Reactive Sputtering of ZnS(O,H) and InS(O,H) for Use as a Buffer Layer
    1.
    发明申请
    Reactive Sputtering of ZnS(O,H) and InS(O,H) for Use as a Buffer Layer 审中-公开
    ZnS(O,H)和InS(O,H)的反应性溅射用作缓冲层

    公开(公告)号:US20130160831A1

    公开(公告)日:2013-06-27

    申请号:US13334296

    申请日:2011-12-22

    摘要: A method of manufacturing a solar cell including providing a substrate, depositing a first electrode over the substrate and depositing at least one p-type semiconductor absorber layer over the first electrode. The p-type semiconductor absorber layer comprises a copper indium selenide (CIS) based alloy material. The method also includes depositing by reactive sputtering an n-type In-VI semiconductor layer over the at least one p-type semiconductor absorber layer and depositing a second electrode over the n-type In-VI semiconductor layer.

    摘要翻译: 一种制造太阳能电池的方法,包括提供衬底,在衬底上沉积第一电极并在第一电极上沉积至少一个p型半导体吸收体层。 p型半导体吸收层包括基于铜铟硒(CIS)的合金材料。 该方法还包括通过反应溅射沉积在至少一个p型半导体吸收层上的n型In-VI半导体层,并在n型In-VI半导体层上沉积第二电极。

    Filter circuit for a magnetron deposition source
    5.
    发明授权
    Filter circuit for a magnetron deposition source 有权
    用于磁控管沉积源的滤波电路

    公开(公告)号:US09103026B1

    公开(公告)日:2015-08-11

    申请号:US13277441

    申请日:2011-10-20

    IPC分类号: C23C14/34 C23C14/35 H01J37/34

    摘要: A magnetron sputtering system comprising a vacuum processing chamber having a chamber shield, a magnetron assembly, and a substrate, the magnetron assembly comprising a permanent magnetic assembly and an electromagnetic coil assembly, a first impedance circuit coupled between a power supply and the electromagnetic coil assembly, the first impedance circuit comprising a first resistor and a first capacitor, and a second impedance circuit having a second resistor and a second capacitor, and coupled between the substrate and a susceptor.

    摘要翻译: 一种磁控溅射系统,包括具有室屏蔽,磁控管组件和基板的真空处理室,所述磁控管组件包括永久磁组件和电磁线圈组件,第一阻抗电路耦合在电源和电磁线圈组件之间 所述第一阻抗电路包括第一电阻器和第一电容器,以及具有第二电阻器和第二电容器的第二阻抗电路,并且耦合在所述基板和基座之间。