针支架板和探头支架板相对于测试基板移动。
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公开(公告)号：US07046025B2
公开(公告)日：2006-05-16
申请号：US10677178
申请日：2003-10-02
申请人： Stefan Schneidewind , Claus Dietrich , Jorg Kiesewetter , Frank-Michael Werner , Axel Schmidt , Matthias Zieger
发明人： Stefan Schneidewind , Claus Dietrich , Jorg Kiesewetter , Frank-Michael Werner , Axel Schmidt , Matthias Zieger
IPC分类号： G01R31/02
CPC分类号： G01R31/2865 , G01R31/2806 , G01R31/2831 , G01R31/2887
摘要： A test apparatuss for testing substrates at low temperatures has a chuck, which can be displaced in the working area by means of a chuck drive, the temperature of which can be controlled using heating and cooling means. The chuck has a receiving surface for receiving a test substrate and holding means for fixing a substrate carrier which receives the test substrate. Spatially and thermally defined test conditions are maintained with minimal energy and labor costs both at room temperatures and at low temperatures. This is achieved by providing a vacuum chamber which surrounds the working area of the chuck. The chuck is on one side thermally decoupled from the uncooled chuck drive and on the other side is thermally connected in a releasable manner to the test substrate. The cooled chuck and the cooled test substrate are shielded from the thermal radiation of the surrounding uncooled assemblies by means of a directly cooled thermal radiation shield.
摘要翻译： 用于在低温下测试基板的测试装置具有卡盘，该卡盘可以通过卡盘驱动器在工作区域中移动，卡盘驱动器的温度可以使用加热和冷却装置来控制。 卡盘具有用于接收测试基板的接收表面和用于固定接收测试基板的基板载体的保持装置。 空间和热定义的测试条件在室温和低温下以最小的能量和劳动成本维持。 这通过提供围绕卡盘的工作区域的真空室来实现。 卡盘在一侧与非冷却的卡盘驱动器热分离，另一侧以可释放的方式热连接到测试基板。 通过直接冷却的热辐射屏蔽将冷却的卡盘和冷却的测试基板与周围的未冷却组件的热辐射隔离。
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