Electrical Connector, Electrical Connection System and Lithographic Apparatus
    1.
    发明申请
    Electrical Connector, Electrical Connection System and Lithographic Apparatus 有权
    电气连接器,电气连接系统和平版印刷设备

    公开(公告)号:US20120024585A1

    公开(公告)日:2012-02-02

    申请号:US13178369

    申请日:2011-07-07

    IPC分类号: H05K1/11 H05K1/00

    摘要: An electrical connector comprises a high voltage pad and a high voltage plate. When connected to another electrical connector, the two plates, which are at the same voltage as the pads, form a region of high voltage in which the field is low. The pads are positioned in that region. An electrostatic clamp of an EUV lithographic apparatus may have such a pad and plate, for connecting to the electrical connector. By placing the interconnection in a low field region, triple points (points of contact between a conductor, a solid insulator and a gas) may be present in that region.

    摘要翻译: 电连接器包括高压焊盘和高压板。 当连接到另一个电连接器时,与焊盘处于相同电压的两个板形成场中低电压的区域。 垫位于该区域。 EUV光刻设备的静电夹具可以具有用于连接到电连接器的垫和板。 通过将互连置于低场区域中,可以在该区域中存在三个点(导体,固体绝缘体和气体之间的接触点)。

    Vacuum device having a getter device
    2.
    发明授权
    Vacuum device having a getter device 失效
    具有吸气装置的真空装置

    公开(公告)号:US6071080A

    公开(公告)日:2000-06-06

    申请号:US879168

    申请日:1997-06-19

    CPC分类号: H01J7/186 H01J29/94

    摘要: A vacuum device has an envelope and a getter assembly mounted within the envelope. The getter assembly includes a reservoir for containing getter material and a deflector having a surface located opposite the getter material and is oriented to deflect the getter material in a predetermined direction within the vacuum device. The deflector surface has raised and/or depressed portions, such as ribs or undulations, in the direction of diffusion of the getter material. These portions reduce the accumulation of getter material on the deflector during getterfiring, resulting in a much reduced likelihood that getter material particles may break loose from the deflector. By preventing loose particles within the vacuum device, the possibility of a short-circuit in the vacuum device is reduced.

    摘要翻译: 真空装置具有外壳和安装在外壳内的吸气组件。 吸气剂组件包括用于容纳吸气剂材料的储存器和具有与吸气剂材料相对的表面的偏转器,并且定向成使吸气剂材料在真空装置内沿预定方向偏转。 偏转器表面在吸气材料的扩散方向上具有凸起和/或凹陷部分,例如肋或起伏。 这些部分在吸气过程中减少吸气剂材料在导流板上的积聚,导致吸气剂材料颗粒可能从偏转器松动的可能性大大降低。 通过防止真空装置内的松散颗粒,真空装置中短路的可能性降低。

    Color selection electrode implementing a temperature based tension reduction of a shadow mask
    3.
    发明授权
    Color selection electrode implementing a temperature based tension reduction of a shadow mask 失效
    实现荫罩基于温度的张力减小的选色电极

    公开(公告)号:US06686684B2

    公开(公告)日:2004-02-03

    申请号:US09914087

    申请日:2001-08-22

    IPC分类号: H01J2907

    摘要: A cathode ray tube comprises a color selection electrode with a shadow mask fixed to a frame and put under tension. The frame comprises a bimetal element (or bimetal elements) which are constructed such that at a raised temperature the tension is released by reducing the distance between sides of the frame to which the mask is attached. The reduction in distance at the center of the sides exceeds, preferably by a factor 1.5 to 3, the reduction in distance at the corners of said sides.

    摘要翻译: 阴极射线管包括一个具有固定在框架上并处于张力下的荫罩的选色电极。 框架包括双金属元件(或双金属元件),其被构造成使得在升高的温度下通过减小与所述掩模附接到的框架的侧面之间的距离来释放张力。 在侧面的中心处的距离的减小优选地超过所述边缘的角落处的距离的减小,优选地为1.5至3倍。

    Cathode ray tube provided with an electron gun, and electrostatic lens system
    5.
    发明授权
    Cathode ray tube provided with an electron gun, and electrostatic lens system 失效
    阴极射线管配有电子枪和静电透镜系统

    公开(公告)号:US06259195B1

    公开(公告)日:2001-07-10

    申请号:US08518062

    申请日:1995-08-22

    IPC分类号: H01J2951

    CPC分类号: H01J29/485

    摘要: A cathode ray tube includes an electron gun having a beam-shaping portion (20) for generating electron beams (7-9), a prefocusing system (30) of electrodes (31, 32) across which a prefocusing voltage is supplied during operation so as to form an electron-optical prefocusing lens, and a main lens system (40) of electrodes (32, 41) across which a main lens voltage is applied during operation so as to form an electron-optical main lens. The electrodes (31, 32, 41) are provided with securing means (48) for connection to an insulating supporting body (47) and with apertures (16) for passing the electron beams (7-9). Electrode (32) protrudes toward electrode (31) in such a way that the mutual distance (l2) between the two electrodes at the location of the apertures (16) therein is smaller than their mutual distance (l1) at the location of their respective securing means (48). The two electrodes (31, 32) are spaced apart at the location of the apertures (16) substantially at a distance limited by electrostatic breakdown.

