Methods of fabricating silicon carbide devices having smooth channels
    2.
    发明授权
    Methods of fabricating silicon carbide devices having smooth channels 有权
    制造具有平滑通道的碳化硅器件的方法

    公开(公告)号:US07528040B2

    公开(公告)日:2009-05-05

    申请号:US11136057

    申请日:2005-05-24

    IPC分类号: H01L21/336

    摘要: Methods of forming silicon carbide power devices are provided. An n− silicon carbide layer is provided on a silicon carbide substrate. A p-type silicon carbide well region is provided on the n− silicon carbide layer. A buried region of p+ silicon carbide is provided on the p-type silicon carbide well region. An n+ region of silicon carbide is provided on the buried region of p+ silicon carbide. A channel region of the power device is adjacent the buried region of p+ silicon carbide and the n+ region of silicon carbide. An n− region is provided on the channel region and a portion of the n− region is removed from the channel region so that a portion of the n− region remains on the channel region to provide a reduction in a surface roughness of the channel region.

    摘要翻译: 提供了形成碳化硅功率器件的方法。 在碳化硅衬底上设置n碳化硅层。 在n碳化硅层上设置p型碳化硅阱区。 在p型碳化硅阱区域上设置p +碳化硅的掩埋区域。 在p +碳化硅的掩埋区域上设置碳化硅的n +区域。 功率器件的沟道区域邻近p +碳化硅的掩埋区域和碳化硅的n +区域。 n沟道区域设置在沟道区域上,并且n沟道区域的一部分被从沟道区域去除,使得n区域的一部分保留在沟道区上,以提供沟道区域的表面粗糙度的降低 。

    Methods of fabricating silicon carbide devices having smooth channels
    3.
    发明申请
    Methods of fabricating silicon carbide devices having smooth channels 有权
    制造具有平滑通道的碳化硅器件的方法

    公开(公告)号:US20060270103A1

    公开(公告)日:2006-11-30

    申请号:US11136057

    申请日:2005-05-24

    IPC分类号: H01L21/00 H01L21/336

    摘要: Methods of forming silicon carbide power devices are provided. An n− silicon carbide layer is provided on a silicon carbide substrate. A p-type silicon carbide well region is provided on the n− silicon carbide layer. A buried region of p+ silicon carbide is provided on the p-type silicon carbide well region. An n+ region of silicon carbide is provided on the buried region of p+ silicon carbide. A channel region of the power device is adjacent the buried region of p+ silicon carbide and the n+ region of silicon carbide. An n− region is provided on the channel region and a portion of the n− region is removed from the channel region so that a portion of the n− region remains on the channel region to provide a reduction in a surface roughness of the channel region.

    摘要翻译: 提供了形成碳化硅功率器件的方法。 在碳化硅衬底上设置n碳化硅层。 在n碳化硅层上设置p型碳化硅阱区。 在p型碳化硅阱区域上设置有碳化硅的掩埋区域。 碳化硅的n + SUP区域设置在碳化硅的掩埋区域上。 功率器件的沟道区域与碳化硅的碳化硅的掩埋区域和碳化硅的n + SUP区域相邻。 在通道区域上提供n + SUP区域,并且从通道区域去除n区域的一部分,使得n + / SUP>区域保留在沟道区域上以提供沟道区域的表面粗糙度的降低。

    Method of manufacturing carrier wafer and resulting carrier wafer structures
    4.
    发明申请
    Method of manufacturing carrier wafer and resulting carrier wafer structures 有权
    制造载体晶片和所得载体晶片结构的方法

    公开(公告)号:US20060057850A1

    公开(公告)日:2006-03-16

    申请号:US11223298

    申请日:2005-09-09

    IPC分类号: H01L21/302 H01L21/461

    摘要: A method is disclosed for preparing carrier wafers for semiconductor device manufacture. The method includes the steps of sorting a plurality of standard carrier wafer blanks into batches by thickness to define a batch of starting carrier wafers that are within a predetermined tolerance of one another, reducing the thickness of the sorted carrier wafers to within 10 microns of a final target thickness, and polishing the sorted carrier wafers to the final target thickness. The polished carrier wafers are mounted to device precursor wafers having at least one semiconductor epitaxial layer on a substrate by joining one surface of a carrier wafer to the epitaxial layer on a substrate. The thickness of the device precursor wafer is then reduced by removing material from the device precursor substrate opposite the joined epitaxial layer.

