SURFACE-EMITTING SEMICONDUCTOR LASER DEVICE IN WHICH AN EDGE-EMITTING LASER IS INTEGRATED WITH A DIFFRACTIVE LENS, AND A METHOD FOR MAKING THE DEVICE
    1.
    发明申请
    SURFACE-EMITTING SEMICONDUCTOR LASER DEVICE IN WHICH AN EDGE-EMITTING LASER IS INTEGRATED WITH A DIFFRACTIVE LENS, AND A METHOD FOR MAKING THE DEVICE 有权
    发射激光器的发射半导体激光器件与衍射透镜一体化,以及用于制造器件的方法

    公开(公告)号:US20120281727A1

    公开(公告)日:2012-11-08

    申请号:US13099429

    申请日:2011-05-03

    IPC分类号: H01S5/18 H01S5/34 H01L21/30

    摘要: A surface-emitting semiconductor laser device is provided that includes an edge-emitting laser integrated in a semiconductor material with various reflectors and a diffractive lens. The edge-emitting laser has a first section comprising an active MQW region, a second section comprising a passive region and a third section comprising a semi-insulating or un-doped semiconductor bulk layer. This configuration ensures that the injection current will pass through all of the layers of the active region, thereby preventing the occurrence of optical losses due to un-injected areas of the MQW active region. In addition, the inclusion of the passive region ensures that there is no current passing through the interface between the active MQW region and the regrown semiconductor bulk layer. The latter feature improves performance and device reliability.

    摘要翻译: 提供一种表面发射半导体激光器件,其包括集成在具有各种反射器的半导体材料中的边缘发射激光器和衍射透镜。 边缘发射激光器具有包括有源MQW区域的第一部分,包括无源区域的第二部分和包括半绝缘或未掺杂半导体体层的第三部分。 该配置确保了注入电流将通过有源区域的所有层,从而防止由于MQW有源区域的未注入区域引起的光学损耗的发生。 此外,包括无源区域确保没有电流通过有源MQW区域和再生长半导体体层之间的界面。 后者的功能提高了性能和设备的可靠性。

    Integrated modulator/laser assembly and a method of producing same
    2.
    发明授权
    Integrated modulator/laser assembly and a method of producing same 失效
    集成调制器/激光组件及其制造方法

    公开(公告)号:US07548574B2

    公开(公告)日:2009-06-16

    申请号:US11153672

    申请日:2005-06-15

    IPC分类号: H01S3/08 H01S3/113

    摘要: An laser/modulator assembly includes a laser source, such as a distributed feedback (DFB) laser, and a modulator, such as an electro-absorption modulator (EAM), integrated along a common waveguide. The waveguide has a distal end bent to define an inner side of the bent waveguide. A low reflectivity facet is arranged at the distal end of the waveguide, and a mirror is arranged at the inner side of the distal end of the waveguide to prevent any back reflection into the EAM waveguide from said low reflectivity facet, and the lateral trenches typically associated therewith.

    摘要翻译: 激光/调制器组件包括诸如分布式反馈(DFB)激光器的激光源以及沿着公共波导集成的调制器,例如电吸收调制器(EAM)。 波导具有弯曲以限定弯曲波导的内侧的远端。 在波导的远端布置有低反射面,并且反射镜布置在波导的远端的内侧,以防止从所述低反射性小面反射入EAM波导的任何反射,并且横向沟槽通常 相关联。

    ELECTRO-ABSORPTION MODULATED LASER (EML) ASSEMBLY HAVING A 1/4 WAVELENGTH PHASE SHIFT LOCATED IN THE FORWARD PORTION OF THE DISTRIBUTED FEEDBACK (DFB) OF THE EML ASSEMBLY, AND A METHOD
    3.
    发明申请
    ELECTRO-ABSORPTION MODULATED LASER (EML) ASSEMBLY HAVING A 1/4 WAVELENGTH PHASE SHIFT LOCATED IN THE FORWARD PORTION OF THE DISTRIBUTED FEEDBACK (DFB) OF THE EML ASSEMBLY, AND A METHOD 审中-公开
    具有位于EML组件的分布式反馈(DFB)的前向部分中的1/4波长相位移动的电吸收式调制激光器(EML)组件,以及方法