    摘要翻译: 阴极射线管包括具有用于产生电子束(7-9)的光束成形部分(20)的电子枪,电极(31,32)的预聚焦系统(30),在操作期间通过其提供预聚焦电压 为了形成电子 - 光学预聚焦透镜,以及在操作期间施加主透镜电压以形成电子 - 光学主透镜的电极(32,41)的主透镜系统(40)。 电极(31,32,31)设置有用于连接到绝缘支撑体(47)的固定装置(48)和用于通过电子束(7-9)的孔(16)。 电极(32)朝向电极(31)突出,使得在其中的孔(16)的位置处的两个电极之间的相互距离(12)小于它们各自的位置处的相互距离(l1) 固定装置(48)。 两个电极(31,32)在孔(16)的位置处基本上以静电击穿限制的距离间隔开。

    Picture display device provided with an electron gun, and electron gun
for use in such a device
    6.
    发明授权
    Picture display device provided with an electron gun, and electron gun for use in such a device 失效
    设置有电子枪的图像显示装置和用于这种装置的电子枪

    公开(公告)号:US5668448A

    公开(公告)日:1997-09-16

    申请号:US518060

    申请日:1995-08-22

    摘要: A picture display device comprises an evacuated envelope and is provided at a first side with an electroluminescent display screen and at an opposite side with an electron gun (6). Between the electron gun (6) and the display screen, the device comprises deflection means with which an electron beam generated by the electron gun (6) can be deflected during operation. The electron gun (6) has at least an electron beam-generating portion (20) and is provided with a main lens system (40) having a first electrode (41), a final electrode (45) and at least one intermediate electrode (42-44) across which a main lens voltage is gradually applied step-wise during operation so as to form an electron-optical main focusing lens. The gun is further provided with means for presenting a dynamic potential (V.sub.d) to at least an electrode (41) of the main lens system (40), which is the first electrode viewed in the direction of propagation of the electron beam (7-9). For an increased dynamic focusing, a coupling capacitor (50) is arranged at least between said first electrode (41) and the subsequent electrode (42) of the main lens system (40).

    摘要翻译: 图像显示装置包括真空外壳,并且在第一侧设置有电致发光显示屏,并且在与电子枪(6)相对的一侧。 在电子枪(6)和显示屏之间,该装置包括偏转装置,在操作期间由电子枪(6)产生的电子束可以偏转。 电子枪(6)至少具有电子束产生部分(20),并且具有主透镜系统(40),其具有第一电极(41),最终电极(45)和至少一个中间电极 42-44),在操作期间逐步地施加主透镜电压以形成电子 - 光学主聚焦透镜。 枪还具有用于向主透镜系统(40)的至少一个电极(41)呈现动态电位(Vd)的装置,该主透镜系统(40)是从电子束(7- 9)。 对于增加的动态聚焦,耦合电容器(50)至少设置在主透镜系统(40)的所述第一电极(41)和后续电极(42)之间。

    Color display tube having asymmetric deflection electrodes
    8.
    发明授权
    Color display tube having asymmetric deflection electrodes 失效
    具有不对称偏转电极的彩色显像管

    公开(公告)号:US4950949A

    公开(公告)日:1990-08-21

    申请号:US255188

    申请日:1988-10-07

    CPC分类号: H01J29/74 H01J31/126

    摘要: A color display tube which comprises a display window and a phosphor pattern provided on the display window, an emission system for producing a pattern of juxtaposed rows of electron beams correlated with the phosphor pattern, an array of strip-shaped deflection electrodes situated between the emission system and the display screen for deflecting electron beams, each deflection electrode extending between adjacent rows of the emission pattern, alternate deflection electrodes being a commonly connected first group, and the remaining deflection electrodes being a commonly connected second group, is characterized in that the deflection electrodes extend asymmetrically with respect to the rows of electron beams.

    Electrical connector, electrical connection system and lithographic apparatus
    9.
    发明授权
    Electrical connector, electrical connection system and lithographic apparatus 有权
    电气连接器,电气连接系统和光刻设备

    公开(公告)号:US08704104B2

    公开(公告)日:2014-04-22

    申请号:US13178369

    申请日:2011-07-07

    IPC分类号: H05K1/11

    摘要: An electrical connector comprises a high voltage pad and a high voltage plate. When connected to another electrical connector, the two plates, which are at the same voltage as the pads, form a region of high voltage in which the field is low. The pads are positioned in that region. An electrostatic clamp of an EUV lithographic apparatus may have such a pad and plate, for connecting to the electrical connector. By placing the interconnection in a low field region, triple points (points of contact between a conductor, a solid insulator and a gas) may be present in that region.

    摘要翻译: 电连接器包括高压焊盘和高压板。 当连接到另一个电连接器时,与焊盘处于相同电压的两个板形成场中低电压的区域。 垫位于该区域。 EUV光刻设备的静电夹具可以具有用于连接到电连接器的垫和板。 通过将互连置于低场区域中,可以在该区域中存在三个点(导体,固体绝缘体和气体之间的接触点)。