    摘要翻译: 公开了一种用于制备用于半导体器件制造的载体晶片的方法。 该方法包括以下步骤:将多个标准载体晶片坯料按厚度分批分批以限定彼此之间的预定公差内的一批起始载体晶片,将分选的载体晶片的厚度减小到10微米以内 最终目标厚度,并将分选的载体晶片抛光到最终目标厚度。 抛光的载体晶片通过将载体晶片的一个表面连接到衬底上的外延层而安装到在衬底上具有至少一个半导体外延层的器件前体晶片。 然后通过从与所接合的外延层相对的器件前体衬底去除材料来减小器件前体晶片的厚度。

    Methods of fabricating silicon carbide devices having smooth channels
    8.
    发明授权
    Methods of fabricating silicon carbide devices having smooth channels 有权
    制造具有平滑通道的碳化硅器件的方法

    公开(公告)号:US08859366B2

    公开(公告)日:2014-10-14

    申请号:US13470600

    申请日:2012-05-14

    摘要: Methods of forming silicon carbide power devices are provided. An n− silicon carbide layer is provided on a silicon carbide substrate. A p-type silicon carbide well region is provided on the n− silicon carbide layer. A buried region of p+ silicon carbide is provided on the p-type silicon carbide well region. An n+ region of silicon carbide is provided on the buried region of p+ silicon carbide. A channel region of the power device is adjacent the buried region of p+ silicon carbide and the n+ region of silicon carbide. An n− region is provided on the channel region and a portion of the n− region is removed from the channel region so that a portion of the n− region remains on the channel region to provide a reduction in a surface roughness of the channel region.

    摘要翻译: 提供了形成碳化硅功率器件的方法。 在碳化硅衬底上设置n碳化硅层。 在n碳化硅层上设置p型碳化硅阱区。 在p型碳化硅阱区域上设置p +碳化硅的掩埋区域。 在p +碳化硅的掩埋区域上设置碳化硅的n +区域。 功率器件的沟道区域邻近p +碳化硅的掩埋区域和碳化硅的n +区域。 n沟道区域设置在沟道区域上,并且n沟道区域的一部分被从沟道区域去除,使得n区域的一部分保留在沟道区上,以提供沟道区域的表面粗糙度的降低 。

    Methods of Fabricating Silicon Carbide Devices Having Smooth Channels and Related Devices
    9.
    发明申请
    Methods of Fabricating Silicon Carbide Devices Having Smooth Channels and Related Devices 有权
    制造具有平滑通道和相关器件的碳化硅器件的方法

    公开(公告)号:US20120228638A1

    公开(公告)日:2012-09-13

    申请号:US13470600

    申请日:2012-05-14

    IPC分类号: H01L29/161 H01L21/20

    摘要: Methods of forming silicon carbide power devices are provided. An n− silicon carbide layer is provided on a silicon carbide substrate. A p-type silicon carbide well region is provided on the n− silicon carbide layer. A buried region of p+ silicon carbide is provided on the p-type silicon carbide well region. An n+ region of silicon carbide is provided on the buried region of p+ silicon carbide. A channel region of the power device is adjacent the buried region of p+ silicon carbide and the n+ region of silicon carbide. An n− region is provided on the channel region and a portion of the n− region is removed from the channel region so that a portion of the n− region remains on the channel region to provide a reduction in a surface roughness of the channel region.

    摘要翻译: 提供了形成碳化硅功率器件的方法。 在碳化硅衬底上设置n碳化硅层。 在n碳化硅层上设置p型碳化硅阱区。 在p型碳化硅阱区域上设置p +碳化硅的掩埋区域。 在p +碳化硅的掩埋区域上设置碳化硅的n +区域。 功率器件的沟道区域邻近p +碳化硅的掩埋区域和碳化硅的n +区域。 n沟道区域设置在沟道区域上,并且n沟道区域的一部分被从沟道区域去除,使得n区域的一部分保留在沟道区上,以提供沟道区域的表面粗糙度的降低 。

    Silicon Carbide Devices Having Smooth Channels
    10.
    发明申请
    Silicon Carbide Devices Having Smooth Channels 有权
    具有平滑通道的碳化硅器件

    公开(公告)号:US20090261351A1

    公开(公告)日:2009-10-22

    申请号:US12424960

    申请日:2009-04-16

    IPC分类号: H01L29/24

    摘要: Power devices are provided including a p-type conductivity well region and a buried p+ conductivity region in the p-type conductivity well region. An n+ conductivity region is provided on the buried p+ conductivity region. A channel region of the power device is provided adjacent the buried p+ conductivity region and n+ conductivity region, the channel region of the power device having a root mean square (RMS) surface roughness of less than about 1.0 Å.

    摘要翻译: 提供功率器件,其包括p型导电性阱区域和p型导电性阱区域中的掩埋p +导电性区域。 在掩埋的p +电导率区域上设置n +电导率区域。 功率器件的沟道区域邻近掩埋的p +导电区域和n +导电区域设置,功率器件的沟道区域的均方根(RMS)表面粗糙度小于约。