    公开(公告)号:US20100290489A1

    公开(公告)日:2010-11-18

    申请号:US12466439

    申请日:2009-05-15

    IPC分类号: H01S3/10 H01S3/08

    摘要: An EML assembly is provided that has and EAM and a DFB, with the DFB having an asymmetric ¼ wavelength phase shift positioned at a location that is in front of the center of the periodic structure of the DFB. In addition, the EML assembly has a tilted or bent waveguide that reduces reflections occurring at the front end facet, thereby enabling the EAM to produce a relatively high POUT level while also achieving reduced chirp and high single-mode yield in the DFB. By providing the EML assembly with a tilted or bent waveguide, the reflections at the front end facet are reduced without having to use an AR coating on the front end facet that has an extremely low reflectivity. By avoiding the need to use an AR coating on the front end facet that has an extremely low reflectivity, the AR coating that is used on the front end facet can be made using standard sputter deposition techniques to enable higher manufacturing yields to be achieved.

    摘要翻译: 提供了一种EML组件,其具有EAM和DFB,其中DFB具有位于DFB的周期性结构的中心前方的位置处的不对称的1/4波长相移。 此外,EML组件具有倾斜或弯曲的波导,其减小在前端小面处发生的反射,从而使得EAM能够产生相对较高的POUT电平,同时还实现DFB中的啁啾和高单模产量的降低。 通过为EML组件提供倾斜或弯曲的波导,前端小面处的反射减小,而不必在具有极低反射率的前端小面上使用AR涂层。 通过避免在具有极低反射率的前端小面上使用AR涂层的需要,可以使用标准溅射沉积技术制造用于前端小面的AR涂层,以实现更高的制造成品率。

    Surface-emitting semiconductor laser device in which an edge-emitting laser is integrated with a diffractive or refractive lens on the semiconductor laser device
    5.
    发明授权
    Surface-emitting semiconductor laser device in which an edge-emitting laser is integrated with a diffractive or refractive lens on the semiconductor laser device 有权
    表面发射半导体激光器件,其中边缘发射激光器与半导体激光器件上的衍射或折射透镜集成

    公开(公告)号:US08582618B2

    公开(公告)日:2013-11-12

    申请号:US13008239

    申请日:2011-01-18

    IPC分类号: H01S5/026

    CPC分类号: H01S5/18 H01S5/026 H01S5/141

    摘要: A surface-emitting semiconductor laser device that includes an edge-emitting laser formed in layers of semiconductor material disposed on a semiconductor substrate, a polymer material disposed on the substrate laterally adjacent the layers in which the edge-emitting laser is formed, a diffractive or refractive lens formed on an upper surface of the polymer material, a side reflector formed on an angled side reflector facet of the polymer material generally facing an exit end facet of the laser, and a lower reflector disposed on the substrate beneath the polymer material. Laser light passes out of the exit end facet and propagates through the polymer material before being reflected by the side reflector toward the lower reflector. The laser light is then re-reflected by the lower reflector towards the lens, which directs the laser light out the device in a direction that is generally normal to the upper surface of the substrate.

    摘要翻译: 一种表面发射半导体激光器件,其包括形成在半导体衬底上的半导体材料层的边缘发射激光器,设置在衬底上的聚合物材料,其横向邻近形成边缘发射激光器的层,衍射或 折射透镜形成在聚合物材料的上表面上,侧反射器形成在聚合物材料的倾斜的侧面反射器小面上,大体上面对激光器的出射端面,以及下反射器,设置在聚合物材料下方的基底上。 激光从出射端小面出射,并在被侧反射器反射向下反射器反射之前传播通过聚合物材料。 然后,激光被下反射器重新反射到透镜,其将激光沿着基本上垂直于衬底的上表面的方向引导出设备。

