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公开(公告)号：US07046025B2
公开(公告)日：2006-05-16
申请号：US10677178
申请日：2003-10-02
申请人： Stefan Schneidewind , Claus Dietrich , Jorg Kiesewetter , Frank-Michael Werner , Axel Schmidt , Matthias Zieger
发明人： Stefan Schneidewind , Claus Dietrich , Jorg Kiesewetter , Frank-Michael Werner , Axel Schmidt , Matthias Zieger
IPC分类号： G01R31/02
CPC分类号： G01R31/2865 , G01R31/2806 , G01R31/2831 , G01R31/2887
摘要： A test apparatuss for testing substrates at low temperatures has a chuck, which can be displaced in the working area by means of a chuck drive, the temperature of which can be controlled using heating and cooling means. The chuck has a receiving surface for receiving a test substrate and holding means for fixing a substrate carrier which receives the test substrate. Spatially and thermally defined test conditions are maintained with minimal energy and labor costs both at room temperatures and at low temperatures. This is achieved by providing a vacuum chamber which surrounds the working area of the chuck. The chuck is on one side thermally decoupled from the uncooled chuck drive and on the other side is thermally connected in a releasable manner to the test substrate. The cooled chuck and the cooled test substrate are shielded from the thermal radiation of the surrounding uncooled assemblies by means of a directly cooled thermal radiation shield.
摘要翻译： 用于在低温下测试基板的测试装置具有卡盘，该卡盘可以通过卡盘驱动器在工作区域中移动，卡盘驱动器的温度可以使用加热和冷却装置来控制。 卡盘具有用于接收测试基板的接收表面和用于固定接收测试基板的基板载体的保持装置。 空间和热定义的测试条件在室温和低温下以最小的能量和劳动成本维持。 这通过提供围绕卡盘的工作区域的真空室来实现。 卡盘在一侧与非冷却的卡盘驱动器热分离，另一侧以可释放的方式热连接到测试基板。 通过直接冷却的热辐射屏蔽将冷却的卡盘和冷却的测试基板与周围的未冷却组件的热辐射隔离。
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2.发明授权公开(公告)号：US07671615B2
公开(公告)日：2010-03-02
申请号：US11839899
申请日：2007-08-16
申请人： Carel van de Beek , Stefan Kreissig , Volker Hansel , Sebastian Giessmann , Frank-Michael Werner , Claus Dietrich , Jorg Kiesewetter
发明人： Carel van de Beek , Stefan Kreissig , Volker Hansel , Sebastian Giessmann , Frank-Michael Werner , Claus Dietrich , Jorg Kiesewetter
IPC分类号： G01R31/02
CPC分类号： G01R31/2874 , H01L21/67109
摘要： In a method and an apparatus for measuring temperature-controlled electronic components in a test station, a component to be measured is held and positioned using a chuck, has a temperature-controlled and directed fluid flow applied to it and is electrically contact-connected using probes and is measured. The setting of the temperature of the component to the temperature at which the measurement is intended to be carried out is effected solely using a directed fluid flow at a defined temperature.
摘要翻译： 在测试台中用于测量温度控制的电子部件的方法和装置中，使用卡盘来保持和定位要测量的部件，其中施加有受温度控制和定向的流体流动并且使用 探头并进行测量。 将组件的温度设定为要进行测量的温度仅仅使用在限定温度下的定向流体流进行。
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公开(公告)号：US20050083037A1
公开(公告)日：2005-04-21
申请号：US10928985
申请日：2004-08-27
申请人： Stefan Schneidewind , Claus Dietrich , Frank-Michael Werner , Don Feuerstein , Mike Lancaster , Denis Place
发明人： Stefan Schneidewind , Claus Dietrich , Frank-Michael Werner , Don Feuerstein , Mike Lancaster , Denis Place
CPC分类号： H01L21/67207 , H01L21/67253
摘要： Arrangement and method for testing a substrate under load with a prober are provided, by which the full productivity of the prober can be exploited. The arrangement includes a chuck, a chuck driver, control electronics, probe or probe card holding means, and has a loading means for applying a thermal, mechanical, electrical or other physical or chemical loading to the substrate. The substrate is subjected to a loading and then its properties are measured by means of the prober. The loading means is arranged as a separate subassembly separated from the prober and therein is connected to the latter via a handling system. The method provides for the substrate to be brought into operative connection with a loading means, subjected to the loading in this loading means, then removed from the loading means and tested in terms of its functions.
摘要翻译： 该装置具有仅在测试期间通过处理系统（3）连接到探测器（1）的温度控制站（2）。 温度控制站向半导体晶片施加热，机械，电气，物理或其他化学载荷，然后通过处理系统将晶片转移到探测器进行进一步测试。 在负载下测试半导体晶片的方法也包括独立权利要求。
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4.发明申请公开(公告)号：US20080042679A1
公开(公告)日：2008-02-21
申请号：US11839899
申请日：2007-08-16
申请人： Carel van de Beek , Stefan Kreissig , Volker Hansel , Sebastian Giessmann , Frank-Michael Werner , Claus Dietrich , Jorg Kiesewetter
发明人： Carel van de Beek , Stefan Kreissig , Volker Hansel , Sebastian Giessmann , Frank-Michael Werner , Claus Dietrich , Jorg Kiesewetter
IPC分类号： G01R31/02
CPC分类号： G01R31/2874 , H01L21/67109
摘要： In a method and an apparatus for measuring temperature-controlled electronic components in a test station, a component to be measured is held and positioned using a chuck, has a temperature-controlled and directed fluid flow applied to it and is electrically contact-connected using probes and is measured. The setting of the temperature of the component to the temperature at which the measurement is intended to be carried out is effected solely using a directed fluid flow at a defined temperature.
