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公开(公告)号：US20140284475A1
公开(公告)日：2014-09-25
申请号：US14258004
申请日：2014-04-21
IPC分类号： H01J37/26
CPC分类号： H01J37/263 , H01J37/153 , H01J37/26 , H01J37/261 , H01J2237/2614 , H01J2237/262
摘要： A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. A specimen holder is provided to hold a specimen in the path of the electron beam. A detector is used to detect the electron beam transmitted through the specimen. The transmission electron microscope may be adapted to generate two or more images that are substantially incoherently related to one another, store the images, and combine amplitude signals at corresponding pixels of the respective images to improve a signal-to-noise ratio. Alternatively or in addition, the transmission electron microscope may be adapted to operate the specimen holder to move the specimen in relation to the beam optics during exposure or between exposures to operate the transmission electron microscope in an incoherent mode.
摘要翻译： 透射电子显微镜包括用于产生电子束的电子束源。 光束被提供以会聚电子束。 提供试样保持器以将样品保持在电子束的路径中。 检测器用于检测透过样品的电子束。 透射电子显微镜可以适于产生彼此基本上不相干的两个或更多个图像，存储图像，并将各个图像的相应像素处的振幅信号组合以提高信噪比。 或者或另外，透射电子显微镜可以适于操作样本保持器以在曝光期间或在曝光之间相对于光束光学元件移动样本，以以非相干模式操作透射电子显微镜。
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公开(公告)号：US12094684B1
公开(公告)日：2024-09-17
申请号：US16532459
申请日：2019-08-05
申请人： Mochii, Inc.
IPC分类号： H01J37/28 , G01N23/2252 , H01J37/153 , H01J37/285
CPC分类号： H01J37/28 , G01N23/2252 , H01J37/153 , H01J37/285 , H01J2237/221 , H01J2237/2482 , H01J2237/2807
摘要： A compact charged-particle-beam microscope, weighing less than about 50 kg and having a size of less than about 1 m×1 m×1 m, is provided for imaging a sample. The microscope has a vacuum chamber to maintain a low-pressure environment, a stage to hold a sample in the vacuum chamber, a charged-particle beam source to generate a charged-particle beam, charged-particle beam optics to converge the charged-particle beam onto the sample, and one or more beam scanners to scan the charged-particle beam across the sample. A charged-particle detector is provided to detect charged-particle radiation emanating from the sample and generate a corresponding charged-particle-detection signal. At least one energy dispersive x-ray spectrometer (EDS) is provided to detect x-rays emanating from the sample and generate a corresponding x-ray-detection signal. A controller analyzes the charged-particle-detection signal and the x-ray-detection signal to generate an image of the sample and a histogram of x-ray energies for at least a portion of the sample.
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公开(公告)号：US08748818B2
公开(公告)日：2014-06-10
申请号：US13759029
申请日：2013-02-04
申请人： Mochii, Inc.
CPC分类号： H01J37/263 , H01J37/153 , H01J37/26 , H01J37/261 , H01J2237/2614 , H01J2237/262
摘要： A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. An aberration corrector corrects the electron beam for at least a spherical aberration. A specimen holder is provided to hold a specimen in the path of the electron beam. A detector is used to detect the electron beam transmitted through the specimen. The transmission electron microscope may operate in an incoherent mode and may be used to locate a sequence of objects on a molecule.
摘要翻译： 透射电子显微镜包括用于产生电子束的电子束源。 光束被提供以会聚电子束。 像差校正器校正至少球面像差的电子束。 提供试样保持器以将样品保持在电子束的路径中。 检测器用于检测透过样品的电子束。 透射电子显微镜可以以非相干模式操作，并且可以用于在分子上定位物体的序列。
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公开(公告)号：US08569694B2
公开(公告)日：2013-10-29
申请号：US13657843
申请日：2012-10-22
申请人： Mochii, Inc.
CPC分类号： H01J37/153 , H01J37/26 , H01J2237/2614 , H01J2237/262
摘要： A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. An aberration corrector comprising either a foil or a set of concentric elements corrects the electron beam for at least a spherical aberration. A specimen holder is provided to hold a specimen in the path of the electron beam. A detector is used to detect the electron beam transmitted through the specimen. The transmission electron microscope may be configured to operate in a dark-field mode in which a zero beam of the electron beam is not detected. The microscope may also be capable of operating in an incoherent illumination mode.
摘要翻译： 透射电子显微镜包括用于产生电子束的电子束源。 光束被提供以会聚电子束。 包括箔或一组同心元件的像差校正器校正至少球面像差的电子束。 提供试样保持器以将样品保持在电子束的路径中。 检测器用于检测透过样品的电子束。 透射电子显微镜可以被配置为在没有检测到电子束的零光束的暗场模式下操作。 显微镜也可能能够以非相干照明模式操作。
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公开(公告)号：US20190287759A1
公开(公告)日：2019-09-19
申请号：US15339922
申请日：2016-10-31
IPC分类号： H01J37/28 , H01J37/20 , H01J37/06 , H01J37/147 , H01J37/244 , H01J37/22
摘要： A transmission electron microscope is provided for imaging a sample. The microscope has a stage to hold a sample and an electron beam column to direct an electron beam onto a field of view on the sample. The electron beam column includes an electron beam source to generate an electron beam, and electron beam optics to converge the electron beam onto a field of view on the sample. The microscope also has a beam scanner to scan the electron beam across multiple fields of view on the sample. The microscope additionally has a detector to detect radiation emanating from the sample to generate an image. A controller is provided to analyze the detected radiation to generate an image of the sample.