    Surface-emitting semiconductor laser device in which an edge-emitting laser is integrated with a diffractive lens, and a method for making the device
    7.
    发明授权
    Surface-emitting semiconductor laser device in which an edge-emitting laser is integrated with a diffractive lens, and a method for making the device 有权
    边缘发射激光器与衍射透镜一体化的表面发射半导体激光器件及其制造方法

    公开(公告)号:US08315287B1

    公开(公告)日:2012-11-20

    申请号:US13099429

    申请日:2011-05-03

    IPC分类号: H01S5/00

    摘要: A surface-emitting semiconductor laser device is provided that includes an edge-emitting laser integrated in a semiconductor material with various reflectors and a diffractive lens. The edge-emitting laser has a first section comprising an active MQW region, a second section comprising a passive region and a third section comprising a semi-insulating or un-doped semiconductor bulk layer. This configuration ensures that the injection current will pass through all of the layers of the active region, thereby preventing the occurrence of optical losses due to un-injected areas of the MQW active region. In addition, the inclusion of the passive region ensures that there is no current passing through the interface between the active MQW region and the regrown semiconductor bulk layer. The latter feature improves performance and device reliability.

    摘要翻译: 提供一种表面发射半导体激光器件,其包括集成在具有各种反射器的半导体材料中的边缘发射激光器和衍射透镜。 边缘发射激光器具有包括有源MQW区域的第一部分,包括无源区域的第二部分和包括半绝缘或未掺杂半导体体层的第三部分。 该配置确保了注入电流将通过有源区域的所有层,从而防止由于MQW有源区域的未注入区域引起的光学损耗的发生。 此外,包括无源区域确保没有电流通过有源MQW区域和再生长半导体体层之间的界面。 后者的功能提高了性能和设备的可靠性。

    SURFACE-EMITTING SEMICONDUCTOR LASER DEVICE IN WHICH AN EDGE-EMITTING LASER IS INTEGRATED WITH A DIFFRACTIVE OR REFRACTIVE LENS ON THE SEMICONDUCTOR LASER DEVICE
    8.
    发明申请
    SURFACE-EMITTING SEMICONDUCTOR LASER DEVICE IN WHICH AN EDGE-EMITTING LASER IS INTEGRATED WITH A DIFFRACTIVE OR REFRACTIVE LENS ON THE SEMICONDUCTOR LASER DEVICE 有权
    发射激光器的发射半导体激光器件,其边缘发射激光与半导体激光器件上的衍射或折射透镜集成

    公开(公告)号:US20120183007A1

    公开(公告)日:2012-07-19

    申请号:US13008239

    申请日:2011-01-18

    IPC分类号: H01S5/18 H01L21/28

    CPC分类号: H01S5/18 H01S5/026 H01S5/141

    摘要: A surface-emitting semiconductor laser device is provided that includes an edge-emitting laser formed in various layers of semiconductor material disposed on a semiconductor substrate, a polymer material disposed on the substrate laterally adjacent the layers in which the edge-emitting laser is formed, a diffractive or refractive lens formed in or on an upper surface of the polymer material, a side reflector formed on an angled side reflector facet of the polymer material generally facing an exit end facet of the laser, and a lower reflector disposed on the substrate beneath the polymer material. Laser light passes out of the exit end facet and propagates through the polymer material before being reflected by the side reflector toward the lower reflector. The laser light is then re-reflected by the lower reflector towards the lens, which directs the laser light out the device in a direction that is generally normal to the upper surface of the substrate.

    摘要翻译: 提供一种表面发射半导体激光器件,其包括形成在设置在半导体衬底上的各种半导体材料中的边缘发射激光器,设置在基板上的与形成边缘发射激光器的层横向相邻的聚合物材料, 形成在聚合物材料的上表面中或上面的衍射或折射透镜,形成在聚合物材料的倾斜的侧面反射器面上的侧反射器,该聚合物材料大致面对激光器的出射端面,以及下反射器, 聚合物材料。 激光从出射端小面出射,并在被侧反射器反射向下反射器反射之前传播通过聚合物材料。 然后,激光被下反射器重新反射到透镜,其将激光沿着基本上垂直于衬底的上表面的方向引导出设备。