摘要翻译： 在测试台中用于测量温度控制的电子部件的方法和装置中，使用卡盘来保持和定位要测量的部件，其中施加有受温度控制和定向的流体流动并且使用 探头并进行测量。 将组件的温度设定为要进行测量的温度仅仅使用在限定温度下的定向流体流进行。
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公开(公告)号：US20050083036A1
公开(公告)日：2005-04-21
申请号：US10928975
申请日：2004-08-27
申请人： Stefan Schneidewind , Claus Dietrich , Frank-Michael Werner , Don Feuerstein , Mike Lancaster , Denis Place
发明人： Stefan Schneidewind , Claus Dietrich , Frank-Michael Werner , Don Feuerstein , Mike Lancaster , Denis Place
CPC分类号： H01L21/6719 , H01L21/67173
摘要： An apparatus for testing substrates reduces the area required and the costs which arise with the testing of substrates, in particular semiconductor wafers, during the production process. The apparatus includes testing arrangements comprising a chuck, a chuck drive, control electronics, probe or probe board holding means with a handling system, a substrate magazine station and an alignment station. The testing arrangements include at least two testing arrangements, both of which are all jointly operatively connected to the handling system, the substrate magazine station and the alignment station.
摘要翻译： 用于测试衬底的装置减少了在制造过程中通过测试衬底，特别是半导体晶片所需的面积和成本。 该装置包括测试装置，其包括卡盘，卡盘驱动器，控制电子装置，具有处理系统的探针板或探针板保持装置，基板杂志站和对准站。 测试装置包括至少两个测试装置，这两个测试装置都共同操作地连接到处理系统，基板仓库站和对准站。
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公开(公告)号：US07196507B2
公开(公告)日：2007-03-27
申请号：US10928975
申请日：2004-08-27
申请人： Stefan Schneidewind , Claus Dietrich , Frank-Michael Werner , Don Feuerstein , Mike Lancaster , Denis Place
发明人： Stefan Schneidewind , Claus Dietrich , Frank-Michael Werner , Don Feuerstein , Mike Lancaster , Denis Place
IPC分类号： G01R31/28
CPC分类号： H01L21/6719 , H01L21/67173
摘要： An apparatus for testing substrates reduces the area required and the costs which arise with the testing of substrates, in particular semiconductor wafers, during the production process. The apparatus includes testing arrangements comprising a chuck, a chuck drive, control electronics, probe or probe board holding means with a handling system, a substrate magazine station and an alignment station. The testing arrangements include at least two testing arrangements, both of which are all jointly operatively connected to the handling system, the substrate magazine station and the alignment station.
摘要翻译： 用于测试衬底的装置减少了在制造过程中通过测试衬底，特别是半导体晶片所需的面积和成本。 该装置包括测试装置，其包括卡盘，卡盘驱动器，控制电子装置，具有处理系统的探针板或探针板保持装置，基板杂志站和对准站。 测试装置包括至少两个测试装置，这两个测试装置都共同操作地连接到处理系统，基板仓库站和对准站。
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公开(公告)号：US07932737B2
公开(公告)日：2011-04-26
申请号：US12345980
申请日：2008-12-30
IPC分类号： G01R31/00
CPC分类号： G01R1/073 , G01R1/04 , G01R31/2891
摘要： A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.
摘要翻译： 用于在衬底上测试重复结构中的器件的探测器设置有探针保持板，安装在板上的探针支架和与每个支架相关联的测试探针。 每个测试探针可通过连接到探针保持器的操纵器移位，并且基底载体固定地支撑基底。 实现了在衬底上以重复结构位置的器件的测试，而不需要衬底移动并且避免相对于器件上的接触岛单独操作测试探针，因为探头保持器固定在 共用探针支架板和探头支架板相对于测试基板移动。
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公开(公告)号：US08841932B2
公开(公告)日：2014-09-23
申请号：US13094604
申请日：2011-04-26
CPC分类号： G01R1/073 , G01R1/04 , G01R31/2891
摘要： A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.
摘要翻译： 用于在衬底上测试重复结构中的器件的探测器设置有探针保持板，安装在板上的探针支架和与每个支架相关联的测试探针。 每个测试探针可通过连接到探针保持器的操纵器移位，并且基底载体固定地支撑基底。 实现了在衬底上以重复结构位置的器件的测试，而不需要衬底移动并且避免相对于器件上的接触岛单独操作测试探针，因为探头保持器固定在 共用探针支架板和探头支架板相对于测试基板移动。
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