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公开(公告)号：US20130043387A1
公开(公告)日：2013-02-21
申请号：US13657843
申请日：2012-10-22
IPC分类号： H01J37/26
CPC分类号： H01J37/153 , H01J37/26 , H01J2237/2614 , H01J2237/262
摘要： A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. An aberration corrector comprising either a foil or a set of concentric elements corrects the electron beam for at least a spherical aberration. A specimen holder is provided to hold a specimen in the path of the electron beam. A detector is used to detect the electron beam transmitted through the specimen. The transmission electron microscope may be configured to operate in a dark-field mode in which a zero beam of the electron beam is not detected. The microscope may also be capable of operating in an incoherent illumination mode.
摘要翻译： 透射电子显微镜包括用于产生电子束的电子束源。 光束被提供以会聚电子束。 包括箔或一组同心元件的像差校正器校正至少球面像差的电子束。 提供试样保持器以将样品保持在电子束的路径中。 检测器用于检测透过样品的电子束。 透射电子显微镜可以被配置为在没有检测到电子束的零光束的暗场模式下操作。 显微镜也可能能够以非相干照明模式操作。
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公开(公告)号：US09997331B1
公开(公告)日：2018-06-12
申请号：US14607079
申请日：2015-01-28
申请人： Mochii, Inc.
CPC分类号： H01J37/28 , H01J37/16 , H01J37/18 , H01J2237/18 , H01J2237/2802 , H01J2237/2812
摘要： A charged-particle beam microscope includes a charged-particle beam source to generate a charged-particle beam. A stage is provided to hold a sample in the path of the charged-particle beam. Beam optics are provided to illuminate the sample with the charged-particle beam. One or more detectors are provided to detect radiation emanating from the sample as a result of the illumination. A controller may control one or more of the beam optics, stage, and detectors to generate an image of the sample based on the detected radiation.
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公开(公告)号：US20140054458A1
公开(公告)日：2014-02-27
申请号：US14071614
申请日：2013-11-04
IPC分类号： H01J37/26
CPC分类号： H01J37/261 , C12Q1/6869 , H01J2237/248 , H01J2237/2802 , Y10S430/143 , C12Q2565/601 , C12Q2565/607
摘要： A scanning transmission electron microscope for imaging a specimen includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. A stage is provided to hold a specimen in the path of the electron beam. A beam scanner scans the electron beam across the specimen. A controller may define one or more scanning areas corresponding to locations of the specimen, and control one or more of the beam scanner and stage to selectively scan the electron beam in the scanning areas. A detector is provided to detect electrons transmitted through the specimen to generate an image. The controller may generate a sub-image for each of the scanning areas, and stitch together the sub-images for the scanning areas to generate a stitched-together image. The controller may also analyze the stitched-together image to determine information regarding the specimen.
摘要翻译： 用于对样本进行成像的扫描透射电子显微镜包括产生电子束的电子束源。 光束被提供以会聚电子束。 提供了一个台架以将样本保持在电子束的路径中。 光束扫描器扫描穿过样品的电子束。 控制器可以定义与样本的位置相对应的一个或多个扫描区域，并且控制一个或多个光束扫描器和平台以选择性扫描扫描区域中的电子束。 提供检测器以检测通过样本传输的电子以产生图像。 控制器可以为每个扫描区域生成子图像，并且将扫描区域的子图像拼接在一起以生成拼接图像。 控制器还可以分析缝合在一起的图像以确定关于样本的信息。
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公开(公告)号：US20130146764A1
公开(公告)日：2013-06-13
申请号：US13759029
申请日：2013-02-04
IPC分类号： H01J37/26
CPC分类号： H01J37/263 , H01J37/153 , H01J37/26 , H01J37/261 , H01J2237/2614 , H01J2237/262
摘要： A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. An aberration corrector corrects the electron beam for at least a spherical aberration. A specimen holder is provided to hold a specimen in the path of the electron beam. A detector is used to detect the electron beam transmitted through the specimen. The transmission electron microscope may operate in an incoherent mode and may be used to locate a sequence of objects on a molecule.
摘要翻译： 透射电子显微镜包括用于产生电子束的电子束源。 光束被提供以会聚电子束。 像差校正器校正至少球面像差的电子束。 提供试样保持器以将样品保持在电子束的路径中。 检测器用于检测透过样品的电子束。 透射电子显微镜可以以非相干模式操作，并且可以用于在分子上定位物体的序列。
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公开(公告)号：US11850620B1
公开(公告)日：2023-12-26
申请号：US16702474
申请日：2019-12-03
申请人： Mochii, Inc.
摘要： A coater is provided for depositing a coating onto a sequence of samples to be analyzed in a microscope. The coater includes a process chamber to maintain a low-pressure vacuum or controlled gaseous environment at a deposition region inside the process chamber, a sample conveyor to support and convey samples through the deposition region, an evaporant supply to vaporize material from an evaporant source onto the samples at the deposition region, and a controller to control one or more operations of the coater.
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